CN214683264U - Device for removing foreign matters on substrate - Google Patents
Device for removing foreign matters on substrate Download PDFInfo
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- CN214683264U CN214683264U CN202120982017.7U CN202120982017U CN214683264U CN 214683264 U CN214683264 U CN 214683264U CN 202120982017 U CN202120982017 U CN 202120982017U CN 214683264 U CN214683264 U CN 214683264U
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Abstract
The utility model provides a cleaning device for foreign matters on a substrate, which can effectively blow off the foreign matters on the substrate and suck the foreign matters from an air suction opening and a vacuum air suction pipe through arranging the air blowing opening and the air suction opening of an air blowing and air suction head module and the air blowing pipe and the vacuum air suction pipe in the vacuum flow adjusting module which are respectively communicated with the air blowing opening and the air suction opening, and avoid the foreign matters from generating secondary pollution; in addition, the detachable support module can be matched with a scanning module assembled on the operating machine table to drive the vacuum flow regulating module and the air blowing and sucking module to reciprocate above each effective area of the substrate so as to clean the effective area of the substrate without dead angles; through set up ion wind generator in the detachable support module, can reach the effect of getting rid of foreign matter and static better.
Description
Technical Field
The utility model relates to a clearing device of foreign matter on base plate.
Background
With the rapid development of the semiconductor industry, electronic products are developed in the direction of miniaturization and high integration, the products are thinner and thinner, and the influence of foreign matters on the product performance and yield is higher and higher. A minute dust may cause the entire product to fail. Usually, the air holes are aligned with the substrate to blow air longitudinally through an air blowing device which is externally fixed, and dust particles on the whole substrate are blown away along with the transmission of the substrate, so that the effect of removing foreign matters on the substrate is achieved. The blowing device only realizes the transfer of foreign matters, and can cause repeated pollution along with the circulation of indoor environment. And the dust-free grade of the workshop is improved, so that the purchasing economic cost is improved.
The blowing device in the prior art has the following defects:
(1) the holes are formed in the blowing rod for blowing, dead angles exist due to fixed blowing of the position, the base plates with different sizes and different layouts cannot be matched, in order to achieve an ideal effect, the holes with different layout of the base plates need to be designed and matched, the economic cost is improved, and a new installation process is introduced;
(2) the flow of the blown air is fixed, and can be adjusted only by adjusting the height of the bracket without fine control;
(3) only foreign matters are blown away from the substrate, and the foreign matters still circulate in the machine table or in a workshop environment, so that repeated pollution is easily caused, and the cleaning effect is increasingly poor;
(4) air is blown out, the effect of removing the foreign matters adsorbed by static electricity is not ideal, and the ESD protection effect cannot be achieved.
Therefore, it is desirable to provide a device for removing foreign materials on a substrate.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a clearing device of external foreign matter on the base plate to the not enough that exists among the prior art.
To this end, the above object of the present invention is achieved by the following technical solutions:
a foreign matter removing device on a substrate is characterized in that: the device for removing the foreign matters on the substrate comprises a vacuum flow regulating module, a detachable support module and a blowing and sucking head module which are sequentially arranged from top to bottom, wherein the blowing and sucking head of the blowing and sucking head module faces the substrate on the transportation track, and the vacuum flow regulating module and the blowing and sucking head module are detachably fixed at the upper end and the lower end of the detachable support module respectively; the vacuum flow regulating module is internally provided with a vacuum suction catheter and an air blowing catheter which are arranged side by side, the air blowing and sucking head module is provided with an air blowing opening and an air suction opening, the air blowing opening of the air blowing and sucking head module is communicated with the lower end of the air blowing catheter of the vacuum flow regulating module, and the air suction opening of the air blowing and sucking head module is communicated with the vacuum suction catheter of the vacuum flow regulating module; the detachable support module can drive the vacuum flow adjusting module and the air blowing and sucking module to reciprocate along the conveying track.
When adopting above-mentioned technical scheme, the utility model discloses can also adopt or make up and adopt following technical scheme:
as the utility model discloses a preferred technical scheme: the vacuum suction pipe and the air blowing pipe both penetrate through the inner part of the detachable bracket module, and redundant parts of the vacuum suction pipe and the air blowing pipe are accommodated in the inner space of the detachable bracket module.
As the utility model discloses a preferred technical scheme: the detachable support module comprises a fixed support and a reciprocating moving mechanism fixed with the outer side of the fixed support, the upper end and the lower end of the fixed support are detachably fixed with the vacuum flow adjusting module and the air blowing and sucking head module respectively, and the reciprocating moving mechanism drives the vacuum flow adjusting module and the air blowing and sucking head module to reciprocate along the transportation track by driving the fixed support.
