CN1260473A - Non-contact plane characteristic 3D automatic test instrument - Google Patents
Non-contact plane characteristic 3D automatic test instrument Download PDFInfo
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- CN1260473A CN1260473A CN 99100043 CN99100043A CN1260473A CN 1260473 A CN1260473 A CN 1260473A CN 99100043 CN99100043 CN 99100043 CN 99100043 A CN99100043 A CN 99100043A CN 1260473 A CN1260473 A CN 1260473A
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Abstract
The three-D automatic test instrument includes mechanical device, optical circuit combination device, electric circuit, computing system, terminal and power supply. Said mechanical device comprises a antivibration working table on which there is a mobile platform for the body to be tested, a mobile optical circuit combination device platform set on the cross beam of portal frame, and a trimming device capable of up-down moving objective lens set on the optical circuit combination device platform. Its electric circuit consists of light modulator, electric modulator, auxiliary carrier frequency generator, demodulator, discriminator circuit and operation circuit,and its computing system is controlled by computing software, and set in operation circuit.
Description
The high speed development of modern science, technology has promoted the comprehensive high speed development of industrial application and production even whole economy.Simultaneously, the high speed development of science, technology, commercial Application has also proposed the problem of many keys, and for example, the measurement of surface quality is so that comprehensive comprehensive calibrating of examining and determine until the surface characteristics parameter of certain area.Many fields, the machine work that relates to the degree of precision of whole war industrys, space industry, civilian industry all requires its surface quality is made calibrating; The key foundation of modern computer industry, in, the production of large scale integrated circuit, each link even many soft materials of liquid crystal industry, as: the laser CD of various brands, high-grade tape, photographic film etc. all require the high precision quality arbitration is carried out on its surface.High precision, non-contact plane characteristic 3 D automatic test instrument are put on the agenda already.
Obviously, this high Precision Detection equipment has become the key that each association area is ensured the quality of products, and is again simultaneously to continue the deeply basis of development, and therefore, this exercise question has caused in the world wide already, the very big concern of scientific circles, technos, industry member.
At present, the Buddha's warrior attendant probe that is based on contact is the checkout equipment of core, and owing to the damage to measured piece, having caused worldwide, the surface detection all is confined to sampled measurements substantially.For contactless, not damaged, high Precision Detection, scientific circles, industry member are all being done many-sided discussion and research, can accomplish that at present the equipment that quantitative high precision is made comprehensive calibrating comprehensively to a plane characteristic still belongs to phoenix feathers and unicorn horns.As the equipment bulletin in this field such as West Germany, Japan, the U.S., we also do not see relevant report in the world.
The purpose of the invention is to propose a kind of non-contact plane characteristic 3 D automatic test instrument technical scheme, solves the difficult problem of high-acruracy survey.
Each ingredient of the technical program complete machine comprises:
Mechanical hook-up, light path composite set, circuit, computing system, terminal and power-supply system.
Whole measurement mechanical devices of this equipment are placed on the antidetonation worktable, comprise that but the X, the Y that place measured piece are to the platform that moves, platform is with respect to the sweep limit of object lens, drawn a circle to approve the maximum area of testee, directly over worktable, stand a movably gantry support is arranged, gantry support is along the guide rail on the worktable, can make Y or directions X moves on platform, and can put and fix on any position.The light path composite set can be made X or Y to moving horizontally on the crossbeam of removable gantry support, and can put arbitrarily fixed.This light path composite set also disposes the upper and lower fine setting of Z direction, and nationality is to regulate the spacing of object lens and measured object.Object lens the light path composite set below.The light path composite set is fixed fixed putting of Y direction with removable gantry support putting of horizontal X direction, has just determined the starting point that each time measured object is detected, i.e. zero point.By the position parameter of displacement transducer may command testing and the database synchronization of computing machine, realize the real-time control of detection, promptly keep synchronously with the scanning process of object lens to measured object.
