CN214718876U

CN214718876U - Conveying mechanism for semiconductor cleaning

Info

Publication number: CN214718876U
Application number: CN202121059759.9U
Authority: CN
Inventors: 郝齐齐
Original assignee: Anhui Fullerde Technology Development Co Ltd
Current assignee: Anhui Fullerde Technology Development Co Ltd
Priority date: 2021-05-18
Filing date: 2021-05-18
Publication date: 2021-11-16
Anticipated expiration: 2031-05-18

Abstract

The utility model discloses a conveying mechanism for semiconductor cleaning relates to the semiconductor production field, including main part, conveyor and clamping device, the main part is including the base, the top of base is provided with the washing tank, one side that the top of base is located the washing tank is connected with the mounting panel. The utility model discloses a set up conveyor, be connected the baffle through stopper and spacing groove and conveyer belt No. one, conveyer belt operation drives the centre gripping shell and carries out the displacement, until centre gripping shell and connecting plate contact, thereby connect through magnet, the transport motor operation drives the centre gripping shell and rotates, centre gripping shell displacement washs the wafer to the washtrough in, wash the completion back, the centre gripping shell continues to rotate, after to the horizontal position, the slider drives the centre gripping shell with the fixed plate contact and rotates, centre gripping shell and recess contact, No. two conveyer belt operations are carried away the centre gripping shell, be convenient for carry the wafer.

Description

Conveying mechanism for semiconductor cleaning

Technical Field

The utility model relates to a semiconductor production field specifically is a conveying mechanism for semiconductor cleaning.

Background

The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, and has applications in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion and the like, for example, a diode is a device manufactured by using the semiconductor, and the importance of the semiconductor is very great from the viewpoint of science and technology or economic development, most electronic products, such as computers, mobile phones or digital recorders, have close relationship with the semiconductor in core units, common semiconductor materials include silicon, germanium, gallium arsenide and the like, silicon is one of the most influential applications of various semiconductor materials, and wafers need to be cleaned in the process of producing the semiconductor.

However, when the wafer is cleaned at present, the wafer needs to be manually placed into the cleaning groove for cleaning, the workload of an operator is increased, and when the wafer is conveyed, the wafer needs to be clamped, the clamping block can shield the wafer when the wafer is manually taken out, and the working efficiency is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: in order to solve the problem that the wafer needs to be automatically conveyed and the clamping blocks influence the taking-out of the wafer, a conveying mechanism for cleaning a semiconductor is provided.

In order to achieve the above object, the utility model provides a following technical scheme: a conveying mechanism for cleaning a semiconductor comprises a main body, a conveying device and a clamping device, wherein the main body comprises a base, a cleaning tank is arranged at the top end of the base, and an installation plate is connected to one side, located on the cleaning tank, of the top end of the base;

wherein, the conveying device comprises a conveying motor positioned on the outer wall of the mounting plate, the output end of the conveying motor is connected with a conveying shaft, one end of the conveying shaft is connected with a conveying disc, the outer wall of the conveying disc is connected with a rotating plate, one side of the outer wall of the mounting plate, which is positioned on the conveying motor, is connected with a fixed plate, one side of the conveying disc is provided with a first conveying belt, the other side of the conveying disc is provided with a second conveying belt, the top end of the second conveying belt is provided with a groove, the inner wall of the rotating plate is connected with a connecting plate, the inner wall of the connecting plate is connected with a rotating shaft, one end of the rotating shaft is connected with a first gear, the outer wall of the first gear is connected with a second gear, one end of the second gear is connected with a connecting shaft, one end of the connecting shaft is connected with a third gear, and the outer wall of the third gear is connected with a fourth gear, the inner wall of No. four gears is connected with the threaded rod, the one end of threaded rod is connected with the slider, the other end of threaded rod is connected with the connecting block, be connected with connecting spring between connecting block and the rotor plate.

