KR100566032B1 - Dust cleaning apparatus - Google Patents

Abstract

The present invention relates to the uniformity of the air force output and the suction force along the width direction of the workpiece, and also to reducing the footprint by collecting the piping structure in the upper center of both chambers. An air discharge chamber 4 having an ultrasonic generator 8 and having an air discharge port 4A, and an air suction chamber 5 adjacent to the air discharge chamber 4 and having an air suction port 5A; Both chambers 4 and 5 are arranged in accordance with the traveling direction of the workpiece 20, and at the same time, the vibration is achieved by maintaining a predetermined distance between the air discharge port 4A and the air suction port 5A and the workpiece 20. Relates to a device. The air discharging pipe hole 2 is disposed in the substantially upper center of the air discharging chamber 4 as seen from the traveling direction of the workpiece 20, and the air suction pipe is disposed in the substantially upper center of the air suction chamber 5. Position the hole 3.

Vibration Control Unit, PDP, LCD

Description

Vibration Control Unit {DUST CLEANING APPARATUS}

1 is a perspective view showing main parts of an embodiment of the present invention.

2 is a longitudinal cross-sectional view of FIG.

Figure 3 is a side view showing the main part of another embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

1, 1A vibration damper

2, 3 piping holes

4 Air Discharge Chamber

4A air outlet

5 air suction chamber

5A air intake

6 bulkhead

7 sole plate

8 Ultrasonic Generator

9, 10 end plate

11, 12 mounting hole

13 Noise Cover

20 Workpiece

In the present invention, dust (also referred to as "dust") attached to the surface of a workpiece, such as a plasma display panel (PDP) display device or a glass substrate for an LCD (liquid crystal display) display device, is sucked with clean air (clean air). It relates to a vibration suppression device to remove.

As a vibration suppressing device which sprays air and sucks and removes dust attached to the surface of a workpiece having a substantially flat surface, for example, see Japanese Patent Application Laid-Open No. 7-60211 (Special Application No. Hei) 5-240672) is known.

In this vibration damping device, an air discharge chamber and an air suction chamber are arranged along the running direction of the workpiece, and each end thereof is connected to a blower so as to discharge and suck air.

In the above-described prior art, both the discharge force and the suction force in the vicinity of the pipe connection portion between the air discharge chamber and the air suction chamber and the blower are the strongest, and as the distance from the pipe connection portion decreases, the discharge force and the suction force decrease, so that the width of the workpiece As this length became longer, there was a problem that the damping force became nonuniform along the width direction. In particular, it was not applicable to the vibration suppression of large glass substrates such as PDP displays having a width of 350 mm or more.

In addition, since the air supply pipe and the discharge pipe are provided along the width direction of the workpiece, a large and wide space is required for the pipe, and a so-called footprint is increased.

Therefore, the present invention is to provide a vibration damping device that can obtain a substantially uniform and stable vibration damping force, a vibration damping effect irrespective of the width of the workpiece, and can reduce the pipe arrangement space thereon.

 In order to solve the said subject, the invention of Claim 1 has an air discharge chamber which incorporates an ultrasonic generator, and has an air discharge port, and an air suction chamber which adjoins this air discharge chamber and has an air suction port, In the vibration suppression apparatus which arrange | positions a discharge chamber and an air suction chamber according to the running direction of a workpiece | work, and maintains a predetermined space | interval between an air discharge port and an air suction port, and a workpiece | work object, an air discharge chamber and an air suction chamber The lower end is longer than the upper end in the driving direction of the object to form an equilateral trapezoidal shape, and the cross section is formed to be smaller from the upper end side to the lower end side in the longitudinal section, and the upper center portion of the air discharge chamber in the driving direction of the workpiece. Arrange the piping hole for air discharge, and also for air suction in the upper middle part of the air suction chamber. Characterized in that the pipe hole is arranged.

However, in the vibration damping apparatus of the present invention, as described in claim 2, the air discharge port and the air suction port have a length that extends over the entire length in the width direction of the workpiece, and the length of the ultrasonic generator that extends over the entire length of the air discharge port. It is desirable to have a.

Further, as described in claim 3, a plurality of pairs of air discharge chambers and air suction chambers can be arranged along the width direction of the work object to correspond to a wide work object.

In the following, embodiments of the present invention will be described with reference to the drawings. 1 is a perspective view showing the main part of the embodiment, Figure 2 is a longitudinal cross-sectional view of Figure 1;

In these figures, the substantially discharge trapezoidal air discharge chamber 4 and the air suction chamber 5 are arranged in a straight line along the traveling direction F of the workpiece as viewed from the side surface (the traveling direction F of the workpiece). .

The widths of the lower ends of both chambers 4 and 5 are approximately equal to the width W of the workpiece, while the chambers 4 and 5 are separated by the same area by the partition 6 as shown in FIG. . In the uppermost central portion of the chambers 4 and 5, pipe holes 2 and 3 having a diameter of about 100 mm connected to the discharge port and the suction port of the blower, not shown, respectively, are formed, and between the discharge port and the pipe hole 2 of the blower. HEPA filters (not shown) are attached to supply clean air.

