CN115852336A - Mass production type ALD device workpiece conveying mechanical arm and ALD device provided with baking box - Google Patents
Mass production type ALD device workpiece conveying mechanical arm and ALD device provided with baking box Download PDFInfo
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- CN115852336A CN115852336A CN202211481907.5A CN202211481907A CN115852336A CN 115852336 A CN115852336 A CN 115852336A CN 202211481907 A CN202211481907 A CN 202211481907A CN 115852336 A CN115852336 A CN 115852336A
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Abstract
The invention discloses a workpiece conveying manipulator of a mass production type ALD device and an ALD device provided with a baking box, wherein the workpiece conveying manipulator comprises a three-axis manipulator for transferring a product jig between stations, and the three-axis manipulator comprises an integral left-right translation motion assembly, a material taking fork plate rotation motion assembly and a material taking fork plate translation motion assembly; the material taking fork plate translational motion assembly comprises a material taking fork plate, the front end of the material taking fork plate translational motion assembly is provided with a fork opening used for being matched with the lower part of a product jig to support the product jig, the material taking fork plate translational motion assembly is used for driving the material taking fork plate to perform translational motion along the length direction of the material taking fork plate, the material taking fork plate rotational motion assembly is used for driving the material taking fork plate translational motion assembly to perform overall rotational motion, the overall left-right translational motion assembly comprises a guide rail, and the overall left-right translational motion assembly is used for driving the material taking fork plate rotational motion assembly and the material taking fork plate translational motion assembly to perform overall translational motion along the guide rail. The manipulator is suitable for automatic conveying of workpieces of a mass production type ALD device.
Description
Technical Field
The invention relates to a conveying manipulator of a vacuum coating machine, in particular to a conveying platform three-axis manipulator of a mass production type Atomic Layer Deposition (ALD) device with a baking box and a manipulator for conveying a workpiece to a process chamber for coating and positioning.
Background
The atomic layer deposition technology is characterized in that the chemical adsorption of the atomic molecules is utilized to ensure that the reaction precursor atomic molecules are deposited on a sample in a single-layer saturated mode, then the inert gas is used for blowing clean and then the second layer is deposited in a saturated mode, and the single-layer atomic layer deposition process is repeated continuously to finish the film coating process. The ALD method has the advantages of being excellent in step coverage, and is particularly suitable for deposition of uniform-thickness film layers of samples with complex shapes, precise curved surfaces and nanoscale narrow slits with large depth-to-width ratios. With the development of semiconductor components and precision optics, ALD technology is increasingly used. However, the deposition rate of ALD is very slow, and some ALD deposition rates are only one tenth of the deposition rate of CVD, so that one furnace needs to take ten hours or more, and the working efficiency is too slow. But some processes require that ALD not be used. In order to improve productivity, mass production equipment and processes must be used to improve productivity.
The design of mass production equipment has various schemes, one of which is to stack samples at intervals and process a plurality of samples at a time, even dozens of samples and hundreds of samples; a plurality of deposition chambers are adjacently arranged under the condition of reserving enough maintenance space; thirdly, necessary auxiliary equipment is added beside the deposition chamber for pre-plating or post-plating treatment, thereby shortening the transfer distance and improving the work efficiency.
The application aims at providing a manipulator for automatically conveying workpieces for the mass production type ALD device.
Disclosure of Invention
The invention aims to solve the technical problem of providing a manipulator for automatically conveying workpieces of an ALD device in a mass production mode.
The technical scheme for solving the technical problem is as follows: a workpiece conveying manipulator of a mass production type ALD device comprises a three-axis manipulator for transferring a product jig among stations, wherein the product jig refers to the whole workpiece rotating frame after a workpiece is loaded;
the three-axis manipulator comprises an integral left-right translational motion assembly, a material taking fork plate rotational motion assembly and a material taking fork plate translational motion assembly;
the material taking fork plate translational motion assembly comprises a material taking fork plate, the front end of the material taking fork plate translational motion assembly is provided with a fork opening used for being matched with the lower part of a product jig to lift the material taking fork plate, the fork opening is used for driving the material taking fork plate to perform translational motion along the length direction of the material taking fork plate, the material taking fork plate translational motion assembly is arranged on the material taking fork plate rotational motion assembly, the material taking fork plate rotational motion assembly is used for driving the whole rotational motion of the material taking fork plate translational motion assembly, the material taking fork plate rotational motion assembly is arranged on the whole left-right translational motion assembly, the whole left-right translational motion assembly comprises a guide rail, and the whole left-right translational motion assembly is used for driving the material taking fork plate rotational motion assembly and the whole material taking fork plate translational motion assembly to perform translational motion along the guide rail.
The whole left-right translational motion assembly adopts a linear module assembly arranged side by side with the guide rail as a power source to drive the material taking fork plate rotational motion assembly and the material taking fork plate translational motion assembly to wholly move along the guide rail in a translational motion manner.
The material taking fork plate rotating motion assembly comprises a speed reducer base 33, a second servo motor 37, an RV speed reducer 39 and an RV speed reducer follow-up top plate 25; second servo motor 37 passes through speed reducer seat 33 is installed on the slider of guide rail, and the hoist and mount are two between the guide rail, RV speed reducer 39 is fixed speed reducer seat 33 is last, the input with second servo motor 37's output links to each other, RV speed reducer follow-up roof 25 is installed RV speed reducer 39's output.
The material taking fork plate translational motion assembly comprises a material taking fork plate 21, an upper-layer guide rail slide block 26, an upper-layer guide rail 27, a first servo motor 34, a rack 35 and a driving gear 36;
two sets of upper guide rail slider 26 is fixed respectively the both sides of RV speed reducer follow-up roof 25, two upper guide rail 27 is detained respectively wherein, two upper guide rail 27 links firmly get material fork plate 21 lower extreme face long limit both sides, first servo motor 34 is installed on RV speed reducer follow-up roof 25, is located two sets ofly between the upper guide rail slider 26, its pivot is located the side and links firmly drive gear 36, this drive gear 36 with along long limit install get the interlock of rack 35 of material fork plate 21 below.
The workpiece conveying manipulator further comprises a jacking manipulator and a rotary manipulator, the rotary manipulator is fixed on the jacking manipulator and located below a deposition process cavity in a deposition station and used for being matched with and bearing the product jig conveyed by the three-axis manipulator and driving a workpiece rotating frame in the product jig to rotate, a sealing plate is arranged on the rotary manipulator, and under the matching of the jacking manipulator, the product jig is lifted and sent into the deposition process cavity and is sealed by the sealing plate under the pressure of the jacking manipulator.
