CN214747794U - Differential chromatic confocal height measuring system and gluing device - Google Patents

Abstract

The utility model relates to a difference formula look confocal height measurement system and rubber coating device, including first measurement branch road, second measurement branch road and main control module, first measurement branch road includes first light source, first spectrum appearance and first light pen, and first light source connects first spectrum appearance and first light pen, and first measurement branch road measures the first measuring point of the work piece of being surveyed in order to obtain first spectral data; the second measuring branch is used for acquiring the height of a second measuring point of the measured workpiece or acquiring the reflected light of the second measuring point of the measured workpiece so as to acquire second spectrum data; the main control module is used for obtaining the height difference between the first measuring point and the second measuring point according to the height of the first measuring point and the height of the second measuring point. The utility model discloses a difference and the confocal mode measurement of look are surveyed the work piece, can effectively eliminate and are surveyed the work piece because of error and installation error that machining error, site environment and equipment self mechanical vibration arouse, and the accuracy obtains the difference in height of two measuring points on being surveyed the work piece.

Description

Differential chromatic confocal height measuring system and gluing device

Technical Field

The utility model relates to an accurate measurement technical field especially relates to a confocal height measurement system of differential formula colour and rubber coating device.

Background

In recent years, the control of the paste thickness, the photoresist thickness, and the like in the panel field and the semiconductor chip industry has been more and more demanding, typically on the micrometer (μm) level. For example, some photoresists require a total thickness of 2 μm to 5 μm, and some materials require a coating thickness that gradually reaches the nanometer (nm) level. For such very thin bondlines, conventional mechanical contact measurement methods (e.g., mechanical probes) cannot be used, or the thin bondline may be scratched.

Therefore, only non-contact measurement can be used for the thin glue layer, that is, the thickness or height of the product can be measured by a non-contact method, such as the measurement of the paste thickness, the photoresist thickness, the optical film, the transparent optical element and the reflective metal element. The main non-contact measurement modes at present are a laser triangulation method and a spectral color confocal method. The international advanced level of the laser triangulation method is represented by japanese ken (Keyence), and the product of the laser triangulation method can achieve an error of about 2um, but the error of the technology is too large to meet the requirement of ultra-high precision measurement. In addition, the principle that the laser triangulation method utilizes reflected light to realize measurement determines that the transparent element cannot be measured, because the laser beam of the laser triangulation method directly passes through the transparent material, so that the reflected light is almost zero, and the thickness measurement result of the transparent element is almost 0.

The spectral color confocal method is a new technology and is sought by some manufacturers in recent years, but the precision of the product is too high (submicron level), so that the following problems exist in practical use: (1) the processing error of the measured component can be larger than submicron (including the deformation of the measured component and the error of a clamping tool); (2) any test field mechanical transmission motion and vibration of the field environment may cause jitter of the light pen in the spectral color confocal apparatus; (3) the motion of any test field mechanical transmission device and the vibration of the field environment can cause the vibration of the tested workpiece; these problems cause errors much larger than submicron levels, which results in inaccurate and, in severe cases, even impossible measurements. In addition, measurement errors may also occur due to the fact that the mounting and calibration accuracy cannot reach a 100% level. And the spectral data processing capacity is large, the thickness (or height) and position information have control time difference and the like, and the requirement of large-batch online rapid measurement cannot be met.

SUMMERY OF THE UTILITY MODEL

In view of this, an object of the present invention is to provide a differential chromatic confocal height measurement system and a glue coating apparatus, which can effectively eliminate the error and the installation error of the measured workpiece caused by the machining error, the field environment and the self mechanical vibration of the device, and obtain the height difference of two measuring points on the measured workpiece.

To achieve the above object, an embodiment of the present invention provides a differential color confocal height measurement system, which includes, as one implementation, a first measurement branch, a second measurement branch, and a main control module; wherein the content of the first and second substances,

the first measuring branch comprises a first light source, a first spectrometer and a first light pen, the first light source is connected with the first spectrometer and the first light pen, the first light source emits broadband continuous light to the first light pen, the first light pen focuses the broadband continuous light to form a color confocal light beam which irradiates on a first measuring point of a measured workpiece, and the first spectrometer receives reflected light of the first measuring point to obtain first spectrum data;

the second measuring branch is used for acquiring the height of a second measuring point of the measured workpiece or acquiring the reflected light of the second measuring point of the measured workpiece so as to acquire second spectrum data;

the main control module is configured to obtain a height difference between the first measurement point and the second measurement point according to the height of the first measurement point and the height of the second measurement point, where the height of the first measurement point is determined according to the first spectrum data, and when the second measurement branch is used to obtain the second spectrum data, the second measurement branch or the main control module is further configured to obtain the height of the second measurement point according to the second spectrum data.