As a further aspect of the present invention: the clamping device comprises a clamping shell located on the inner wall of the first conveying belt, a placing groove is formed in the top end of the clamping shell, a baffle is connected to the inner wall of the placing groove, a torsion spring is connected between the baffle and the placing groove, a clamping groove is formed in the bottom end of the baffle, a clamping block is connected to the position, located below the clamping groove, inside the clamping shell, a fixing spring is connected between the clamping block and the clamping shell, the outer wall of the clamping block is connected with a rotating disc, and the outer wall of the rotating disc is connected with a pushing rod.

As a further aspect of the present invention: the gear teeth of the first gear are meshed with the gear grooves of the second gear, and the gear teeth of the third gear are meshed with the gear grooves of the fourth gear.

As a further aspect of the present invention: the outer wall of threaded rod is provided with the external screw thread, the inner wall of No. four gears is provided with the internal thread, the external screw thread of threaded rod agrees with mutually with the internal thread of No. four gears, the one end of slider is the inclined plane.

As a further aspect of the present invention: the inner wall of the groove is matched with the outer wall of the clamping shell, the placing groove is connected with the baffle through the rotating shaft, and magnets are arranged on the outer wall of the connecting plate and the top end of the clamping shell.

As a further aspect of the present invention: the inner wall of a conveyer belt is connected with the stopper, be connected with spacing spring between stopper and the conveyer belt, the one end of stopper is the disc, the both ends of centre gripping shell are provided with the spacing groove, the inner wall in spacing groove agrees with mutually with the outer wall of stopper.

As a further aspect of the present invention: the inner wall of the clamping groove is matched with the outer wall of the clamping block, tooth grooves are formed in the outer walls of the clamping block and the pushing rod, gear teeth are formed in the outer wall of the rotating disc, and the gear teeth of the rotating disc are meshed with the tooth grooves of the clamping block and the pushing rod.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the baffle is connected with the first conveying belt through the limiting block and the limiting groove by arranging the conveying device, the first conveying belt rotates to drive the clamping shell to displace until the clamping shell is contacted with the connecting plate so as to be connected through the magnet, the conveying motor rotates to drive the clamping shell to rotate, the clamping shell displaces into the cleaning groove to clean the wafer, after cleaning is completed, the clamping shell continues to rotate, after the horizontal position is reached, the sliding block is contacted with the fixed plate to drive the clamping shell to rotate, the clamping shell is contacted with the groove, and the second conveying belt rotates to convey the clamping shell away so as to convey the wafer conveniently;

2. through setting up clamping device, put into the standing groove with the wafer, rotating the baffle shelters from the standing groove, the fixture block receives the effect of fixed spring elasticity to carry out the displacement and gets into the draw-in groove, fix the baffle, wash the completion back, centre gripping shell and recess contact, No. two conveyer belt operations are carried away the centre gripping shell, centre gripping shell and recess contact, the catch bar carries out the displacement with the recess contact, the catch bar displacement drives the rolling disc and rotates, the rolling disc rotates and drives the fixture block and carry out the displacement, the fixture block position shifts out the draw-in groove, the cancellation is fixed to the baffle, the baffle receives the effect of torsional spring to rotate, expose the standing groove, make things convenient for the operator to take out the wafer, be convenient for carry out the centre gripping to the wafer, and can not cause when taking out the operator and block.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is an installation schematic diagram of the conveying device of the present invention;

fig. 3 is an installation schematic diagram of the clamping device of the present invention;

fig. 4 is a cross-sectional view of the clamping device of the present invention;

fig. 5 is an enlarged view of the position a of the present invention.