The jacking manipulator preferably has the following structure: the jacking manipulator comprises a vertical lifting assembly and a lifting supporting assembly;
the vertical lifting assembly comprises a Z-axis driving motor 12, a speed reducer 13, a worm gear 15, a ball screw 53-1, a Z-axis slider 16, a Z-axis guide rail 17 and a synchronizing rod 19;
the left side and the right side of the deposition station are both provided with two Z-axis slide rails 17 which are vertically arranged in the front-back direction, four Z-axis slide blocks 16 are respectively buckled on the four Z-axis slide rails 17, the worm gear 15 is arranged between the two Z-axis slide rails 17 which are vertically arranged in the front-back direction on the two sides and is positioned at the lower end of the guide rails, wherein a horizontally-arranged worm gear is connected with the vertical ball screw 53-1, the transverse worm of the worm gear 15 on one side of the deposition station is connected with the speed reducer 13 through a coupler and then is connected with the Z-axis driving motor 12, the other end of the transverse worm is connected with the synchronizing rod 19 through a coupler, and the other end of the synchronizing rod 19 extends to the opposite side of the deposition station and is connected with the corresponding end of the transverse worm of the worm gear 15 on the opposite side through a coupler;
the lifting support assembly comprises a lifting moving frame and a lifting support bracket;
the lifting moving frame is arranged on the Z-axis sliding blocks 16 on two sides and is sleeved on the ball screw 53-1 through a ball screw nut 53-3 on the lifting moving frame;
the lifting support bracket comprises two lifting cross plates 43, which are arranged in tandem and are connected to the lifting moving frame on both sides of the deposition station, respectively, to form a parallel bar for lifting.
The lifting moving frame comprises a Z-axis moving frame horizontal plate 56-1, a Z-axis moving frame side vertical plate 56-2, a Z-axis moving frame reinforcing plate 56-3, a Z-axis moving frame back vertical plate 56-4 and the ball screw nut 53-3;
the Z-axis moving frame horizontal plate 56-1 is a horizontally placed T-shaped plate, the middle of the Z-axis moving frame back vertical plate 56-4 is provided with an upper notch, the extending section of the T-shaped plate just passes through the upper notch to extend forwards, two Z-axis moving frame side vertical plates 56-2 connect the two ends of one field of the T-shaped plate with the two sides of the Z-axis moving frame back vertical plate 56-4 at the two sides to form a two-layer cabinet lattice structure lacking a bottom plate and a top plate, the Z-axis moving frame reinforcing plate 56-3 is in a right trapezoid shape and is connected with the T-shaped plate from the front extending section of the upper notch and the corresponding side of the upper notch of the Z-axis moving frame back vertical plate 56-4 to play a role of reinforcing ribs, the extending section of the T-shaped plate is provided with a through hole, and the ball screw nut 53-3 is fixedly connected in the T-shaped plate.
The rotary manipulator comprises an outer sealing plate 45 and an inner sealing plate 47, wherein the inner sealing plate 47 and the outer sealing plate 45 are arranged up and down, the middle of the inner sealing plate 47 and the outer sealing plate 45 are connected through a cylinder, and a rotary pressing part and a rotary driving part are accommodated in the cylinder;
the rotary compaction part comprises a plurality of (more than two) rotary compaction cylinders 48 which are uniformly distributed close to the inner wall of the cylinder, piston rods 48-1 of the rotary compaction cylinders hermetically penetrate through holes on the inner sealing plate 47, one-way elbows are arranged at the penetrating ends of the piston rods, and after the rotary compaction cylinders 48 are started, the piston rods 48-1 of the rotary compaction cylinders are changed from the original rising state of the elbows outwards to the falling compaction state of the elbows inwards so as to be matched with the product jig to fix the product jig on the inner sealing plate 47;
the rotary driving part comprises a third servo motor 57, a second speed reducer 58, a linkage seat 64 and a rotary magnetic fluid 65;
the upper end face of the rotating magnetic fluid 65 is connected with the lower end face of the inner sealing plate 47 in a sealing manner, the upper end of the rotating shaft of the rotating magnetic fluid 65 penetrates out of the central hole of the inner sealing plate 47 and is fixedly connected with the linkage seat 64, gear teeth are arranged on the upper end face of the linkage seat 64, and the lower end of the rotating shaft of the rotating magnetic fluid 65 is connected with the second speed reducer 58 through a coupling and is then connected with the third servo motor 57;
the upper end face of the inner sealing plate 47 is also provided with a positioning structure used for being matched with the product jig to carry out centering and limiting.
The invention aims to solve another technical problem of providing a mass production type ALD device with a baking box, wherein the mass production type ALD device comprises a baking station, a feeding and discharging station and a plurality of (more than two) deposition stations, the baking station and the deposition stations are arranged side by side, the feeding and discharging stations and the baking stations are arranged in an L shape, the baking box is arranged at the baking station, the deposition stations are provided with deposition process cavities, vertical multilayer workpiece clamping rotating frames are adopted in the deposition process cavities to load workpieces, and the mass production type ALD device completes the transfer of product jigs among the feeding and discharging station, the baking station and the deposition stations through the three-shaft mechanical arm.
The deposition process cavity is formed by sleeving an inner cavity and an outer cavity.
Has the advantages that:
1) The three-axis manipulator provided by the invention is used for conveying workpieces among different stations, and the jacking manipulator and the rotating manipulator are arranged in the deposition process cabin, so that the full mechanization and automation of workpiece conveying are realized, a high-purification environment can be ensured to be kept in a coating workshop, and the workpiece conveying reliability is improved.
2) The workpiece conveying manipulator is exquisite in design, simple in structure and flexible and reliable in action.
3) The mass production type ALD device integrates all the technical points of improving the work efficiency, the productivity is improved by adopting a plurality of parallel deposition process cavities and a vertical multi-layer workpiece clamping rotating frame, and a baking box is additionally arranged beside each deposition process cavity to reduce the baking time of the workpiece in the deposition process cavity, so that the utilization rate of main equipment is improved, the production period is shortened, and the effect of improving the work efficiency is finally achieved.