As an embodiment, the second measuring branch includes a second light source, a second spectrometer, and a second light pen, the second light source is connected to the second spectrometer and the second light pen, the second light source emits broadband continuous light to the second light pen, the second light pen focuses the broadband continuous light to form a color confocal light beam, and irradiates the color confocal light beam onto a second measuring point of the measured workpiece, and the second spectrometer receives reflected light from the second measuring point to obtain second spectral data; wherein the content of the first and second substances,

the first spectrometer is further configured to determine a height of the first measurement point from the first spectral data, and the second spectrometer is further configured to determine a height of the second measurement point from the second spectral data.

As one embodiment, the differential confocal measurement system further includes a motion control mechanism and an encoder module, and the main control module is connected to the motion control mechanism and is used for controlling the motion control mechanism to move so as to move the workpiece to be measured; the encoder module is connected with the motion control mechanism and the main control module, and is used for acquiring position information of the motion control mechanism and sending the position information to the main control module, wherein the position information corresponds to the first measuring point and the second measuring point.

As one embodiment, the differential confocal measurement system further includes a motion control mechanism and an encoder module, and the main control module is connected to the motion control mechanism and is used for controlling the motion control mechanism to move so as to move the workpiece to be measured; the encoder module is connected with the motion control mechanism and the first spectrometer, and is connected with the motion control mechanism and the second spectrometer, and is used for acquiring the position information of the motion control mechanism and sending the position information to the first spectrometer and the second spectrometer, wherein the position information corresponds to the first measuring point and the second measuring point.

As one embodiment, the motion control mechanism includes a first transmission unit for moving a workpiece to be measured in a first direction, a second transmission unit for moving the workpiece to be measured in a second direction, and a connection block for connecting the first transmission unit and the second transmission unit.

As one embodiment, the first spectrometer and the second spectrometer each include an automatic light intensity adjusting device, and the automatic light intensity adjusting device is configured to automatically adjust the intensity of the light source according to the intensity of the reflected light on the surface of the workpiece to be measured.

As one embodiment, the main control module is further connected to a monitoring system, and receives the image information of the workpiece to be tested, which is acquired by the monitoring system, so as to perform an anomaly analysis according to the image information of the workpiece to be tested, so as to determine an anomalous workpiece to be tested.

In one embodiment, the main control module is further connected with an exception execution module for controlling the exception execution module to remove the abnormal workpiece to be tested.

In one embodiment, the second measuring branch comprises a contact digital height sensor, and the contact digital height sensor is used for acquiring the height of the second measuring point of the measured workpiece.

According to the utility model discloses on the other hand, still provide a rubber coating device, the rubber coating device include the rubber coating module and as above-mentioned arbitrary difference formula look confocal height measurement system, the rubber coating module set up in between first light pen and the second light pen.

In summary, the differential color confocal height measurement system and the glue coating device provided in this embodiment are provided with a first measurement branch, a second measurement branch and a main control module, where the first measurement branch includes a first light source, a first spectrometer and a first light pen, the first light source is connected to the first spectrometer and the first light pen, the first light source emits broadband continuous light to the first light pen, the first light pen focuses the broadband continuous light to form a color confocal light beam, and irradiates the color confocal light beam onto a first measurement point of a measured workpiece, and the first spectrometer receives reflected light of the first measurement point to obtain first spectrum data; the second measuring branch is used for acquiring the height of a second measuring point of the measured workpiece or acquiring the reflected light of the second measuring point of the measured workpiece so as to acquire second spectrum data; the main control module is used for obtaining the height difference between the first measuring point and the second measuring point according to the height of the first measuring point and the height of the second measuring point, wherein the height of the first measuring point is determined according to the first spectrum data, and when the second measuring branch is used for obtaining the second spectrum data, the second measuring branch or the main control module is also used for obtaining the height of the second measuring point according to the second spectrum data. Therefore, the method and the device can effectively eliminate errors caused by clamping of the measured workpiece in processing, errors caused by the field environment and self mechanical vibration of the device and installation errors, and obtain the height difference of two measuring points on the measured workpiece.

Drawings

Fig. 1 is a block diagram of a differential confocal measurement system according to an embodiment of the present invention.

Fig. 2 is a schematic diagram of a differential color confocal measurement with two optical pens according to an embodiment of the present invention.

Fig. 3 is a block diagram of a differential chromatic confocal height measurement system according to another embodiment of the present invention.

Fig. 4 is a schematic diagram of a partial detailed structure of a differential chromatic confocal height measuring system according to an embodiment of the present invention.