In addition, as shown in FIG. 1, both ends of the lower end of both chambers 4 and 5 are terminated by end plates 9 and 10. Reference numerals 11 and 12 are attachment holes for attaching the vibration suppression apparatus to the peripheral support members.

In Fig. 2, bottom plates 7 having a width substantially the same as the width W of the workpiece are formed at the lower ends of both chambers 4 and 5, respectively. The gap between the bottom plate 7 and the surface of the workpiece 20 is maintained at about 2 mm.

The air discharge port 4A is formed in the bottom plate 7 of the air discharge chamber 4 over the entire length of the width direction, and the bottom plate 7 of the air suction chamber 5 is equally extended to the full length of the width direction. The air suction port 5A is formed over it.

As shown in Fig. 2, both chambers 4 and 5 have a shape such that the cross-sectional area of the lower end portion is smaller than the upper end portion.

Inside the air discharge chamber 4, an ultrasonic generator 8 for imparting an ultrasonic frequency vibration to the discharge air is disposed above the air discharge port 4A. This ultrasonic generator 8 has a length over the entire length of the air discharge port 4A.

Here, the chambers 4 and 5, the pipe holes 2 and 3, the bottom plate 7 and the like are integrally formed of aluminum.

In addition, (13) is a noise cover attached to the outside of both chambers (4, 5), it is omitted in Figure 1 for convenience.

In the present embodiment, the bottom angles of the chambers 4 and 5, which are almost equilateral trapezoidal in the traveling direction F of the workpiece 20, are set to 45 degrees, but the angle is the width of the workpiece 20 or the work. It can be set arbitrarily according to the wide and narrow space of the upper space of the object 20. For example, when the upper space of the workpiece 20 is narrow, when the bottom angle is 30 degrees, the height of the vibration suppression apparatus can be kept low.

Next, the operation of the present embodiment will be described. The clean air supplied from the blower is introduced into the air discharge chamber 4 through the HEPA filter, and ultrasonic vibration is transmitted by the ultrasonic generator 8, through the air discharge port 4A. Discharged toward the workpiece 20.

The dust adhering to the surface of the workpiece 20 is removed by this discharge air, and is sucked into the air suction chamber 5 under negative pressure from the adjacent air suction port 5A to provide a pipe hole 3. Exhaust from

At this time, in the present embodiment, since the pipe holes 2 and 3 are disposed at substantially uppermost centers of the air discharge chamber 4 and the air suction chamber 5 to discharge and suck air, the air discharge port 4A and the air are discharged. In the suction port 5A, uniform earth output and suction force can be obtained over almost the entire length (that is, the width W of the workpiece 20).

According to the experiments of the inventors, for the workpiece 20 having a width W of 6 m, the vibration damping apparatus of the present invention was installed at three locations, one for every 2 m, along the width direction of the workpiece 20, resulting in a uniform vibration damping effect. It was confirmed that it can be obtained.

3 illustrates another embodiment of the present invention.

In the figure, 1A is a combination of the above-described chambers 4 and 5 and pipe holes 2 and 3 arranged in plurality (four in this embodiment) along the width direction of the workpiece 20. It is a vibration damper and the same components as those in Figs. In this way, in the case where the plurality of chambers 4 and 5 are provided in plural sets, it is preferable to install even groups in the load condition of the blower.

According to this embodiment, it was confirmed that even a workpiece 20 having a width W of 6 m can obtain a uniform and stable vibration damping effect with a single vibration damper.

As described above, according to the present invention, since a pipe hole for blower connection is arranged at the uppermost center of the air discharge chamber and the air suction chamber, air is supplied and discharged from the approximately uppermost center of each chamber. The toe output and suction force of the air along the width direction can be made almost uniform. To this end, a uniform and stable vibration damping force can be obtained even for a wide range of workpieces such as glass substrates for PDP displays.

In addition, since the piping structure can be collected above the central portion of each chamber, the footprint can be reduced and the occupied space can be narrowed.

Claims (3)

An air discharge chamber having a built-in ultrasonic generator and having an air discharge port, and an air suction chamber adjacent to the air discharge chamber and having an air suction port, wherein the air discharge chamber and the air suction chamber are arranged according to the running direction of the workpiece. In the vibration suppression apparatus which is arranged and maintains a predetermined space between the air discharge port and the air suction port and the workpiece. The air discharge chamber and the air suction chamber are formed in an equilateral trapezoidal shape by lengthening a lower end than an upper end in the traveling direction of the work object, and forming a cross-sectional area from an upper end side to a lower end side in a longitudinal section. And a pipe hole for air discharge at the top center of the air discharge chamber, and a pipe hole for air suction at the top center of the air suction chamber as viewed in the direction of travel of the workpiece. The method of claim 1, The air discharge port and the air suction port have a length over the entire length in the width direction of the workpiece, The ultrasonic generator has a length that extends over the entire length of the air discharge port. The method according to claim 1 or 2, A vibration damper comprising: a plurality of tanks formed of the air discharge chamber and the air suction chamber are arranged along the width direction of the workpiece.

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