CN114164411A - Workpiece frame transfer system for vacuum coating machine - Google Patents

Workpiece frame transfer system for vacuum coating machine Download PDF

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Publication number
CN114164411A
CN114164411A CN202111514011.8A CN202111514011A CN114164411A CN 114164411 A CN114164411 A CN 114164411A CN 202111514011 A CN202111514011 A CN 202111514011A CN 114164411 A CN114164411 A CN 114164411A
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CN
China
Prior art keywords
guide rail
workpiece
vacuum
coating machine
vacuum coating
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111514011.8A
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Chinese (zh)
Inventor
武文全
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Foshan Foxin Vacuum Technology Co ltd
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Foshan Foxin Vacuum Technology Co ltd
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Publication date
Application filed by Foshan Foxin Vacuum Technology Co ltd filed Critical Foshan Foxin Vacuum Technology Co ltd
Priority to CN202111514011.8A priority Critical patent/CN114164411A/en
Publication of CN114164411A publication Critical patent/CN114164411A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568Transferring the substrates through a series of coating stations
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a workpiece frame transfer system for a vacuum coating machine, which comprises a vacuum coating machine shell, a transfer mechanism, at least two material taking and placing mechanisms and at least two workpiece frames, wherein the vacuum coating machine shell is provided with a vacuum chamber, the peripheral wall of the vacuum coating machine shell is provided with a vacuum chamber port, the transfer mechanism comprises a transfer guide rail erected in the half-air space beside the vacuum coating machine shell, the transfer guide rail is provided with a first feeding end and at least two second discharging ends, and the first feeding end is butted with a first guide rail in the vacuum chamber; the at least two material taking and placing mechanisms are respectively in one-to-one correspondence with the at least two second material placing ends, each material taking and placing mechanism comprises a pit, a lifting frame and a lifting driving assembly, and the lifting frame is provided with a second guide rail in butt joint with the second material placing ends; the top of the workpiece frame is provided with a hanging wheel sliding assembly. The downtime of the vacuum coating machine is greatly reduced, workers can continuously load and unload the workpiece, the workpiece does not need to be taken and placed in a vacuum chamber or a high platform is not arranged, and the operation safety is improved.

Description

Workpiece frame transfer system for vacuum coating machine
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a workpiece frame transfer system for a vacuum coating machine.
Background
The existing vertical vacuum coating machine adopts a workpiece rack which can be moved out of a vacuum chamber for the convenience of taking and placing workpieces, but in the actual production process, after the workpiece rack is moved out, the coated workpieces need to be taken out, new workpieces are installed, and then the workpieces are pushed into the vacuum chamber, and the process needs the vertical vacuum coating machine to be stopped for a long time, so that the processing efficiency is influenced; and for the taking and placing of the workpieces, the high platform is erected beside the vertical vacuum coating machine, and workers stand on the high platform to sequentially place the workpieces on the workpiece rack in the vacuum chamber or take the workpieces down, so that potential safety hazards exist in the high platform operation of the workers, and the operation of safety production is not facilitated.
Disclosure of Invention
The present invention is directed to a workpiece carrier transfer system for a vacuum coater that solves one or more of the problems set forth in the prior art and provides at least one useful alternative or creation.
The technical scheme adopted for solving the technical problems is as follows:
the invention provides a workpiece frame transfer system for a vacuum coating machine, which comprises: the vacuum coating machine comprises a vacuum coating machine shell, a transfer mechanism, a material taking and placing mechanism and a workpiece frame, wherein a vacuum chamber is arranged in the vacuum coating machine shell, a vacuum chamber opening is formed in the outer peripheral wall of the vacuum coating machine shell, a sealing door is installed at the vacuum chamber opening, and a first guide rail is arranged at the top of the vacuum chamber; the transfer mechanism comprises a transfer guide rail erected in the air beside the vacuum coating machine shell, the transfer guide rail is provided with a first feeding end and at least two second discharging ends, and the first feeding end is in butt joint with the first guide rail; the number of the material taking and placing mechanisms is at least two, the at least two material taking and placing mechanisms are respectively in one-to-one correspondence with at least two second material placing ends, each material taking and placing mechanism comprises a pit arranged beside the vacuum coating machine shell, a lifting frame arranged above the pit and a lifting driving assembly used for driving the lifting frame to move up and down, the pit is provided with a pit opening with an upward opening, and the bottom of the lifting frame is provided with a second guide rail in butt joint with the second material placing ends; the number of the workpiece frames is at least two, the top of each workpiece frame is provided with a hanging wheel sliding assembly, and the hanging wheel sliding assemblies are matched with the first guide rail, the transfer guide rail and the second guide rail respectively and slidably hung and matched.