As the utility model discloses a preferred technical scheme: an ion wind generator is further arranged in the detachable support module, an inlet of the ion wind generator is communicated with the air blowing guide pipe of the vacuum flow adjusting module, and an outlet of the ion wind generator is communicated with the air blowing opening of the air blowing and sucking head module.
As the utility model discloses a preferred technical scheme: the blowing openings of the blowing and sucking module are arranged in the center of the blowing and sucking module, and the sucking openings of the blowing and sucking module are arranged on the circumference of the blowing and sucking module.
As the utility model discloses a preferred technical scheme: and the outer surface of the vacuum flow regulating module is provided with a vacuum display screen, a vacuum regulating button, an airflow display screen and an airflow regulating button.
The utility model provides a cleaning device for foreign matters on a substrate, which can effectively blow off the foreign matters on the substrate and suck the foreign matters from an air suction opening and a vacuum air suction pipe through arranging the air blowing opening and the air suction opening of an air blowing and air suction head module and the air blowing pipe and the vacuum air suction pipe in the vacuum flow adjusting module which are respectively communicated with the air blowing opening and the air suction opening, and avoid the foreign matters from generating secondary pollution; in addition, the detachable support module can be matched with a scanning module assembled on the operating machine table to drive the vacuum flow regulating module and the air blowing and sucking module to reciprocate above each effective area of the substrate so as to clean the effective area of the substrate without dead angles; through set up ion wind generator in the detachable support module, can reach the effect of getting rid of foreign matter and static better.
Drawings
Fig. 1 is a diagram of a device for removing foreign matters from a substrate according to the present invention.
Detailed Description
The invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1, a device for removing foreign matters on a substrate includes a vacuum flow rate adjusting module 100, a detachable support module 200, and a blowing and sucking head module 300, which are sequentially arranged from top to bottom, wherein a blowing and sucking face of the blowing and sucking head module 300 faces a substrate 5 on a transportation rail 4, and the vacuum flow rate adjusting module 100 and the blowing and sucking head module 300 are detachably fixed at an upper end and a lower end of the detachable support module 200, respectively; the vacuum flow volume adjusting module 100 is provided with a vacuum suction duct 101 and an air blowing duct 102 arranged side by side, in the present embodiment, two vacuum suction ducts 101 are shown, the two vacuum suction ducts 101 are arranged at both sides in fig. 1, the air blowing duct 102 is arranged at a middle position, the air blowing head module 300 is provided with an air blowing opening 301 and a suction opening 302, the air blowing opening 301 of the air blowing head module 300 is communicated with the lower end of the air blowing duct 102 of the vacuum flow volume adjusting module 100, and the suction opening 302 of the air blowing head module 300 is communicated with the vacuum suction duct 101 of the vacuum flow volume adjusting module 100; the detachable cradle module 200 can bring the vacuum flow rate regulation module 100 and the blow and suction head module 300 into reciprocating motion along the transportation rail 4.
In this embodiment: both the vacuum intake tube 101 and the insufflation tube 102 pass through the interior of the detachable rack module 200, and redundant portions of the vacuum intake tube 101 and the insufflation tube 102 are accommodated within the interior space of the detachable rack module 200.
In this embodiment: the detachable support module 200 comprises a fixed support 202 and a reciprocating mechanism 201 fixed to the outer side of the fixed support 202, the upper end and the lower end of the fixed support 202 detachably fix the vacuum flow rate adjusting module 100 and the blowing and sucking head module 300 respectively, and the reciprocating mechanism 201 drives the fixed support 202 to drive the vacuum flow rate adjusting module 100 and the blowing and sucking head module 300 to reciprocate along the transportation track 4; the reciprocating mechanism 201 may be a reciprocating motor, or may be another structure or form capable of performing a reciprocating function.
In this embodiment: an ion wind generator 203 is further arranged in the detachable support module 200, an inlet of the ion wind generator 203 is communicated with the air blowing conduit 102 of the vacuum flow regulating module 100, and an outlet of the ion wind generator 203 is communicated with the air blowing opening 301 of the air blowing and sucking module 300.
In this embodiment: the blowing opening 301 of the blowing and sucking head module 300 is disposed at the center of the blowing and sucking head module 300, and the sucking opening 302 of the blowing and sucking head module 300 is disposed on the circumference of the blowing and sucking head module 300.
In this embodiment: the outer surface of the vacuum flow regulating module 100 is provided with a vacuum display screen, a vacuum regulating button 103, and an airflow display screen, an airflow regulating button 104, where two marks are only for illustration.