Fig. 5 is a block diagram of a differential chromatic confocal height measurement system according to a second embodiment of the present invention.

Fig. 6 is a schematic partial structural diagram of a differential chromatic confocal height measuring system according to a third embodiment of the present invention.

Fig. 7 is a schematic measurement diagram of a differential chromatic confocal height measurement system according to a fourth embodiment of the present invention.

Fig. 8 is a schematic partial structural view of a gluing device according to a fifth embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail and completely with reference to the accompanying drawings, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments, and are only used for explaining the present invention, and are not used for limiting the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that for clarity and simplicity of description, the same reference numerals are used for the same components in the different drawings and the connection manner of the components in the drawings should be understood with reference to the drawings and the corresponding text in the following description of the different embodiments.

First embodiment

Referring to fig. 1, fig. 1 is a block diagram of a differential confocal measurement system according to an embodiment of the present invention. As shown in fig. 1, the differential confocal measurement system includes a first measurement branch, a second measurement branch, and a main control module 130. The first measuring branch comprises a first light source 110, a first spectrometer 111 and a first light pen 112, the first light source 110 is connected with the first spectrometer 111 and the first light pen 112, the first light source 110 emits broadband continuous light to the first light pen 112, the first light pen 112 focuses the broadband continuous light to form a color confocal light beam, the color confocal light beam irradiates a first measuring point of a measured workpiece, and the first spectrometer 111 receives reflected light of the first measuring point to obtain first spectrum data. The second measuring branch comprises a second light source 120, a second spectrometer 121 and a second light pen 122, the second light source 120 is connected with the second spectrometer 121 and the second light pen 122, the second light source 120 emits broadband continuous light to the second light pen 122, the second light pen 122 focuses the broadband continuous light to form a color confocal light beam, the color confocal light beam irradiates a second measuring point of the measured workpiece, and the second spectrometer 121 receives reflected light of the second measuring point to obtain second spectrum data. The main control module 130 is connected to the first spectrometer 111 and the second spectrometer 121 to receive the first spectrum data and the second spectrum data, and obtain a height of the first measurement point (which may also be understood as a thickness of the first measurement point of the workpiece to be measured) and a height of the second measurement point (which may also be understood as a thickness of the second measurement point of the workpiece to be measured) according to the first spectrum data and the second spectrum data, so as to obtain a height difference between the first measurement point and the second measurement point.

Specifically, the light sources (the first light source 110 and the second light source 120) emit broadband continuous light (such as an LED or a tungsten lamp), and are respectively connected to the light pen (the first light pen 112 and the second light pen 122) and the spectrometer (the first spectrometer 111 and the second spectrometer 121). The light pen focuses the broadband continuous light emitted by the light source to form a color confocal light beam, the color confocal light beam irradiates a workpiece to be measured (respectively irradiates a first measuring point and a second measuring point), then the workpiece to be measured reflects light with a certain wavelength back to the light pen, the light is guided into the spectrometer after being coupled by the optical fiber, and the spectrometer (the first spectrometer 111 and the second spectrometer 121) obtains corresponding spectral data (first spectral data and second spectral data). The main control module 130 analyzes the heights of the first measuring point and the second measuring point of the measured workpiece according to the first spectrum data and the second spectrum data, and then calculates the height difference between the first measuring point and the second measuring point according to the difference value. For example, when measuring the thickness of the paste on the workpiece, the first light pen 112 points (first measuring point) on the paste on the workpiece, i.e. the height of the paste element is measured, and the second light pen 122 points (second measuring point) on the substrate reference plane adjacent to the first measuring point. The height value measured by the first light pen 112 at the first measurement point is H1, the height value measured by the second light pen 122 at the second measurement point is H2, and for the case that two measurement points are adjacent, the base material reference plane of the first measurement point and the base material reference plane of the second measurement point are considered to be very close, so that the thickness value of the glue coating can be the difference between H1 and H2, that is, the glue coating thickness Z is H1-H2. Because both H1 and H2 contain some error factors, such as an error caused by clamping of the measured workpiece, an actual height and a field environment, a relative fluctuation between the measured workpiece and the optical pen caused by mechanical vibration of the device itself, and a horizontal plane installation error of the measurement system, etc., the error caused by clamping of the measured workpiece during processing, the error caused by the field environment and the mechanical vibration of the device itself, and the installation error can be) effectively eliminated through the above differential scheme, and the actual thickness Z of the glue coating is obtained.