In the figure: 1. a main body; 101. a base; 102. a cleaning tank; 103. mounting a plate; 2. a conveying device; 201. a conveying motor; 202. a delivery shaft; 203. a delivery tray; 204. a rotating plate; 205. a fixing plate; 206. a first conveying belt; 207. a second conveying belt; 208. a groove; 209. a connecting plate; 210. a rotating shaft; 211. a first gear; 212. a second gear; 213. a connecting shaft; 214. a third gear; 215. a fourth gear; 216. a threaded rod; 217. a slider; 218. connecting blocks; 219. a connecting spring; 3. a clamping device; 301. a clamping shell; 302. a placement groove; 303. a baffle plate; 304. a torsion spring; 305. a card slot; 306. a clamping block; 307. fixing the spring; 308. rotating the disc; 309. a push rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "disposed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. The following describes an embodiment of the present invention according to its overall structure.

Referring to fig. 1 to 5, in an embodiment of the present invention, a conveying mechanism for cleaning a semiconductor includes a main body 1, a conveying device 2 and a clamping device 3, wherein the main body 1 includes a base 101, a cleaning tank 102 is disposed at a top end of the base 101, and a mounting plate 103 is connected to a side of the top end of the base 101, which is located at the cleaning tank 102;

wherein, the conveying device 2 comprises a conveying motor 201 positioned on the outer wall of the mounting plate 103, the output end of the conveying motor 201 is connected with a conveying shaft 202, one end of the conveying shaft 202 is connected with a conveying disc 203, the outer wall of the conveying disc 203 is connected with a rotating plate 204, the outer wall of the mounting plate 103 is connected with a fixing plate 205 positioned on one side of the conveying motor 201, one side of the conveying disc 203 is provided with a first conveying belt 206, the other side of the conveying disc 203 is provided with a second conveying belt 207, the top end of the second conveying belt 207 is provided with a groove 208, the inner wall of the rotating plate 204 is connected with a connecting plate 209, the inner wall of the connecting plate 209 is connected with a rotating shaft 210, one end of the rotating shaft 210 is connected with a first gear 211, the outer wall of the first gear 211 is connected with a second gear 212, one end of the second gear 212 is connected with a connecting shaft 213, one end of the connecting shaft 213 is connected with a third gear 214, the outer wall of the third gear 214 is connected with a fourth gear 215, the inner wall of the fourth gear 215 is connected with a threaded rod 216, one end of the threaded rod 216 is connected with a sliding block 217, the other end of the threaded rod 216 is connected with a connecting block 218, and a connecting spring 219 is connected between the connecting block 218 and the rotating plate 204, so that the wafer can be conveniently conveyed.

Please refer to fig. 1, fig. 3 and fig. 4, the clamping device 3 includes a clamping shell 301 located on the inner wall of the first conveying belt 206, a placing groove 302 is disposed at the top end of the clamping shell 301, a baffle 303 is connected to the inner wall of the placing groove 302, a torsion spring 304 is connected between the baffle 303 and the placing groove 302, a clamping groove 305 is disposed at the bottom end of the baffle 303, a clamping block 306 is connected to the inside of the clamping shell 301 below the clamping groove 305, a fixed spring 307 is connected between the clamping block 306 and the clamping shell 301, a rotating disc 308 is connected to the outer wall of the clamping block 306, and a pushing rod 309 is connected to the outer wall of the rotating disc 308, so as to clamp the wafer.

Please refer to fig. 1 and 3, the teeth of the first gear 211 are engaged with the teeth slots of the second gear 212, so that the first gear 211 rotates to drive the second gear 212 to rotate, the teeth of the third gear 214 is engaged with the teeth slots of the fourth gear 215, and the third gear 214 rotates to drive the fourth gear 215 to rotate.

Please refer to fig. 1-4, the outer wall of the threaded rod 216 is provided with an external thread, the inner wall of the fourth gear 215 is provided with an internal thread, the external thread of the threaded rod 216 is matched with the internal thread of the fourth gear 215, so that the threaded rod 216 can be displaced to drive the fourth gear 215 to rotate, and one end of the sliding block 217 is an inclined surface, so that the sliding block 217 can be displaced under stress.