Drawings
FIG. 1-1 is a schematic vertical view of a mass production ALD apparatus (product tool raised into a deposition chamber) in accordance with a preferred embodiment of the present invention;
FIGS. 1-2 are schematic diagrams of mass production ALD apparatus of the preferred embodiment of the present invention (product tool sitting on the take-off fork plate beside the deposition chamber);
FIG. 2 is a first schematic top view of a mass production ALD apparatus of a preferred embodiment of the present invention, wherein the three-axis robot is in an initial state;
FIG. 3 is a schematic top view of a mass-produced ALD apparatus according to a preferred embodiment of the present invention, wherein the three-axis robot is in a material loading and unloading state in the loading and unloading area;
FIG. 4 is a third schematic top view of a mass production ALD apparatus of the present invention, in which a three-axis robot is in a loading and unloading state in a baking oven;
FIG. 5 is a fourth schematic top view of a mass production ALD apparatus of the present invention, illustrating a state in which a three-axis robot is taking and placing materials under a deposition process chamber;
FIG. 6-1 is an enlarged schematic view A-1 of the left elevational view A of the three-axis manipulator;
FIG. 6-2 is an enlarged schematic view A-2 of the left elevational view A portion of the three-axis manipulator;
FIG. 7 is a schematic diagram of a perspective view of a jacking manipulator and a rotating manipulator;
FIG. 8 is a top view of a jacking manipulator and a rotating manipulator;
FIG. 9 is a schematic front elevation view of a jacking manipulator and a rotating manipulator;
fig. 10 is a partially enlarged schematic view D of the lifting robot;
FIG. 11 is an enlarged view of the rotary robot and the product fixture C;
FIG. 11-1 is an isometric view of a rotary robot;
description of the reference numerals: a three-axis manipulator a; a jacking manipulator b; rotating the manipulator c; a feeding and discharging area 1; a deposition process chamber 2; a baking oven 3; a toaster door 4; a lower linear guide 5; a guide rail mounting plate 6; a linear module 7; a first module connecting plate 8; a needle bearing 9; a second module connecting plate 10; a fixed base plate 11; a Z-axis drive motor 12; a speed reducer 13; a coupling 14; a worm gear 15; a Z-axis slider 16; a Z-axis guide rail 17; a Z-axis guide mounting plate 18; a synchronization lever 19; a product jig 20; a disc 20-1 on the product jig; a product jig base 20-2; a material taking fork plate 21; a drag chain box 22; a drag chain 23; a tow chain fixing plate 24; the RV reducer follow-up top plate 25; an upper-layer rail slider 26; upper-layer guide rails 27; a motor fixing plate 28; a module fixing plate 29; a transverse plate 30-1 of the guide rail mounting block; a guide rail mounting block locking plate 30-2; a lower-layer rail slider 31; a moving plate 32; a reducer base 33; a first servo motor 34; a rack 35; a drive gear 36; a second servo motor 37; a photoelectric switch sensor chip 38; an RV reducer 39; an opto-electronic switch 40; a photoelectric switch fixing plate 41; the cooling water nozzle 42; a lifting transverse plate 43; an outer fixing plate 44; an outer seal plate 45; a support base plate 46-1; supporting the cylindrical barrel 46-2; supporting base top plate 46-3; an inner seal plate 47; a rotary compacting cylinder 48; a cylinder connecting post 49; a seal seat 50; a framework oil seal 51; a middle stop collar 52; ball screw 53-1; a screw rod slide block 53-2; a bearing support base 54; deep groove ball bearings 55; a Z-axis moving frame horizontal plate 56-1; a Z-axis moving frame side plate 56-2; a Z-axis moving frame reinforcing plate 56-3; a Z-axis moving frame back vertical plate 56-4; a third servo motor 57; a speed reducer 58; a second reducer 58; a coupling 59; a second photovoltaic fixing plate 60; a second photoelectric switch 61; a photoelectric sensing sheet 62; a magnetic fluid fixing column 63; a lower linkage seat 64; a rotating magnetic fluid 65; rotating the magnetic fluid upper end flange 65-1; a product turret 66; a linkage seat screw 67; an upper linkage seat 68; a bearing sleeve 69; a second deep groove ball bearing 70; a product turret connecting shaft 71; a locking cap 72.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings by taking the single deposition station and baking station as an example, and using a three-axis robot a, a lift robot b, and a rotary robot c.
Fig. 1-1 and fig. 1-2 are two schematic diagrams of mass production ALD apparatus equipped with a baking oven according to the present invention, which show the overall layout of ALD apparatus, and it can be seen from the figure that a baking station is disposed adjacent to a deposition station side by side, the baking station is provided with a baking oven 3, and the deposition station is provided with a deposition process chamber 2. The deposition process chamber 2 is composed of a process inner chamber and a process outer chamber, as shown in fig. 1-1. Two sides of the space below the deposition process cavity 2 are provided with jacking manipulators b, and the front part is provided with a workpiece conveying working platform and a three-axis manipulator a. The rotary manipulator c is arranged on the jacking manipulator b and used for receiving the product jig 20 sent to the deposition station, an inner sealing plate 47 and an outer sealing plate 45 are arranged on the rotary manipulator c, the rotary manipulator c sends the received product jig 20 to the deposition process cavity above the rotary manipulator under the action of jacking pressure of the jacking manipulator b, and the bottom of the inner process cavity and the bottom of the outer process cavity are respectively sealed through the inner sealing plate 47 and the outer sealing plate 45 on the rotary manipulator. The rotary manipulator c is also used for driving the workpiece rotating stand in the product jig 20 to rotate, so that the coating uniformity is improved. Figures 1-2 show three-dimensionally the structure and relative positions of the three-axis robot a and the lift robot b and show the product holders 20 seated on the take-off fork plate 21 of the three-axis robot a and located adjacent the deposition station.
Fig. 2 is a plan view of an initial state of the three-axis manipulator, which shows that the material taking fork plate 21 is in a state parallel to the linear module 7, and a fork opening at the right end of the material taking fork plate 21 faces the direction of the feeding and discharging area 1, and a fork opening end of the fork plate does not exceed the right end of the linear module 7.
Fig. 3 shows the state of the three-axis manipulator taking and placing materials in the feeding and discharging area 1, and shows that the material taking fork plate 21 is driven to extend forwards to the right into the feeding and discharging area 1. When taking materials, the product jig 20 is supported by the special manipulator of the feeding and discharging area 1 and is conveyed to the position appointed by the feeding and discharging area 1, the fork opening at the right front end of the material taking fork plate 21 is just inserted into the lower space of the lower end surface of the product jig 20, the special manipulator of the feeding and discharging area 1 enables the supported product jig 20 to slowly descend and just sit on the fork opening of the material taking fork plate 21, then the special manipulator descends a little again to separate from the product jig 20, and retreats and exits from the feeding and discharging area 1. The material taking fork plate 21 then supports the product jig 20 together with the workpiece rotating frame and the workpiece thereon to retreat for rotating the cabin. When unloading, the fork mouth of the material taking fork plate 21 supports the product jig 20 and the coated workpiece on the product jig 20 to extend into the designated position of the loading and unloading area 1, the special manipulator for the loading and unloading area is inserted into the space below the lower end surface of the product jig 20, and the manipulator is lifted to support the product jig 20 and then is retracted out of the loading and unloading area 1. The take-out fork 21 waits for the next cycle of operation.