For better understanding of the technical solution, please refer to fig. 1 and fig. 2 in combination, fig. 2 is a schematic diagram of a dual-optical-pen differential color confocal measurement according to an embodiment of the present invention. As shown in fig. 2, the color confocal light beam formed by focusing of the first light pen 112 irradiates onto the glue 210 (the first measurement point) on the workpiece to be measured, and then reflects light with a certain wavelength back to the first light pen 112, and is guided into the first spectrometer 111 after being coupled by the optical fiber, the first spectrometer 111 obtains the first spectral data, and the main control module 130 analyzes the height of the glue 210 of the workpiece to be measured according to the first spectral data. The color confocal light beam formed by focusing of the second light pen 122 irradiates the reference surface 211 (the second measurement point) of the measured workpiece, then reflects the light with a certain wavelength back to the second light pen 122, and is guided into the second spectrometer 121 after being coupled by the optical fiber, the second spectrometer 121 obtains the second spectrum data, and the main control module 130 analyzes the height of the reference surface 211 of the measured workpiece according to the second spectrum data.

Referring to fig. 3, fig. 3 is a block diagram of a differential color confocal height measurement system according to another embodiment of the present invention. As shown in fig. 3, the differential confocal measurement system further includes a motion control mechanism 140 and an encoder module 150, the main control module 130 is connected to the motion control mechanism 140 and is used for controlling the motion control mechanism 140 to move the workpiece to be measured; the encoder module 150 is connected to the motion control mechanism 140 and the main control module, and is configured to obtain position information of the motion control mechanism 140 and send the position information to the main control module 130.

Specifically, the workpiece to be measured is placed on the motion control mechanism 140, and the main control module 130 controls the motion control mechanism 140 to move in a specific direction at a preset speed, so that the measurement position of the optical pen can be changed, for example, the glue coating thickness of different glue coating positions on the workpiece to be measured can be obtained. The encoder module 150 acquires the position of the motion control mechanism 140 in real time and sends the position to the main control module, so that the position information and the thickness measurement value Z can form a plurality of data sets, wherein the encoder module 150 provides the position information of the motion control mechanism 140 to the main control module in real time in a pulse encoding mode.

In one embodiment, the motion control mechanism 140 includes a first transmission unit for moving the workpiece to be measured in a first direction, a second transmission unit for moving the workpiece to be measured in a second direction, and a connection block for connecting the first transmission unit and the second transmission unit.

Specifically, the transmission units (the first transmission unit and the second transmission unit) may include a linear mechanical slide, and a driving motor (a stepping motor or a servo motor) that drives the linear mechanical slide to move so as to move the workpiece to be measured. For example, the first and second transmission units can move the workpiece to be measured in two directions perpendicular to each other, and X and Y represent the first and second directions, respectively, and when the first and second light pens 112 and 122 are stationary and the motion control mechanism 140 moves the workpiece to be measured in the X direction at the speed v1, the first and second measuring points change with the position of the workpiece to be measured, that is, H1 and H2 change with the position of the workpiece to be measured. Thus, the resulting data set of position signals and thickness measurements Z can be expressed as:

Z(x1)＝H1(x1)-H2(x2)；

where x1 is the position of the first measurement point on the workpiece being measured, i.e., the position of the thickness measurement point, e.g., the glue site, and x2 is the position of the second measurement point on the workpiece being measured, i.e., the reference point position, i.e., the base level of the substrate near x1, Z (x1) is the thickness measurement at the corresponding location, and t is time, which represents one-dimensional motion. In two-dimensional motion (the workpiece is moving in the X direction at velocity v1, and the workpiece is moving in the Y direction at velocity v 2), the resulting data set of position signals and thickness measurements Z can be expressed as follows,

Z(x1,y1)＝H1(x1,y1)-H2(x2,y2)；

wherein (x1, y1) is the position of a first measuring point on the measured workpiece, i.e. the position of a thickness measuring point, such as a glue coating position, (x2, y2) is the position of a second measuring point on the measured workpiece, i.e. the position of a reference point, such as a base material datum plane, H1 and H2 are thickness values of corresponding positions respectively, and Z represents the thickness difference between the two positions, i.e. the height or thickness of the glue coating at H1. In one embodiment, the master control module 130 includes a communication control sub-module for communicatively coupling the first spectrometer 111, the second spectrometer 121, and the motion control mechanism 140.

Specifically, the communication control sub-module may include a serial port or USB communication interface, a PWM or modbus communication interface, and a TCP/UDP communication interface. The serial port or the USB communication interface is used to connect the spectrometers (the first spectrometer 111 and the second spectrometer 121). The PWM or modbus communication interface is used to connect the motion control mechanism 140, and is a PWM communication interface when a stepping motor is used in the motion control mechanism 140, and is a modbus communication interface when a servo motor is used in the motion control mechanism 140. Of course, the communication control sub-module may also contain other communication interfaces for function extension, such as a TCP/UDP communication interface.

