CN214422744U - Side manipulator for conveying workpiece hanging plate of large vacuum coating machine - Google Patents
Side manipulator for conveying workpiece hanging plate of large vacuum coating machine Download PDFInfo
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- CN214422744U CN214422744U CN202022607247.3U CN202022607247U CN214422744U CN 214422744 U CN214422744 U CN 214422744U CN 202022607247 U CN202022607247 U CN 202022607247U CN 214422744 U CN214422744 U CN 214422744U
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Abstract
A side manipulator for conveying a workpiece hanging plate of a large-scale vacuum coating machine is arranged in a feeding cabin or a discharging cabin, the hanging plate of the feeding cabin is conveyed to a conveying cabin or a finished product hanging plate of the conveying cabin is conveyed to the discharging cabin, and the side manipulator consists of a power set, a linear module and a clamping assembly; the clamping assembly is vertically arranged and is of a three-layer structure, the clamping assembly comprises a movable mounting plate in the middle, a bottom fixing plate at the bottom layer and a sliding claw part at the forefront, the movable mounting plate is slidably mounted on a transverse guide rail, the guide rail is transversely slidably mounted on the bottom fixing plate, the movable mounting plate is provided with a pushing block, the pushing block is positioned between limiting blocks at two sides of the transverse guide rail and forms a butting structure with the limiting blocks, and the pushing block is positioned at one side of the movable mounting plate, which is far away from the transport cabin; the power set is connected with the linear module, and the linear module is connected with the movable mounting plate. The utility model discloses manipulator control accuracy is high, can accomplish the conveying task of large-scale link plate in the large-scale many cabins vacuum coating machine steadily, reliably.
Description
Technical Field
The utility model relates to a manipulator for completing the automatic transmission task of a large-scale workpiece hanging plate in a large-scale vacuum coating machine, in particular to a large-scale vacuum coating machine with a plurality of cabins.
Background
The technical development trend of vacuum coating equipment is to improve the productivity and efficiency and to improve the quality and stability of the coated product. In order to improve the productivity and efficiency, the equipment is designed to be larger and larger, the loading capacity is larger and larger, and a single workpiece hanger (a plurality of workpieces are hung on the hanger to finish film coating together) is larger and heavier; in order to improve the quality and stability of the film, besides introducing a new coating technology and a new coating process, one of the most basic requirements is to control the stability of the coating atmosphere in the furnace to be unchanged, that is, to ensure that the residual gas in each furnace is reduced to the minimum and the consistency is kept unchanged. Therefore, the most effective means is that the coating of each furnace is carried out in vacuum without breaking vacuum when loading and unloading workpieces, so that each furnace is carried out in the same vacuum environment, the atmosphere in the furnace is not polluted by atmosphere due to vacuum breaking, the consistency of residual atmosphere between the furnaces can be maintained, and the quality and consistency of the film layer can be greatly improved. Therefore, in recent years, vacuum coating equipment has been developed in which the vacuum coating equipment is increased in size and has been multi-chambered.
When the multi-chamber is configured, the coating process chamber is always kept in a vacuum state and is connected with the feeding chamber and the discharging chamber through vacuum valves, workpieces are fed into the process chamber (the coating process chamber is abbreviated as the coating process chamber) from the feeding chamber in the vacuum state, and after the coating process is finished, the workpieces are moved out of the discharging chamber in the vacuum state. The large-scale of the equipment leads the quantity of the hangers for hanging the workpieces to be large, the volume of the hangers to be large, and the weight of the hangers for hanging the workpieces is heavy. These hangers, which transfer the pod under vacuum, must be done by a robot.
In order to adapt to the development trend of the current vacuum coating equipment, the development of a vacuum manipulator is urgent. Because the coating workpiece materials, sizes and shapes of the vacuum coating machines are different, the sizes, shapes and quantity of the used workpiece hangers are also different, in addition, the preparation cabin (mainly referring to the feeding cabin and the discharging cabin), the transition cabin (used for communicating the feeding cabin and the discharging cabin with the process cabin) and the process cabin of the vacuum coating machines with different models are also different in design, the transmission modes of the hangers adapted to the preparation cabin, the feeding cabin and the discharging cabin and the process cabin are also different, the actions and the functions of the mechanical arm are different, and the design of the mechanical arm is five-to-eight. For large vacuum coating equipment which can hang twenty large-size and heavy rectangular flat plate type hangers (the hanger has the size of 300mmx1500mmx35mm and weighs about 40kg when being fully hung with workpieces), no mechanical arm capable of completing the task of automatically conveying the workpiece hanging plates exists at present.
SUMMERY OF THE UTILITY MODEL
The invention aims at providing a side manipulator for conveying a large hanging plate in a large multi-cabin vacuum coating machine, which is used for conveying the hanging plate of a feeding cabin to a conveying cabin or conveying a finished hanging plate of the conveying cabin to a discharging cabin, namely the manipulator needs to convey across the cabin.
The invention purpose of the utility model is realized by the following technical scheme: a side manipulator for conveying a workpiece hanging plate of a large-scale vacuum coating machine is arranged in a feeding cabin or a discharging cabin, is used for conveying the hanging plate of the feeding cabin to a conveying cabin or conveying a finished product hanging plate of the conveying cabin to the discharging cabin, and consists of a power group, a linear module and a clamping assembly;
the clamping assembly is vertically arranged and is of a three-layer structure, and comprises a middle moving mounting plate, a bottom fixing plate at the bottom layer and a foremost sliding claw part, the moving mounting plate is slidably mounted on a transverse guide rail, the guide rail is transversely slidably mounted on the bottom fixing plate, namely, the moving mounting plate is slidably mounted on the bottom fixing plate through a double guide rail, the moving mounting plate is provided with a pushing block, the pushing block is positioned between limiting blocks at two sides of the transverse guide rail and forms a butting structure with the limiting blocks, and the pushing block is positioned at one side of the moving mounting plate, which is far away from the transport cabin;
the power set is connected with the linear module, the linear module is connected with the movable mounting plate, the power set provides power, and the movable mounting plate is driven to do linear reciprocating motion through the linear module;
the sliding claw part comprises two sliding claws which are respectively arranged at the left side and the right side of the movable mounting plate, and the two sliding claws move in opposite directions or in the back direction under the action of the cylinder to realize the grabbing or releasing of the hanging plate.
The linear module drives the movable mounting plate to extend forwards, after the movable mounting plate reaches a certain degree, the pushing block on the linear module abuts against the limiting block on one side of the transverse guide rail, the transverse guide rail and the movable mounting plate are pushed to extend forwards together until the movable mounting plate reaches the corresponding station of the conveying cabin, after the task is completed, the linear module drives the movable mounting plate to retreat, after the movable mounting plate retreats to a certain degree, the pushing block on the linear module abuts against the limiting block on the other side of the transverse guide rail, and the transverse guide rail and the movable mounting plate are pushed to retreat from the conveying cabin together and return to the initial station of the feeding cabin or the discharging cabin. Therefore, the utility model discloses can accomplish the cabin conveying of striding of link plate smoothly.
