CN100579671C - Apparatus for removing particle and method of the same - Google Patents

Apparatus for removing particle and method of the same Download PDF

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Publication number
CN100579671C
CN100579671C CN200610159819A CN200610159819A CN100579671C CN 100579671 C CN100579671 C CN 100579671C CN 200610159819 A CN200610159819 A CN 200610159819A CN 200610159819 A CN200610159819 A CN 200610159819A CN 100579671 C CN100579671 C CN 100579671C
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Prior art keywords
support
working fluid
operation thing
dedusting
dust
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CN1990125A (en
Inventor
金德谦
李峻泳
金重铉
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cleaning In General (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention relates to an apparatus for removing dust and method of the same, the apparatus for removing dust provided according to the invention includes a bearing for supporting operation object; a support transferring part for closing to/keeping away from the bearing; a removing dust support combining with the support transferring part, on which a nozzle for jetting working fluid and a fluid guiding part are formed, in which the fluid guiding part guides current direction of the working fluid supplying by the nozzle under the state of the support transferring part closing to the bearing. Thereby, the removing dust efficiency is improved by using relative less working fluid.

Description

Dust arrester and dust collection method
Technical field
The present invention relates to a kind of dust arrester and dust collection method, relate in particular to and to use few relatively working fluid to improve the dust arrester and the dust collection method of efficiency of dust collection.
Background technology
In the technology of making semiconductor or liquid crystal display (LCD) panel,, therefore need the strict this impurity of handling because impurity such as dust directly influence the quality of product.Usually, dust arrester is used for impurity such as dust out, fine glass blocks in this manufacturing process.Dust arrester utilizes various working fluids to clean, spray or absorption impurity.
Example as this dust arrester, exist in the image detection device be installed in the LCD panel that LCD TV (LCD TV) waits, to be used for the device that before carrying out the circuit board printing state, mounting the inspection work of installment state, reflow soldering situation etc. of parts removing is attached to the dust of LCD panel surface.
Japan's publication communique " 2001-5398 number (2001.01.12) " discloses the grey dust remover of this LCD panel.The dust arrester that prior art provided comprises: be attached on the air ejector nozzle that is located at LCD panel top and the air conduit of inject high pressure air, to be used to remove the dust that is attached on the LCD panel; Handover portion is to be used for transferring air conduit along the LCD panel; The dust adsorbent is to be used to adsorb the dust of removing from the LCD panel.Can effectively remove dust on the LCD panel according to this structure.
But prior art is owing to pressure-air mobile inhomogeneous on the LCD panel surface makes the pressure-air speed generation difference that flows, thereby can not effectively remove the dust that is evenly distributed on the whole LCD panel surface.And, disperse to carry out dedusting in order to make pressure-air, need to use more pressure-air.
Summary of the invention
The object of the present invention is to provide a kind of dust arrester and dust collection method that can carry out dedusting more effectively.
Comprise according to dust arrester provided by the present invention to achieve these goals: the bearing that is used to support the operation thing; Can be close/away from the support handover portion of described bearing; Be incorporated into the dedusting support of described support handover portion, form the nozzle that sprays working fluid on this dedusting support and in described support handover portion near the fluid guide of guiding under the state of described bearing by the flow direction of the working fluid of described nozzle supply.
At this, preferably also comprise the seal member that is incorporated into described dedusting support, to be used for to make the segment space between described operation thing and the described dedusting support be in sealing state by the edge part that contacts described operation thing.
And described fluid guide is preferably in the plate face depression of described dedusting support and forms.
And described nozzle preferably is provided with the regional relative of discharge working fluid, and runs through described dedusting support and form at least one.