Referring to fig. 4, fig. 4 is a schematic diagram of a partial specific structure of a differential chromatic confocal height measurement system according to an embodiment of the present invention. As shown in fig. 4, the differential color confocal measurement system further includes a bottom plate 160 and a fixing bracket, the fixing bracket is used for fixing the first light pen 112 and the second light pen 122, and the fixing bracket and the motion control mechanism 140 are disposed on the bottom plate 160.

Specifically, the first light pen 112 and the second light pen 122 are fixed by a fixing bracket, and the fixing bracket and the motion control mechanism 140 are disposed on the bottom plate 160. The fixing bracket may include a cross beam 170, a first fixing arm 171 and a second fixing arm 172 fixed on the cross beam 170, and a first support 173 and a second support 174 supporting the cross beam 170, the first light pen 112 being fixed by the first fixing arm 171, and the second light pen 122 being fixed by the second fixing arm 172. The motion control mechanism 140 includes a first linear mechanical slide 141, a second linear mechanical slide 142, and a connecting block 143 connecting the first linear mechanical slide 141 and the second linear mechanical slide 142. Wherein, the workpiece to be measured is fixedly placed on the second linear mechanical sliding table 142. The second linear mechanical sliding table 142 may further include a fixing tool for fixing a workpiece to be measured.

In one embodiment, the motion control mechanism 140 and/or the stationary bracket further comprise a shock absorbing device.

In one embodiment, each of the first spectrometer 111 and the second spectrometer 121 includes an automatic light intensity adjusting device for automatically adjusting the intensity of the light source according to the intensity of the light reflected by the surface of the workpiece to be measured.

Specifically, the intensity of the light source can be automatically adjusted according to the acquired spectral intensity by arranging the automatic light intensity adjusting device in the spectrometer, so that the spectrometer can measure the reflected light with small integral time and high response speed (within 1ms, for example) to meet the requirement of conventional high-speed online measurement (such as 1 KHZ).

In one embodiment, the main control module 130 is further connected to the monitoring system, and receives the image information of the workpiece to be tested acquired by the monitoring system, so as to perform an anomaly analysis according to the image information of the workpiece to be tested, so as to determine an anomalous workpiece to be tested.

Specifically, the monitoring module, for example, an industrial camera, monitors the workpiece to be measured in real time, and sends the image information of the workpiece to be measured, which is acquired in real time, to the main control module 130, and the main control module 130 analyzes whether there are noise singularities, such as dust, small bubbles, and scratches, on the gluing surface of the workpiece to be measured, so as to eliminate abnormal situations of gluing thickness measurement and increase the accuracy of measurement.

In one embodiment, the main control module 130 is further connected to the exception execution module for controlling the exception execution module to remove the abnormal workpiece under test.

Specifically, whether the workpiece to be measured is qualified or not may be determined according to whether the measured height difference is within a preset range, for example, when the glue thickness on the workpiece to be measured is measured, the glue thickness may be obtained according to the height difference between the first measuring point and the second measuring point, and then the data set (XZ or XYZ) may also be obtained according to the corresponding position information. And judging whether the workpiece to be detected is qualified or not according to a qualified range value preset in the main control module, and judging that the workpiece to be detected is unqualified, namely representing abnormal conditions. On the basis of the gluing thickness, the detected workpiece which is judged to be abnormal due to the noise singular point can be further removed according to the image information.

In an embodiment, the differential chromatic confocal height measuring system further includes a server, and the server is connected to the main control module 130 and configured to receive data sent by the main control module 130.

Specifically, the data sent by the main control module 130 may include a plurality of data sets formed by position information and thickness measurement value Z (height difference between the first measurement point and the second measurement point), and abnormal information of the measured workpiece.

In an embodiment, the differential chromatic confocal height measurement system further includes a power supply, and the power supply is connected to the first spectrometer, the second spectrometer, the motion control mechanism, the main control module, and the server to supply power.

In summary, the differential chromatic confocal height measurement system provided by this embodiment can effectively eliminate the errors and installation errors of the measured workpiece caused by the machining errors, the field environment and the mechanical vibration of the device itself, and obtain the height difference between two measurement points on the measured workpiece.

