CN211928380U - Laser exposure processing device - Google Patents
Laser exposure processing device Download PDFInfo
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- CN211928380U CN211928380U CN202020845185.7U CN202020845185U CN211928380U CN 211928380 U CN211928380 U CN 211928380U CN 202020845185 U CN202020845185 U CN 202020845185U CN 211928380 U CN211928380 U CN 211928380U
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- manipulator
- exposure
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Abstract
The utility model discloses a processing procedure device of laser exposure, its characterized in that: the device comprises a detection sensor, a plate placing machine, a transplanting machine, an LDI exposure host machine, a cleaning machine, a plate turnover machine and a plate collecting machine; the plate placing machine is sequentially connected with a cleaning machine, an LDI exposure host machine, a transplanting machine, a plate turnover machine, a cleaning machine, an LDI exposure host machine, a transplanting machine and a plate collecting machine; utilize high performance's semiconductor laser and DMD lens, arrange outstanding optical system, replace real object film instrument with image electronic data file, carry out the photopolymerization through laser direct imaging technique to the dry film with the graphic line in the file, form the size macromolecular structure that is insoluble in dilute alkaline solution, and the resolution ability and the life that adopt the LDI light source are higher than the LED lamp source, LDI exposure machine improves 25.3% than traditional exposure machine production efficiency, whole disability rate descends 0.4%, one-time qualification rate improves 4%, three main condemnation obviously reduce because of exposing to lead to, obtain effective control.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a laser exposure field, concretely relates to processing procedure device of laser exposure.
[ background of the invention ]
The traditional pattern transfer uses a parallel light source to irradiate a film negative film for imaging, and the line width/line width of the minimum resolution is 3/3 mils, but the traditional pattern transfer cannot be produced in mass. The processing capability of the prior art can not completely meet the increasing precision requirement of products, and a series of quality problems are generated in the manufacturing process; such as: garbage, copper scraps, copper slag, broken films and the like carried on the board are stuck in the film effective graphic units to cause poor positioning short circuit; the film expansion and contraction causes the deviation of the graph; the film scratches cause line chipping, poor open/short circuits, and the like.
[ Utility model ] content
In order to solve the above problems, a laser exposure processing device is proposed;
a processing device for laser exposure is characterized in that: the device comprises a detection sensor, a plate placing machine, a transplanting machine, an LDI exposure host machine, a cleaning machine, a plate turnover machine and a plate collecting machine;
the plate placing machine is sequentially connected with a cleaning machine, an LDI exposure host machine, a transplanting machine, a plate turnover machine, a cleaning machine, an LDI exposure host machine, a transplanting machine and a plate collecting machine;
and a detection sensor is arranged between each two devices.
Furthermore, the moving manipulator arranged in the plate placing machine and the plate collecting machine is a vacuum manipulator, the plate placing machine and the plate collecting machine are also provided with an operation panel (202), a conveyor belt and an emergency stop button, and the vacuum manipulator is arranged between the operation panel and the conveyor belt in a spanning mode; the operation panel of the plate placing machine is arranged on the left side of the conveying belt, the operation panel of the plate collecting machine is arranged on the right side of the conveying belt, and the vacuum manipulator is provided with a brushless motor.
Further, the panel turnover machine includes upset manipulator and is equipped with the scram button, wherein the upset manipulator be vacuum suction upset manipulator.
Furthermore, the cleaning machine consists of a conveyor belt, an air nozzle and a high-pressure fan, wherein the conveyor belt is provided with the air nozzle, and the air nozzle is connected with the high-pressure fan.
Further, LDI exposure machine comprises operating panel and exposure room, operating panel set up in the exposure room, the exposure room is equipped with 6 groups of laser heads and is a word arrangement, every group laser head formation of image regional width is 8 cm.
Further, the laser head is composed of a semiconductor laser and a DMD lens.
The transplanter further comprises a three-axis manipulator, the three-axis manipulator is a vacuum three-axis manipulator, and the vacuum suction device is fixedly connected with a hand of the vacuum three-axis manipulator; the vacuum part below the three-axis manipulator is connected with the horizontal guide rail in a sliding mode, and the vacuum suction device comprises a motor and a grabbing detection sensor.
The utility model discloses utilize high performance semiconductor laser and DMD lens, arrange outstanding optical system, replace the film instrument in kind with image electronic data file, carry out the photopolymerisation through laser direct imaging technique to the dry film with the graphic circuit in the file, form the size macromolecular structure that is insoluble in dilute alkali solution, and the resolution ability and the life that adopt the LDI light source are higher than the LED lamp source, LDI exposure machine improves 25.3% than traditional exposure machine production efficiency, whole disability rate descends 0.4%, one-shot qualification rate improves 4%, three main scrapping because of exposing and leading to obviously reducing, obtain effective control;
[ description of the drawings ]
FIG. 1 is an overall structure diagram of the present invention;
FIG. 2 is a diagram of the structure of the laser head of the present invention;
FIG. 3 is a structural diagram of the exposure machine of the present invention;
fig. 4 is a schematic flow chart of the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
A processing device for laser exposure is characterized in that: the device comprises a detection sensor, a plate placing machine, a transplanting machine, an LDI exposure host machine, a cleaning machine, a plate turnover machine and a plate collecting machine;
the plate placing machine is sequentially connected with a cleaning machine, an LDI exposure host machine, a transplanting machine, a plate turnover machine, a cleaning machine, an LDI exposure host machine, a transplanting machine and a plate collecting machine;
and a detection sensor is arranged between each device.