Fig. 4 is a three-axis manipulator oven material taking and placing state diagram, which shows that after the material taking fork plate 21 takes out the product jig 20 from the feeding and discharging area 1, the whole body is dragged by the linear module 7 to move leftwards, and before the product goes to the oven door 4 of the oven 3, the material taking fork plate 21 itself also moves leftwards under the action of other driving structures, and a space for the material taking fork plate 21 to rotate anticlockwise and not to be blocked is reserved. Before oven door 4, get material fork plate 21 and receive its below rotary mechanism drive anticlockwise rotation, let this fork plate be perpendicular with the oven door, open oven door 4, fork plate translation actuating mechanism drive get material fork plate 21 and hold in the palm product tool 20 and stretch into 3 assigned positions of barbecue case, there is elevating system below the relevant position in the case, when feeding, this elevating system rises, hold up product tool 20, then get material fork plate 21 and retreat and withdraw from toasting case 3, oven door 4 closes, the work piece that piles up on the product tool 20 is stayed toasting case 3 interior heating toasts. When the material was got in changeing the cabin, oven door 4 was opened, and the preceding material fork board 21 of getting of this chamber door stretches into toasting case 3 in, terminal surface below space under its front end fork inserted incasement product tool 20, and elevating system descends in the oven, falls on the fork mouth of this fork board to product tool 20, then incasement elevating system descends again, lets get material fork board 21 and is holding in the palm product tool 20, gets material fork board 21 and withdraws from toasting case 3 then, takes out the product tool 20 whole of toasting.
Fig. 5 is a diagram of a material taking and placing state of the three-axis robot at the deposition station, showing the material taking fork 21 supporting the product fixture 20 to extend forward into the bottom of the deposition process chamber 2. The material taking fork plate 21 supports the product jig 20 and the baked workpieces stacked on the product jig, and is dragged by the linear module 7 to integrally translate rightward from the front of the baking box 3 until the front of the deposition process cavity. The material taking fork plate 21 is driven by the translation driving mechanism to extend forwards to convey the product jig 20 and the stacked workpieces on the product jig 20 to the position under the bottom of the deposition process cavity 2, the lifting transverse plate 43 of the lifting manipulator b is arranged at the lowest position of the bottom of the deposition process cavity 2, the rotating manipulator c which descends along with the lifting transverse plate 43 is supported at the center of the lifting transverse plate, at the moment, the position under the product jig 20 is over against the center position of the sealing plate 47 in the process inner cavity at the topmost position of the rotating manipulator c, the lifting transverse plate 43 is slightly lifted by the lifting manipulator b, the sealing plate 47 in the process inner cavity supports the base of the product jig 20, and then the lifting manipulator b is slightly lifted, so that the material taking fork plate 21 is separated from the product jig 20 and can be withdrawn and withdrawn. When material is taken, the lifting transverse plate 43 of the lifting manipulator b lowers the rotating manipulator c seated thereon and the product jig 20 thereon to the lower part of the bottom of the deposition process cavity 2, the material taking fork plate 21 extends forward to allow the fork opening at the front end of the material taking fork plate to be inserted into the lower space of the lower end surface of the product jig 20, then the lifting manipulator b lowers a little again to allow the fork opening of the fork plate to support the product jig 20, and the deposition station can be withdrawn. The three-axis manipulator a is additionally provided with a rotary driving mechanism for driving the material taking fork plate 21 to integrally rotate 90 degrees clockwise, so that a fork opening of the fork plate faces the feeding and discharging area 1. The linear module 7 drags the material taking fork plate 21 translation mechanism and the rotating mechanism to integrally move right, and then the special translation driving mechanism drives the material taking fork plate 21 to extend forwards rightwards relative to the linear module 7, so that the product jig 20 and the workpieces stacked on the product jig are fed into the feeding and discharging area 1 and delivered to a special manipulator in the area.
The motion structure and the motion mode of three shafts of the three-shaft manipulator are described by combining the attached drawings, wherein one of the three shafts is a whole left-right translational motion assembly, the other three shafts is a material taking fork plate rotational motion assembly, and the other three shafts is a material taking fork plate translational motion assembly. The following are described separately:
the overall left-right translational movement assembly is described in connection with fig. 2 and 6-1. The whole left-right translational motion assembly comprises: the linear module assembly comprises a linear module 7, a module motor 7-1, a linear module sliding block 7-2, a first module connecting plate 8, a needle bearing 9, a second module connecting plate 10, a fixed bottom plate 11 and a module fixing plate 29. The linear module 7 is disposed in parallel in front of the deposition process chamber 2 and the bake chamber 3, and is mounted on the fixed base plate 11 through a module fixing plate 29. The module motor 7-1 is arranged at the left end of the module and drives a screw rod in the module to rotate, so that the built-in nut and the linear module sliding block 7-2 are driven to move left and right. The first module connecting plate 8 is fixedly connected to the linear module sliding block 7-2 and translates along with the linear module sliding block, and then the first module connecting plate 8 is connected with the lower part of the linear module sliding block through the needle roller bearing 9, and the second module connecting plate 10 is connected with the upper part of the linear module sliding block, so that the second module connecting plate 10 is dragged to translate left and right. The needle bearing 9 is connected with the left-right translational motion assembly, the stress can be automatically adjusted, the stress is uniform, and the installation precision can be widened.
The left-right translational motion assembly consists of a guide rail mounting plate 6, a lower layer guide rail 5, a drag chain box 22, a drag chain 23, a drag chain fixing plate 24, a guide rail mounting block transverse plate 30-1, a guide rail mounting block locking plate 30-2, a lower layer guide rail sliding block 31 and a moving plate 32. Fig. 6-1 is a left side elevation view of fig. 2, with the right side of the lower half of the figure being the linear module assembly and the left side being the left-right translational motion assembly. The lower part of the second module connecting plate 10 is fixedly connected with a movable plate 32, the left side and the right side of the lower end surface of the movable plate are fixedly connected with lower guide rail sliding blocks 31, and the lower parts of the lower guide rail sliding blocks are buckled on the lower guide rails 5. The lower end of the guide rail is fixedly connected with a guide rail mounting block locking plate 30-2, and the lower end of the guide rail is fixedly connected with a transverse plate 30-1 of the guide rail mounting block, and the transverse plate is fixed on the fixed bottom plate 11. Thus, the moving plate 32 is dragged by the linear module through the module connecting plate and slides in a left-right translation mode along the lower guide rail 5. Two drag chains 23 are arranged at the inner sides of the two lower guide rails 5 below the moving plate 32, a drag chain box 22 fixed on the fixed bottom plate 11 is arranged below the lower drag chains, and a drag chain fixing plate 24 fixed on the moving plate 32 is arranged above the lower drag chains, and the drag chains are used for accommodating electric wires, water and air pipelines dragged along with the movement of the moving plate 32.