The driving structure of the two sliding claws is as follows:
the two sliding claws are slidably mounted on the movable mounting plate through transverse guide rails, each sliding claw is provided with a vertical part opposite to the left and right and a connecting plate with the bottom extending to the opposite side, inclined grooves are formed in the connecting plates, the inclined grooves in the two sliding claws form a splayed shape or an inverted splayed shape (the splayed shape in the later specific embodiment), an air cylinder is fixed in the middle of the movable mounting plate, a driving plate is fixedly connected to an output shaft of the air cylinder, and a group of cam bearings are symmetrically arranged on two sides of a middle shaft of the driving plate and are sleeved in the inclined grooves of the sliding claws on the corresponding sides.
The utility model discloses the switching of side manipulator between different stations has adopted the precision height, has moved steady sharp module and has come the transmission, in the aspect of snatching the link plate, utilizes the cooperation of cam bearing and chute ingeniously, has converted the vertical motion of cylinder into the horizontal open and shut motion of two sliding jaws, has realized only through two sliding jaws of a power component simultaneous control.
The sliding claw part also comprises a clamping block, the cross section of the clamping block is U-shaped, and the clamping block is arranged on the opposite side of the vertical parts of the two sliding claws.
Has the advantages that:
the utility model discloses manipulator control accuracy is high, can accomplish the conveying task of large-scale link plate (length can reach more than a meter, hangs the work piece after, and weight can reach dozens of jin) in the large-scale many cabins vacuum coating machine steadily, reliably.
Drawings
FIG. 1 is a layout diagram of a large-scale multi-chamber vacuum coater in this embodiment;
fig. 2a-2E are schematic diagrams related to the top and bottom manipulators, wherein fig. 2a is a side elevation sectional view of the feeding cabin, fig. 2b is an enlarged view of the part F of fig. 2a, fig. 2c is an enlarged view of the part E of fig. 2a, fig. 2d is a partial structural diagram first of the top and bottom manipulators, which mainly reflects the assembly structure of the motion component support and the clamping block mounting plate part, and fig. 2E is a partial structural diagram second of the top and bottom manipulators, which mainly reflects the assembly structure of the inclined slide plate part;
fig. 3a-3b are related schematic views of a feed bay side robot, wherein fig. 3a is a perspective view of the side robot and fig. 3b is a left side view;
figures 4a-4c are related schematic views of a pick and place peg board robot, wherein figure 4a is a side elevation view of the pick and place peg board robot, figure 4b is a perspective view of the pick and place peg board robot, and figure 4c is an elevation view of the pick and place peg board robot (upper and lower jaw plates omitted).
Detailed Description
The structure and operation of the various manipulators for conveying the workpiece hanging plate in the vacuum environment of the present invention will be described in detail below by taking a large-scale multi-cabin vacuum coating machine as an example.
First, equipment cabin layout and workpiece hanging plate cabin-rotating process
1.1 cabin layout: referring to fig. 1, the core area of the coating equipment is a cylindrical process chamber, and all the workpiece hanging plates are erected for a circle close to the peripheral wall of the cylindrical chamber to perform coating operation. The technological cabin is connected with a rectangular transportation cabin which is opposite to the valve opening through a flap valve, the left side of the transportation cabin is a feeding cabin which is parallel to the transportation cabin and is provided with a communicating opening, and the right side of the transportation cabin and the feeding cabin are symmetrically provided with a discharging cabin which is parallel to the transportation cabin and is provided with a communicating opening.
1.2 workpiece hanging plate cabin-turning process
Each cabin is in an empty state, a mechanical arm A outside the furnace starts to work, the workpiece hanging plate is conveyed into the feeding cabin, when the hanging plate is filled in the feeding cabin as shown in figure 1, a, stopping working of a mechanical arm, closing a feeding cabin door, vacuumizing to a preset vacuum degree, opening a process cabin valve to start feeding from the feeding cabin to a transport cabin, feeding to the process cabin until the process cabin is full of materials, closing the process cabin valve, starting coating operation, meanwhile, the cabin door of the feeding cabin is opened, the mechanical arm A outside the furnace starts to work again, the workpiece hanging plate is sent into the feeding cabin, after the feeding cabin is filled with materials, and the mechanical arm A stops working again, the feeding cabin door is closed, the vacuum pumping is carried out to the preset vacuum degree (the discharging cabin door is closed), the process cabin valve is opened, the feeding cabin, the discharging cabin and the mechanical arm of the transport cabin work together, the materials are taken from the process cabin and are conveyed to the discharging cabin, and the hanging plate of the feeding cabin is moved to the process cabin for feeding materials.
Second, each cabin manipulator and change cabin function thereof
(1) An external mechanical arm A: a special mechanical arm A is arranged outside a cabin door of the feeding cabin and is responsible for sending hanging plates with hung workpieces into a preparation groove pit of a hanging plate positioning seat plate of the feeding cabin one by one. And then returning to repeat the operation until the last hanging plate is fed.
(2) Link plate positioner: the hanging plate positioning device is used for arranging and positioning the hanging plates, and the hanging plates are stably placed on the hanging plate positioning device and wait for being transmitted to the next procedure. The hanging plate positioning component is divided into an upper part and a lower part. The lower part is a hanging plate positioning seat plate which is fixed on a fixing plate of the hanging plate positioning seat plate, and the hanging plate positioning seat plate is divided into a left part and a right part which extend to the tail end of the cabin from the cabin door. A space is left between the left and right positioning seat plates, and a top mechanical arm clamping block mechanism and a bottom mechanical arm clamping block mechanism which are described later are moved from the space. The upper end surface of the hanging plate positioning seat plate is provided with a plurality of hanging plate groove pits K, as shown in figure 2a, the bottom ends of the hanging plates are inserted into the hanging plate positioning seat plate for positioning. The position close to the cabin door is a prepared positioning groove pit, then a first positioning groove pit is arranged, and the prepared positioning groove pit and the first positioning groove pit are sequentially arranged backwards to the tail of the cabin to form a final positioning groove pit. The bulkhead on the left and right sides of the upper end of the hanging plate is provided with a hanging plate limiting device, so that the hanging plate is prevented from toppling forwards, backwards, leftwards and rightwards.
