CN217361540U

CN217361540U - Positioning device for semiconductor etching machine

Info

Publication number: CN217361540U
Application number: CN202221132756.8U
Authority: CN
Inventors: 王健
Original assignee: Wuxi Dingstoneware Electronic Engineering Co ltd
Current assignee: Wuxi Dingstoneware Electronic Engineering Co ltd
Priority date: 2022-05-12
Filing date: 2022-05-12
Publication date: 2022-09-02
Anticipated expiration: 2032-05-12

Abstract

The utility model discloses a positioning device for a semiconductor etching machine, which belongs to the technical field of etching machine accessories, and particularly relates to a positioning device for a semiconductor etching machine, wherein the side wall of a positioning table is slidably connected with a lifting frame, the top of the positioning table is inlaid with a lifting plate, the top buckle of the lifting plate is connected with a positioning block, the side wall of the positioning table is fixedly connected with a side frame through screws, the side wall of the side frame is fixedly connected with a mounting plate through screws, the positioning device for the semiconductor etching machine is characterized in that a fixed plate is arranged in the etching machine to fix the whole positioning device, the top of the fixed plate is connected with the positioning table, the side surface of the positioning table is connected with a driving shaft driven by a motor, the lifting frame is driven by the driving shaft to carry the lifting plate to move upwards, the positioning block carrying a chip is combined with a positioning plate after moving upwards, the positioning is rapid, and the positioning plate carries out one-time positioning on the positioning groove plate, the positioning groove plate carries out secondary positioning to the positioning piece on the lifting plate, and the dual positioning mode makes the location more stable.

Description

Positioning device for semiconductor etching machine

Technical Field

The utility model relates to a corrode quick-witted accessory technical field, specifically be a positioner for semiconductor etching machine.

Background

Semiconductors are used in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion, etc., for example, diodes are devices made of semiconductors, and the importance of semiconductors is enormous from the viewpoint of technology or economic development. Most electronic products, such as computers, mobile phones or digital audio recorders, have a core unit closely related to semiconductors, and the common semiconductor materials include silicon, germanium, gallium arsenide, etc., silicon being the most influential one of various semiconductor material applications.

Semiconductor etchers are included in semiconductor processing, and the etchers can be classified into chemical etchers and electrolytic etchers. In chemical etching, chemical solutions are used to achieve the purpose of etching through chemical reactions, chemical etchers are techniques for removing materials by chemical reactions or physical impact, and semiconductor etchers include positioning devices.

When the positioning device of the existing semiconductor etching machine is used for positioning, the speed is low, the positioning mode is simple, and a multiple positioning mode is lacked, so that the positioning process is unstable, and the actual processing effect is influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a positioner for semiconductor etching machine to solve the current positioner of semiconductor etching machine that provides in the above-mentioned background art when fixing a position, speed is slower, and locate mode is simple, lacks multiple locate mode, makes the locate process unstable, has influenced the problem of the effect of actual processing.

In order to achieve the above purpose, the utility model provides a following technical scheme:

the side wall of the positioning table is connected with a lifting frame in a sliding mode, a lifting plate is embedded into the top of the positioning table, and a positioning block is connected to the top of the lifting plate in a buckling mode;

the side wall of the positioning table is fixedly connected with the side frame through screws, the side wall of the side frame is fixedly connected with an installation plate through screws, a motor is embedded in the side wall of the installation plate, the output end of the motor is connected with a driving shaft through a coupler, and the outer circumferential wall of the driving shaft is sleeved with driving teeth;

the bottom of the side frame is fixedly connected with the fixed plate through a screw, and the top of the fixed plate is connected with a bracket in a buckling mode;

the bottom of the positioning plate is fixedly connected with the bracket through a screw, and a positioning groove plate matched with the positioning block is embedded in the side wall of the positioning plate;

the corrosion machine, the inner chamber bottom of corrosion machine passes through screw fixed connection the fixed plate, the preceding lateral wall of corrosion machine passes through screw fixed connection and establishes ties the controller of motor.

Preferably, the front side wall of the lifting frame is integrally connected with a meshing tooth matched with the driving tooth, and the top of the positioning block is integrally connected with a positioning hole.

