CN214428615U - Piece equipment is scraped in transfer of chip inverter - Google Patents
Piece equipment is scraped in transfer of chip inverter Download PDFInfo
- Publication number
- CN214428615U CN214428615U CN202022943849.6U CN202022943849U CN214428615U CN 214428615 U CN214428615 U CN 214428615U CN 202022943849 U CN202022943849 U CN 202022943849U CN 214428615 U CN214428615 U CN 214428615U
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- China
- Prior art keywords
- sliding mechanism
- fixedly connected
- sliding
- movable table
- baffle
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- 230000007246 mechanism Effects 0.000 claims abstract description 89
- 238000007790 scraping Methods 0.000 claims abstract description 10
- 230000007306 turnover Effects 0.000 claims description 11
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 210000003437 trachea Anatomy 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052710 silicon Inorganic materials 0.000 abstract description 11
- 239000010703 silicon Substances 0.000 abstract description 11
- 238000001179 sorption measurement Methods 0.000 abstract description 7
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 238000007599 discharging Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Abstract
The utility model discloses a chip discharging machine transfer scraping device, which comprises a fixing frame, a scraping machine body and a workbench, wherein the scraping machine body is fixedly installed in the fixing frame, the workbench is fixedly installed on the upper surface of the bottom wall of the fixing frame, a sliding mechanism is fixedly installed on the upper surface of the workbench, the sliding mechanism comprises a bottom plate, two ends of the upper surface of the bottom plate are fixedly connected with a baffle, two ends of a sliding rod are fixedly connected with the inner side of the baffle, the sliding rod is connected with the inner side in a sliding way in the peripheral direction and passes through the inner part of a movable table, the inner side of the baffle is fixedly connected with one end of a pneumatic telescopic rod, the other end of the pneumatic telescopic rod is fixedly inserted into the inner part of the movable table, a first air pipe is arranged on one side of the baffle, the first air pipe is communicated with the pneumatic telescopic rod, a limit slide rail is fixedly installed on one side of the baffle, the limit slide rail is connected with a limit slide block, and the silicon chips are adsorbed and grabbed through an adsorption hole on a clamping plate, avoid manual snatching, reduce the scratch that takes place to the silicon chip.
Description
Technical Field
The utility model relates to a chip inverter technical field specifically is a chip equipment is collected in transfer of chip inverter.
Background
With the continuous progress of integrated circuit manufacturing processes, silicon wafers are becoming smaller and smaller, which also results in very small particles becoming sufficient to affect the fabrication and performance of the silicon wafers;
the existing sheet rewinder is used for manually rewinding sheets, silicon wafers are turned for 180 degrees to be collected, scratches can be generated in the basket rewinding process, the automation degree is improved, the working efficiency is improved, and scratches generated in the transferring and collecting process of the sheet rewinder are reduced.
Therefore, a transfer scraping device of a chip inverter is provided for solving the problem.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a transfer of machine of falling mascerating collects a equipment to solve the problem that provides among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a piece transfer and gathering device of a piece rewinding machine comprises a fixing frame, a piece gathering machine body and a workbench, wherein the piece gathering machine body is fixedly installed inside the fixing frame, the workbench is fixedly installed on the upper surface of the bottom wall of the fixing frame, a sliding mechanism is fixedly installed on the upper surface of the workbench and comprises a bottom plate, two ends of the upper surface of the bottom plate are fixedly connected with a baffle, two ends of a sliding rod are fixedly connected with the inner side of the baffle, the periphery of the sliding rod is in sliding connection with the inner part of a movable table, one end of a pneumatic telescopic rod is fixedly connected with the inner side of the baffle, the other end of the pneumatic telescopic rod is fixedly inserted into the movable table, a first air pipe is arranged on one side of the baffle and communicated with the pneumatic telescopic rod, a limiting sliding rail is fixedly installed on one side of the baffle and is in sliding connection with a limiting sliding block, the top end of the limiting sliding block is fixedly connected with the movable table, a mounting hole is formed in the movable table, the three groups of the sliding mechanisms are respectively a first sliding mechanism, a second sliding mechanism and a third sliding mechanism, a bottom plate on the first sliding mechanism is fixedly connected with the upper surface of a workbench, a bottom plate in the second sliding mechanism is fixedly connected with the upper surface of a movable table in the first sliding mechanism, a side plate on one side in the third sliding mechanism is fixedly connected with the upper surface of the movable table in the second sliding mechanism, the movable table in the third sliding mechanism is fixedly connected with one side of a turnover mechanism, and the other side of the turnover mechanism is fixedly connected with a sheet taking mechanism.