The invention has the beneficial effects that: after the work rest in the vacuum chamber is coated with film, the sealing door is opened, the work rest on the first guide rail is transferred to the first feeding end and transferred to one of the second discharging ends along the transfer guide rail under the guiding sliding of the hanging wheel sliding assembly, then the work rest is transferred to the second guide rail on the lifting frame, the corresponding lifting driving assembly drives the lifting frame to descend so that the work rest descends into the pit relative to the pit opening, at the moment, a worker can stand on the ground to disassemble the work rest on the work rest and assemble a new work piece, meanwhile, the other work rest loaded in the material taking and placing mechanism is transferred to the other second discharging end from the corresponding lifting frame and transferred to the first feeding end along the transfer guide rail, then the work rest is transferred to the first guide rail, the sealing door is closed, the film coating operation is carried out, the operation is repeated, the stop time of the vacuum film coating machine is greatly shortened, moreover, the worker can continuously load and unload the workpiece, and the worker does not need to put the workpiece in the vacuum chamber or set a high platform to carry out operation far away from the vacuum chamber, so that the operation safety is improved.
As a further improvement of the technical scheme, the material taking and placing mechanism further comprises a fixing frame fixed above the pit, the fixing frame comprises a top seat and a plurality of vertically arranged stand columns, the stand columns are arranged at the periphery of the pit opening at annular intervals, the upper ends of the stand columns are fixedly connected with the top seat, the lifting frame is arranged below the top seat, and the lifting driving assembly is installed between the top seat and the lifting frame.
Get in this scheme and put material mechanism and come bearing lift drive subassembly and crane through the mount, specifically: the footstock is erected above the pit through a plurality of vertically arranged stand columns, the lifting driving assembly is installed at the bottom of the footstock, the lifting driving assembly can drive the lifting frame to move up and down below the footstock, and the upper limit of the lifting frame is just the position where the second guide rail is butted with the second discharging end.
As a further improvement of the technical scheme, the lifting driving assembly comprises a rhombic expansion bracket and a telescopic driving piece, wherein the rhombic expansion bracket is arranged in an up-and-down extending mode, and the telescopic driving piece is installed on the rhombic expansion bracket.
The lifting driving assembly in the scheme adopts a structure of the diamond-shaped expansion bracket, and the telescopic driving piece is arranged in the diamond-shaped expansion bracket to drive the diamond-shaped expansion bracket to realize up-down stretching so as to drive the lifting frame to lift, wherein the telescopic driving piece can be a cylinder or an electric push rod and other linear driving structures.
As a further improvement of the above technical solution, the first guide rail and the second guide rail are both provided with a locking assembly, and the locking assemblies are used for locking and fixing the workpiece holder.
No matter the work rest is locked and fixed during film coating or during loading and unloading of the work piece, the work rest is prevented from being mistakenly moved to influence the film coating quality and the safety of workers, and therefore the scheme is provided with the locking assembly to lock and fix the position of the work rest so as to determine that the work rest can be fixed at the film coating station and the loading and unloading station.
Specifically, the method comprises the following steps: the locking assembly comprises a locking positioning pin and a locking pin hole, wherein the locking pin hole is formed in the first guide rail and the second guide rail, the locking positioning pin is installed on the workpiece frame, and the locking positioning pin is in positioning insertion connection with the locking pin hole.
As a further improvement of the technical scheme, the workpiece frame comprises a bottom plate, a top plate and a plurality of vertical rods vertically connected between the bottom plate and the top plate, the vertical rods are arranged in an annular interval mode, a plurality of hanging pieces are arranged on the vertical rods, and the hanging wheel sliding assemblies are arranged on the top surface of the top plate.
The workpiece rack in the scheme is integrally cylindrical, a plurality of vertical rods are arranged on the periphery of the workpiece rack, a plurality of hanging pieces are arranged on the vertical rods, and coated workpieces are hung on the hanging pieces in sequence, so that the workpieces are convenient to mount and dismount.
As a further improvement of the above technical solution, the sealing door is slidably disposed along a direction perpendicular to the opening of the vacuum chamber. The sealing door in the scheme adopts a push-pull type structure, and is mainly convenient to open and close.
As a further improvement of the technical scheme, the sealing door is connected with an opening and closing sliding driving assembly, and the opening and closing sliding driving assembly is used for driving the sealing door to slide.
This scheme has set up the switching drive assembly that slides and has come the drive automatically and seal the door and slide, realizes automatic opening and closing, and wherein the switching drive assembly that slides can be sharp drive structures such as electric putter or cylinder.
Drawings
The invention is further described with reference to the accompanying drawings and examples;
FIG. 1 is a schematic diagram of a workpiece carrier transfer system according to one embodiment of the present invention;
FIG. 2 is a side view of one embodiment of a workpiece rack transfer system provided by the present invention.
Detailed Description
Reference will now be made in detail to the present preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, if words such as "a plurality" are described, the meaning is one or more, the meaning of a plurality is two or more, more than, less than, more than, etc. are understood as excluding the present number, and more than, less than, etc. are understood as including the present number.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
Referring to fig. 1-2, the workpiece holder transfer system for a vacuum coater of the present invention is made in the following embodiments:
the workpiece rack transfer system of the embodiment comprises a vacuum coating casing 100, a transfer mechanism, a material taking and placing mechanism 300 and a workpiece rack 400, wherein a vacuum chamber 110 is arranged inside the vacuum coating casing 100, a vacuum chamber port 120 is formed in the peripheral wall of the vacuum coating casing 100, a sealing door 130 is installed at the position of the vacuum chamber port 120, the sealing door 130 in the embodiment is arranged in a sliding mode along the direction vertical to the opening direction of the vacuum chamber port 120, and the sealing door 130 is of a push-pull type structure and is mainly convenient for opening and closing the sealing door 130. In other embodiments, not shown in the drawings, the sealing door 130 is connected with an opening and closing sliding driving assembly, and the opening and closing sliding driving assembly is used for driving the sealing door 130 to slide so as to achieve automatic opening and closing, wherein the opening and closing sliding driving assembly may be a linear driving structure such as an electric push rod or an air cylinder.