Preferably, the side wall of the positioning plate is fixedly connected with a guard plate through a screw, and the top of the positioning plate is integrally formed with a groove body matched with the positioning groove plate.

Preferably, the bottom of the fixing plate is fixedly connected with the etching machine through screws, and the side wall of the etching machine is fixedly connected with a feeding bin through screws.

Preferably, the bottom of the corrosion machine is fixedly connected with a bin carrying a turnover cover through a bolt.

Compared with the prior art, the beneficial effects of the utility model are that: this kind of positioner for semiconductor etching machine, combination application through the accessory, the inside at the etching machine sets up the fixed plate, fix whole positioner, and connect the location platform at the top of fixed plate, the drive shaft by motor drive is connected to the side of location platform, the drive shaft drives and makes the crane carry the lifter plate after driving the tooth and shift up, make the locating piece and the locating plate combination that carry the chip after shifting up, the location is quick, and the locating plate carries out primary location to the positioning groove board, the positioning groove board carries out the secondary location to the locating piece on the lifter plate, dual locate mode makes the location more stable.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the positioning plate of the present invention;

fig. 3 is a schematic view of the assembly of the present invention with the etching machine.

In the figure: 100 positioning tables, 110 lifting frames, 120 lifting plates, 130 positioning blocks, 131 positioning holes, 200 side frames, 210 mounting plates, 220 motors, 230 driving shafts, 240 driving teeth, 300 fixing plates, 310 supports, 400 positioning plates, 410 guard plates, 420 positioning groove plates, 500 corrosion machines, 510 feeding bins, 520 bins, 530 turning covers and 540 controllers.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a positioner for semiconductor etching machine, through the combination application of accessory, the inside of etching machine sets up the fixed plate, fix whole positioner, and connect the location platform at the top of fixed plate, the drive shaft by motor drive is connected to the side of location platform, make the crane carry the lifter plate after the drive shaft drives the drive tooth and shift up, make the locating piece and the locating plate combination that carry the chip after shifting up, the location is quick, and the locating plate carries out primary positioning to the positioning frid, the positioning frid carries out secondary positioning to the locating piece on the lifter plate, dual positioning mode makes the location more stable, please refer to fig. 1, fig. 2 and fig. 3, including location platform 100, side bearer 200, fixed plate 300, locating plate 400 and etching machine 500;

referring to fig. 1 again, the side wall of the positioning plate 100 is provided with a lifting frame 110, specifically, the side wall of the positioning table 100 is slidably connected with the lifting frame 110, a lifting plate 120 is embedded in the top of the positioning table 100, and the top of the lifting plate 120 is connected with a positioning block 130 in a buckling manner;

referring to fig. 1 again, the side wall of the side frame 200 is connected to the positioning plate 100, specifically, the side wall of the positioning table 100 is fixedly connected to the side frame 200 through a screw, the side wall of the side frame 200 is fixedly connected to an installation plate 210 through a screw, a motor 220 is embedded in the side wall of the installation plate 210, an output end of the motor 220 is connected to a driving shaft 230 through a coupling, and a driving tooth 240 is sleeved on the circumferential outer wall of the driving shaft 230;

referring to fig. 1 again, the top of the fixing plate 300 is connected to the positioning table 100, specifically, the bottom of the side frame 200 is fixedly connected to the fixing plate 300 through a screw, and the top of the fixing plate 300 is connected to a bracket 310 in a snap-fit manner;

referring to fig. 1 and fig. 2 again, the bottom of the positioning plate 400 is connected to the bracket 310, specifically, the bottom of the positioning plate 400 is fixedly connected to the bracket 310 through a screw, and a positioning groove plate 420 matched with the positioning block 130 is embedded in the sidewall of the positioning plate 400;

referring to fig. 1 and fig. 3 again, the inner cavity of the etching machine 500 is fixedly connected with a fixing plate 300, specifically, the bottom of the inner cavity of the etching machine 500 is fixedly connected with the fixing plate 300 through a screw, and the front side wall of the etching machine 500 is fixedly connected with a controller 540 electrically connected in series with the motor 220 through a screw.