Preferably, tilting mechanism, including the organism, organism fixed mounting is on the movable table in the third glide machanism, inboard diapire fixed mounting motor of organism, motor output shaft fixed connection driving gear axle center, driving gear meshing connection driven gear, driven gear axle center fixed mounting is in pivot week side, the insertion sleeve of connecting is rotated to pivot one end, sleeve bottom fixed connection organism lateral wall, pivot other end fixed connection revolving stage one end, revolving stage week side is rotated the passing another lateral wall of organism of connecting, revolving stage other end fixed connection fixing base, fixing base fixed mounting gets piece mechanism.
Preferably, the sheet taking mechanism comprises a base, the base is fixedly mounted on the fixing base, a second air pipe is arranged on one side of the base, a plurality of clamping plates are fixedly mounted on the base, two adsorption holes are formed in each clamping plate, and the second air pipes are communicated with the adsorption holes.
Preferably, the first sliding mechanism and the second sliding mechanism are perpendicular to each other, and the third sliding mechanism is perpendicular to the second sliding mechanism.
Preferably, a limiting ring is fixedly mounted on the periphery of the rotary table, and the limiting ring is in clearance fit with the side wall of the machine body in a rotating connection mode.
Preferably, two branch supporting plates extending forwards are arranged on the front side of the clamping plate.
Compared with the prior art, the beneficial effects of the utility model are that: adsorb the silicon chip through the adsorption hole on the cardboard and snatch, avoid manual snatching, reduce rubbing that takes place to the silicon chip and hinder, can advance 180 of upset to the silicon chip after snatching through tilting mechanism and collect together, through three glide machanisms of group, can carry out horizontal, vertical and vertical direction's removal, can get a mechanism to tilting mechanism in three orientation and fix a position, use in a flexible way, be favorable to improving work efficiency.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of a middle sliding mechanism of the present invention;
FIG. 3 is a schematic structural view of the turnover mechanism of the present invention;
fig. 4 is a schematic structural view of the middle sheet taking mechanism of the present invention.
In the figure: 1. a work table; 2. a sliding mechanism; 3. a first sliding mechanism; 4. a second sliding mechanism; 5. a third sliding mechanism; 6. a fixed mount; 7. a scraping machine body; 8. a turnover mechanism; 9. a sheet taking mechanism; 21. a baffle plate; 22. a limiting slide block; 23. a limiting slide rail; 24. a pneumatic telescopic rod; 25. a slide bar; 26. a movable table; 261. mounting holes; 27. a first air pipe; 28. a base plate; 81. a body; 82. a sleeve; 83. an electric motor; 84. a driving gear; 85. a rotating shaft; 86. a driven gear; 87. a turntable; 88. a limiting ring; 89. a fixed seat; 91. a base; 92. a second air pipe; 93. clamping a plate; 94. and (4) adsorbing the pores.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a piece transferring and gathering device of a piece pouring machine comprises a fixing frame 6, a piece gathering machine body 7 and a workbench 1, wherein the piece gathering machine body 7 is fixedly installed inside the fixing frame 6, the workbench 1 is fixedly installed on the upper surface of the bottom wall of the fixing frame 6, a sliding mechanism 2 is fixedly installed on the upper surface of the workbench 1, the sliding mechanism 2 comprises a bottom plate 28, two ends of the upper surface of the bottom plate 28 are fixedly connected with a baffle plate 21, and two ends of a sliding rod 25 are fixedly connected to the inner side of the baffle plate 21, so that the function of fixedly supporting the sliding rod 25 can be achieved;
the periphery of the sliding rod 25 is connected in a sliding mode and penetrates through the interior of the movable table 26, the movable table 26 can slide along the sliding rod 25, the stability of the movable table 26 during sliding is enhanced, one end of a pneumatic telescopic rod 24 is fixedly connected to the inner side of a baffle 21, the other end of the pneumatic telescopic rod 24 is fixedly inserted into the interior of the movable table 26, a first air pipe 27 is arranged on one side of the baffle 21, the first air pipe 27 is communicated with the pneumatic telescopic rod 24, the pneumatic telescopic rod 24 can be controlled to stretch and retract through the first air pipe 27 by utilizing the prior art such as an air cylinder, a limiting sliding rail 23 is fixedly installed on one side of the baffle 21, the limiting sliding rail 23 is connected with a limiting sliding block 22 in a sliding mode, and the limiting sliding block 22 can slide on the limiting sliding rail 23, so that the stability of the movable table 26 during sliding is enhanced;