(3) Feeding a cabin top and bottom mechanical arm: the feeding cabin is provided with a top manipulator and a bottom manipulator from a cabin door to a cabin tail end, the top manipulator and the bottom manipulator are in symmetrical structures and are in cooperative action up and down, and the top manipulator and the bottom manipulator are responsible for sending a hanging plate on a ready-to-position slot pit close to the cabin door to a specified position of the positioning slot pit; the top and bottom mechanical arms respectively clamp the hanging plate from the top and bottom ends, finally lift the hanging plate to be higher than the positioning seat plate, then move horizontally back and forth to convey the hanging plate to the designated pit position of the tail end direction, then the top and bottom mechanical arms descend to insert the hanging plate into the pit, the clamping blocks are loosened, and the cabin door end returns to prepare for next operation. At the moment, the A mechanical arm sends a new hanging plate to the prepared slot pit, and the top mechanical arm and the bottom mechanical arm repeat the operation until the hanging plate is filled with all the slot pits on the positioning seat plate.
(3) Feeding cabin side manipulator: and the tail end of the feeding cabin is provided with a side manipulator which is responsible for transferring the hanging plate from the feeding cabin to the right side transportation cabin. The side manipulator opens the left and right clamping claws in advance, the top and bottom manipulators arrange the feeding cabin on the hanging plate which is most close to the tail end positioning groove pit, the feeding cabin is clamped and lifted to a position higher than the upper end surface of the positioning seat groove pit from top to bottom, then the feeding cabin is transferred to the tail end direction, the feeding cabin is always sent to the left and right clamping claws of the side manipulator, the left and right clamping claws are folded to clasp the hanging plate, and the top and bottom manipulators clamp the upper and lower blocks to be loosened and integrally retreat. The side mechanical handle hanging plate moves right and transversely passes through a communication port of the transportation cabin to enter the transportation cabin.
(4) The conveying cabin sends and gets the link plate manipulator: when the hanging plate is conveyed to the front connection position of the conveying cabin plate conveying and taking manipulator, the feeding cabin side mechanical handle stops, the plate conveying and taking manipulator moves forwards, the upper clamping block and the lower clamping block of the plate conveying and taking manipulator reach the upper plate end and the lower plate end of the hanging plate, the upper clamping block and the lower clamping block are closed to clamp the hanging plate, and the side manipulator loosens the left clamping claw hand and the right clamping claw hand and returns to the feeding cabin. At the moment, a flap valve communicated with the process cabin and the transport cabin is opened, the plate-feeding and hanging manipulator moves forwards to feed the hanging plate into the process cabin, the corresponding station of the hanging plate in the process cabin is aligned, the plate-feeding and hanging manipulator loosens the clamping block after the hanging plate is firmly hung on the workpiece rotating frame, and then the process cabin is withdrawn. And when the hanging plate which is coated is rotated to a position right facing the cabin door, the rotating mechanism stops rotating, the hanging plate sending and taking manipulator enters the process cabin again, the hanging plate is close to the coated hanging plate, the upper clamping block and the lower clamping block act to clamp the hanging plate, and after the hanging plate is lifted to be separated from the workpiece rotating frame, the hanging plate is clamped to exit the process cabin and returns to the delivery position of the transport cabin to be stopped.
(5) Discharge chamber side manipulator: and the tail end of the discharging cabin is provided with a side manipulator which is responsible for transferring the coated hanging plate from the left side conveying cabin to the right side discharging cabin. When the coated hanging plate is conveyed to a delivery and taking hanging plate mechanical handle of a conveying cabin, the right side discharging cabin side manipulator moves towards the conveying cabin and stops when the coated hanging plate reaches the delivery position, the left clamping claw and the right clamping claw of the manipulator are opened before the coated hanging plate is conveyed to the side manipulator, the hanging plate clamped by the delivery and taking hanging plate mechanical handle is slightly pushed forwards to the side manipulator, the left clamping claw and the right clamping claw of the latter clamp the hanging plate from the left side and the right side of the hanging plate, then the delivery and taking hanging plate manipulator loosens the upper clamping block and the lower clamping block and moves backwards, and the side manipulator clamps the coated hanging plate and moves rightwards to return to the original position of the discharging cabin.
(6) A top and bottom manipulator of the discharging cabin: the discharging cabin is provided with a top manipulator and a bottom manipulator which are configured the same as the feeding cabin and can move from the cabin door to the tail end of the cabin, the top manipulator and the bottom manipulator are in symmetrical structures and cooperate up and down to send the coated hanging plate transferred from the left transport cabin to the appointed pit of the positioning seat device. The top and bottom mechanical arms firstly translate to the front of the cabin tail side mechanical arm, the top and bottom clamping blocks at the two ends of the top and bottom mechanical arms act to clamp the hanging plate, then the side mechanical arms loosen the left and right clamping claws, the top and bottom mechanical arms clamp the coated hanging plate and translate and retreat to the appointed positioning seat pit, the hanging plate is descended and placed into the positioning groove, and the top and bottom clamping blocks are loosened. And repeating the operation, and transferring the hanging plates one by one from the side manipulator until the plated hanging plates are fully arranged in all the positioning seat groove pits.
(7) Mechanical arm outside the furnace B: and a special mechanical arm B is arranged outside the door of the discharging cabin and is responsible for taking out the plated hanging plate positioned at the positioning seat preparation pit of the discharging cabin and transferring the plate to a workbench outside the furnace. And after the discharge cabin is full of the coated hanging plates, the discharge cabin door is opened by breaking vacuum. The top manipulator and the bottom manipulator sequentially transfer the coated hanging plates to a preparation groove pit close to the cabin door backward block by block from the first groove position of the positioning seat, and the mechanical arm B acts to take out the coated hanging plates block by block from the discharge cabin; the top and bottom manipulators and the manipulator B act cooperatively until the last coated hanging plate is taken out.
Structure and movement of each manipulator
3.1 furnace external mechanical arm A: and the structure of the purchased part is omitted.
3.2 Top and bottom manipulators of feeding cabin
The structure of the top and bottom manipulators of the feed bin is shown in figures 2a-2 c. FIG. 2a is a side elevation view of the feeding chamber showing the process of the robot arm A in cooperation with the top and bottom manipulators to feed the hanging plate into the feeding chamber. The top manipulator is arranged at the top of the cabin, the bottom manipulator is arranged at the bottom of the cabin, and the top manipulator and the bottom manipulator work in a matching way. The two groups of mechanical arms are symmetrical structures and respectively consist of two sets of transmission units. The conveying unit of the top and bottom manipulators of the feeding cabin mainly comprises three components: the device comprises a power assembly 1S, a linear module 2S and a moving assembly 3S. In the figure, 4 is a hanging plate which is positioned outside the furnace.