The set-up mode of the technical program, for the travel mechanism of gantry support horizontal X direction on the gantry support crossbeam in Y direction and light path composite set, its machine work precision can propose excessive demand; And to X, the Y platform, requiring the precision index on shockproof index and plane to be not more than 2.5um gets final product, this be because, the density of system scan is 4800 points/mm, if tested plane is 400mm * 600mm, the error band of that petty 2.5um platform gives the error effect of native system at 6.5 * 10-7～4.3 * 10-7 (um).
The light path composite set of the technical program comprises:
Helium-neon laser, the helium-neon laser of employing λ=632.8 nanometers requires helium-neon laser must guarantee that frequency is accurate, and accuracy should be higher than 10-9 (negative 9 powers, down together), and frequency stability is higher than 10-9; Temperature coefficient is higher than 10-8, and purpose is to guarantee the frequency stabilization of the low frequency signal 100kc of input coefficient, promptly guarantees zero point stability, and this is a key of guaranteeing the native system measuring accuracy.
One component light microscopic, its half anti-, semi-transparent eyeglass coefficient 0.5 is best.
The selection of the object lens in the light path combination is a principle with light probe＜0.8um and lengthening depth of focus, and object lens should have the scale focusing.
The circuit part of the technical program comprises light, electric modulator, subcarrier frequency generator and detuner, phase demodulation comparator circuit and computing circuit.
Enter two electrooptic modulators after the lasing light emitter beam split respectively, electrooptic modulator requirement working point should be in the centre of linearity range, therefore, require modulation signal promptly by subcarrier frequency generator output load 100,000,000 and 100.1 million signal frequently, modulation power should be stablized, 100,000,000 and 100.1 million frequency stability and frequency accuracy should be higher than 10-8, and temperature coefficient should be higher than 10-7.
The principle of work of the technical program is:
Can confirm that according to the wave characteristic of laser laser exists coherent phenomena, it and electromagnetic beat duplicate.When two bundles have the laser coherence of frequency difference, the low frequency signal that can clearly observe or detect two laser frequency differences of reflection exists, and the optical path difference of the laser that the phase place of this low frequency signal and participation are relevant presents linear functional relation, that is: Δ h=(λ/4 π) * ΔΦ.Wherein: ΔΦ--the phase change of low frequency signal
λ--optical maser wavelength
The optical path difference of Δ h--coherent laser
If we can confirm that this optical path difference is exactly the relevant physical quantity of measured piece surface parameter, that is petty, and we also just accurately detect this physical quantity by accurate detection of the high-fidelity of ΔΦ.The so-called plane characteristic that we see say the rough geometry parameter that will detect the plane exactly quantitatively intuitively, and this parameter is in several nanometer range, and certainly, it is to be difficult to accurately directly detect.The measuring equipment of contact increases probe hardness to greatest extent, and as adopting adamas, its tip is very thin, and obviously the scuffing to measured surface is inevitable.
This equipment is based on the laser coherence principle, and we to much smaller than 1um, are referred to as light probe to laser focusing, and it is sensory surface uneven directly, so optical path difference has just appearred in the relevant laser of two bundles.Get rid of, shielded other when us from system with the incoherent optical path difference of surface irregularity, we are referred to as " interferences ", according to ΔΦ=f (Δ h), (mathematical relation of ΔΦ and Δ h derivation herein is omitted).Established the single funtcional relationship of ΔΦ and Δ h, the device systems scheme is just round making, control, utilize the relevant of laser, accurately catch the relevant low frequency signal that generates, the variation of surveying its phase place reaches the purpose that finally quantitatively measures, calculates the plane characteristic parameter.
The embodiment of the technical program is as shown in drawings:
Accompanying drawing the 2, the 3rd, the principle of work synoptic diagram of the technical program;
Accompanying drawing 4 is computing system process flow diagrams of the present invention.