The take-off fork plate rotary motion assembly is described in connection with fig. 6-1 and 6-2. The material taking fork plate rotating motion assembly consists of a speed reducer base 33, a second servo motor 37, an RV speed reducer 39, an RV speed reducer follow-up top plate 25, a photoelectric switch 40, a photoelectric switch induction sheet 38 and a photoelectric switch fixing plate 41. The lower part of the speed reducer base 33 is fixedly connected with the movable plate 32, the upper part of the speed reducer base is fixedly connected with an RV speed reducer 39, the lower part of the speed reducer base is rotatably connected with a second servo motor 37, and a servo motor body extends downwards to penetrate through the speed reducer base 33 and the movable plate 32. The RV reducer is a cycloidal pin gear reducer, has high reduction ratio and strong output rotation moment, and the upper end surface of the RV reducer is an RV reducer follow-up top plate 25 which rotates along with the RV reducer. The control system of the second servo motor 37 is composed of a photoelectric switch 40, a photoelectric switch induction sheet 38 and a photoelectric switch fixing plate 41. The photoelectric switch fixing plate 41 is fixed on the outer wall of the RV reducer 39 with the larger diameter, the photoelectric switch 40 is installed at the upper end of the fixing plate and is stationary relative to the RV reducer, the photoelectric switch induction sheet 38 is vertically and downwards installed on the lower end face of the RV reducer follow-up top plate 25 and rotates along with the reducer top plate, when the photoelectric switch induction sheet passes through a signal gap of the photoelectric switch 40, a pulse signal is generated, the photoelectric switch induction sheet 38 is selected as a starting origin when passing through a servo motor and is used as a control reference point, the number of left and right rotation cycles of the servo motor is set, and the left and right rotation angle of the RV reducer follow-up top plate 25 can be determined.
The material taking fork plate translational motion assembly is described by combining fig. 6-1 and fig. 6-2, and the material taking fork plate translational motion assembly is composed of a material taking fork plate 21, an upper layer guide rail slide block 26, an upper layer guide rail 27, a motor fixing plate 28, a first servo motor 34, a rack 35 and a driving gear 36. The left and right upper-layer guide rail sliding blocks 26 are symmetrically and downwards fixedly connected to the periphery of the upper end face of the RV speed reducer follow-up top plate 25 respectively, the sliding blocks are buckled on the upper-layer guide rails 27 in an upward sliding mode, and the two upper-layer guide rails 27 are fixedly connected to two sides of the long side of the lower end face of the material taking fork plate 21. The side of the motor fixing plate 28 is vertically fixedly connected to the side of the horizontal RV reducer follow-up top plate 25 through a structure, the first servo motor 34 is transversely fixedly connected to the fixing plate, the rotating shaft of the first servo motor 34 is fixedly connected with the driving gear 36, the gear is meshed with the rack 35 installed on the lower end face of the material taking fork plate 21, and the rack is parallel to the long edge of the fork plate. The first connecting mechanism enables the material taking fork plate 21 to rotate along with the driving of the RV reducer 39, and meanwhile, the material taking fork plate can be driven by the first servo motor 34 to translate back and forth.
The jacking robot is explained with reference to fig. 7 and 8. Fig. 7 is a perspective view of the jacking robot, and fig. 8 is a plan view of the jacking robot. The jacking mechanical arm is positioned below the bottom of the deposition process cavity. Its function is to lift the product tool from take off fork 21 into the deposition chamber above, while allowing inner and outer seal plates 47 and 45 to seal the opening below deposition chamber 2. In addition, after the film coating is finished, the jacking hand machine descends to remove the sealing of the inner sealing plate and the outer sealing plate to the deposition process cavity 2, and the product jig 20 and the stacked workpieces coated on the product jig are descended to the lowest position below the bottom of the deposition process cavity 2 together, so that the material taking fork plate 21 is convenient to carry away.
The jacking manipulator comprises a vertical lifting assembly and a lifting supporting assembly. The vertical lifting assembly consists of a Z-axis driving motor 12, a speed reducer 13, a coupler 14, a worm gear 15, a Z-axis slider 16, a Z-axis guide rail 17, a Z-axis guide rail mounting plate 18 and a synchronizing rod 19. The vertical lifting components are positioned at the left side and the right side below the bottom of the deposition process cavity 2 and are in a bilateral symmetry structure, the left side and the right side are respectively provided with two Z-axis slide rails 17 which are vertically arranged from front to back and are respectively arranged on a V-21274-shaped vertical Z-axis guide rail mounting plate 18. The Z-axis guide rail mounting plate 18 can enable the structure to be more firm, stable and reliable. Four Z-axis sliding blocks 16 are respectively and movably buckled on four Z-axis guide rails 17, worm gears and worms 15 are respectively arranged between adjacent guide rails at the bottommost parts of the left guide rail and the right guide rail, the horizontally placed worm gears are connected with a vertical ball screw 53-1, the upper end of the horizontally placed worm gears is sleeved into the inner ring of a deep groove ball shaft 55, the bearing is arranged in a bearing support seat 54, and the support seat is fixedly connected to the upper ends of two adjacent Z-axis guide rail mounting plates 18 and is fixedly connected into a whole. The right end of the transverse worm of the right worm gear 15 is fixedly connected with a coupling 14, and then is connected with a speed reducer 13 and then is connected with a Z-axis driving motor 12. The left end of the horizontal worm is connected with a synchronizing rod 19 through a coupler 14, the left side of the synchronizing rod 19 extends to the left worm gear 15, and the left end of the synchronizing rod is connected with the horizontal worm of the left worm gear 15 through the coupler 14. Thus, the rotation of the Z-axis driving motor 12 can drive the left and right worm gears to move simultaneously through the synchronous rod connection, thereby driving the ball screw 53-1 to rotate.
The structure of the elevating support assembly will be described with reference to fig. 7, 9 and 10, which is composed of two parts, an elevating moving frame symmetrically disposed on the Z-axis guide rails 17 on both sides, and an elevating support bracket connecting the left and right elevating moving frames. The lifting moving frame consists of a Z-axis moving frame horizontal plate 56-1, a Z-axis moving frame side vertical plate 56-2, a Z-axis moving frame reinforcing plate 56-3, a Z-axis moving frame back vertical plate 56-4 and a ball screw nut 53-3. The Z-axis moving frame horizontal plate 56-1 is a horizontally placed T-shaped plate, the middle section of the Z-axis moving frame back vertical plate 56-4 is provided with an upper notch, the T-shaped extension section of the horizontal plate just passes through the notch to extend forwards, the horizontal plate and the back vertical plate are fixedly connected into a bracket shape at two sides by the two Z-axis moving frame side vertical plates 56-2, and the Z-axis moving frame reinforcing plate 56-3 is an approximate right triangle and fixedly connects the horizontal plate with two sides of the notch of the back vertical plate from two sides of the extension section of the notch of the back vertical plate to play a role of a reinforcing rib. The horizontal plate 56-1 of the Z-axis moving frame is provided with two through holes in the central axis, the through hole near the notch extending section passes through the ball screw 53-1 sleeved with the ball screw nut 53-2, the lower convex shoulder of the ball screw nut is fixedly connected with the lower end face of the Z-axis moving horizontal plate 56-1, and the screw nut drags the lifting moving frame to lift along the Z axis along with the left and right rotation of the ball screw 53-1. The left and right sides of the lifting moving frame are symmetrically arranged.