The utility model provides a cleaning device for foreign matters on a substrate, which can effectively blow off the foreign matters on the substrate and suck the foreign matters from an air suction opening and a vacuum air suction pipe through arranging the air blowing opening and the air suction opening of an air blowing and air suction head module and the air blowing pipe and the vacuum air suction pipe in the vacuum flow adjusting module which are respectively communicated with the air blowing opening and the air suction opening, and avoid the foreign matters from generating secondary pollution; in addition, the detachable support module can be matched with a scanning module assembled on the operating machine table to drive the vacuum flow regulating module and the air blowing and sucking module to reciprocate above each effective area of the substrate so as to clean the effective area of the substrate without dead angles; through set up ion wind generator in the detachable support module, can reach the effect of getting rid of foreign matter and static better.
The above-mentioned embodiments are only for explaining the preferred embodiments of the present invention, and not for limiting the present invention, and any modifications, equivalent replacements, improvements, etc. made by the present invention fall within the protection scope of the present invention within the spirit and the protection scope of the claims.
Claims (6)
1. A foreign matter removing device on a substrate is characterized in that: the device for removing the foreign matters on the substrate comprises a vacuum flow regulating module, a detachable support module and a blowing and sucking head module which are sequentially arranged from top to bottom, wherein the blowing and sucking head of the blowing and sucking head module faces the substrate on the transportation track, and the vacuum flow regulating module and the blowing and sucking head module are detachably fixed at the upper end and the lower end of the detachable support module respectively; the vacuum flow regulating module is internally provided with a vacuum suction catheter and an air blowing catheter which are arranged side by side, the air blowing and sucking head module is provided with an air blowing opening and an air suction opening, the air blowing opening of the air blowing and sucking head module is communicated with the lower end of the air blowing catheter of the vacuum flow regulating module, and the air suction opening of the air blowing and sucking head module is communicated with the vacuum suction catheter of the vacuum flow regulating module; the detachable support module can drive the vacuum flow adjusting module and the air blowing and sucking module to reciprocate along the conveying track.
2. A device for removing foreign matters from a substrate according to claim 1, wherein: the vacuum suction pipe and the air blowing pipe both penetrate through the inner part of the detachable bracket module, and redundant parts of the vacuum suction pipe and the air blowing pipe are accommodated in the inner space of the detachable bracket module.
3. A device for removing foreign matters from a substrate according to claim 1, wherein: the detachable support module comprises a fixed support and a reciprocating moving mechanism fixed with the outer side of the fixed support, the upper end and the lower end of the fixed support are detachably fixed with the vacuum flow adjusting module and the air blowing and sucking head module respectively, and the reciprocating moving mechanism drives the vacuum flow adjusting module and the air blowing and sucking head module to reciprocate along the transportation track by driving the fixed support.
4. A removing apparatus for foreign matters on a substrate according to any one of claims 1 to 3, wherein: an ion wind generator is further arranged in the detachable support module, an inlet of the ion wind generator is communicated with the air blowing guide pipe of the vacuum flow adjusting module, and an outlet of the ion wind generator is communicated with the air blowing opening of the air blowing and sucking head module.
5. A device for removing foreign matters from a substrate according to claim 1, wherein: the blowing openings of the blowing and sucking module are arranged in the center of the blowing and sucking module, and the sucking openings of the blowing and sucking module are arranged on the circumference of the blowing and sucking module.
6. A device for removing foreign matters from a substrate according to claim 1, wherein: and the outer surface of the vacuum flow regulating module is provided with a vacuum display screen, a vacuum regulating button, an airflow display screen and an airflow regulating button.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120982017.7U CN214683264U (en) | 2021-05-10 | 2021-05-10 | Device for removing foreign matters on substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120982017.7U CN214683264U (en) | 2021-05-10 | 2021-05-10 | Device for removing foreign matters on substrate |
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| Publication Number | Publication Date |
|---|---|
| CN214683264U true CN214683264U (en) | 2021-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120982017.7U Active CN214683264U (en) | 2021-05-10 | 2021-05-10 | Device for removing foreign matters on substrate |
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| CN (1) | CN214683264U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115301632A (en) * | 2022-08-04 | 2022-11-08 | 华进半导体封装先导技术研发中心有限公司 | Suction and blowing device for removing foreign matters on surface of substrate |
-
2021
- 2021-05-10 CN CN202120982017.7U patent/CN214683264U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115301632A (en) * | 2022-08-04 | 2022-11-08 | 华进半导体封装先导技术研发中心有限公司 | Suction and blowing device for removing foreign matters on surface of substrate |
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