Fig. 2b is an enlarged view of the position F of fig. 2a, showing the structure of the power assembly 1S, which includes a motor 1-1, a coupling 1-2, a sealing magnetic fluid 1-3, a motor fixing plate 1-4, a motor support rod 1-5, and a coupling (2) 1-6. The motor 1-1 is fixed on the motor fixing plate 1-4, the motor fixing plate 1-4 is fixed on the left end of the motor supporting rod 1-5, the motor supporting rod 1-5 is provided with four supporting rod bodies which are uniformly and fixedly connected on the outer wall of the cabin. A motor shaft at the right end of the motor 1-1 is connected with a left end shaft of the sealed magnetic fluid 1-3 through a coupler 1-2, the sealed magnetic fluid 1-3 penetrates through a cabin wall, a right end shaft of the sealed magnetic fluid extends into the cabin, and the sealed magnetic fluid is connected with a left end transmission shaft of the linear module 2S through a coupler (2) 1-6. The motor 1-1 rotates forwards and backwards to drive the screw of the linear module 2S to rotate forwards and backwards, so that the nut sleeved on the screw drags the sliding block fixed on the nut to move forwards and backwards.
The linear module 2S is a standard product, belongs to a purchased part, is used for converting the positive and negative rotation motion of the motor 1-1 into the linear front and back translation motion of the sliding block, and has a omitted structure. The top and bottom two sets of linear modules 2S extend from the hatch opening to the hatch tail and are respectively arranged on the hatch top plate and the hatch bottom plate.
Moving assembly 3S: the clamping hanging plate is used for horizontally moving the clamping hanging plate to a specified positioning seat groove pit. The motion assembly is integrally and fixedly connected to the sliding block of the linear module to realize front and back translation. The motion assembly can drive the clamping block to ascend or descend by the structure of the motion assembly, so that the hanging plate is clamped or loosened.
FIG. 2c is an enlarged view of E of FIG. 2a, showing the structure of the motion assembly, mainly comprising 3-1 parts of a vacuum motor, 3-2 parts of a coupler (1), 3-3 parts of a lead screw bearing seat (1), 3-4 parts of a lead screw nut, 3-5 parts of a lead screw, 3-6 parts of a lead screw bearing seat (2), 3-7 parts of a linear bearing, 3-8 parts of a guide post, 3-9 parts of a clamping block, 3-10 parts of an inclined sliding plate, 3-11 parts of a swash plate sliding block, 3-12 parts of an inclined guide rail, 3-12 parts of a motion assembly bracket, 3-12-1 parts of a bracket bottom plate, 3-12-2 parts of a bracket upper plate, 3-12-3 parts of a motor fixing vertical plate, a bracket upper plate guide rail, 3-13 parts of a lead screw nut connecting plate, 3-14 parts of a lead screw nut connecting plate sliding block, 3-15 parts of a swash plate sliding block connecting plate, 3-16 parts of a clamping block mounting plate, Linear bearing bases 3-17, linear module sliding block connecting plates 3-18 and linear module sliding blocks 3-19.
The motion assembly support 3-12 is rectangular and carries the whole motion assembly 3, and as shown in fig. 2d, the motion assembly support comprises a support bottom plate 3-12-1, a support upper plate 3-12-2 and two side plates. The left side plate is positioned at the left end of the support bottom plate 3-12-1, the right side plate is positioned at the right side of the middle part of the support bottom plate 3-12-1, the support upper plate 3-12-2 spans the two side plates, and the width is obviously narrower than that of the support bottom plate 3-12-1, so that the installation positions of the linear bearings 3-7 are reserved at the two sides of the support bottom plate 3-12-1. The right end side plate of the support bottom plate 3-12-1 continues to move right to form an extension section of the support bottom plate, and a motor fixing vertical plate 3-12-3 is fixedly connected to the extension section. The side view of the motor fixing vertical plate 3-12-3 is triangular, and the motor fixing vertical plate is composed of a bottom plate, a side mounting plate and two triangular reinforcing plates which are vertically connected. The vacuum motor 3-1 is fixed on the right side of the motor fixing vertical plate 3-12-3, the bottom surface of the support bottom plate 3-12-1 is fixedly connected with the linear module sliding block connecting plate 3-18, the linear module sliding block 3-19 is fixedly connected with the linear module sliding block 3-19, and the linear module sliding block 3-19 moves to drive the whole moving assembly 3 to move horizontally left and right. Two side plates of the moving assembly bracket 3-12 are respectively fixed with a screw rod bearing seat (1)3-3 and a screw rod bearing seat (2)3-6, the two bearing seats support a screw rod 3-5, the screw rod 3-5 penetrates out of the right screw rod bearing seat (1)3-3 and is connected with a rotating shaft of a vacuum motor 3-1 through a coupling (1) 3-2. The screw rod 3-5 is sleeved with a screw rod nut 3-4, the rear side of the screw rod nut 3-4 is fixedly connected with a nut connecting plate 3-13 which is in an inverted L shape, the inverted L is bent towards the upper plate 3-12-2 of the bracket, the lower end surface of the bent part of the nut connecting plate 3-13 is fixedly connected with a slide block 3-14 which is buckled on the guide rail of the upper plate of the bracket on the upper end surface of the upper plate 3-12-2 of the bracket to be in sliding connection. As shown in fig. 2e, the back of the nut connecting plate 3-13 is fixedly connected with an inclined sliding plate 3-10, the back edge of the back is inlaid with an inclined guide rail, an inclined sliding block 3-11 is sleeved on the inclined guide rail of the inclined sliding plate 3-10 and is connected with the inclined sliding plate in a sliding manner, the back of the inclined sliding block 3-11 is fixedly connected with an inclined sliding block connecting plate 3-15, the upper end surface of the inclined sliding block connecting plate is fixedly connected with the lower end surface of a clamping block mounting plate 3-16, and a clamping block 3-9 is fixed in the middle of the upper end surface of the clamping block mounting plate 3-16. Linear bearings 3-7 are arranged on two sides of the inclined sliding block connecting plates 3-15, bases of the linear bearings 3-7 are fixed on the support base plates 3-12-1, the upper end faces of linear bearing shaft sleeves are fixedly connected to the lower end faces of the clamping block mounting plates 3-16, and linear bearing guide columns 3-8 penetrate through the linear bearing shaft sleeves and are connected in a sliding mode to play a role in lifting, guiding, stabilizing and balancing.