The lifting support bracket is characterized in that the left lifting moving frame and the right lifting moving frame are fixedly connected from the front side and the rear side by two lifting transverse plates 43, and the left lifting moving frame and the right lifting moving frame can integrally and stably lift along the Z axis.
The middle part of the lifting support bracket supports the whole sealing device at the bottom of the deposition process cavity, the sealing device is a component of a rotary manipulator, the upper end surface and the lower end surface of the sealing device are respectively an inner sealing plate and an outer sealing plate of the deposition process cavity 2, and the inner sealing plate also bears a structure for limiting and fixing a product jig and a structure for enabling a workpiece rotating frame on the product jig to rotate.
The overall sealing device for the bottom of the deposition process chamber is described with reference to fig. 8, 9 and 11, and comprises: the device comprises an outer fixing plate 44, an outer sealing plate 45, a supporting seat bottom plate 46-1, a supporting seat cylinder 46-2, a supporting seat top plate 46-3, an inner sealing plate 47, a rotary pressing cylinder 48, a rotary pressing cylinder movable rod 48-1, a cylinder connecting column 49, a sealing seat 50, a framework oil seal 51 and a middle limiting ring 52. The bottom sealing device of the process cavity is provided with an upper sealing plate and a lower sealing plate, the middle of the process cavity is formed by connecting short cylinders with flanges on two end surfaces, and the through hole space in each cylinder accommodates a rotary pressing part and a rotary driving part. The concrete structure is as follows: the outer sealing plate 45 is a square plate with a large circular hole in the center, is used for sealing the bottom of the outer process cavity, and is connected with a lifting transverse plate 43 of the jacking manipulator through an outer fixing plate 44. The supporting seat bottom plate 46-1, the supporting seat cylinder 46-2 and the supporting seat top plate 46-3 are welded into a vertical short cylinder with flange surfaces at two ends, the supporting seat bottom plate 46-1 is arranged on the periphery of a large central circular hole of the outer sealing plate 45 and fixedly connected with the outer circular hole through screws, and the supporting seat top plate 46-3 at the upper end of the supporting seat cylinder 46-2 is fixedly connected with the inner sealing plate 47 above the supporting seat cylinder through screws. Four rotary compression cylinders 48 are uniformly distributed in the inner cavity of the supporting seat cylinder 46-2 close to the inner wall, the lower ends of the cylinders are fixedly connected with the lower end of a cylinder connecting column 49, the upper end of the connecting column is fixedly connected with an outer annular shoulder flange at the upper end of a sealing seat 50, the flange is fixedly connected with the lower end face of an inner sealing plate 47, and a framework oil seal 51 is sleeved in the inner cavity of the sealing seat. The piston rod 48-1 of the rotary pressing cylinder is led out from the rotary pressing cylinder 48, penetrates through the framework oil seal 51 and then extends out of the through hole in the inner sealing plate 47, and the extending upper end of the piston rod is provided with a one-way elbow. The center of the upper end face of the inner sealing plate 47 is fixedly connected with a middle limiting ring 52 with a central through hole, and the limiting ring is used for centering and limiting when a product jig 20 is placed. The center of the upper end face of the inner sealing plate 47 is provided with a rotary driving part downwards.
Fig. 9, 11 and 11-1 show the structure of the rotary driving part and the product jig linked therewith, and fig. 11 and 11-1 are partially enlarged views. The structure of the rotation driving part will be described first with reference to fig. 9, 11 and 11-1. The rotary driving part is used for driving the workpiece rotating frame on the product jig 20 which is arranged on the rotary driving part and linked with the rotary driving part to rotate so as to improve the uniformity of the coating. The rotary driving component comprises a third servo motor 57, a second speed reducer 58, a coupler 59, a second photoelectric fixing plate 60, a second photoelectric switch 61, a photoelectric sensing sheet 62, a lower linkage seat 64, a rotary magnetic fluid 65 and a cooling water nozzle 42. The flange at the upper end of the rotary magnetic fluid 65 is fixedly connected with the lower end face of the inner sealing plate 47, the upper section of the rotating shaft of the rotary magnetic fluid 65 penetrates out of the central hole of the inner sealing plate 47, and the upper shaft end of the rotary magnetic fluid is fixedly connected with the lower linkage seat 64. The lower extension section of the rotating shaft is connected with an output shaft of a second speed reducer 58 through a coupler 59, the upper ends of a plurality of magnetic fluid fixing columns 63 are fixedly connected with the lower end face of an upper end flange of a rotating magnetic fluid 65, the lower ends of the fixing columns are fixedly connected with an upper end flange of the second speed reducer 58, and a lower base of the speed reducer is fixedly connected with a ring shoulder flange of a third servo motor 57. Therefore, the rotation of the servo motor is decelerated by the second speed reducer 58, and then the rotating shaft of the rotating magnetic fluid 65 is driven by the coupler to rotate in the vacuum dynamic seal, and then the lower linkage seat 64 is dragged to rotate. The 42 is a cooling water nozzle, and external circulating cooling water enters the inside of the rotating magnetic fluid 65 to play a role in cooling and carrying away heat. The second photoelectric fixing plate 60 is fixedly connected to an upper end flange of the second speed reducer 58, and the fixing plate is transversely and fixedly connected with a second photoelectric switch 61. The photoelectric sensing piece 62 is a disc piece with a notch, and is fixedly attached to the lower end face of the coupler 59, the periphery of the disc enters the signal slot opening of the second photoelectric switch 61, and when the notch of the disc of the photoelectric sensing piece 62 reaches the signal slot opening, the photoelectric switch transmits a pulse signal to the automatic control system to be processed according to a preset program.
