CN216585188U - Workpiece hanging plate fixing frame pull-out mechanism for large vacuum coating machine - Google Patents

Abstract

A workpiece hanging plate fixing frame pull-out mechanism for a large-scale vacuum coating machine is characterized in that a transition cabin and a coating process cabin which are adjacent are arranged in the vacuum coating machine, and a gate valve is arranged between the two to separate the two; a process rotating frame which is a vertical polygonal cylindrical shell is arranged in the coating process cabin and fixed on a vertical rotating shaft of the process rotating frame, and each side surface of the cylindrical shell is provided with a hook capable of hooking the workpiece hanging plate; a plum blossom-shaped rotating frame for storing the workpiece hanging plates is arranged in the transition cabin and is fixed on a vertical rotating shaft of the plum blossom-shaped rotating frame, a vertical workpiece hanging plate fixing frame is arranged on the plum blossom-shaped rotating frame, the workpiece hanging plates can be hooked on the workpiece hanging plate fixing frame, and the workpieces are attached to the outer sides of the workpiece hanging plates; the workpiece hanging plate fixing frame pulling mechanism is used for pulling the workpiece hanging plate fixing frame out of the quincuncial rotating frame along the sliding rail; and the manipulator for moving and conveying the workpiece hanging plate is used for moving and conveying the workpiece hanging plate back and forth between the transition cabin and the process cabin. The machine has the advantages of simplified structure, low cost, convenient use and low failure rate.

Description

Workpiece hanging plate fixing frame pull-out mechanism for large vacuum coating machine

Technical Field

The utility model relates to an internal mechanism of a vacuum coating machine, in particular to a workpiece hanging plate fixing frame pulling-out mechanism for a large-scale vacuum coating machine.

Background

The technical development trend of vacuum coating equipment is to improve the productivity and efficiency and to improve the quality and stability of the coated product. The productivity and efficiency are improved, so that the equipment design is larger and larger, the loading capacity is more and more, and a single workpiece hanger is larger and heavier; in order to improve the quality and stability of the film, besides introducing a new coating technology and a new coating process, one of the most basic requirements is to control the stability of the coating atmosphere in the furnace to be unchanged, that is, to ensure that the residual gas in each furnace is reduced to the minimum and the consistency is kept unchanged. Therefore, the most effective means is that the film coating and the workpiece loading and unloading are carried out in vacuum without breaking the vacuum, so that each heat is carried out in the same vacuum environment, the atmosphere in the furnace is not polluted by atmosphere due to vacuum breaking, the consistency of residual atmosphere between furnaces can be maintained, and the quality and consistency of the film layer can be greatly improved.

Therefore, in recent years, vacuum coating equipment has been developed in large size and multi-chamber. When the multi-chamber configuration, wherein the coating process chamber is always kept in a vacuum state, the multi-chamber configuration is connected with the feeding chamber and the discharging chamber through vacuum valves, a workpiece is fed into the coating chamber from the feeding chamber in the vacuum state, and the workpiece is moved out to the discharging chamber in the vacuum state after the coating process is finished. On one hand, the equipment is large in size, the number of hangers for hanging the workpieces is large, the size of the hangers is large, and the weight of the hangers for hanging the workpieces is heavy. The hangers are transferred to the rotary cabin in a vacuum state and must be completed by a manipulator. In order to adapt to the development trend of the current vacuum coating equipment, vacuum manipulators suitable for various purposes need to be developed. Therefore, a plurality of manipulators are required to be arranged on the multi-cabin type coating equipment, the equipment is very complex and large, and the manufacturing cost is very high.

In addition, the design of the multi-cabin coating machine often separates a feeding cabin from a discharging cabin, a feeding moving frame and a discharging moving frame are needed respectively, and a plurality of mechanical arms are correspondingly adopted, so that the designed equipment is complex in structure, high in manufacturing cost, inconvenient to use and high in failure rate.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem of providing a workpiece hanging plate fixing frame pulling-out mechanism for a large-scale vacuum coating machine, which has the advantages of simple structure, low manufacturing cost, convenient use and few faults.

The technical scheme adopted by the utility model is as follows:

the utility model provides a work piece link plate mount pull-out mechanism for large-scale vacuum coating machine, characterized by includes:

the horizontal rodless cylinder 40 is arranged on the base, the vertical rodless cylinder 43 is arranged on the horizontal sliding block 41 of the horizontal rodless cylinder, the vertical sliding block 42 of the vertical rodless cylinder is provided with a vertical horizontal and up-and-down moving plate 44, and the horizontal and up-and-down moving plate is provided with a downward extending pull column 45.

The fixing frame pull-out mechanism is arranged below the plum blossom-shaped rotating frame for storing the workpiece hanging plates and is arranged in parallel to the radial direction of the plum blossom-shaped rotating frame, the vertical horizontal and up-down moving plates just reach the height of a lower end hooking hole of the workpiece hanging plate fixing frame when rising, and when the piston of the horizontal rodless cylinder 40 extends forwards, the pull-out column can correspondingly reach the position above the upper hooking hole of the workpiece hanging plate fixing frame at the station.

Preferably, the horizontal slider 41 of the fixed frame pulling-out mechanism is arranged on a slide rail of the side vertical surface of the horizontal rodless cylinder 40, and the vertical slider 42 is arranged on a slide rail of the outer side wall of the vertical rodless cylinder 43.