Movement of the moving assembly: the vacuum motor rotates immediately after receiving a signal, the screw rod is driven to rotate through the coupler, the motor drives the screw rod to rotate forwards or reversely, the rear side of the screw rod nut sleeved on the motor is fixedly connected with an inverted L-shaped nut connecting plate, the upper end of the plate is fixedly connected with a sliding block, the sliding block is buckled on a guide rail of an upper plate of the bracket, and the structure limits that the screw rod nut can only do linear translation movement leftwards or rightwards. The inclined sliding plate is fixedly connected behind the nut connecting plate and also translates along with the lead screw nut. The back of the inclined slide plate is provided with an inclined slide plate guide rail, an inclined slide block is matched with the inclined slide plate guide rail, the back of the inclined slide block is fixedly connected with an inclined slide block connecting plate, and the inclined slide block connecting plate is fixedly connected with a clamping block mounting plate, so that the inclined slide block is limited and cannot horizontally shift. When the screw rod nut moves leftwards to drive the inclined slide plate to move leftwards, the inclined slide block is forced to ascend from low to high along the inclined slide rail at the original horizontal coordinate position, namely, the clamping block mounting plate is lifted up through the inclined slide block connecting plate, so that the clamping block on the inclined slide block mounting plate is lifted up; meanwhile, the clamping block mounting plate also drives the linear bearings arranged on the two sides to move, namely, the linear bearing shaft sleeve embraces the linear bearing guide pillar to rise, so that the clamping block mounting plate is ensured to rise stably. When the lead screw nut moves rightwards to drive the inclined sliding plate to move rightwards, the inclined sliding block is forced to descend from high to low along the inclined guide rail, namely the clamping block mounting plate is lowered through the inclined sliding block connecting plate, and the clamping block on the inclined sliding block mounting plate descends; meanwhile, the clamping block mounting plate also drives the linear bearings arranged on the two sides to move, namely, the linear bearing shaft sleeve embraces the linear bearing guide pillar to descend, and the clamping block is ensured to descend stably.
The top manipulator and the bottom manipulator are symmetrically arranged in an upper set and a lower set and act cooperatively. A certain hanging plate is moved, the hanging plate is positioned on a corresponding groove pit of the left and right positioning base plates, the top manipulator and the bottom manipulator reach the groove pit of the hanging plate at the same time, the upper clamping block and the lower clamping block are aligned with the hanging plate, the clamping block of the bottom manipulator is lifted upwards, the clamping block of the top manipulator extends downwards, the hanging plate is clamped, the lifting stroke of the bottom manipulator is more (the linear guide rail of the bottom manipulator has larger inclination), the highest top surface higher than the groove position on the hanging plate is required, and the hanging plate is enabled to translate forwards and backwards.
After the top manipulator and the bottom manipulator clamp the hanging plate, the top manipulator and the bottom manipulator synchronously move to move the moving assembly and the hanging plate to move to the designated slot positions, the bottom clamping block of the moving assembly descends, the hanging plate is seated on the slot pits of the left positioning base plate and the right positioning base plate, the bottom clamping block continuously descends, the top clamping block ascends, and the hanging plate is completely loosened.
3.3 feed bin side manipulator
Fig. 3a-3b are schematic structural views of a side manipulator, fig. 3a is a perspective view of the side manipulator, and fig. 3b is a left side view. The side manipulators are symmetrically arranged on the side wall of the feeding cabin tail and the side wall of the discharging cabin tail respectively, are of symmetrical structures, and are matched with the top manipulator and the bottom manipulator or the plate-hanging-feeding and taking-out manipulator in the transport cabin to work. The side manipulator mainly comprises a power set, a linear module and a clamping assembly. The power set provides power to drive the linear module to realize the integral left-right movement of the clamping assembly.
The power set is 1Y, the linear module (outsourcing standard component) is 6, and the module fixing plate is 6-1 and is fixed on the rear wall of the cabin. The linear module 6 is fixed on the module fixing plate 6-1. The power set 1Y is fixedly connected with the shaft end of the linear module 6 to drive the slide block of the linear module 6 to move.
And 7, a clamping assembly which is of a three-layer structure. The bottommost layer is a bottom fixing plate part, the middle layer is a movable mounting plate part, and the foremost layer is a sliding claw part. All layers are connected in a sliding mode through a sliding block/guide rail assembly. The structure of the clamping assembly 7 is slightly complicated, because the sliding claw must clamp the hanging plate and transfer the hanging plate from the feeding cabin to the right front of the hanging plate delivering and taking manipulator of the transport cabin, the sliding claw depends on the matching of the sliding block/guide rail assembly to realize the movement, so the guide rail must extend to the right front of the hanging plate delivering and taking manipulator, and after the hanging plate is delivered, the guide rail must return to the original position so as not to prevent the hanging plate delivering and taking manipulator from clamping the hanging plate to move forward, and the guide rail at the position must be telescopic. Therefore, the utility model designs a section of fixed guide rail, and then a group of slide block/guide rail components are connected on the guide rail in a sliding way, and the latter becomes a telescopic guide rail.
The bottom fixed plate part mainly comprises a bottom fixed plate 7-3, an upper bottom fixed plate guide rail slide block 7-3-1, an upper bottom fixed plate guide rail 7-3-2, a lower bottom fixed plate guide rail 7-3-3, a lower bottom fixed plate guide rail slide block 7-3-4 and a limiting block 7-5.
The bottom fixing plate 7-3 is fixedly connected to the rear cabin wall of the cabin tail, the front plate surface of the bottom fixing plate 7-3 is close to the upper and lower plate end parts and is respectively fixed with an upper bottom fixing plate guide rail 7-3-2 and a lower bottom fixing plate guide rail 7-3-3, and the upper bottom fixing plate guide rail slide block 7-3-1 and the lower bottom fixing plate guide rail slide block 7-3-4 are respectively buckled with the upper bottom fixing plate guide rail 7-3-2 and the lower bottom fixing plate guide rail 7-3-3 to be in sliding connection. The limiting block 7-5 is fixed at the upper end part of the bottom fixing plate 7-3.
The movable mounting plate part of the middle layer mainly comprises a connecting plate (1)7-1, a connecting plate (2)7-2, a cylinder 7-4, an upper guide rail mounting plate 7-6 and an upper guide rail rear limiting block 7-6-1, a front limit block 7-6-2 of the upper guide rail, the device comprises an upper guide rail sliding block 7-7-1, a lower guide rail sliding block 7-7-3, an upper guide rail 7-7, a lower guide rail 7-7-2, a lower guide rail mounting plate 7-12, a lower guide rail rear limiting block (not shown), a lower guide rail front limiting block 7-12-2, a movable mounting plate 7-10, a pushing block 7-10-1, a cam bearing 7-13, a driving plate 7-15, an upper sliding claw guide rail 7-8-1 and a lower sliding claw guide rail 7-8-2.