Second embodiment

Referring to fig. 5, fig. 5 is a block diagram of a differential color confocal height measurement system according to a second embodiment of the present invention. As shown in fig. 5, the differential confocal measurement system includes a first measurement branch, a second measurement branch, and a main control module 530. The first measuring branch comprises a first light source 510, a first spectrometer 511 and a first light pen 512, the first light source 510 is connected with the first spectrometer 511 and the first light pen 512, the first light source 510 emits broadband continuous light to the first light pen 512, the first light pen 512 focuses the broadband continuous light to form a color confocal light beam and irradiates the color confocal light beam on a first measuring point of a measured workpiece, and the first spectrometer 511 receives reflected light of the first measuring point to obtain first spectrum data and obtain the height of the first measuring point according to the first spectrum data. The second measuring branch comprises a second light source 520, a second spectrometer 521 and a second light pen 522, the second light source 520 is connected with the second spectrometer 521 and the second light pen 522, the second light source 520 emits broadband continuous light to the second light pen 522, the second light pen 522 focuses the broadband continuous light to form a confocal light beam, the confocal light beam irradiates a second measuring point of the measured workpiece, the second spectrometer 521 receives reflected light of the second measuring point to obtain second spectrum data, and the height of the second measuring point is obtained according to the second spectrum data. The main control module 530 is connected to the first spectrometer 511 and the second spectrometer 521, and is configured to receive a height of the first measurement point (which may also be understood as a thickness of the first measurement point of the workpiece to be measured) and a height of the second measurement point (which may also be understood as a thickness of the second measurement point of the workpiece to be measured) to obtain a height difference between the first measurement point and the second measurement point.

Specifically, compared with the first embodiment, in the present embodiment, the heights (also understood as thickness values) of the first measurement point and the second measurement point are calculated in real time by the first spectrometer 511 and the second spectrometer 521, and the height data is directly output to the main control module 530, so that a large amount of spectrum data is prevented from being transmitted to the main control module 530, and the measurement speed is increased.

In one embodiment, the differential confocal measurement system further includes a motion control mechanism and an encoder module 550, the main control module 530 is connected to the motion control mechanism for controlling the motion control mechanism to move the workpiece to be measured; the encoder module 550 is connected to the motion control mechanism and the first spectrometer 511, and connected to the motion control mechanism and the second spectrometer 521, and is configured to obtain position information of the motion control mechanism and send the position information to the first spectrometer 511 and the second spectrometer 521.

Specifically, compared with the first embodiment, in the present embodiment, the encoder module 550 collects the position information of the motion control mechanism in real time and sends the position information to the first spectrometer 511 and the second spectrometer 521, and the first spectrometer 511 and the second spectrometer 521 respectively form the two-dimensional data set or the three-dimensional data set by the calculated height data and the position information and send the two-dimensional data set or the three-dimensional data set to the main control module 530. The communication time difference between the module processors caused by directly collecting the position information and then collecting the height data by the main control module 530 can be avoided. And if the data is collected in the non-stop or non-deceleration process, the time difference can cause the asynchronization of the position information and the height data, namely the position information and the height data (namely the height difference, namely the thickness difference between the first measuring point and the second measuring point) are misplaced.

It should be noted that the encoder modules in fig. 5 may be an integral body, or there may be one encoder module corresponding to different spectrometers.

Other parts of this embodiment can refer to the first embodiment, and are not described herein again.

Therefore, the differential chromatic confocal height measurement system provided by the embodiment can not only effectively eliminate the error of the measured workpiece caused by clamping during processing, the error caused by the field environment and the mechanical vibration of the device, and the installation error, but also obtain the height difference of two measurement points on the measured workpiece, improve the detection speed, and eliminate the information synchronization error.

Third embodiment

Referring to fig. 6, fig. 6 is a partial schematic structural view of a differential chromatic confocal height measurement system according to a third embodiment of the present invention. As shown in fig. 6, the differential confocal measurement system of the present embodiment includes a first measurement branch, a second measurement branch, and a main control module. The first measuring branch comprises a first light source, a first spectrometer and a first light pen 610, the first light source is connected with the first spectrometer and the first light pen 610, the first light source emits broadband continuous light to the first light pen 610, the first light pen 610 focuses the broadband continuous light to form a color confocal light beam which irradiates on a first measuring point of a measured workpiece, the first spectrometer receives reflected light of the first measuring point to obtain first spectrum data, and the height of the first measuring point is obtained according to the first spectrum data. The second measuring branch comprises a contact digital height sensor 611, the contact digital height sensor 611 being used for measuring the height of the second measuring point. The main control module is connected to the first spectrometer and the contact digital height sensor 611, and is configured to receive a height of the first measurement point (which may also be understood as a thickness of the first measurement point of the workpiece to be measured) and a height of the second measurement point (which may also be understood as a thickness of the second measurement point of the workpiece to be measured), so as to obtain a height difference between the first measurement point and the second measurement point.