Preferably, the horizontal and up-down moving plate 44 is an L-shaped vertical plate, the upper end of the vertical section of which is bent inward and provided with a downward pulling column 45, and the other end of the horizontal section is fixed on the vertical slide block 42 of the vertical rodless cylinder 43.

The vacuum coating machine is internally provided with an adjacent transition cabin 4 and a coating process cabin 1, and a gate valve 2 is arranged between the two cabins and is separated by a gate valve plate 3;

the coating process cabin is internally provided with:

the technological rotating frame 5 is a vertical polygonal cylindrical shell and is fixed on a vertical rotating shaft 6 of the technological rotating frame with a driving mechanism, and four hooks 9 capable of hooking the workpiece hanging plate I are arranged on each side surface of the cylindrical shell;

the transition cabin is internally provided with:

a plum blossom-shaped rotating frame IV for storing the workpiece hanging plates, which is fixed on a vertical rotating shaft 8 of the plum blossom-shaped rotating frame with a driving mechanism, a plurality of workpiece hanging plate fixing frames 51 which are vertical and can be pulled out of the plum blossom-shaped rotating frame along a sliding rail are arranged on the plum blossom-shaped rotating frame, the workpiece hanging plates can be hooked on the workpiece hanging plate fixing frames, and the workpieces needing film coating are attached to the outer sides of the workpiece hanging plates;

the fixing frame pulling-out mechanism III is used for pulling the workpiece hanging plate fixing frame out of the quincuncial rotating frame along the sliding rail;

and the moving and conveying manipulator II is used for moving and conveying the workpiece hanging plates back and forth between the transition cabin and the process cabin.

Preferably, the mobile transfer workpiece hanging plate robot comprises:

a vertical swiveling and horizontal moving mechanism comprising: a fixed plate linear guide rail slider mechanism and a fixed plate screw nut driving linear motion mechanism are arranged on the bottom surface of the horizontal fixed bottom plate 27 and the top surface of the supporting plate, so that the fixed bottom plate and the supporting plate can move back and forth relatively, the bottom surface of the supporting plate is fixed on a vertical rotary shaft 7 of a vertical rotary and horizontal moving mechanism with a driving mechanism, and the horizontal moving mechanism and a component carried on the horizontal moving mechanism can rotate vertically as a whole;

a mobile rack assembly, comprising: a supporting frame 19, which is fixedly erected on the fixed bottom plate 27, the supporting frame 19 is of a truss structure, the front vertical surface of the supporting frame is provided with an erected front mounting plate 19-1, the middle part of the front mounting plate is provided with a central plate assembly, and the supporting frame comprises: a front vertical plate 24 and a rear vertical plate 24-1 of a central plate which are vertically and parallelly arranged are fixedly connected through a transverse plate 24-2, the front vertical plate and the rear vertical plate of the central plate are respectively positioned at the front and rear parts of a front mounting plate, a vertically protruding guide post 25 is respectively arranged above and below the front vertical line of the front vertical plate of the central plate, a horizontal rear vertical plate linear guide rail sliding block mechanism and a cylinder driving linear motion mechanism are arranged in front of the rear vertical plate of the central plate and behind the front mounting plate, so that the rear vertical plate of the central plate and the fixedly connected front vertical plate can relatively move left and right relative to the front mounting plate;

an up-down moving plate mechanism comprising: an upper moving plate 15 and a lower moving plate 18 which are vertically arranged in the same plane, wherein the upper end part of the upper moving plate is provided with an upper claw lock plate 14 which extends forwards, and the front end of the upper moving plate is fixed with a downward upper claw block 13; correspondingly, the lower end part of the lower moving plate is provided with a lower claw block locking plate 17 which extends forwards, and the front end of the lower claw block locking plate is fixed with an upward lower claw block 16; the lower part of the upper moving plate is provided with a long through hole which inclines upwards from left to right, and the long through hole is sleeved on a guide post of a front vertical plate of the central plate at the back of the upper moving plate; two pairs of moving plate sliding blocks 23 are fixedly connected to the back of the upper moving plate and are respectively sleeved on two vertical moving plate sliding rails 22 which are vertically fixed on the supporting frame side by side in an up-and-down mode, so that the upper moving plate can be limited to move up and down relative to the supporting frame; symmetrically, the upper part of the lower moving plate close to the lower moving plate is provided with a long through hole which inclines downwards from left to right and is sleeved on the other guide post of the front vertical plate of the central plate at the back of the upper moving plate; two pairs of movable plate sliding blocks are fixedly connected to the back of the lower portion of the lower movable plate, and are respectively sleeved on the other two vertical movable plate sliding rails which are vertically fixed on the supporting frame side by side in an up-and-down mode, so that the lower movable plate can be limited to move up and down relative to the supporting frame.

Preferably, the fixed bottom plate linear guide slider mechanism of the vertical rotation and horizontal movement mechanism of the moving and conveying workpiece hanging plate manipulator is as follows: the two sides of the bottom surface of the fixed bottom plate are correspondingly fixedly connected with linear parallel manipulator guide rails 28, and manipulator sliding blocks 29 which are in sliding fit with the manipulator guide rails are connected with heightening blocks 30 and fixed on the top surface of a supporting plate 31.

Preferably, the fixed base plate screw nut driving linear motion mechanism is: the nut 34 is fixed on the top surface of the supporting plate 31, two ends of the screw rod 35 are supported by the deep groove ball bearings fixed on the bottom surface of the fixed bottom plate 27, the driving motor is also fixed on the bottom surface of the fixed bottom plate, and the output shaft of the driving motor is connected with the screw rod 35.