Please refer to fig. 1-4, the inner wall of the groove 208 fits with the outer wall of the clamping shell 301, so that the inner wall of the groove 208 fits with the outer wall of the clamping shell 301 for connection, the placing groove 302 is connected with the baffle 303 through the rotating shaft, so that the placing groove 302 and the baffle 303 rotate relatively, and the outer wall of the connecting plate 209 and the top end of the clamping shell 301 are both provided with magnets, so that the connecting plate 209 and the clamping shell 301 can be connected conveniently.

Please refer to fig. 1-5, the inner wall of the first conveying belt 206 is connected with a limiting block, a limiting spring is connected between the limiting block and the first conveying belt 206, one end of the limiting block is a round surface, so that the limiting block can be displaced by stress, the two ends of the clamping shell 301 are provided with limiting grooves, the inner wall of the limiting groove is matched with the outer wall of the limiting block, so that the outer wall of the limiting block is attached to the inner wall of the limiting groove, and the clamping shell 301 is connected in a limiting manner.

Referring to fig. 1 to 4, the inner wall of the engaging groove 305 fits the outer wall of the engaging block 306, so that the inner wall of the engaging groove 305 fits the outer wall of the engaging block 306 for fixation, the outer walls of the engaging block 306 and the pushing rod 309 are provided with tooth grooves, the outer wall of the rotating disc 308 is provided with gear teeth, the gear teeth of the rotating disc 308 are engaged with the tooth grooves of the engaging block 306 and the pushing rod 309, so that the pushing rod 309 can displace to drive the engaging block 306 to displace through the rotating disc 308.

The utility model discloses a theory of operation is: firstly, a wafer is placed into a placing groove 302, a rotating baffle plate 303 covers the placing groove 302, a clamping block 306 is displaced by the elastic force of a fixed spring 307 and enters a clamping groove 305 to fix the baffle plate 303, the baffle plate 303 is connected with a first conveying belt 206 through a limiting block and a limiting groove, the first conveying belt 206 operates to drive a clamping shell 301 to displace until the clamping shell 301 is contacted with a connecting plate 209 so as to be connected through a magnet, a conveying motor 201 operates to drive a conveying shaft 202 to rotate, the conveying shaft 202 rotates to drive a conveying disc 203 to rotate, the conveying disc 203 rotates to drive a rotating plate 204 to rotate, the rotating plate 204 rotates to drive the connecting plate 209 to rotate, the connecting plate 209 rotates to drive the clamping shell 301 to rotate, the clamping shell 301 displaces into a cleaning groove 102 to clean the wafer, after cleaning, the clamping shell 301 continues to rotate, and after reaching a horizontal position, a sliding block 217 is contacted with a fixed plate 205 to displace, the slide block 217 displaces to drive the threaded rod 216 to displace, the threaded rod 216 displaces to drive the fourth gear 215 to rotate, the fourth gear 215 rotates to drive the third gear 214 to rotate, the third gear 214 rotates to drive the connecting shaft 213 to rotate, the connecting shaft 213 rotates to drive the second gear 212 to rotate, the second gear 212 rotates to drive the first gear 211 to rotate, the first gear 211 rotates to drive the rotating shaft 210 to rotate, the rotating shaft 210 rotates to drive the connecting plate 209 to rotate, the connecting plate 209 rotates to drive the clamping shell 301 to rotate, the clamping shell 301 is contacted with the groove 208, the second conveyor 207 rotates to convey the clamping shell 301 away, the clamping shell 301 is contacted with the groove 208, the push rod 309 is contacted with the groove 208 to displace, the push rod 309 displaces to drive the rotating disc 308 to rotate, the rotating disc 308 rotates to drive the fixture block 306 to displace, and the fixture block 306 displaces out of the fixture groove 305, the fixing of the baffle 303 is cancelled, the baffle 303 rotates under the action of the torsion spring 304, the placing groove 302 is exposed, and an operator can take out the wafer conveniently.