the top end of the limiting slide block 22 is fixedly connected with a movable table 26, the movable table 26 is provided with a mounting hole 261 through which a mechanism connected with the movable table 26 can be conveniently connected, the sliding mechanisms 2 comprise three groups, namely a first sliding mechanism 3, a second sliding mechanism 4 and a third sliding mechanism 5, a bottom plate 28 on the first sliding mechanism 3 is fixedly connected with the upper surface of the workbench 1 and can play a role in fixing the first sliding mechanism 3, the bottom plate 28 in the second sliding mechanism 4 is fixedly connected with the upper surface of the movable table 26 in the first sliding mechanism 3, the movable table 26 in the first sliding mechanism 3 can drive the second sliding mechanism 4 to move when moving, a side plate on one side in the third sliding mechanism 5 is fixedly connected with the upper surface of the movable table 26 in the second sliding mechanism 4, the movable table 26 in the second sliding mechanism 4 can drive the third sliding mechanism 5 to move when moving, the movable table 26 in the third sliding mechanism 5 is fixedly connected with one side of the turnover mechanism 8, the other side of the turnover mechanism 8 is fixedly connected with a sheet taking mechanism 9;
the turnover mechanism 8 comprises a machine body 81, the machine body 81 is fixedly arranged on a movable table 26 in a third sliding mechanism 5, a motor 83 is fixedly arranged on the bottom wall of the inner side of the machine body 81, an output shaft of the motor 83 is fixedly connected with the axle center of a driving gear 84, the motor 83 can drive the driving gear 84 to rotate, the driving gear 84 is meshed with a driven gear 86, the driving gear 84 can drive the driven gear 86 to rotate, the axle center of the driven gear 86 is fixedly arranged on the periphery of a rotating shaft 85 so as to drive the rotating shaft 85 and a rotary table 87 to rotate, the sheet taking mechanism 9 is turned over, an inserting sleeve 82 is rotatably connected with one end of the rotating shaft 85, the bottom end of the sleeve 82 is fixedly connected with the side wall of the machine body 81, the sleeve 82 can enhance the stability when the rotating shaft 85 rotates, the other end of the rotating shaft 85 is fixedly connected with one end of the rotary table 87, the periphery of the rotary table 87 rotatably passes through the other side wall of the machine body 81, and the other end of the rotary table 87 is fixedly connected with a fixed seat 89, the fixed seat 89 is fixedly provided with a sheet taking mechanism 9;
the sheet taking mechanism 9 comprises a base 91, the base 91 is fixedly arranged on a fixed seat 89, a second air pipe 92 is arranged on one side of the base 91, a plurality of clamping plates 93 are fixedly arranged on the base 91, the clamping plates 93 can support the silicon sheet, two adsorption holes 94 are formed in the clamping plates 93, the second air pipe 92 is communicated with the adsorption holes 94, air is sucked from the second air pipe 92 through an air pump and the like in the prior art to generate negative pressure suction force, and the silicon sheet can be sucked and grabbed through the adsorption holes 94;
the first sliding mechanism 3 and the second sliding mechanism 4 are vertical to each other and can perform transverse and longitudinal displacement, and the third sliding mechanism 5 is vertical to the second sliding mechanism 4 and can perform vertical height position and can perform positioning in three directions;
a limiting ring 88 is fixedly arranged on the peripheral side of the rotary table 87, and the limiting ring 88 is in clearance fit with the side wall of the machine body 81 in a rotating manner, so that the rotary table 87 is prevented from falling out of the side wall of the machine body 1, and the stability of the rotary table 87 during rotation is enhanced;
the cardboard 93 front side is provided with two branch extension boards that extend forward, can play the supporting role to silicon wafer in snatching.