Preferably, the workpiece hanging plate I is a vertical rectangular hanging plate 11, hook holes are formed in four corners of the workpiece hanging plate I, the front face and the rear face of each hook hole are respectively blocked by a first hook locking plate 10 and a second hook locking plate 12, a hook hole is formed in the center of each first hook locking plate in a digging mode, the shape of each first hook locking plate is a lower circle, and the upper end of each first hook locking plate is a narrowed slotted hole.

Preferably, the reserve work piece link plate plum blossom revolving rack do: a vertical central support 47 supported on the vertical revolving shaft 8 of the plum blossom-shaped revolving rack, wherein a horizontal upper plum blossom-shaped revolving rack plate 46 and a horizontal lower plum blossom-shaped revolving rack plate 48 are correspondingly fixed on the upper part and the lower part of the plum blossom-shaped revolving rack, a plurality of vertical plate strips extending along the radius direction are radially arranged on the bottom surface of the upper plum blossom-shaped revolving rack plate and the top surface of the corresponding lower plum blossom-shaped revolving rack plate from the revolving shaft center outwards, and a horizontally corresponding sliding rail 49 of the plum blossom-shaped revolving rack is fixed on the same side of the upper vertical plate strip and the lower vertical plate strip; the workpiece hanging plate fixing frame 51 is a rectangular vertical plate, a sliding block 50 which is fixed and is matched and slidably connected with the quincunx revolving frame sliding rail is arranged at the position, corresponding to the quincunx revolving frame sliding rail, of the upper end and the lower end of the back surface of the workpiece hanging plate fixing frame, a hook 9 is arranged outside the front surface of the vertical plate and used for hooking the workpiece hanging plate, and the workpiece hanging plate is located outside the upper plate and the lower plate of the circular quincunx revolving frame and can be conveniently taken down when the workpiece hanging plate fixing frame is pulled out in a sliding mode along the radius direction to reach a station position for taking/hanging the workpiece hanging plate; the outer side edge of the lower end of the workpiece hanging plate fixing frame is fixedly connected with a pulling-out block 52, and a vertical pulling-out hole is drilled on the pulling-out block.

Preferably, the vertical central support 47 is a standpipe.

Has the advantages that: the design of the existing multi-cabin film plating machine often separates a feeding cabin and a discharging cabin, so that the design is too complicated, the utility model simplifies the two cabins into a transition cabin, combines an original feeding moving frame and an original discharging moving frame into a moving frame, and originally changes a plurality of manipulators into one manipulator, so that the designed equipment has the advantages of simplified structure, low manufacturing cost, convenient use and low failure rate.

Drawings

The present invention will be described in further detail with reference to the accompanying drawings and examples.

FIG. 1 is a schematic cross-sectional view of an embodiment of a large vacuum coater of the present invention;

FIG. 2 is a schematic top view of the workpiece hanging plate fixing frame pulled out by the fixing frame pulling-out mechanism;

FIG. 3 is a schematic plan view of the workpiece hanging plate advanced by the moving conveying manipulator;

FIG. 4 is a schematic plan view of the state of the workpiece hanging plate conveyed by the movable conveying manipulator retreating and shifting;

FIG. 5 is a schematic top view of the state that the movable conveying manipulator goes deep into the process cabin to mount the workpiece hanging plate;

FIG. 6a is a schematic front view of the workpiece hanging plate of FIG. 1I;

FIG. 6b is a schematic cross-sectional view of the workpiece suspending plate of FIG. 1I;

FIG. 6c is a rear view of the workpiece hanging plate of FIG. 1I;

FIG. 6d is an enlarged partial cross-sectional view of FIG. 6 c;

FIG. 7a is a schematic cross-sectional view of the workpiece suspending plate moving and transferring robot shown in FIG. 1 II;

FIG. 7b is a partial front view of the workpiece suspending plate moving and transferring robot shown in FIG. 1;

FIG. 7c is a schematic front view of the workpiece suspending plate moving and transferring robot of FIG. 1B after removing the front upper and lower moving plates;

FIG. 8a is a schematic front view of the drawing mechanism of the workpiece suspending plate fixing frame of FIG. 1;

FIG. 8b is a left side view of the drawing mechanism of the workpiece suspending plate fixing frame of FIG. 1;

FIG. 9a is a schematic cross-sectional view of the plum blossom-shaped revolving rack of the IV storing workpiece hanging plate in FIG. 1;

FIG. 9b is a schematic partial cross-sectional view of the plum blossom-shaped revolving rack of the IV storing workpiece hanging plate in FIG. 1;

FIG. 9c is a partial enlarged view of one of the portions of FIG. 9 b;

fig. 9d is a second partial enlarged view of fig. 9 b.