Specifically, for example, when measuring the thickness of the glue on the workpiece to be measured, the first measuring branch is used to fix (measure) the glue on the workpiece to be measured, i.e. measure the height of the glue applying element, and the second measuring branch (second measuring point) is used to measure the base level of the substrate adjacent to the first measuring point, if the measurement accuracy of the system is not high, for example, above ± 2um, the cost can be greatly reduced by replacing the relevant components of the second measuring branch of the foregoing embodiment with a contact type digital height sensor.

The difference between the differential confocal measurement system and the previous embodiment is only described in the present embodiment, and the description of the same parts of the present embodiment is not repeated.

Fourth embodiment

Please refer to fig. 2, fig. 4 and fig. 7 in combination, fig. 7 is a schematic measurement diagram of a differential chromatic confocal height measurement system according to a fourth embodiment of the present invention. As shown in fig. 4 (fig. 4 is only used to illustrate the components in the present embodiment for convenience of description), in the present embodiment, the relative positions of the first light pen 112 in the first measurement branch and the second light pen 122 in the second measurement branch are adjustable.

In one embodiment, the first fixing arm 171 and/or the second fixing arm 172 are movably connected to the cross beam 170 for adjusting the relative position of the first light pen and the second light pen.

Specifically, the first fixing arm 171 and/or the second fixing arm 172 may be movably connected to the cross beam 170, for example, the fixing arm and the cross beam are connected by sliding, or the cross beam 170 is provided with a plurality of connecting holes for adjusting the connecting position of the fixing arm, so as to adjust the relative position between the optical pens. The movable connection is not limited to this, and the corresponding arrangement can be made by other movable connection existing technologies in the field.

Referring to fig. 7, when the diameter of the optical pen is larger, the relative positions of the first optical pen 112 and the second optical pen 122 are adjusted to make the first optical pen 112 and the second optical pen 122 as close as possible in the X direction. The measurement point corresponding to the first light pen 112 is 701 and has coordinates (X1, Y1), and the measurement point corresponding to the second light pen 122 is 702 and has coordinates (X2, Y2). The distance between the two points in the Y direction is:

ΔY＝Y1-Y2

when the workpiece moves along the Y direction at the speed v2, the time difference between the two points (i.e. the time difference between the positions corresponding to the Y coordinates of the two points with respect to any one of the light pens) is:

Δt＝ΔY/v2

due to the different spatial positions of the two light pens (different X and Y coordinates of the measurement points), at the same time, the first light pen 112 corresponds to the first measurement point (X1, Y1) and the second light pen 122 corresponds to the second measurement point (X2, Y2). In practice, in order to obtain the glue thickness Z at the first measurement point (X1, Y1), it is necessary to measure the height (or thickness) at the first measurement point (X1, Y1) and the height (or thickness) at (X2, Y1). Therefore, in the time sequence, the second light pen 122 performs measurement first, and the first light pen 112 performs measurement again, so when the two light pens are placed at a distance sufficiently small in the X direction, i.e., X1-X2 ≈ 0, the glue thickness at the point (X1, Y1) at the time t- Δ t, i.e., the glue thickness Z ═ H1(X1, Y1) -H2 '(X2, Y2+ Δ Y), can be equivalently performed by using H1(X1, Y1) -H2' (X2, Y2+ Δ Y). That is, in essence, the present embodiment compensates for the difference in the spatial X or Y coordinates of the first light pen 112 and the second light pen 122 by the time difference measured by the two light pens.

Fig. 8 is a schematic partial structural view of a gluing device according to a fifth embodiment of the present invention. As shown in fig. 8, the glue applying apparatus includes a glue applying module 801 disposed between the first light pen 112 and the second light pen 122, and the differential chromatic confocal height measuring system of any of the above embodiments. Of course, the first light pen 112 and/or the second light pen 122 may also be replaced with a height sensor. The glue module 801 shown in fig. 8 is a glue nozzle, although other spray modules may be used. In this embodiment, the measurement point of the first light pen 112 and the measurement point of the second light pen 122 have the same X coordinate or Y coordinate, but may be arranged in a staggered manner as mentioned in the previous embodiments. By arranging the glue coating module 801 between the first light pen 112 and the second light pen 122, glue coating and spraying can be performed in real time, and the glue coating thickness is measured, that is, the second light pen performs measurement point measurement (that is, the height of the substrate before glue coating is measured), then after glue coating operation is performed, the first light pen performs measurement of a corresponding measurement point (the measurement value is the sum of the substrate thickness and the glue coating thickness), and the glue coating thickness value is obtained by subtracting the height measured by the second light pen from the height measured by the first light pen, although the first light pen and the second light pen are only used for distinguishing similar objects and are not necessarily used for describing a specific sequence or sequence. For a specific measurement method, reference may be made to the foregoing embodiments, which are not described herein again.