The above-mentioned, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. A conveying mechanism for semiconductor cleaning comprises a main body (1), a conveying device (2) and a clamping device (3), and is characterized in that the main body (1) comprises a base (101), a cleaning tank (102) is arranged at the top end of the base (101), and a mounting plate (103) is connected to one side, located on the cleaning tank (102), of the top end of the base (101);

wherein, the conveying device (2) comprises a conveying motor (201) positioned on the outer wall of a mounting plate (103), the output end of the conveying motor (201) is connected with a conveying shaft (202), one end of the conveying shaft (202) is connected with a conveying disc (203), the outer wall of the conveying disc (203) is connected with a rotating plate (204), one side of the outer wall of the mounting plate (103) positioned on the conveying motor (201) is connected with a fixing plate (205), one side of the conveying disc (203) is provided with a first conveying belt (206), the other side of the conveying disc (203) is provided with a second conveying belt (207), the top end of the second conveying belt (207) is provided with a groove (208), the inner wall of the rotating plate (204) is connected with a connecting plate (209), the inner wall of the connecting plate (209) is connected with a rotating shaft (210), one end of the rotating shaft (210) is connected with a first gear (211), the outer wall of a gear (211) is connected with No. two gears (212), the one end of No. two gears (212) is connected with connecting axle (213), the one end of connecting axle (213) is connected with No. three gears (214), the outer wall of No. three gears (214) is connected with No. four gears (215), the inner wall of No. four gears (215) is connected with threaded rod (216), the one end of threaded rod (216) is connected with slider (217), the other end of threaded rod (216) is connected with connecting block (218), be connected with between connecting block (218) and rotor plate (204) connecting spring (219).

2. The conveying mechanism for cleaning the semiconductors as claimed in claim 1, wherein the clamping device (3) comprises a clamping shell (301) located on an inner wall of a first conveying belt (206), a placing groove (302) is arranged at a top end of the clamping shell (301), a baffle (303) is connected to an inner wall of the placing groove (302), a torsion spring (304) is connected between the baffle (303) and the placing groove (302), a clamping groove (305) is arranged at a bottom end of the baffle (303), a clamping block (306) is connected to the inside of the clamping shell (301) and located below the clamping groove (305), a fixed spring (307) is connected between the clamping block (306) and the clamping shell (301), a rotating disc (308) is connected to an outer wall of the clamping block (306), and a pushing rod (309) is connected to an outer wall of the rotating disc (308).

3. The conveying mechanism for semiconductor cleaning according to claim 1, wherein the teeth of the first gear (211) are engaged with the teeth grooves of the second gear (212), and the teeth of the third gear (214) are engaged with the teeth grooves of the fourth gear (215).

4. The conveying mechanism for cleaning the semiconductor as claimed in claim 1, wherein the outer wall of the threaded rod (216) is provided with an external thread, the inner wall of the fourth gear (215) is provided with an internal thread, the external thread of the threaded rod (216) is matched with the internal thread of the fourth gear (215), and one end of the sliding block (217) is an inclined surface.

5. The conveying mechanism for cleaning the semiconductors as claimed in claim 2, wherein the inner wall of the groove (208) is engaged with the outer wall of the clamping shell (301), the placing groove (302) is connected with the baffle (303) through a rotating shaft, and the outer wall of the connecting plate (209) and the top end of the clamping shell (301) are provided with magnets.

6. The conveying mechanism for cleaning the semiconductor according to claim 2, wherein a limiting block is connected to the inner wall of the first conveying belt (206), a limiting spring is connected between the limiting block and the first conveying belt (206), one end of the limiting block is a round surface, limiting grooves are formed in two ends of the clamping shell (301), and the inner walls of the limiting grooves are matched with the outer walls of the limiting block.

7. The conveying mechanism for cleaning semiconductors as claimed in claim 2, wherein the inner wall of the slot (305) is engaged with the outer wall of the block (306), the outer walls of the block (306) and the pushing rod (309) are provided with tooth grooves, the outer wall of the rotating disc (308) is provided with gear teeth, and the gear teeth of the rotating disc (308) are engaged with the tooth grooves of the block (306) and the pushing rod (309).