The working principle is as follows: when the utility model is used, air is sucked from the second air pipe 92 through the prior art such as an air pump to generate negative pressure suction force, the silicon wafer can be sucked and grabbed through the suction holes 94 on the clamping plate 93, the motor 83 drives the driving gear 84 to rotate, the driving gear 84 drives the driven gear 86 to rotate, further drives the rotating shaft 85 and the rotary table 87 to rotate, the wafer taking mechanism 9 is overturned,
carry out concertina movement through control pneumatic telescopic rod 24, drive the activity platform 26 and slide, spacing slider 22 can slide on spacing slide rail 23, is favorable to strengthening the stability when activity platform 26 slides, through three glide machanisms 2 of group, can carry out horizontal, vertical and vertical direction's removal, can get piece mechanism 9 and fix a position turnover mechanism 8 in three directions, uses in a flexible way.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a piece equipment is scraped in transfer of chip inverter, includes mount (6), scraps device body (7) and workstation (1), its characterized in that: the inside fixed mounting of mount (6) is saved and is sent up a grain machine body (7), fixed surface installs workstation (1) on mount (6) diapire, fixed surface installs glide machanism (2) on workstation (1), glide machanism (2) include bottom plate (28), bottom plate (28) upper surface both ends fixed connection baffle (21), baffle (21) inboard fixed connection slide bar (25) both ends, slide bar (25) week side sliding connection passes inside movable table (26), baffle (21) inboard fixed connection pneumatic telescopic link (24) one end, pneumatic telescopic link (24) other end fixed insertion is inside movable table (26), baffle (21) one side sets up first trachea (27), first trachea (27) intercommunication pneumatic telescopic link (24), baffle (21) one side fixed mounting has spacing slide rail (23), the limiting slide rail (23) is connected with a limiting slide block (22) in a sliding manner, the top end of the limiting slide block (22) is fixedly connected with a movable table (26), the movable table (26) is provided with a mounting hole (261), the sliding mechanisms (2) are three groups, namely a first sliding mechanism (3), a second sliding mechanism (4) and a third sliding mechanism (5), a bottom plate (28) on the first sliding mechanism (3) is fixedly connected with the upper surface of the workbench (1), a bottom plate (28) in the second sliding mechanism (4) is fixedly connected with the upper surface of the movable table (26) in the first sliding mechanism (3), a side plate in the third sliding mechanism (5) is fixedly connected with the upper surface of the movable table (26) in the second sliding mechanism (4), and the movable table (26) in the third sliding mechanism (5) is fixedly connected with one side of the turnover mechanism (8), the other side of the turnover mechanism (8) is fixedly connected with a sheet taking mechanism (9).
2. The chip scraping transfer device of the chip chipper as claimed in claim 1, wherein: the turnover mechanism (8) comprises a machine body (81), the machine body (81) is fixedly arranged on a movable table (26) in a third sliding mechanism (5), the bottom wall of the inner side of the machine body (81) is fixedly provided with an electric motor (83), an output shaft of the electric motor (83) is fixedly connected with the axle center of a driving gear (84), the driving gear (84) is engaged with a driven gear (86), the axis of the driven gear (86) is fixedly arranged on the periphery of the rotating shaft (85), one end of the rotating shaft (85) is rotatably connected with an inserting sleeve (82), the bottom end of the sleeve (82) is fixedly connected with the side wall of the machine body (81), the other end of the rotating shaft (85) is fixedly connected with one end of a rotating table (87), the periphery of the rotating table (87) is rotatably connected and penetrates through the other side wall of the machine body (81), the other end of the rotary table (87) is fixedly connected with a fixed seat (89), and the fixed seat (89) is fixedly provided with a sheet taking mechanism (9).
3. The chip scraping transfer device of the chip chipper as claimed in claim 1, wherein: get piece mechanism (9) and include base (91), base (91) fixed mounting is on fixing base (89), base (91) one side is provided with second trachea (92), base (91) fixed mounting has a plurality of cardboard (93), be provided with two on cardboard (93) and adsorb hole (94), and second trachea (92) intercommunication adsorbs hole (94).
4. The chip scraping transfer device of the chip chipper as claimed in claim 1, wherein: the first sliding mechanism (3) and the second sliding mechanism (4) are perpendicular to each other, and the third sliding mechanism (5) is perpendicular to the second sliding mechanism (4).
5. The chip scraping transfer device of the chip chipper as claimed in claim 2, wherein: the periphery of the turntable (87) is fixedly provided with a limiting ring (88), and the limiting ring (88) is in clearance fit with the side wall of the rotating connection body (81).
6. The chip scraping transfer device of the chip chipper as claimed in claim 3, wherein: two branch supporting plates extending forwards are arranged on the front side of the clamping plate (93).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022943849.6U CN214428615U (en) | 2020-12-10 | 2020-12-10 | Piece equipment is scraped in transfer of chip inverter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022943849.6U CN214428615U (en) | 2020-12-10 | 2020-12-10 | Piece equipment is scraped in transfer of chip inverter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214428615U true CN214428615U (en) | 2021-10-19 |
Family
ID=78050876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022943849.6U Active CN214428615U (en) | 2020-12-10 | 2020-12-10 | Piece equipment is scraped in transfer of chip inverter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214428615U (en) |
-
2020
- 2020-12-10 CN CN202022943849.6U patent/CN214428615U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China |