Main other part names:

a film coating process cabin 1, a gate valve 2, a gate valve plate 3, a transition cabin 4, a process rotating frame 5, a process rotating frame vertical rotating shaft 6, a vertical rotating and horizontal moving mechanism vertical rotating shaft 7, a stored workpiece hanging plate plum blossom rotating frame vertical rotating shaft 8, a hook 9, a hook hole 9-1, a first hook locking plate 10, a workpiece hanging plate 11, a second hook locking plate 12, an upper claw block 13, an upper claw block locking plate 14, an upper moving plate 15, a lower claw block 16, a lower claw block locking plate 1, a lower moving plate 18, a supporting frame 19, a front mounting plate 19-1, a central plate rear vertical plate linear guide sliding block mechanism horizontal sliding rail 20, a central plate rear vertical plate linear guide sliding block mechanism horizontal sliding block 21, an upper moving plate sliding block sliding rail 22, an upper moving plate sliding block 23, a central plate front plate 24, a central plate rear plate 24-1, a central plate transverse support plate 24-2, a guide column 25 and a horizontal air cylinder 26, the device comprises a fixed bottom plate 27, a manipulator guide rail 28, a manipulator sliding block 29, an elevating block 30, a support plate 31, a first bearing seat 32, a first deep groove ball bearing 33, a nut 34, a screw rod 35, a second bearing seat 36, a second deep groove ball bearing 37, a coupler 38, a servo motor 39, a horizontal rodless cylinder 40, a pulling cylinder sliding block 41, a pulling cylinder sliding block 42, a vertical rodless cylinder 43, a horizontal and upper and lower moving plate 44, a pulling column 45, a quincunx turret upper plate 46, a central support 47, a quincunx turret lower plate 48, a quincunx turret sliding rail 49, a sliding block 50, a workpiece hanging plate fixing frame 51 and a pulling block 52.

Detailed Description

The following describes a specific structure of the present invention with reference to the drawings.

FIG. 1 is a front view of an embodiment of a large-scale vacuum coating machine with a section, which shows that a transition chamber 4 and a coating process chamber 1 are arranged in the vacuum coating machine, a gate valve 2 is arranged in the middle for separation, and the two chambers are communicated or separated by opening or closing a gate valve 3.

The film coating process chamber 1 is a film coating chamber, and a process rotating frame 5 is arranged in the center of the chamber and is driven to rotate by a process rotating frame vertical rotating shaft 6 with a driving mechanism. The process rotating frame 5 is a vertical polygonal cylindrical shell and is fixed on a vertical rotating shaft 6 of the process rotating frame, and four hooks 9 capable of hooking the workpiece hanging plate I are arranged on each side surface of the cylindrical shell. The workpiece hanging plate I is hung on a hook 9 of the process rotating frame 5, and a workpiece to be plated is pasted on the outer side surface of the workpiece hanging plate I. And when the valve is closed, film coating operation is carried out, and when the valve is opened, the coated workpiece hanging plate is taken out and the workpiece hanging plate to be coated is mounted.

The transition cabin 4 is a turnover cabin, is provided with a plum blossom rotating frame IV for storing workpiece hanging plates, is fixed on a vertical rotating shaft 8 of the plum blossom rotating frame with a driving mechanism, is provided with a plurality of workpiece hanging plate fixing frames 51 which are vertical and can be pulled out of the outer side of the plum blossom rotating frame along a sliding rail, can hook the workpiece hanging plate I on the workpiece hanging plate fixing frames, and a workpiece needing film coating is attached to the vertical surface of the outer side of the workpiece hanging plate I. When a valve of the coating process cabin is closed, a cabin door of the transition cabin can be opened, a workpiece hanging plate to be coated is hooked on a workpiece hanging plate fixing frame for storing the workpiece hanging plate plum blossom rotating frame IV from the outside of the furnace, or the coated workpiece hanging plate is taken out of the furnace from the workpiece hanging plate fixing frame for storing the workpiece hanging plate plum blossom rotating frame IV.

In addition, a fixed frame pulling-out mechanism III and a workpiece hanging plate moving and conveying manipulator II are further arranged in the transition cabin 4.

The fixed frame pulling-out mechanism is arranged below a rotating chassis of the quincuncial rotating frame so as to facilitate the fixed frame pulling-out mechanism to pull the workpiece hanging plate fixed frame on the quincuncial rotating frame out of the outer side of the rotating frame. The manipulator is arranged between the inserting plate valve 3 and the plum blossom rotating frame IV, so that the manipulator can conveniently take and deliver the workpiece hanging plate from the position between the process rotating frame in the process cabin and the plum blossom rotating frame in the transition cabin.

Fig. 2 to 5 are schematic top views of the work process of the robot for moving and conveying the workpiece hanging plates, which show the whole process that the workpiece hanging plate moving and conveying robot takes out the workpiece hanging plates from the quincunx rotating frame of the transition cabin, conveys the workpiece hanging plates to the process cabin and loads the workpiece hanging plates to the process rotating frame.

Fig. 2 shows a situation where the fixing frame pull-out mechanism pulls out the workpiece hanging plate fixing frame 51 on the quincunx rotating frame from the original station (inside of the radial slide rail) to the outside of the rotating frame (outside of the radial slide rail). The upper and lower parts of each station of the plum blossom-shaped rotating frame are correspondingly provided with horizontal fixed slide rails 49 (see figure 9b), each station is provided with a set of movable vertical plate-shaped workpiece hanging plate fixing frame 51 which can be pulled out, the upper and lower ends of the workpiece hanging plate fixing frame are provided with slide blocks 50 corresponding to the station slide rails, the slide blocks are sleeved in the slide rails and can slide relatively, and the workpiece hanging plate fixing frame 51 can be pulled out from the original position to the outer side of the plum blossom-shaped rotating frame through a workpiece hanging plate fixing frame pull-out mechanism III, as shown in figures 3, 4, 5 and 8. A workpiece hanging plate I is hooked on the outward vertical face of the workpiece hanging plate fixing frame 51, and a workpiece needing film coating is attached to the outer vertical face of the workpiece hanging plate I. At this time, the moving conveying manipulator II is in a retreating position facing the workpiece hanging plate I.