The mobile manipulator arranged in the plate placing machine and the plate collecting machine is a vacuum manipulator, and is also provided with an operation panel (202), a conveyor belt and an emergency stop button, and the vacuum manipulator is arranged between the operation panel and the conveyor belt in a spanning mode; the operation panel of the plate placing machine is arranged on the left side of the conveying belt, the operation panel of the plate collecting machine is arranged on the right side of the conveying belt, and the vacuum manipulator is provided with a brushless motor.
The panel turnover machine comprises a turnover manipulator and an emergency stop button, wherein the turnover manipulator is a vacuum suction turnover manipulator.
The cleaning machine consists of a conveyor belt, an air nozzle and a high-pressure fan, wherein the conveyor belt is provided with the air nozzle, and the air nozzle is connected with the high-pressure fan.
The LDI exposure machine comprises operating panel and exposure room, operating panel set up in the exposure room, the exposure room is equipped with 6 groups of laser heads and is a word arrangement, every group laser head image area width is 8 cm.
Wherein the laser head consists of a semiconductor laser and a DMD lens.
The transplanter comprises a three-axis manipulator, the three-axis manipulator is a vacuum three-axis manipulator, and the vacuum suction device is fixedly connected with a hand of the vacuum three-axis manipulator; the vacuum part below the three-axis manipulator is connected with the horizontal guide rail in a sliding mode, and the vacuum suction device comprises a motor and a grabbing detection sensor.
The implementation method of the processing device for laser exposure comprises the following steps:
feeding → cleaning A plate → processing A face → turning plate → cleaning B plate face → processing B face → blanking
The feeding in the step is to place the raw materials on an operation panel of a plate placing machine, suck the raw materials by a vacuum manipulator of the plate placing machine, place the raw materials on a conveying belt of the plate placing machine, and convey the raw materials forwards to the cleaning machine;
the cleaning of the surface of the plate A in the step A is to discharge a high-pressure air pressure cleaning raw material from an air nozzle of a cleaning machine;
the step A of processing is that a transplanter transfers the raw materials into a control panel; processing the surface A of the raw material by a laser head in an exposure chamber, and moving the raw material to a plate turnover machine by a transplanting machine;
the turning plate is used for turning the raw materials by a plate turning machine;
the cleaning plate surface in the step B is a cleaning raw material with high pressure and air pressure discharged by an air nozzle of a cleaning machine;
the step B of processing is that a transplanter transfers the raw materials into a control panel; processing the surface A of the raw material by a laser head in an exposure chamber, and moving the raw material to a board receiving machine by a transplanter;
and in the step of blanking, a vacuum manipulator of the plate placing machine sucks the plate and places the plate on an operation panel of the plate placing machine, and the plate placing machine is processed.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (7)
1. A processing device for laser exposure is characterized in that: the device comprises a detection sensor, a plate placing machine, a transplanting machine, an LDI exposure host machine, a cleaning machine, a plate turnover machine and a plate collecting machine;
the plate placing machine is sequentially connected with a cleaning machine, an LDI exposure host machine, a transplanting machine, a plate turnover machine, a cleaning machine, an LDI exposure host machine, a transplanting machine and a plate collecting machine;
and a detection sensor is arranged between each two devices.
2. The apparatus of claim 1, wherein: the mobile manipulator arranged in the plate placing machine and the plate collecting machine is a vacuum manipulator, and is also provided with an operation panel and a conveyor belt, and is also provided with an emergency stop button, and the vacuum manipulator is arranged between the operation panel and the conveyor belt in a spanning manner; the operation panel of the plate placing machine is arranged on the left side of the conveying belt, the operation panel of the plate collecting machine is arranged on the right side of the conveying belt, and the vacuum manipulator is provided with a brushless motor.
3. The apparatus of claim 1, wherein: the panel turnover machine comprises a turnover manipulator and an emergency stop button, wherein the turnover manipulator is a vacuum suction turnover manipulator.
4. The apparatus of claim 1, wherein: the cleaning machine consists of a conveyor belt, an air nozzle and a high-pressure fan, wherein the conveyor belt is provided with the air nozzle, and the air nozzle is connected with the high-pressure fan.
5. The apparatus of claim 1, wherein: LDI exposure machine comprises operating panel and exposure chamber, operating panel set up in the exposure chamber, the exposure chamber is equipped with 6 groups of laser heads and is a word arrangement, every group laser head image area width is 8 cm.
6. The apparatus of claim 5, wherein: the laser head consists of a semiconductor laser and a DMD lens.
7. The apparatus of claim 1, wherein: the transplanter comprises a three-axis manipulator, the three-axis manipulator is a vacuum three-axis manipulator, and the vacuum suction device is fixedly connected with the hand part of the vacuum three-axis manipulator; the vacuum part below the three-axis manipulator is connected with the horizontal guide rail in a sliding mode, and the vacuum suction device comprises a motor and a grabbing detection sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020845185.7U CN211928380U (en) | 2020-05-20 | 2020-05-20 | Laser exposure processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020845185.7U CN211928380U (en) | 2020-05-20 | 2020-05-20 | Laser exposure processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211928380U true CN211928380U (en) | 2020-11-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020845185.7U Expired - Fee Related CN211928380U (en) | 2020-05-20 | 2020-05-20 | Laser exposure processing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211928380U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111538215A (en) * | 2020-05-20 | 2020-08-14 | 领跃电子科技（珠海）有限公司 | Laser exposure processing device and implementation method thereof |
-
2020
- 2020-05-20 CN CN202020845185.7U patent/CN211928380U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111538215A (en) * | 2020-05-20 | 2020-08-14 | 领跃电子科技（珠海）有限公司 | Laser exposure processing device and implementation method thereof |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201113 |