And the material of described seal member preferably comprises silicon.
And described working fluid preferably comprises Ionized pressure-air.
And, preferably also comprise the working fluid that guiding discharges and the dust collecting part of collecting impurity.
In addition, the dust collection method of removing operation thing surface dirt provided by the present invention comprises step: support described operation thing by bearing; Form support handover portion, make its can be close/away from described bearing; The dedusting support is attached to described support handover portion, this dedusting support be provided with the nozzle that sprays working fluid and in described support handover portion near the fluid guide of guiding under the state of described bearing by the flow direction of the working fluid of described nozzle supply.
At this, preferably also comprise the step that seal member is attached to described dedusting support, the sealing parts can make the segment space between described operation thing and the described dedusting support be in sealing state by the edge part that contacts described operation thing.
And, preferably also comprise with respect to the zone of discharging working fluid and run through described dedusting support and form the step of at least one described nozzle.
And, also being included in the step that zone that working fluid is discharged from is provided with dust collecting part, the working fluid that this dust collecting part is discharged by guiding is collected impurity.
Description of drawings
Fig. 1 is the layout drawing roughly according to dust arrester provided by the present invention;
Fig. 2 is the decomposing schematic representation of dust arrester;
Fig. 3 a to Fig. 3 c is the handover process of expression operation thing and the front elevation of dust arrester operating process;
Fig. 4 a and Fig. 4 b are the amplification profile of dedusting holder part;
Fig. 5 is the flow chart of dust collection method.
The specific embodiment
Below, the dust arrester 10 of in the image detection device (not shown) of the LCD panel of LCD TV (LCDTV), removing LCD panel dust that preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings is provided.The present invention only is applicable to the LCD panel, and the circuit that can also be applicable to MP3 player, palm PC various information processors such as (PDA) and projector is with on substrate or the panel.
Image detection device utilizes optical viewers such as light microscope to carry out the observation of the detection etc. of the circuit board printing state to the LCD panel, the installment state that mounts parts, reflow soldering situation as shown in Figure 1.Image detection device comprises: supply is as the feeding unit 5 of the operation things 11 such as LCD panel of detected object; Be used to discharge the deliverying unit 7 of operation thing 11; Between feeding unit 5 and the deliverying unit 7 operation thing 11 is being transferred and is being loaded into as the handover arm 1 on the bearing 13 of detection position; Be used to drive the arm drive division 3 of transferring arm 1; Be used to remove the dust arrester 10 that is attached to operation thing 11 lip-deep dusts.Image detection device also can carry out various detections successively at the operation thing of being transferred by the conveyer that forms as one 11.
Dust arrester 10 provided by the present invention has the bearing 13 that is used to support operation thing 11 and can be approaching/away from the support handover portion 20 of bearing 13 shown in Fig. 1 to Fig. 3 c.Dust arrester 10 comprises dedusting support 30, and this dedusting support 30 comprises: be combined in the support handover portion 20 and spray the nozzle 31 of working fluid; Fluid guide 32 in support handover portion 20 near the flow direction that guides the working fluid of supplying by nozzle 31 under the state of bearing 13.Dust arrester 10 also comprises the seal member 40 that is incorporated on the dedusting support 30, and sealing parts 40 can make the segment space between operation thing 11 and the dedusting support be in sealing state by the edge part of contact operation thing 11.Dust arrester 10 also comprises the dust collecting part 50 that is arranged on the working fluid discharging area, collects impurity to be used to guide the working fluid of being discharged.
Operation thing 11 is by bearing 13 supports, as shown in Figure 1.On the surface of operation thing 11, mount various parts or form circuit etc.But this operation thing 11 also may be the LCD panel etc. that forms the raw material state before the circuit etc.