The movable mounting plate structure is as follows: the connecting plate (1)7-1 is fixedly connected to the slide block of the linear module 6, the upper end of the connecting plate (2)7-2 is fixedly connected with the connecting plate (1)7-1, the lower end of the connecting plate is fixedly connected with the movable mounting plate 7-10, the upper end and the lower end of the back of the movable mounting plate 7-10 are respectively fixedly connected with the upper guide rail slide block 7-7-1 and the lower guide rail slide block 7-7-3 which are respectively buckled with the upper guide rail 7-7 and the lower guide rail 7-7-2 to form sliding connection, and the upper guide rail 7-7 and the lower guide rail 7-7-2 are respectively fixedly connected with the upper guide rail mounting plate 7-6 and the lower guide rail mounting plate 7-12. The head and the tail ends of the two guide rail mounting plates are provided with limiting blocks, namely an upper guide rail rear limiting block 7-6-1, an upper guide rail front limiting block 7-6-2, a lower guide rail rear limiting block and a lower guide rail front limiting block 7-12-2. The back of the upper guide rail mounting plate 7-6 and the back of the lower guide rail mounting plate 7-12 are respectively fixedly connected with the upper bottom fixed plate guide rail sliding block 7-3-1 and the lower bottom fixed plate guide rail sliding block 7-3-4. The movable mounting plate 7-10 can slide relative to the bottom fixing plate 7-3 by means of a double slider/guide assembly, and the upper and lower guide mounting plates 7-6 and 7-12 can be extended or retracted to the right. 7-10-1 is an upper pushing block which is fixed on the upper top edge of the movable mounting plate 7-10 and is positioned between the upper guide rail rear limiting block 7-6-1 and the upper guide rail front limiting block 7-6-2 of the upper guide rail mounting plate 7-6. Similarly, 7-10-2 is a lower push block which is fixed on the lower bottom edge of the movable mounting plate 7-10 and is positioned between the lower guide rail rear limiting block of the lower guide rail mounting plate 7-12 and the lower guide rail front limiting block 7-12-2. The middle upper part of the front plate surface of the movable mounting plate 7-10 is fixed with a cylinder 7-4 which moves up and down, the cylinder shaft is fixedly connected with a driving plate 7-16, and cam bearings 7-13 are arranged on two sides of the central shaft of the driving plate 7-16. An upper sliding claw guide rail 7-8-1 and a lower sliding claw guide rail 7-8-2 are transversely arranged on the front plate surface of the movable mounting plate 7-10.
The sliding claw part at the foremost layer mainly comprises sliding claws 7-8, a connecting plate (3)7-9, clamping blocks 7-11, upper sliding claw sliding blocks 7-8-3 and lower sliding claw sliding blocks 7-8-4.
The front of the movable mounting plate 7-10 is provided with a sliding melon 7-8 which is divided into two parts which are symmetrical left and right. The back surfaces of the left and right parts of the sliding claw 7-8 are fixedly connected with an upper sliding claw sliding block 7-8-3 and a lower sliding claw sliding block 7-8-4 at the positions of the transverse upper sliding claw guide rail 7-8-1 and the lower sliding claw guide rail 7-8-2 corresponding to the movable mounting plate 7-10, and the sliding blocks are buckled with the guide rails for sliding connection. And 7-11 are clamping blocks which are divided into four blocks which are symmetrical from left to right and are fixed at the opposite side ends of the top and the bottom of the sliding claw 7-8. The left and right sides of the sliding claw 7-8 are fixedly connected with a connecting plate (3)7-9 in opposite directions, inclined grooves which incline towards the direction of the middle shaft from top to bottom are dug in the sliding claw 7-8, and the cam bearings 7-13 fixed on the movable mounting plate 7-10 are sleeved in the inclined grooves and are in sliding connection.
Movement of the clamping assembly:
1) the hanging plate is clamped by sliding claws:
the manipulator at the feeding cabin side is at an initial position, and a sliding claw is firstly opened. When a signal is input into a cylinder shaft to push the driving plate to move downwards, cam bearings on two sides of the driving plate move downwards along with the inclined grooves facing the central shaft direction, namely, the sliding claws are pushed to be left and right outwards, the upper and lower sliding claw sliding blocks arranged behind the sliding claws are matched with upper and lower sliding claw guide rails arranged on the movable mounting plate to perform sliding guide, and the clamping blocks on the left and right sides are opened. The hanging plate is conveyed to the left and right clamping blocks of the side manipulator by a feeding cabin top and bottom mechanical handle, the side manipulator is lifted by a signal input cylinder shaft to pull a driving plate to lift, cam bearings on two sides of the driving plate move upwards along a chute in the direction away from a central shaft, namely, the left sliding claw and the right sliding claw are folded inwards, an upper sliding claw sliding block and a lower sliding claw sliding block which are arranged behind the sliding claws are matched with an upper sliding claw guide rail and a lower sliding claw guide rail which are arranged on a movable mounting plate to perform sliding guide, the left sliding claw and the right sliding claw are folded, and the clamping blocks on the left side and the right side clamp the hanging plate tightly. The upper and lower clamping blocks of the top and bottom manipulators are loosened and integrally retreated.
2) And (3) moving the side manipulator to the right:
the linear module is started to move rightwards, the movable mounting plate is driven to move rightwards through the connecting plate (1) and the connecting plate (2), the bottom fixing plate is fixed, the movable mounting plate and the carried sliding claw assembly slide rightwards together through the sliding block/guide rail assembly arranged on the back of the movable mounting plate and the sliding block/bottom fixing plate guide rail assembly which is a double sliding assembly. The movable mounting plate is dragged to move rightwards through the connecting plates (1) and (2), and the upper guide rail slide block and the lower guide rail slide block on the back surface of the movable mounting plate slide rightwards along the upper guide rail and the lower guide rail on the upper guide rail mounting plate and the lower guide rail mounting plate. Move on the mounting panel, the promotion piece on the lower plate end limit follows and moves to the right, when moving the mounting panel and moving to the right above-mentioned promotion piece and touching the right stopper on upper and lower guide rail mounting panel, connecting plate (1), (2) drag and move the mounting panel and continue moving to the right, then promote the piece and push upper and lower guide rail mounting panel and move to the right, the slider behind the upper and lower guide rail mounting panel moves to the right along the guide rail on the bottom fixed plate promptly, upper and lower guide rail mounting panel extends to the right, until the left stopper on the upper and lower guide rail mounting panel bumps the stopper on the fixed plate to the end, move to the right and stop. At the moment, the upper guide rail and the lower guide rail extend to the right to the limit, namely the movable mounting plate moves to the right to the limit. At the moment, the sliding claw reaches the preset hanging plate connection position of the transport cabin.
3) The hanging plate is loosened by the sliding claw:
after the sliding melon reaches a preset position, the plate feeding and taking manipulator moves forwards to clamp the plate. The sliding pawls of the side manipulators operate according to the opposite program: when a signal is input into a cylinder shaft to push the driving plate to move downwards, cam bearings on two sides of the driving plate move downwards along with the inclined groove facing to the central shaft direction, namely, the sliding claws are pushed outwards from left to right, an upper sliding claw sliding block and a lower sliding claw sliding block which are arranged on the back of the sliding claws are matched with an upper sliding claw guide rail and a lower sliding claw guide rail which are arranged on a movable mounting plate to perform sliding guide, and clamping blocks on the left side and the right side are loosened.