The structure of the product jig is described with reference to fig. 8, 9 and 11. The product jig is a workpiece rotating frame for bearing stacked workpieces. The product jig 20 includes: the fixture comprises a product rotating frame 66, a fixture upper disc 20-1, a fixture cylinder base 20-2, a screw 67, an upper linkage seat 68, a bearing sleeve 69, a second deep groove ball bearing 70, a product rotating frame connecting shaft 71 and a locking cover 72. The machine base of the product jig 20 consists of a jig upper disc 20-1 and a jig cylinder base 20-2. The jig cylinder base 20-2 is a cylinder with a flange protruding from the lower bottom and an upper disc 20-1 welded to the upper end of the cylinder. The center of the upper disc 20-1 of the jig is provided with a step through hole, a product rotating frame connecting shaft 71 extends out of the through hole, the upper end of the product rotating frame connecting shaft 71 is provided with a necking down, and the lower section of the product rotating frame connecting shaft is provided with two stages of step shafts. The lower section of the connecting shaft is sleeved with a second deep groove ball bearing 70, a step convex shoulder at the lower section of the connecting shaft abuts against the upper end of an inner ring of the bearing, the deep groove ball bearing 70 is sleeved with a bearing sleeve 69, and an upper end face flange of the bearing sleeve is fixedly connected with the lower end face of the upper disc 20-1 of the jig by screws. The inner ring shoulder of the lower end face of the bearing sleeve is against the lower end face of the outer ring of the bearing, the outer edge of the central stepped hole of the lower end face of the upper disc 20-1 of the jig is against the upper end of the outer ring of the bearing, and the upper linkage seat 68 is sleeved on the stepped shaft at the front end of the lower section of the product rotating frame connecting shaft 71 and fixedly connected by a screw 67. The end face gear teeth of the upper linkage seat 68 are meshed with the end face gear teeth of the lower linkage seat 64. The lowest layer of the product rotating frame 66 is a disc-shaped rotating frame chassis 66-1, a plurality of layers of supports are fixedly connected on the disk-shaped rotating frame chassis, and the sheet-shaped workpieces are respectively inserted into the trays of each layer. The rotary frame chassis 66-1 is sleeved in the upper end of the product rotary frame connecting shaft 71 to be necked down and is seated on the shoulder of the stepped shaft ring. The upper end face of the connecting shaft locks the rotating frame chassis 66-1 by a locking cover 72. When the product rotating frame 66 on the product jig 20 is full of workpieces, the lower end face of the upper disc 20-1 of the jig is lifted by the material taking fork plate 21, and the product rotating frame on the lower end face is conveyed to the lower part of the bottom of the deposition process cavity and is positioned right above the inner sealing plate 47 of the rotary manipulator on the lifting supporting bracket of the lifting manipulator, at the moment, the lifting manipulator slowly rises, the middle limiting ring 52 is sleeved in the cylinder of the jig cylinder base 20-2, so that the product jig 20 is stably seated on the inner sealing plate 47, namely, the inner sealing plate 47 already lifts the product jig 20. At this time, the material taking fork plate 21 is not stressed and then is separated and retracted. Then, the rotary pressing cylinder 48 is started to convert the piston rod 48-1 of the rotary pressing cylinder from the original rising state of the elbow outwards to the state of the elbow turning inwards and falling the outer bottom ring shoulder of the cylindrical base 20-2 of the pressing jig, so that the product jig 20 is fixed. Then, the jacking manipulator ascends until the outer sealing plate 45 and the inner sealing plate 47 reach the outer and inner cavity sealing positions of the deposition process cavity 2 at the same time, and the outer and inner cavity sealing positions are properly pressed to complete sealing. During film coating, the third servo motor 57 is started to drive the lower linkage seat 64 to rotate, and the upper linkage seat 68 is dragged to rotate through meshing of the gear teeth, so that the whole workpiece rotating frame is driven to rotate, and uniform film coating of the workpiece is facilitated.
Claims (10)
1. The workpiece conveying manipulator of the mass production type ALD device is characterized by comprising a three-axis manipulator for transferring a product jig among stations, wherein the product jig refers to the whole workpiece rotating frame after a workpiece is loaded;
the three-axis manipulator comprises an integral left-right translational motion assembly, a material taking fork plate rotational motion assembly and a material taking fork plate translational motion assembly;
the material taking fork plate translational motion assembly comprises a material taking fork plate, the front end of the material taking fork plate translational motion assembly is provided with a fork opening used for being matched with the lower portion of a product jig to lift the material taking fork plate, the fork opening is used for driving the material taking fork plate to perform translational motion along the length direction of the material taking fork plate, the material taking fork plate translational motion assembly is installed on the material taking fork plate rotational motion assembly, the material taking fork plate rotational motion assembly is used for driving the whole rotational motion of the material taking fork plate translational motion assembly, the material taking fork plate rotational motion assembly is installed on the whole left-right translational motion assembly, the whole left-right translational motion assembly comprises a guide rail, and the whole left-right translational motion assembly is used for driving the material taking fork plate rotational motion assembly on the material taking fork plate rotational motion assembly and the whole material taking fork plate translational motion assembly to perform translational motion along the guide rail.
2. A workpiece conveying manipulator as claimed in claim 1, wherein the overall left-right translational movement assembly employs a linear module assembly disposed side-by-side with the guide rail as a power source to drive the material taking fork plate rotational movement assembly and the material taking fork plate translational movement assembly to move in a translational manner overall along the guide rail.
3. The work piece conveying robot of claim 1, wherein the take-out fork plate rotating motion assembly comprises a reducer base (33), a second servo motor (37), an RV reducer (39), an RV reducer follower top plate (25); second servo motor (37) pass through speed reducer seat (33) are installed on the slider of guide rail, and hoist and mount two between the guide rail, RV speed reducer (39) are fixed on speed reducer seat (33), the input with the output of second servo motor (37) links to each other, RV speed reducer follow-up roof (25) are installed the output of RV speed reducer (39).
4. The workpiece conveying manipulator as claimed in claim 1, wherein the material taking fork plate translational motion assembly comprises the material taking fork plate (21), an upper guide rail slide block (26), an upper guide rail (27), a first servo motor (34), a rack (35) and a driving gear (36);
two sets of upper guide rail slider (26) are fixed respectively the both sides of RV speed reducer follow-up roof (25), two wherein, two upper guide rail (27) are detained respectively upper guide rail (27) link firmly get material fork plate (21) lower extreme face long limit both sides, first servo motor (34) are installed on RV speed reducer follow-up roof (25), be located two sets of between upper guide rail slider (26), its pivot is located the side and links firmly drive gear (36), this drive gear (36) with along long limit install get rack (35) interlock of material fork plate (21) below.