To sum up, the differential chromatic confocal height measurement system and the gluing device provided by the embodiment of the application can not only effectively eliminate the error of the measured workpiece caused by clamping during processing, the error caused by the field environment and the mechanical vibration of the device and the installation error, but also obtain the height difference of two measurement points on the measured workpiece, can improve the detection speed, eliminate the information synchronization error, and solve the measurement error caused by the over-coarse diameter of the optical pen. The gluing device can also carry out gluing operation in real time and measure the gluing thickness after the operation in real time.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

Claims (10)

1. A differential chromatic confocal height measuring system is characterized by comprising a first measuring branch, a second measuring branch and a main control module; wherein the content of the first and second substances,

the first measuring branch comprises a first light source, a first spectrometer and a first light pen, the first light source is connected with the first spectrometer and the first light pen, the first light source emits broadband continuous light to the first light pen, the first light pen focuses the broadband continuous light to form a color confocal light beam which irradiates on a first measuring point of a measured workpiece, and the first spectrometer receives reflected light of the first measuring point to obtain first spectrum data;

the second measuring branch is used for acquiring the height of a second measuring point of the measured workpiece or acquiring the reflected light of the second measuring point of the measured workpiece so as to acquire second spectrum data;

the main control module is configured to obtain a height difference between the first measurement point and the second measurement point according to the height of the first measurement point and the height of the second measurement point, where the height of the first measurement point is determined according to the first spectrum data, and when the second measurement branch is used to obtain the second spectrum data, the second measurement branch or the main control module is further configured to obtain the height of the second measurement point according to the second spectrum data.

2. The differential chromatic confocal height measurement system of claim 1, wherein the second measurement branch comprises a second light source, a second spectrometer and a second light pen, the second light source is connected with the second spectrometer and the second light pen, the second light source emits broadband continuous light to the second light pen, the second light pen focuses the broadband continuous light to form a chromatic confocal light beam and irradiates the second measurement point of the measured workpiece, and the second spectrometer receives reflected light of the second measurement point to obtain second spectral data; wherein the content of the first and second substances,

the first spectrometer is further configured to determine a height of the first measurement point from the first spectral data, and the second spectrometer is further configured to determine a height of the second measurement point from the second spectral data.

3. The differential chromatic confocal height measurement system of claim 2, further comprising a motion control mechanism and an encoder module, wherein the main control module is connected to the motion control mechanism for controlling the motion control mechanism to move the workpiece under test; the encoder module is connected with the motion control mechanism and the main control module, and is used for acquiring position information of the motion control mechanism and sending the position information to the main control module, wherein the position information corresponds to the first measuring point and the second measuring point.

4. The differential chromatic confocal height measurement system of claim 2, further comprising a motion control mechanism and an encoder module, wherein the main control module is connected to the motion control mechanism for controlling the motion control mechanism to move the workpiece under test; the encoder module is connected with the motion control mechanism and the first spectrometer, and is connected with the motion control mechanism and the second spectrometer, and is used for acquiring the position information of the motion control mechanism and sending the position information to the first spectrometer and the second spectrometer, wherein the position information corresponds to the first measuring point and the second measuring point.

5. The differential chromatic confocal height measurement system of claim 3 or 4, wherein the motion control mechanism comprises a first transmission unit for moving a workpiece under test in a first direction, a second transmission unit for moving the workpiece under test in a second direction, and a connection block for connecting the first transmission unit and the second transmission unit.

6. The differential chromatic confocal height measurement system of claim 2, wherein the first spectrometer and the second spectrometer each comprise an automatic light intensity adjustment device for automatically adjusting the intensity of the light source according to the intensity of the light reflected from the surface of the workpiece to be measured.

7. The differential chromatic confocal height measurement system of claim 1, wherein the main control module is further connected to a monitoring system, and receives the image information of the workpiece to be measured acquired by the monitoring system, so as to perform an anomaly analysis according to the image information of the workpiece to be measured, so as to determine an anomalous workpiece to be measured.

8. The differential chromatic confocal height measurement system of claim 7, wherein the main control module is further connected with an exception execution module for controlling the exception execution module to remove the abnormal workpiece under test.

9. The differential chromatic confocal height measurement system of claim 1, wherein the second measurement branch comprises a contact digital height sensor for acquiring a height of a second measurement point of the workpiece under test.

10. A glue spreading device comprising a glue spreading module and a differential chromatic confocal height measurement system as claimed in any one of claims 1 to 9, the glue spreading module being disposed between the first and second light pens.

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