Fig. 3 shows the situation that the workpiece hanging plate I is taken down by the moving conveying manipulator II. The moving conveying manipulator II moves forwards to the position near the workpiece hanging plate towards the workpiece hanging plate, the upper grabbing block and the lower grabbing block of the manipulator clamp the workpiece hanging plate, and the workpiece hanging plate is separated from a hook on the workpiece hanging plate fixing frame. And the moving conveying manipulator II retreats to move the workpiece hanging plate away from the workpiece hanging plate fixing frame 51.

FIGS. 4 and 5 show that a moving conveying mechanical arm II clamps a workpiece hanging plate I and retreats to a proper position, turns to face the workpiece hanging plate I and extends into a process cabin, a gate valve is opened, the process cabin is communicated with a transition cabin, the moving conveying mechanical arm II clamps the workpiece hanging plate I to extend forwards, the workpiece hanging plate I enters the process cabin through a valve port, the hanging plate is conveyed to an empty station of a process rotating frame and is hung on a corresponding hook, the moving conveying mechanical arm II retreats a bit after being hung firmly, the process rotating frame rotates for a station angle to enable a plated workpiece hanging plate I to face a mechanical arm II, the mechanical arm II extends forwards to the workpiece hanging plate I to enable the workpiece hanging plate I to be separated from the hook on the process rotating frame, the workpiece hanging plate I is clamped and retreated, the process cabin is withdrawn, the actions are repeated in a reverse order, namely, the clamped workpiece hanging plate I faces to a workpiece hanging plate fixing frame 51 outside the vacated plum blossom rotating frame in a reverse rotating direction, the workpiece hanging plate I moves forwards to be close to the workpiece hanging plate 51 and is hung on the workpiece hanging plate, and the manipulator II loosens the upper and lower grabbing blocks and retreats to be completely separated from the workpiece hanging plate I and return to the original position. The workpiece hanging plate fixing frame pulling-out mechanism III pushes the workpiece hanging plate fixing frame 51 inwards from the outer side of the plum blossom rotating frame IV, and the workpiece hanging plate fixing frame returns to the original station by sliding the upper sliding rail and the lower sliding rail on the station sleeved by the upper sliding block and the lower sliding block.

Fig. 6a to 6d are schematic views of the workpiece hanging plate i in fig. 1, showing the structure of the workpiece hanging plate. It is a vertical rectangular plate, the four end corners are opened with hook holes, fig. 6d is a cross-sectional enlarged schematic view of the hook hole structure, which shows the hook hole structure, and it includes a first hook locking plate 10, a hanging plate 11, a hook hole and a second hook locking plate 12. The first hook locking plate 10 is a square thin plate, a hook hole is dug in the center of the first hook locking plate, the shape of the hook hole is a lower circle, the upper end of the hook hole is a narrowed slotted hole which is a through hole, and four corners of the first hook locking plate 10 are fixedly connected on the hanging plate 11 through four screws. The hanging plate 11 is provided with a corresponding through hole corresponding to the hook hole, the second hook locking plate 12 is arranged on the back of the hanging plate 11 at the corresponding position of the first hook locking plate 10, the size of the second hook locking plate is the same as that of the first hook locking plate, the second hook locking plate is a sealing plate and blocks the through hole of the hanging plate 11, and the four corners of the second hook locking plate are fastened on the hanging plate 11 by screws.

Fig. 7a to 7c are schematic diagrams of the workpiece hanging plate moving and conveying robot of fig. 1 ii, which show the structure of the workpiece hanging plate moving and conveying robot, and have three views: the robot comprises an integral side sectional view, a view of an up-and-down moving plate in a front view direction and a front view of a manipulator with the up-and-down moving plate removed.

Remove conveying work piece link plate manipulator includes: a vertical swiveling and horizontal moving mechanism comprising: a fixed plate linear guide rail slider mechanism and a fixed plate screw nut driving linear motion mechanism are arranged on the bottom surface of the horizontal fixed bottom plate 27 and the top surface of the supporting plate, so that the fixed bottom plate and the supporting plate can move back and forth relatively, the bottom surface of the supporting plate is fixed on a vertical rotary shaft 7 of a vertical rotary and horizontal moving mechanism with a driving mechanism, and the horizontal moving mechanism and a component carried on the horizontal moving mechanism can rotate vertically as a whole;

a mobile rack assembly, comprising: a supporting frame 19, which is fixedly erected on the fixed bottom plate 27, the supporting frame 19 is of a truss structure, the front vertical surface of the supporting frame is provided with an erected front mounting plate 19-1, the middle part of the front mounting plate is provided with a central plate assembly, and the supporting frame comprises: a front vertical plate 24 and a rear vertical plate 24-1 of a central plate which are vertically and parallelly arranged are fixedly connected through a transverse plate 24-2, the front vertical plate and the rear vertical plate of the central plate are respectively positioned at the front and rear parts of a front mounting plate, a vertically protruding guide post 25 is respectively arranged above and below the front vertical line of the front vertical plate of the central plate, a horizontal rear vertical plate linear guide rail sliding block mechanism and a cylinder driving linear motion mechanism are arranged in front of the rear vertical plate of the central plate and behind the front mounting plate, so that the rear vertical plate of the central plate and the fixedly connected front vertical plate can relatively move left and right relative to the front mounting plate;