Bearing 13 is arranged on the bottom, to be used to support operation thing 11.Bearing 13 also may comprise delivery unit.
Support handover portion 20 as shown in Figures 1 and 2, have can make that it is approaching/away from the drive division (not shown) of bearing 13.Support handover portion 20 has the known transfer units (not shown) such as line slideway that carry out lifting by slip.One side of support handover portion 20 is incorporated into arm drive division 3, and opposite side is incorporated into dedusting support 30.
Dedusting support 30 as shown in Figure 2, comprise be incorporated into support handover portion 20 and be used to spray nozzle 31, the slave plate face depression of working fluid and form and in support handover portion 20 near the fluid guide 32 of guiding under the states of bearing 13 by the flow direction of the working fluid of nozzle 31 supplies.
Nozzle 31 is set at least one with discharging the regional relative of working fluid on dedusting support 30, and working fluid is ejected into fluid guide 32.Nozzle 31 is provided with its size and quantity according to size of operation thing 11 etc., so that working fluid keeps certain flow on the integral surface of operation thing 11.The position of nozzle 31 is as described below, for example when fluid guide 32 form corresponding to dimetric operation thing 11 "
Figure C20061015981900071
" during font, nozzle 31 is arranged in the position corresponding to the open area of discharging working fluid.
Fluid guide 32 slave plate faces cave in and form, to be used in support handover portion 20 near the flow direction of guiding under the states of bearing 13 by the working fluid of nozzle 31 supplies, shown in Fig. 2 and Fig. 4 a.That is, fluid guide 32 is corresponding to the shape of tetragonal operation thing 11, the marginal portion of plate face is "
Figure C20061015981900072
" font, and make "
Figure C20061015981900073
" the plate face depression of font inside.Form airtight space between fluid guide 32 and operation thing 11 surfaces, flow so that working fluid is pressed certain speed on operation thing 11 surfaces.Therefore, operation thing 11 surfaces are in fluid guide 32 speed according to not only fast but also uniform working fluid, pressure is reduced relatively and can remove easily and are attached to lip-deep impurity.And, keep airtight conditions between operation thing 11 surface and the dedusting support 30, thus raising be used for dedusting working fluid efficient and can reduce required amount of working fluid.
Sources of supply such as storage part that supply pipe 33 does not illustrate from accompanying drawing or compressor are to nozzle 31 supplying working fluids.
Be attached to operation thing 11 lip-deep impurity in order to remove, with predetermined pressure supplying working fluid (not shown).And working fluid preferably comprises Ionized pressure-air, produces static to prevent to be attached between the impurity such as operation thing 11 lip-deep micronic dusts or glass blocks.Working fluid can comprise water under high pressure etc. as required.In view of the above, can be by working fluid easily from operation thing 11 surperficial removals of contamination.
Seal member 40 is incorporated into dedusting support 30, and contacts and the segment space between operation thing 11 and the dedusting support 30 is sealed with the edge part of operation thing 11, shown in Fig. 2 and Fig. 4 a, 4b.The damage that causes because of pressurization when preventing that seal member 40 and operation thing 11 surfaces from contacting, seal member 40 comprises the materials of compressing such as silicon that are ductile, and forms and have the tabular of predetermined thickness.Seal member 40 shown in Fig. 4 b, form corresponding to dimetric operation thing 11 "
Figure C20061015981900074
" font, and contact on three directions with operation thing 11 and to keep airtight conditions, and be in open state in a direction.
Therefore, the dust on operation thing 11 surfaces is removed by the working fluid that sprays in the predetermined space that is formed by fluid guide 32 and seal member 40.In this process,, therefore can on entire job thing 11, make working fluid keep certain flow rate, shown in Fig. 4 b because the working fluid that is sprayed can not discharged from the side.Therefore, on the surface of operation thing 11, with working fluid on the operation thing in the process of flowing working fluid can not keep the situation of airtight conditions the specific pressure fall is relatively large mutually.Therefore, can easily overcome the attaching power that is attached to operation thing 11 lip-deep impurity, thereby can improve efficiency of dust collection.And therefore the airtight conditions owing to keeping between operation thing 11 surfaces and the dedusting support 30 can also reduce the amount of dedusting with working fluid.