Accompanying drawing is specified the present invention in conjunction with the embodiments:
Shown in Figure 1A:
Place X, Y mobile platform 2 on the earthquake table 1, removable gantry support 3 places the Y on the worktable 1 also can put allocation arbitrarily on track, X can put allocation arbitrarily to moving also on the support 3 but light path composite set 5 is suspended on, object lens 6 are arranged on following can the driving by fine setting of light path composite set 5 and make the Z direction up and down and move and put allocation, and measured object 4 is placed on the platform 2, under the object lens 6; Light, electrical modulation and detuner are arranged in the device 5, and electric signal is exported to by cable in the circuit of operator's console and handled by computing system.
Shown in Figure 1B:
Circuits System 7, computing system 8, power supply 10 and display terminal 9 are installed on the rack 11 of operator's console.
The principle of work of the technical program is shown in Fig. 2,3:
Sum of errors measuring accuracy in this programme:
The single funtcional relationship of establishing ΔΦ and Δ h is very important, and this is because in fact " optical path difference " is not single.This programme is divided into systematic error, accidental error, stochastic error with error, takes corresponding technical measures to be solved in the complete machine overall design respectively.
This equipment principle core:
1, laser has the relevant beat characteristic of similar radiowave.
2, on laser beam the minus carrier frequency signal by electricity-machine-optical modulation (100MC 100.1MC), utilizes the laser coherence beat then.
3, the low-frequency component information (100kc) of beat appearance can be obtained by the photoelectricity demodulation.
4, the phase place of this electric signal will be made function with optical path difference, and promptly Δ h is relevant to ΔΦ, and linear.Thereby the measurement of passing through ΔΦ realizes the measurement of Δ h, its funtcional relationship:
Δh＝(λ/4π)×ΔΦ。
5, the basis is sinusoidal wave as phase reference.
Optical path difference in this programme:
As shown in Figure 2, exist just like next optical path difference in this programme:
(1) L1, L2 optical path difference
(2) L3, L4 optical path difference
(3) L5, L6 optical path difference
(4) Δ h: measurement of optical path difference
(5) measured surface causes the additional optical path difference between basic hot spot and the light probe when slope or big slope are arranged
(6) the three-dimensional platform optical path difference that when directions X moves, may occur
(7) as the sine wave of measuring comparison basis, directly relevant and produce without the measured object surface, owing to exist its phase place of parasitic path difference at-2 π---+2 π intervals are with fixed.
Above-mentioned all light path (1) is irrelevant with measurement; (4) be the core of this programme, all the other every optical path differences are at (2 π---+2 π) ± m * 2 π, and the measuring accuracy of this equipment of having a strong impact on.According to the reason that the additional optical path difference of interferometry produces, can divide into: systematic error, accidental error, stochastic error.Can compensate for systematic error, and, can solve by the calibration zeroing as the sinusoidal wave initial phase of the 100KC of phase demodulation benchmark.
As Fig. 2, shown in Figure 3, laser beam two bundles behind spectroscope 13 enter electrooptic modulator 14 with frequency laser.Two subcarrier frequency generators 16.1,17.1 and 16.2,17.2 output 100MC and 100.1MC signal enter electrooptic modulator 14.1,14.2 respectively and finish the photoelectricity modulation.The two bundle laser that enter photoelectricity detuner 15.1 are not pass through the measured object surface, 100kc positive wave after the coherent demodulation is that the basis is sinusoidal wave, the two bundle laser that the process measured object reflects, comprise light probe, enter photoelectricity detuner 15.2, demodulation output 100kc sine wave, its phase place has included measured object surface irregularity parameter information.The sine wave of two coherent demodulation generations enters phase demodulation comparator circuit 18, the signal of output has been a digital signal of representing the measured object surface characteristics, enter combination of circuits 19,20 and finish digital integration and conversion, then enter computing system 21, characterize the calculating of each parameter of plane characteristic according to prefabricated mathematical model and design and calculation method, as roughness Ra, percent ripple Wa, how much patterns etc., data and result of calculation storage can show, print in terminal 22 by the mode of user's request simultaneously.