an up-down moving plate mechanism including: an upper moving plate 15 and a lower moving plate 18 which are vertically and symmetrically arranged in the same plane, wherein the upper end part of the upper moving plate is provided with an upper claw locking plate 14 which extends forwards, and the front end of the upper moving plate is fixed with a downward upper claw block 13; correspondingly, the lower end part of the lower moving plate is provided with a lower claw block locking plate 17 which extends forwards, and the front end of the lower claw block locking plate is fixed with an upward lower claw block 16; the lower part of the upper moving plate is provided with a long through hole which inclines upwards from left to right, and the long through hole is sleeved on a guide post of a front vertical plate of the central plate at the back of the upper moving plate; two pairs of moving plate sliding blocks 23 are fixedly connected to the back of the upper moving plate and are respectively sleeved on two vertical moving plate sliding rails 22 which are vertically fixed on the supporting frame side by side in an up-and-down mode, so that the upper moving plate can be limited to move up and down relative to the supporting frame; symmetrically, the upper part of the lower moving plate close to the lower moving plate is provided with a long through hole which inclines downwards from left to right and is sleeved on the other guide post of the front vertical plate of the central plate at the back of the upper moving plate; two pairs of movable plate sliding blocks are fixedly connected to the back of the lower portion of the lower movable plate, and are respectively sleeved on the other two vertical movable plate sliding rails which are vertically fixed on the supporting frame side by side in an up-and-down mode, so that the lower movable plate can be limited to move up and down relative to the supporting frame.

Preferably, the fixed bottom plate linear guide slider mechanism of the vertical rotation and horizontal movement mechanism of the mobile workpiece hanging plate conveying manipulator is as follows: the two sides of the bottom surface of the fixed bottom plate are correspondingly fixedly connected with linear parallel manipulator guide rails 28, and manipulator sliding blocks 29 in sliding fit with the linear parallel manipulator guide rails are fixed on the top surface of the supporting plate 31.

Preferably, the fixed base plate lead screw nut driving linear motion mechanism is: the nut 34 is fixed on the top surface of the supporting plate 31, two ends of the screw rod 35 are supported by the deep groove ball bearings fixed on the bottom surface of the fixed bottom plate 27, the driving motor is also fixed on the bottom surface of the fixed bottom plate, and the output shaft of the driving motor is connected with the screw rod.

The vertical rotation and horizontal movement mechanism is a power and transmission mechanism for the integral rotation angle and the front and back movement of the manipulator.

When the servo motor 39 is started, the screw rod 35 is driven to rotate. Since the nut 34 is fixedly connected to the support plate 31, the relative movement of the spindle is forced, i.e. the spindle system with the fixed base plate 27 is guided along the guide rail 28. The servo motor drives the fixed bottom plate 27 to extend forwards or retreat in a forward and reverse rotation mode. The screw and screw nut combination herein is contrary to conventional applications, where the nut is stationary and the screw moves relative to the nut. The lower end face of the supporting plate 31 is fixedly connected with the vertical rotating shaft 7 to drive the manipulator to integrally rotate.

The up-down moving plate mechanism is used for clamping and taking out a workpiece hanging plate and comprises an upper claw block 13, an upper claw block locking plate 14, an upper moving plate 15, a lower claw block 16, a lower claw block locking plate 17, a lower moving plate 18 and a moving plate sliding block 23. Fig. 7a to 7c show that an upper moving plate 15 and a lower moving plate 18 are vertically and symmetrically installed, an upper jaw locking plate 14 extending forward is provided at the upper end of the upper moving plate 15, and a downward upper jaw 13 is fixed at the front end thereof; correspondingly, the lower end of the lower moving plate 18 is provided with a lower claw lock plate 17 extending forward, and the front end thereof is fixed with an upward lower claw 16 and a moving plate slider 23. The lower part of the upper moving plate 15 is provided with a long through hole which is inclined upwards from left to right and is sleeved on a guide post 25 of a front vertical plate 24 of a central plate at the back of the upper moving plate 15. Two pairs of moving plate sliding blocks 23 are fixedly connected to the back of the upper portion of the upper moving plate 15, and are respectively sleeved on two vertical moving plate sliding rails 22 which are vertically arranged side by side and fixed on the supporting frame 19. Similarly, symmetrically, the upper portion of the lower moving plate 18 is provided with a long through hole which is inclined downwards from left to right and is sleeved on another guide post 25 of a front vertical plate 24 of a central plate at the back of the upper moving plate 18. Two pairs of moving plate sliding blocks 23 are fixedly connected to the back of the lower portion of the lower moving plate 18 and are respectively sleeved on two vertical moving plate sliding rails 22 which are vertically arranged and fixed on the supporting frame 19 side by side.