Dust collecting part 50 is set at the zone of discharging working fluid shown in Fig. 4 a, collect impurity to be used to guide the working fluid of discharge.Thus, prevent the pollution problem again of the impurity removed in advance by handling the impurity removed.
According to aforesaid structure, the dust removal process of transferring process and dust arrester 10 according to operation thing provided by the present invention is described below with reference to Fig. 3 a to 3c and Fig. 5.
At first, with reference to the handover process of Fig. 3 a to 3c explanation operation thing, shown in Fig. 3 a, transfer arm 1 and grasp the operation thing of supporting by feeding unit 5 11, and be transplanted on bearing 13 by arm drive division 3 by vacuum pressure etc.The operation thing 11 that is shifted into bearing 13 is unloaded on the bearing 13 by transferring arm 1 shown in Fig. 3 b.Then, control dust arrester 10 is near the operation thing 11 on the bearing 13, shown in Fig. 3 c.
Below with reference to Fig. 5 dust removal process is described.
In the step S110 that supports the operation thing, operation thing 11 is placed on the bearing 13 and supported.
In the step S120 that forms support handover portion, support is transferred portion 20 and is attached on the arm drive division 3, with make by the drive division that does not illustrate in the accompanying drawing support handover portion 20 can be approaching/away from bearing 13.
In the step S130 of dust removal combined support, dedusting support 30 has slave plate face depression and forms and the fluid guide 32 near the flow direction that guides the working fluid of being supplied by nozzle 31 under the state of bearing 13 in support handover portion 20.The step S130 of dust removal combined support comprises: run through with respect to the zone of discharging working fluid on dedusting support 30 and the nozzle that forms at least one nozzle 31 forms step (S131); Seal member 40 is attached to dedusting support 30, makes the step of the combination seal parts of the segment space maintenance sealing state (S133) between operation thing 11 and the dedusting support 30 by making seal member 40 contact operation things 11 edges.Thus, when spraying working fluid, can reduce pressure to the whole surface of operation thing 11 by flowing velocity evenly and fast, thereby improve whole efficiency of dust collection.
The dedusting support near step S140 in operation support handover portion 20, by transferring the edge that dedusting support 30 makes the seal member 40 contact operation things 11 that are incorporated into dedusting support 30 bottoms.At this moment, support handover portion 20 transfers dedusting support 30, makes seal member 40 pressurization operation things 11, thereby can further keep air-tightness.
In the step S150 of guiding working fluid, to the pressure-air of fluid guide 32 ejected ionization etc., fluid guide 32 guiding working fluids make it be evenly distributed on the surface of operation thing 11 by nozzle 31.Therefore, working fluid keeps evenly and flowing velocity fast, makes the pressure that is reduced overcome the attaching power of operation thing 11 surfaces and impurity, thereby can removal of contamination.
In the step S160 that collects impurity, in the zone of discharging working fluid dust collecting part 50 is set, to collect the impurity of removing from operation thing 11.
The dedusting support away from step S170 in, when the impurity on operation thing 11 surfaces was eliminated, support handover portion 20 made dedusting support 30 away from operation thing 11.
Then, operation thing 11 carries out preset detection work by image detection device, finishes testing and is discharged to deliverying unit 7 by transferring arm 1 afterwards.Dust arrester will carry out said process repeatedly.Aforesaid each process can be controlled by the control part that does not illustrate in the accompanying drawing.
Therefore, utilize a spot of working fluid and working fluid evenly and is apace flowed on operation thing surface, thereby improve the efficient of removal of contamination according to the present invention.Therefore, the demand of working fluid is few, the dedusting time short, can reduce expense thereupon.And, make the process and the product that detect the operation thing can keep the dust less state, thereby can reduce the disqualification rate of product and enhance productivity.
In sum, according to the invention provides dust arrester and the dust collection method that the few relatively working fluid of utilization improves efficiency of dust collection.