4) Moving the side manipulator to the left:
firstly, the plate feeding and taking manipulator clamping the plate is slightly retreated, and a left moving space of the side manipulator is made. The side manipulator power unit is driven reversely, the linear module is moved to the left, and the movable mounting plate is driven to move to the left through the connecting plate (1) and the connecting plate (2). The bottom fixed plate is fixed, and the movable mounting plate and the carried sliding claw assembly slide leftwards through a double sliding group of a sliding block/guide rail assembly arranged at the back of the movable mounting plate and a sliding block/guide rail assembly of the bottom fixed plate. At the beginning, the connecting plates (1) and (2) drag the movable mounting plate to move left, and the upper and lower guide rail sliding blocks on the back surface of the movable mounting plate slide left along the upper and lower guide rails on the upper and lower guide rail mounting plates extending rightwards. Move on the mounting panel, the promotion piece on the lower plate end edge follows and moves to the left, when the removal mounting panel moves to the left above-mentioned promotion piece and touches the left stopper on the upper and lower guide rail mounting panel, the connecting plate drags to move the mounting panel and continues to move to the left and then promotes the piece and push the upper and lower guide rail mounting panel and move to the left, namely the slider behind the upper and lower guide rail mounting panel moves to the left along the guide rail on the bottom fixed plate, the upper and lower guide rail mounting panel retracts to the left, until supreme, right stopper on the lower guide rail mounting panel touches the stopper on the bottom fixed plate, move to the left and stop. At the moment, the upper guide rail and the lower guide rail retract to the original positions leftwards, namely, the mounting plate moves leftwards and returns to the original positions.
3.4 transport cabin and send and get link plate manipulator
Figures 4a-4c are related schematic views of a pick and place peg robot, wherein figure 4a is a side elevation view, figure 4b is a perspective view, and figure 4c is a front view (upper and lower gripper plates omitted).
The plate feeding and taking manipulator is located in the transport cabin, the plate feeding and taking manipulator base is installed on the cabin bottom plate, the plate feeding and taking manipulator moves back and forth opposite to the technical cabin door and works together with the manipulators on the two sides, plates transferred from the feeding cabin are fed into the technical chamber, and the plates are taken from the technical cabin and transferred to the discharging cabin. The plate feeding and taking manipulator mainly comprises a power set, a linear module assembly and a melon clamping assembly.
1h is a power set (purchased part), and 8 is a linear module (purchased part). The rotating shaft of the power set 1h is connected with the left end shaft head of the linear module 8 to provide power for the linear module, and the linear module is driven to drive the clamping jaw assembly to integrally move back and forth.
The linear module assembly comprises a linear module 8, a module fixing plate (2)8-1, a guide rail fixing seat 8-2 and a guide rail 8-3. The module fixing plate (2)8-1 is fixed on the bottom plate of the transportation cabin, a linear module 8 is fixedly connected on the module fixing plate, and the right side of the module fixing plate is provided with a guide rail fixing seat 8-2 parallel to the linear module 8 and fixed on the other side of the module fixing plate (2) 8-1. The guide rail 8-3 is fixed on the guide rail fixing seat 8-2. The sliding table plane of the linear module 8 is provided with a movable sliding block.
The clamping jaw component is divided into a movable support and an upper jaw plate mechanism and a lower jaw plate mechanism:
the movable support comprises a vertical frame 9-1, a support 9-2, a vertical guide rail 9-5, a driving main plate 9-6, a cam bearing 9-13, an H cylinder 9-7, a transverse guide rail 9-8, a transverse sliding block 9-8-1 and a connecting group 9-9.
The vertical frame 9-1 is a right-angle trapezoid welded by plates, is composed of 6 surfaces and is provided with a plurality of hollowed-out parts, a bottom plate of the vertical frame is fixedly connected with a sliding block, and the bottom plate is buckled on the guide rail 8-3 and is in sliding connection. The lower side of the frame 9-1 is fixedly connected with a connecting group 9-9 close to the bottom end, and the connecting group is fixed on a sliding block of the linear module 8. The front of the stand 9-1 is fixedly connected with a bracket 9-2 extending forwards, the bracket 9-2 is also welded by plates, the side view is isosceles trapezoid, the front end face and the back face are parallel, the front end face is divided into an upper part and a lower part, each part is respectively connected with the back face through a middle face, the middle parts of the two middle faces are connected together by an H-shaped frame, two front end feet of the H-shaped frame form an outward flanging, the H-shaped frame and the outward flanging are arranged at the inner side of the divided part of the front end face when seen from the front end face of the bracket 9-2, and a plurality of faces of the bracket 9-2 are respectively provided with a hollow structure. An H cylinder 9-7 is arranged on a cross frame of the divided inner part, namely the H-shaped frame, in the middle of the front end face of the support 9-2, and the H cylinder 9-7 drags the driving main board 9-6 in front of the H cylinder 9-7 to move. The upper end and the lower end of the back plate surface of the driving main plate 9-6 are fixedly connected with transverse sliding blocks 9-8-1, the transverse sliding blocks 9-8-1 are buckled on two transverse guide rails 9-8 transversely fixed on a support 9-2 and are in sliding connection, and an output shaft which is specifically parallel to the H cylinder 9-7 is fixed on two outward flanges of the H-shaped frame. Cam bearings 9-13 are arranged on two sides of the transverse central axis of the driving main plate 9-6. The upper part and the lower part of the bracket 9-2 are fixedly connected with two parallel vertical slide rails 9-5.
The upper and lower claw plate mechanisms comprise upper claw plates 9-3, upper claw plate vertical sliding blocks, lower claw plates 9-4, lower claw plate vertical sliding blocks and clamping blocks 9-11.
The upper claw plate 9-3 is positioned in front of the front end surface of the support 9-2, occupies the upper half part, is flat in front, is provided with a guard plate and an upper top end bent plate at two sides close to the upper part, and is fixed with a clamping block 9-11. The back of the upper part of the upper claw plate 9-3 corresponds to the position of two parallel vertical guide rails 9-5 on the bracket 9-2, and four upper claw plate vertical slide blocks are fixedly connected with the upper part and the lower part respectively, buckled on the vertical guide rails 9-5 and are in sliding connection; the upper claw plate 9-3 is provided with a chute 9-3-3 inclined upwards from left to right at the position corresponding to the cam bearing 9-13 on the upper part of the driving main plate 9-6, and the cam bearing 9-13 is sleeved in the chute.