The moving bracket assembly rotates and moves along with the vertical rotation and horizontal moving mechanism, supports the upper moving plate assembly and the lower moving plate assembly, and also bears a driving and transmission mechanism for the upper moving plate assembly and the lower moving plate assembly to act. The device comprises a supporting frame 19, a front mounting plate 19-1, a horizontal slide rail 20, a horizontal slide block 21, a central plate front vertical plate 24, a central plate rear vertical plate 24-1, a central plate cross support plate 24-2, a guide post 25 and a cylinder 126. The supporting frame 19 is a vertical truss structure, welded by steel plates, with some parts hollowed out, and integrally vertically and fixedly connected to the fixing bottom plate 27. The upright front mounting plate 19-1 is erected on the supporting frame 19, the central plate assembly is arranged in the middle of the front mounting plate, and the foremost end is movably connected with the upper and lower movable plate assemblies. The up-down moving plate assembly is taken away, a central plate assembly is arranged in the middle of the up-down moving plate assembly, the central plate assembly is shown in a side view and is actually of a truss structure, the central plate assembly comprises a central plate front vertical plate 24 and a central plate rear vertical plate 24-1, and the two vertical plates are welded by two transverse plates 24-2. The front elevation shows that the central panel front upright 24 is an upright rectangular panel with a guide post 25 at each of the upper and lower portions of the upright central line. The inclined grooves of the upper and lower moving plates are sleeved in the inclined grooves, the rear vertical plate 24-1 is fixedly connected with an upper horizontal sliding block 21 and a lower horizontal sliding block 21 and is respectively sleeved on two parallel horizontal sliding rails 20, the horizontal sliding rails 20 are fixed on a front mounting plate 19-1 of a supporting frame 19, and a horizontal cylinder 26 is fixed on the supporting frame and drives the rear vertical plate 24-1 of the central plate to move, so that the central plate assembly is driven to horizontally move left and right along the guide of the horizontal sliding blocks 21/horizontal sliding rails 20 system. When the front vertical plate 24 of the central plate translates to the right, the upper guide post 25 moves to the right, so that the upper moving plate 15 which cannot move left and right is forced to be pushed by the guide post from the left to the right and descends along the limitation of the vertical moving plate slide rail 22/moving plate slide block 23 system; the lower moving plate 18 is pushed by the guide post 25 from left to right and ascends along the limit of the vertical moving plate slide rail 22/moving plate slide block 23 system; the two up-down moving plates are close to the middle. On the contrary, if the central plate front vertical plate 24 is translated from left to right, the upper moving plate 15 is pushed by the guide post 25 to ascend by the left-to-right upward chute, and the lower moving plate 18 is pushed by the guide post 25 to descend by the left-to-right downward chute; so that the two upper and lower moving plates are separated upward and downward from the middle. When the upper and lower moving plates are close to the middle, the upper and lower claw blocks are close to the middle, and the workpiece hanging plate 11 is clamped from the two ends of the hanging plate; when the upper and lower moving plates are separated upward and downward, the upper and lower claw blocks are separated upward and downward to loosen the workpiece hanging plate 11.

Referring to fig. 9a to 9b, on the workpiece hanging plate fixing frame 51 of the quincunx rotating frame and the process rotating frame 5, the workpiece hanging plate 11 is hung and hooked by the hook 9, and the workpiece hanging plate 11 is required to be separated from the hook 9 when being taken out. Therefore, the upper and lower moving plates are designed to be not completely symmetrical relative to the horizontal center line, and the lower moving plate 18 slightly shifts upwards (for the reason that the lower round hole of the workpiece hanging plate is a narrow slotted hole at the upper end, when the hanging plate is hung on the hook, the hook is just hooked at the top end of the narrow slotted hole, the hanging plate is firstly lifted up to a whole piece, the hook relatively descends to the lower round hole part of the hanging hole, and the upper hook is well separated from the hanging hole, so the upper and lower moving plates have the asymmetrical action design), when the front vertical plate 24 of the central plate translates from left to right, the lower claw block 16 of the lower moving plate 18 is closer to the bottom end surface of the hanging plate 11 than the upper claw block 13, so that the hanging plate 11 is lifted up a little bit earlier, at the moment, the hook 9 is positioned on the round hole with a big claw of the hanging hole 9-1, the upper claw block descends to contact the upper end surface of the hanging plate, the upper and lower claw blocks clamp the hanging plate 11 together, the hanging plate 11 can be smoothly separated from the hook 9.

Fig. 8a and 8b are schematic diagrams of a workpiece hanging plate fixing frame pulling-out mechanism iii shown in fig. 1, which is located below a workpiece hanging plate storage quincunx rotating frame iv and used for pulling out a workpiece hanging plate fixing frame 51 on a quincunx rotating frame iv station and a workpiece hanging plate 11 thereon from the outside of the rotating frame. The workpiece hanging plate fixing frame pulling-out mechanism comprises a horizontal rodless cylinder 40, a horizontal sliding block 41, a vertical sliding block 42, a vertical rodless cylinder 43, a horizontal and up-down moving plate 44 and a pulling-out column 45. The driving part of the assembly consists of two rodless cylinders, the horizontal rodless cylinder 40 is horizontally arranged and is responsible for transverse movement, and the horizontal sliding block 41 is positioned on a sliding rail of the side vertical surface of the horizontal rodless cylinder 40 and is dragged to slide left and right by the magnetic piston block in the cylinder. A vertical rodless cylinder 43 is fixedly connected to the horizontal sliding block 41 in a vertical mode and is responsible for vertical movement, a vertical sliding block 42 is movably connected to a sliding rail on the outer side wall of the vertical rodless cylinder 43, and the cylinder sliding block 42 is pulled down to slide up and down under the dragging of a magnetic piston in the vertical rodless cylinder 43. The outer side of the vertical sliding block 42 is fixedly connected with a horizontal and up-down moving plate 44 which is an L-shaped vertical plate, a bottom cross arm is fixedly connected with the vertical sliding block 42, a vertical arm of the vertical arm extends upwards, and the top end of the vertical arm is bent out and fixedly connected with a pull-out column 45. The workpiece hanging plate fixing frame pulling-out mechanism is arranged in a radial direction parallel to the quincuncial rotating frame, is parallel to the workpiece hanging plate fixing frame 51 on the corresponding station, is arranged below a base plate of the quincuncial rotating frame, and when a vertical horizontal and up-down moving plate 44 rises, the vertical horizontal and up-down moving plate just reaches the height of a hook hole at the lower end of the workpiece hanging plate fixing frame 51, and when a piston of a horizontal rodless cylinder 40 extends forwards, a pulling-out column 45 on the horizontal and up-down moving plate 44 can reach the position above the hook hole on the workpiece hanging plate fixing frame 51 at the station.