5. The workpiece conveying robot of any one of claims 1-4, further comprising a jacking robot and a rotary robot, wherein the rotary robot is fixed on the jacking robot and located below the deposition process chamber in the deposition station, and is used for matching and carrying the product jigs conveyed by the three-axis robot and driving the workpiece rotating frames in the product jigs to rotate, and a sealing plate is arranged on the rotary robot, and under the matching of the jacking robot, the rotary robot lifts the product jigs to be conveyed into the deposition process chamber and seals the deposition process chamber through the sealing plate by means of the pressure of the jacking robot.
6. The work conveying robot of claim 5, wherein the jacking robot includes a vertical lift assembly and a lift support assembly;
the vertical lifting assembly comprises a Z-axis driving motor (12), a speed reducer (13), a worm gear (15), a ball screw (53-1), a Z-axis sliding block (16), a Z-axis guide rail (17) and a synchronizing rod (19);
the left side and the right side of the deposition station are respectively provided with two Z-axis sliding rails (17) which are vertically arranged in a front-back mode, four Z-axis sliding blocks (16) are respectively buckled on the four Z-axis sliding rails (17), the worm gear (15) is arranged between the two Z-axis sliding rails (17) which are arranged in the front-back mode on the two sides and is located at the lower end of the guide rail, the horizontally-placed worm gear is connected with the vertical ball screw (53-1), the transverse worm of the worm gear (15) on one side of the deposition station is connected with the speed reducer (13) through a coupler and then is connected with the Z-axis driving motor (12), the other end of the transverse worm is connected with the synchronizing rod (19) through a coupler, the other end of the synchronizing rod (19) extends to the opposite side of the deposition station and is connected with the corresponding end of the transverse worm of the worm gear (15) on the opposite side through a coupler;
the lifting support assembly comprises a lifting moving frame and a lifting support bracket;
the lifting moving frame is arranged on the Z-axis sliding blocks (16) on two sides and is sleeved on the ball screw (53-1) through a ball screw nut (53-3) on the lifting moving frame;
the lifting support bracket comprises two lifting transverse plates (43) which are distributed in tandem and are respectively connected with the lifting moving frame at two sides of the deposition station to form a parallel bar for lifting.
7. The workpiece conveying robot of claim 6, wherein the lifting moving frame comprises a Z-axis moving frame horizontal plate (56-1), a Z-axis moving frame side vertical plate (56-2), a Z-axis moving frame reinforcing plate (56-3), a Z-axis moving frame back vertical plate (56-4) and the ball screw nut (53-3);
the Z-axis moving frame comprises a Z-axis moving frame horizontal plate (56-1), a Z-axis moving frame back vertical plate (56-4), a T-shaped plate extending section, two Z-axis moving frame side vertical plates (56-2), a bottom plate and a top plate, wherein the Z-axis moving frame horizontal plate (56-1) is a T-shaped plate which is horizontally placed, an upper notch is formed in the middle of the Z-axis moving frame back vertical plate (56-4), the T-shaped plate extending section just penetrates through the upper notch to extend forwards, two ends of a field of the T-shaped plate and two sides of the Z-axis moving frame back vertical plate (56-4) are connected at two sides to form a two-layer cabinet lattice structure which lacks the bottom plate and the top plate, a Z-axis moving frame reinforcing plate (56-3) is a right trapezoid, the T-shaped plate is connected with the T-shaped plate from the extending section of the upper notch and the corresponding side of the notch in the Z-axis moving frame back vertical plate (56-4) to play a role of reinforcing ribs, a through hole is formed in the T-shaped plate extending section, and a ball screw nut (53-3) is fixedly connected in the T-shaped plate.
8. The work conveying robot according to claim 7, wherein the rotary robot includes an outer seal plate (45), an inner seal plate (47), the inner seal plate (47) and the outer seal plate (45) being disposed one above the other and connected by a cylinder, the cylinder accommodating therein a rotary pressing member and a rotary driving member;
the rotary compaction part comprises a plurality of rotary compaction cylinders (48) which are uniformly distributed close to the inner wall of the cylinder, piston rods (48-1) of the rotary compaction cylinders hermetically penetrate through holes in the inner sealing plate (47), one-way elbows are arranged at penetrating ends of the piston rods, and after the rotary compaction cylinders (48) are started, the piston rods (48-1) of the rotary compaction cylinders are changed from an original rising state with the elbows facing outwards to a falling compaction state with the elbows facing inwards so as to be matched with the product jig to fix the product jig on the inner sealing plate (47);
the rotary driving component comprises a third servo motor (57), a second speed reducer (58), a linkage seat (64) and a rotary magnetic fluid (65);
the upper end face of the rotating magnetic fluid (65) is connected with the lower end face of the inner sealing plate (47) in a sealing mode, the upper end of a rotating shaft of the rotating magnetic fluid (65) penetrates out of a center hole of the inner sealing plate (47) and is fixedly connected with the linkage seat (64), gear teeth are arranged on the upper end face of the linkage seat (64), and the lower end of the rotating shaft of the rotating magnetic fluid (65) is connected with the second speed reducer (58) through a coupler and then is connected with the third servo motor (57).
9. The workpiece conveying manipulator as claimed in claim 8, wherein the upper end face of the inner sealing plate (47) is further provided with a positioning structure for centering and limiting in cooperation with the product jig.
10. The utility model provides a volume production type ALD device of case is toasted in configuration, volume production type ALD device toasts the station, goes up unloading station and a plurality of deposition station including toasting the station, toasts the station and sets up side by side with the deposition station, goes up unloading station then arranges into the L type with them, toast the case set up in toast the station, the deposition station is equipped with the deposition process chamber, adopt vertical multilayer clamping work piece revolving rack to load the work piece in the deposition process chamber, and volume production type ALD device accomplishes through any one of claims 1-9 triaxial manipulator go up the transfer of unloading station, toasting between the station, the deposition station product tool.
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| CN106808470A (en) * | 2017-03-24 | 2017-06-09 | 合肥工业大学 | A kind of sucked type automatic loading/unloading rotating machine arm |
| CN110323151A (en) * | 2018-03-30 | 2019-10-11 | 台湾积体电路制造股份有限公司 | Semiconductor manufacturing facility and semiconductor making method |
| CN109129545A (en) * | 2018-08-21 | 2019-01-04 | 合肥工业大学 | A kind of cylindrical coordinate type automatic loading and unloading manipulator |
| CN112359341A (en) * | 2020-11-11 | 2021-02-12 | 广东汇成真空科技股份有限公司 | Side manipulator for conveying workpiece hanging plate of large vacuum coating machine |
| CN214422744U (en) * | 2020-11-11 | 2021-10-19 | 广东汇成真空科技股份有限公司 | Side manipulator for conveying workpiece hanging plate of large vacuum coating machine |
| CN215050642U (en) * | 2021-07-27 | 2021-12-07 | 苏州清越光电科技股份有限公司 | Evaporation plating equipment |
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