When the positioning device is used specifically, the lifting frame 110 is connected to the top of the positioning table 100, the lifting plate 120 in sliding connection is arranged on the side face of the lifting frame 110, the side frame 200 carrying the mounting plate 210 is arranged on the side face of the positioning table 100, the motor 220 is connected to the mounting plate 210, the motor 220 drives the driving shaft 230 carrying the driving teeth 240, the driving teeth 240 are meshed with the lifting frame 110 to drive the lifting plate 120 on the top of the lifting frame 110, the positioning block 130 for mounting a chip is arranged on the top of the lifting plate 120, positioning is rapid, the positioning block 400 on the top of the support 310 is used for positioning the positioning groove plate 420 for the first time, the positioning groove plate 420 is used for positioning the positioning block 130 on the lifting plate 120 for the second time, and positioning is more stable due to a double positioning mode;

referring to fig. 1 again, in order to facilitate driving of the lifting frame 110 during the transmission process, specifically, the front side wall of the lifting frame 110 is integrally connected with an engaging tooth matched with the driving tooth 240, and the top of the positioning block 130 is integrally connected with a positioning hole 131.

Referring to fig. 1 and fig. 2 again, in order to facilitate the positioning of the positioning plate 400 and the positioning slot plate 420 at one time and shield the side surface of the positioning plate 400, specifically, the side wall of the positioning plate 400 is fixedly connected with a guard plate 410 through a screw, and the top of the positioning plate 400 is integrally connected with a slot body matched with the positioning slot plate 420.

Referring to fig. 1 and fig. 3 again, in order to facilitate the feeding of the etching machine 500, specifically, the bottom of the fixing plate 300 is fixedly connected to the etching machine 500 through screws, and the side wall of the etching machine 500 is fixedly connected to the feeding bin 510 through screws.

Referring to fig. 3 again, in order to increase the storage capacity of the impurities, in particular, a bin 520 carrying a flip cover 530 is fixedly connected to the bottom of the etching machine 500 through a bolt.

While the invention has been described above with reference to an embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, as long as there is no structural conflict, the various features of the disclosed embodiments of the present invention can be used in any combination with each other, and the description of such combinations is not exhaustive in the present specification only for the sake of brevity and resource conservation. Therefore, it is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. A kind of semiconductor etching machine uses the locating device, characterized by that: the method comprises the following steps:

the side wall of the positioning table (100) is connected with a lifting frame (110) in a sliding mode, a lifting plate (120) is embedded into the top of the positioning table (100), and a positioning block (130) is connected to the top of the lifting plate (120) in a buckling mode;

the side wall of the positioning table (100) is fixedly connected with the side frame (200) through screws, the side wall of the side frame (200) is fixedly connected with an installation plate (210) through screws, a motor (220) is embedded in the side wall of the installation plate (210), the output end of the motor (220) is connected with a driving shaft (230) through a coupling, and the outer circumferential wall of the driving shaft (230) is sleeved with driving teeth (240);

the bottom of the side frame (200) is fixedly connected with the fixing plate (300) through a screw, and the top of the fixing plate (300) is connected with a bracket (310) in a buckling mode;

the bottom of the positioning plate (400) is fixedly connected with the bracket (310) through a screw, and a positioning groove plate (420) matched with the positioning block (130) is embedded in the side wall of the positioning plate (400);

the corrosion machine (500), the inner chamber bottom of corrosion machine (500) passes through screw fixed connection fixed plate (300), the preceding lateral wall of corrosion machine (500) passes through screw fixed connection and establishes ties controller (540) of motor (220).

2. The positioning device for the semiconductor etching machine according to claim 1, wherein: the front side wall of the lifting frame (110) is integrally connected with a meshing tooth matched with the driving tooth (240), and the top of the positioning block (130) is integrally connected with a positioning hole (131).

3. The positioning device for the semiconductor etching machine according to claim 2, wherein: the lateral wall of locating plate (400) passes through screw fixed connection and has backplate (410), the top integrated into one piece of locating plate (400) be connected with location frid (420) assorted cell body.

4. The positioning device for the semiconductor etching machine according to claim 3, wherein: the bottom of fixed plate (300) passes through screw fixed connection corrosion machine (500), the lateral wall of corrosion machine (500) passes through screw fixed connection and has feeding storehouse (510).

5. The positioning device for the semiconductor etching machine according to claim 4, wherein: the bottom of the corrosion machine (500) is fixedly connected with a bin (520) carrying a flip cover (530) through a bolt.