When the piston in the horizontal rodless cylinder 40 drags the horizontal sliding block 41 and the horizontal and up-down moving plate 44 to extend forwards to the hook hole of the workpiece hanging plate fixing frame 51, the piston in the vertical rodless cylinder 43 drags the vertical sliding block to move downwards together with the horizontal and up-down moving plate, the pull-out column 45 is inserted into the hook hole of the workpiece hanging plate fixing frame 51, then the piston in the horizontal rodless cylinder 40 is reversed, drags the horizontal sliding block 41 to move reversely together with the horizontal and up-down moving plate, drags the workpiece hanging plate fixing frame 51 to be guided by a rail dragging system on the horizontal rodless cylinder, and pulls out to the outer side of the quincunx frame to wait for the manipulator to fetch and deliver the hanging plate 11.

Fig. 9a and 9b are schematic diagrams of the plum blossom-shaped revolving rack of the iv storage workpiece hanging plate in fig. 1, which show the mounting structure of the workpiece hanging plate fixing rack on the plum blossom-shaped revolving rack. A plurality of groups of work piece hanging plate fixing frame stations are radially and densely arranged on the quincuncial rotating frame from the center axis to the outside, and the structure of a left group of work piece hanging plate fixing frames and a right group of work piece hanging plate fixing frames and a work piece hanging plate hanging frame is shown in the figure. The quincuncial rotating frame comprises a quincuncial rotating frame upper plate 46, a vertical central support 47, a quincuncial rotating frame lower plate 48, a quincuncial rotating frame sliding rail 49, a quincuncial rotating frame sliding block 50, a workpiece hanging plate fixing frame 51, a pulling-out block 52 and a hook 9. The central support 47 is a vertical cylinder, the upper end is fixedly connected with an upper plate 46 of the quincuncial rotary frame, the lower end is fixedly connected with a lower plate 48 of the quincuncial rotary frame, a vertical plate strip extending along the radius direction is respectively welded on the upper and lower corresponding stations on each station, and a slide rail 49 is respectively fixedly connected on the same side of the vertical plate strip. The workpiece hanging plate fixing frame 51 is a vertical plate, the upper end and the lower end of the back surface of the workpiece hanging plate fixing frame are fixedly connected with sliding blocks 50 matched with the sliding rails 49 respectively, the sliding blocks 50 can be sleeved into the sliding rails 49 to be in sliding connection, namely the workpiece hanging plate fixing frame 51 can slide along the radius direction through the matching of two pull rails, a plurality of hanging plate positions at the station positions for taking/hanging the workpiece hanging plates can be pulled out, the outer side edge of the lower end of the workpiece hanging plate fixing frame 51 is fixedly connected with a pull-out block 52, and a pull-out hole which is convenient for the pull-out column 45 to insert is drilled in the pull-out block. Four hooks 9 are arranged at the positions of the front plate surface of the workpiece hanging plate fixing frame 51 corresponding to the hook holes at the four corners of the workpiece hanging plate, and the hook holes 9-1 at the four corners of the workpiece hanging plate 11 are hung on the hooks 9 and slide along with the workpiece hanging plate fixing frame.

The utility model has the advantages that:

1, a scheme of replacing a multi-cabin type of a feeding cabin, a transferring cabin and a discharging cabin and a fetching and delivering hanging plate of a plurality of manipulators by using a transition cabin and a set of manipulators is adopted, so that the equipment structure is greatly simplified, and the manufacturing cost is saved;

2, one mechanical arm is adopted for operation, so that the trouble of cooperative work and debugging brought by a plurality of mechanical arms is reduced;

3, the operation procedure when multiple manipulators are adopted is simplified, the failure rate is reduced, the operation and maintenance cost is saved, and the efficiency is improved.

Claims (3)

1. The utility model provides a work piece link plate mount pull-out mechanism for large-scale vacuum coating machine, characterized by includes:

the horizontal rodless cylinder (40) is arranged on the base, the vertical rodless cylinder (43) is arranged on the horizontal sliding block (41) of the horizontal rodless cylinder, the vertical sliding block (42) of the vertical rodless cylinder is provided with a vertical horizontal and up-and-down moving plate (44), and the horizontal and up-and-down moving plate is provided with a downward extending pull-out column (45).

2. The mechanism of claim 1, which is used for pulling out the workpiece hanging plate fixing frame of the large-scale vacuum coating machine, and is characterized in that: the horizontal sliding block (41) of the fixed frame pulling-out mechanism is arranged on a sliding rail of the side vertical surface of the horizontal rodless cylinder (40), and the vertical sliding block (42) is arranged on a sliding rail of the outer side wall of the vertical rodless cylinder (43).

3. The workpiece hanging plate fixing frame pulling mechanism for the large-scale vacuum coating machine according to claim 1, which is characterized in that: the horizontal and up-down moving plate (44) is an L-shaped vertical plate, the upper end of the vertical section of the L-shaped vertical plate is bent inwards and is provided with a downward pull-out column (45), and the other end of the horizontal section is fixed on a vertical sliding block (42) of a vertical rodless cylinder (43).

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