Explanation to the computing system process flow diagram:
The English capitalization that indicates in the square frame among the figure is represented each step in the system flow.
Wherein: A: system's master menu, B: measurement parameter input, C: initialization survey position of platform, D: carry out data sampling by the A/D mouth, E: sampled data is converted into height value, F: this height value is sent in the data file, G: judge whether to finish data sampling, Y: finish data sampling, H: sampled data is handled, J: form the final data file, K: current file is sent into the measurement result display module; T: data file name input, X: on screen, show measurement result, X1: measurement result display menu, P: print measurement result, P1: print and finish; S1: select to begin to measure option, S2: select the measurement result Show Options, S3: selective printing, S4: select to return.
System start-up, start display system master menu A, enter measurement parameter input B by selecting to begin to measure option S1, instrument begins initialization survey position of platform C, carry out data sampling D by the A/D mouth, sampled data is converted into height value E, this height value is sent into F in the data file, judge whether to finish data sampling G, be that (Y) then enters sampled data processing H, form final data file J, current file is sent into measurement result display module S5, on system's master menu, select measurement result Show Options S2, enter data name input T, on screen, show measurement result X, selective printing S3 on measurement result display menu X1, draw print result P, finish and return display menu X1 after printing P1; Perhaps select to return S4 retrieval system master menu A from display menu X1.When in system flow, judging whether to finish sampling G, judge and do not finish data sampling N, system changes platform over to and moves C1, continue to enter and read position of platform information C2, data to output judge whether platform reaches precalculated position C3, and arrival precalculated position Y then enters by the A/D mouth and carries out data sampling D, and platform does not reach precalculated position N, by computing platform compensation displacement C4, repeat to enter platform and move C1.
Claims (4)
1, a kind of non-contact plane characteristic 3 D automatic test instrument, comprise mechanical hook-up, the light path composite set, circuit, computing system, terminal and power supply, it is characterized in that: mechanical hook-up is by the antidetonation worktable, place measured object on the worktable, but horizontal X, the platform that the Y direction moves, be arranged on the guide rail of work top, can be along Y or X to the gantry support that moves, be provided with on the gantry support crossbeam, the light path composite set platform that can move along X or Y direction is provided with on the light path composite set platform, can be along on the Z direction, the micromatic setting that moves down the animal lens head is formed; The light path composite set is by LASER Light Source, one group of master's spectroscope, and two groups of secondary beam split mirrored cabinets, two semi-permeable mirrors and object lens are formed, and are installed on the light path composite set platform of mechanical hook-up; Circuit is by the light that is provided with on the beam split light path, electric modulator, subcarrier frequency generator, detuner, and phase discriminator and computing circuit are formed; Computing system is controlled by software for calculation, is arranged in the computing circuit; Terminal comprises display and printer, is connected with circuit output end; Power supply is given the power supply of complete machine each several part electrical appliance.
2, non-contact plane characteristic 3 D automatic test instrument as claimed in claim 1, the working routine that it is characterized in that computing system is: start display system master menu, enter the measurement parameter loading routine by selecting to begin to measure option, instrument begins the initialization survey position of platform, carry out data sampling by the A/D mouth, sampled data is converted into height value, this height value is sent in the data file, judge whether to finish data sampling, as finish and then enter sampled data and handle to form the final data file, current file is sent into the measurement result display module; Select the measurement result option on system's master menu, enter the data name input, show measurement result on the screen, selective printing can draw print result; In the judgment data sampling imperfect tense, enter the platform mobile process, the platform positional information of making even continues to read the newspaper, data to output judge whether platform reaches the precalculated position, the in-position then enters by the A/D mouth carries out data sampling, do not reach the position, then repeat to enter the platform mobile process by computing platform compensation displacement.