Claims (10)

1, a kind of dust arrester is characterized in that comprising:
Be used to support the bearing of operation thing;
Can be close/away from the support handover portion of described bearing;
Be incorporated into the dedusting support of described support handover portion, form the nozzle that sprays working fluid on this dedusting support and in described support handover portion near the fluid guide of guiding under the state of described bearing by the flow direction of the working fluid of described nozzle supply,
Described fluid guide is corresponding to the shape of tetragonal operation thing, the marginal portion of plate face is "
Figure C2006101598190002C1
" font, and make "
Figure C2006101598190002C2
" the plate face depression of font inside.
2, dust arrester according to claim 1, it is characterized in that also comprising the seal member that is incorporated into described dedusting support, to be used for making the segment space between described operation thing and the described dedusting support be in sealing state by the edge part that contacts described operation thing.
3, dust arrester according to claim 2 is characterized in that described nozzle is provided with discharging the regional relative of working fluid, and runs through described dedusting support and form at least one.
4, dust arrester according to claim 2 is characterized in that the material of described seal member comprises silicon.
5, dust arrester according to claim 1 is characterized in that described working fluid comprises Ionized pressure-air.
6,, it is characterized in that also comprising the working fluid that guiding discharges and the dust collecting part of collecting impurity according to any described dust arrester in the claim 1 to 5.
7, a kind of dust collection method of removing operation thing surface dirt is characterized in that comprising step:
Support described operation thing by bearing;
Form support handover portion, make its can be close/away from described bearing;
The dedusting support is attached to described support handover portion, this dedusting support be provided with the nozzle that sprays working fluid and in described support handover portion near the fluid guide of guiding under the state of described bearing by the flow direction of the working fluid of described nozzle supply,
Described fluid guide is corresponding to the shape of tetragonal operation thing, the marginal portion of plate face is "
Figure C2006101598190002C3
", font, and make "
Figure C2006101598190002C4
" the plate face depression of font inside.
8, dust collection method according to claim 7, it is characterized in that also comprising the step that seal member is attached to described dedusting support, the sealing parts make the segment space between described operation thing and the described dedusting support be in sealing state by the edge part that contacts described operation thing.
9, dust collection method according to claim 8 is characterized in that also comprising with respect to the zone of discharging working fluid and runs through the step that described dedusting support forms at least one described nozzle.
10, according to any described dust collection method in the claim 7 to 9, it is characterized in that also being included in the step that zone that working fluid is discharged from is provided with dust collecting part, the working fluid that this dust collecting part is discharged by guiding is collected impurity.
CN200610159819A 2005-12-27 2006-09-28 Apparatus for removing particle and method of the same Active CN100579671C (en)

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CN100579671C true CN100579671C (en) 2010-01-13

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CN103033516A (en) * 2011-10-10 2013-04-10 靖江市永盛光电科技有限公司 Automatic conductive adhesive key detection equipment
CN102909952B (en) * 2012-10-05 2015-10-28 梧州市光华纺织制品有限责任公司 The clear hair device of printing machine
KR101509864B1 (en) * 2012-11-07 2015-04-06 (주)엘지하우시스 Apparatus for cleaning powder
CN106140738A (en) * 2016-07-28 2016-11-23 芜湖凯尔电气科技有限公司 Universal remote control entirety cleaning plant
CN106238428B (en) * 2016-09-19 2018-06-29 连云港康达智精密技术有限公司 Eyeglass dust removal machine

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KR19990074948A (en) * 1998-03-16 1999-10-05 윤종용 Wafer development system and driving method of semiconductor device manufacturing equipment
JP3652596B2 (en) 1999-10-25 2005-05-25 東京エレクトロン株式会社 Liquid processing equipment
KR100566032B1 (en) * 1999-11-11 2006-03-30 휴글엘렉트로닉스가부시키가이샤 Dust cleaning apparatus
KR20030074542A (en) * 2003-08-25 2003-09-19 케이 이엔지(주) The mote removing device of LCD panel

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