The lower claw plate 9-4 is positioned in front of the front end surface of the bracket 9-2, occupies the lower half part, is flat in front, and has a structure which is reversely symmetrical with the upper claw plate 9-3. Namely, the two sides of the lower part of the lower claw plate 9-4 are provided with a guard plate and a lower bottom end bent plate, and the lower bottom end bent plate is fixed with a clamping block 9-11. The back of the lower part of the lower claw plate 9-4 corresponds to the position of two parallel vertical slide rails 9-5 on the bracket 9-2, and four lower claw plate vertical slide blocks are fixedly connected with the upper part and the lower part respectively to buckle the guide rails 9-5 and are in sliding connection. The lower claw plate 9-4 is provided with a chute 9-4-3 inclined downwards from left to right at a position corresponding to the cam bearing 9-13 on the lower side of the driving main plate 9-6, and the cam bearing 9-13 is sleeved in the chute.
And (3) sending and taking the hanging plate manipulator: the rotating shaft of the power set 1h is connected with the left end shaft head of the linear module 8 to provide power for the linear module. The rotating shaft of the power set 1h rotates forwards or reversely to drive the sliding block of the linear module 8 to move forwards or backwards along the sliding table. The slide block drags the vertical frame 9-1 arranged on the guide rail 8-3 parallel to the linear module 8 to move together through the connecting group 9-9, namely the whole clamping jaw component moves back and forth. The stand 9-1 extends forward through the bracket 9-2 and supports the jaw assembly main components. The cylinder shaft of the H cylinder 9-7 stretches transversely to drag the driving main board 9-6 to move, and the movement is guided by the slide block and the guide rail connected with the back of the driving main board 9-6 so as to slide left and right. The upper and lower parts of the driving main board 9-6 are respectively provided with cam bearings 9-13 which are respectively sleeved in the inclined grooves 9-3-3 and 9-4-3 of the upper and lower claw boards 9-3 and 9-4. The 9-3 chute 9-3-3 of the upper claw plate is inclined upwards from left to right, and the lower claw plate 9-4 is inclined downwards from left to right. The back surfaces of the upper and lower claw plates 9-3 and 9-4 are respectively fixedly connected with four slide blocks to buckle double vertical guide rails arranged on the bracket 9-2, so that the upper and lower claw plates 9-3 and 9-4 are guided in motion. When the main plate 9-6 is driven to move from right to left, the upper jaw plate 9-3 is forced to move upwards, and the lower jaw plate 9-4 moves downwards, so that the upper and lower clamping blocks 9-11 are pulled apart (loosened). When the main driving plate 9-6 moves from left to right, the upper claw plate 9-3 is forced to descend, the lower claw plate 9-4 rises, and as a result, the upper clamping block 9-11 and the lower clamping block 9-11 are closed (clamped), and the grabbing is realized.
3.5 discharging cabin side manipulator
The discharging cabin side mechanical arm and the feeding cabin side mechanical arm are in bilateral symmetry structures, and the actions are similar and are not repeated.
3.6 discharging cabin top and bottom manipulator
The top and bottom manipulators of the discharging cabin are the same as those of the top and bottom manipulators of the feeding cabin, have similar actions, and are responsible for moving the coated hanging plates transferred by the side manipulators to corresponding slot positions one by one until the cabin is full. And are not repeated.
3.7 furnace external mechanical arm B: and the structure of the purchased part is omitted.
Fourthly, the vacuum coating machine of the embodiment has the characteristics
1) The five sets of mechanical arms in the furnace work coordinately, so that the large hanging plate type smelting tool in the large vacuum coating machine can be fully automatically and simultaneously delivered to and taken from the rotary cabin under the vacuum environment, the design and the processing are ingenious, the equipment capacity is large, the automation degree is high, the working efficiency is high, the mechanical arm control precision is high, and the actions are stable and reliable;
2) the coating process chamber can be kept to work in an unbroken vacuum state all the time, is not polluted by the atmosphere, ensures the consistency of the coating atmosphere and ensures high quality stability and good repeatability of the film.
Claims (3)
1. A side manipulator for conveying a workpiece hanging plate of a large-scale vacuum coating machine is characterized in that the side manipulator is arranged in a feeding cabin or a discharging cabin, is used for conveying the hanging plate of the feeding cabin to a conveying cabin or conveying a finished product hanging plate of the conveying cabin to the discharging cabin, and consists of a power group, a linear module and a clamping assembly;
the clamping assembly is vertically arranged and is of a three-layer structure, and comprises a middle moving mounting plate, a bottom fixing plate at the bottom layer and a foremost sliding claw part, the moving mounting plate is slidably mounted on a transverse guide rail, the guide rail is transversely slidably mounted on the bottom fixing plate, namely, the moving mounting plate is slidably mounted on the bottom fixing plate through a double guide rail, the moving mounting plate is provided with a pushing block, the pushing block is positioned between limiting blocks at two sides of the transverse guide rail and forms a butting structure with the limiting blocks, and the pushing block is positioned at one side of the moving mounting plate, which is far away from the transport cabin;
the power set is connected with the linear module, the linear module is connected with the movable mounting plate, the power set provides power, and the movable mounting plate is driven to do linear reciprocating motion through the linear module;
the sliding claw part comprises two sliding claws which are respectively arranged at the left side and the right side of the movable mounting plate, and the two sliding claws move in opposite directions or in the back direction under the action of the cylinder to realize the grabbing or releasing of the hanging plate.
2. The side robot according to claim 1, wherein the driving structure of the two sliding pawls is as follows:
the two sliding claws are arranged on the movable mounting plate in a sliding mode through transverse guide rails, each sliding claw is provided with a vertical part opposite to the left and the right and a connecting plate with the bottom extending to the opposite side, inclined grooves are formed in the connecting plates, the inclined grooves in the two sliding claws form a splayed shape or an inverted splayed shape, an air cylinder is fixed in the middle of the movable mounting plate, a driving plate is fixedly connected to an output shaft of the air cylinder, and a group of cam bearings are symmetrically arranged on two sides of a middle shaft of the driving plate and are sleeved into the inclined grooves of the sliding claws on the corresponding sides.
3. The side robot according to claim 2, wherein the sliding jaw portion further comprises a clamping block having a U-shaped cross section provided at opposite sides of the vertical portion of the two sliding jaws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022607247.3U CN214422744U (en) | 2020-11-11 | 2020-11-11 | Side manipulator for conveying workpiece hanging plate of large vacuum coating machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022607247.3U CN214422744U (en) | 2020-11-11 | 2020-11-11 | Side manipulator for conveying workpiece hanging plate of large vacuum coating machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115852336A (en) * | 2022-11-24 | 2023-03-28 | 广东汇成真空科技股份有限公司 | Mass production type ALD device workpiece conveying mechanical arm and ALD device provided with baking box |
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2020
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115852336A (en) * | 2022-11-24 | 2023-03-28 | 广东汇成真空科技股份有限公司 | Mass production type ALD device workpiece conveying mechanical arm and ALD device provided with baking box |
| CN115852336B (en) * | 2022-11-24 | 2023-10-31 | 广东汇成真空科技股份有限公司 | Workpiece conveying manipulator of mass-production ALD device and ALD device provided with baking oven |
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