3, non-contact plane characteristic 3 D automatic test instrument as claimed in claim 1 or 2 is characterized in that laser instrument adopts the helium-neon laser of λ=632.8 nanometers, and semi-transparent eyeglass coefficient is 0.5, and object lens light probe＜0.8um, object lens have the scale focusing.
4, non-contact plane characteristic 3 D automatic test instrument as claimed in claim 1 or 2 is characterized in that the subcarrier frequency signal of subcarrier frequency generator output is 100,000,000 and 100.1 million.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99100043 CN1260473A (en) | 1999-01-08 | 1999-01-08 | Non-contact plane characteristic 3D automatic test instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99100043 CN1260473A (en) | 1999-01-08 | 1999-01-08 | Non-contact plane characteristic 3D automatic test instrument |
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| CN1260473A true CN1260473A (en) | 2000-07-19 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100561275C (en) * | 2006-12-29 | 2009-11-18 | 鸿富锦精密工业（深圳）有限公司 | Camera lens module assembling and testing device and assembling test method |
| CN102854197A (en) * | 2012-10-10 | 2013-01-02 | 苏州富强科技有限公司 | Laser detection device |
| CN102853767A (en) * | 2012-10-10 | 2013-01-02 | 苏州富强科技有限公司 | Laser detection device |
| CN103727869A (en) * | 2013-09-22 | 2014-04-16 | 雷孔成 | Pocket three-coordinate length measuring instrument |
| CN103913137A (en) * | 2013-01-08 | 2014-07-09 | 株式会社三丰 | Coordinate measuring device and method for controlling the same |
| CN104400066A (en) * | 2014-12-07 | 2015-03-11 | 常州市武进亚太机电配件有限公司 | Punching workbench |
| CN106092204A (en) * | 2016-07-29 | 2016-11-09 | 广东惠利普路桥信息工程有限公司 | A kind of road and bridge construction data acquisition equipment of noctovisor scan |
| CN110091068A (en) * | 2018-01-30 | 2019-08-06 | 上海鸣志电器股份有限公司 | Device and method for the automatic duplicate removal of laser after rotor dynamic balancing |
-
1999
- 1999-01-08 CN CN 99100043 patent/CN1260473A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100561275C (en) * | 2006-12-29 | 2009-11-18 | 鸿富锦精密工业（深圳）有限公司 | Camera lens module assembling and testing device and assembling test method |
| CN102854197A (en) * | 2012-10-10 | 2013-01-02 | 苏州富强科技有限公司 | Laser detection device |
| CN102853767A (en) * | 2012-10-10 | 2013-01-02 | 苏州富强科技有限公司 | Laser detection device |
| CN103913137A (en) * | 2013-01-08 | 2014-07-09 | 株式会社三丰 | Coordinate measuring device and method for controlling the same |
| CN103913137B (en) * | 2013-01-08 | 2018-03-13 | 株式会社三丰 | Coordinate measuring set and its control method |
| CN103727869A (en) * | 2013-09-22 | 2014-04-16 | 雷孔成 | Pocket three-coordinate length measuring instrument |
| CN104400066A (en) * | 2014-12-07 | 2015-03-11 | 常州市武进亚太机电配件有限公司 | Punching workbench |
| CN106092204A (en) * | 2016-07-29 | 2016-11-09 | 广东惠利普路桥信息工程有限公司 | A kind of road and bridge construction data acquisition equipment of noctovisor scan |
| CN110091068A (en) * | 2018-01-30 | 2019-08-06 | 上海鸣志电器股份有限公司 | Device and method for the automatic duplicate removal of laser after rotor dynamic balancing |
| CN110091068B (en) * | 2018-01-30 | 2024-03-15 | 上海鸣志电器股份有限公司 | Device and method for automatic laser weight removal after dynamic balance of motor rotor |
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