The transfer mechanism comprises a transfer guide rail 200 erected in the air beside the vacuum coating enclosure 100, wherein the transfer guide rail 200 is provided with a first feeding end 210 and at least two second discharging ends 220, the top of the vacuum chamber 110 is provided with a first guide rail 140, and the first feeding end 210 is butted with the first guide rail 140.
The number of the material taking and placing mechanisms 300 in this embodiment is at least two, at least two material taking and placing mechanisms 300 are respectively in one-to-one correspondence with at least two second material placing ends 220, each material taking and placing mechanism 300 comprises a pit 310 arranged beside the vacuum coating machine shell 100, a lifting frame 320 arranged above the pit 310 and a lifting driving assembly used for driving the lifting frame 320 to move up and down, the pit 310 is provided with a pit opening with an upward opening, the bottom of the lifting frame 320 is provided with a second guide rail 321 butted with the second material placing ends 220, the number of the workpiece frames 400 is at least two, the top of the workpiece frame 400 is provided with a hanging wheel sliding assembly, and the hanging wheel sliding assembly is matched with the first guide rail 140, the transfer guide rail 200 and the second guide rail 321 to be in a sliding and hanging fit.
Wherein get drop feed mechanism 300 still including being fixed in mount 330 of pit 310 top, mount 330 includes footstock 331, the stand 332 of a plurality of vertical settings, and a plurality of stands 332 are annular interval and set up in the periphery of pithead, a plurality of stand 332 the upper end with footstock 331 fixed connection, crane 320 sets up in the below of footstock 331, lift drive assembly installs between footstock 331 and crane 320, just lift drive assembly including being the rhombus expansion bracket 340 that extends the setting from top to bottom, installing the flexible driving piece 350 on rhombus expansion bracket 340, set up flexible driving piece 350 in rhombus expansion bracket 340 and drive rhombus expansion bracket 340 and realize flexible from top to bottom to drive crane 320 and go up and down, wherein flexible driving piece 350 can be straight line drive structures such as cylinder or electric putter. The upper limit of the lifting frame 320 is just the position where the second guide rail 321 is butted with the second discharging end 220.
After the coating of the workpiece rack 400 in the vacuum chamber 110 is finished, the sealing door 130 is opened, the workpiece rack 400 on the first guide rail 140 is transferred to the first feeding end 210 and transferred to one of the second discharging ends 220 along the transfer guide rail 200 under the guiding sliding of the hanging wheel sliding assembly, then the workpiece rack 400 is transferred to the second guide rail 321 on the lifting frame 320, the corresponding lifting driving assembly drives the lifting frame 320 to descend so that the workpiece rack 400 descends into the pit 310 relative to the pit opening, at this time, a worker can stand on the ground to detach the workpiece on the workpiece rack 400 and mount a new workpiece, at the same time, the loaded workpiece rack 400 in the other discharging mechanism 300 is transferred to the other second discharging end 220 from the corresponding lifting frame 320 and transferred to the first feeding end 210 along the transfer guide rail 200, then the workpiece rack 400 is transferred to the first guide rail 140, the sealing door 130 is closed, the operation of coating is repeated, so that the downtime of the vacuum coating machine is greatly reduced, workers can continuously load and unload the workpiece, the workers do not need to put the workpiece in the vacuum chamber 110 or set a high platform to get and put the workpiece, the operation is carried out far away from the vacuum chamber 110, and the operation safety is improved.
Further, no matter the workpiece holder 400 is used for film coating or workpiece loading and unloading, locking and fixing are required, so that in order to avoid the workpiece holder 400 being mistakenly moved to affect the film coating quality and the safety of workers, locking assemblies are arranged on the first guide rail 140 and the second guide rail 321, and are used for locking and fixing the workpiece holder 400, so that the workpiece holder 400 can be fixed at both the film coating station and the loading and unloading station.
The locking assembly comprises a locking positioning pin and a locking pin hole, the locking pin hole is formed in each of the first guide rail 140 and the second guide rail 321, the locking positioning pin is mounted on the workpiece frame 400, and the locking positioning pin is in positioning insertion connection with the locking pin hole.
In other embodiments, locking structures such as locking screws may be used.
Furthermore, the workpiece holder 400 comprises a bottom plate 410, a top plate 420 and a plurality of vertical rods 430 vertically connected between the bottom plate 410 and the top plate 420, the vertical rods 430 are arranged at intervals, a plurality of hanging pieces 431 are arranged on the vertical rods 430, the hanging wheel sliding assembly is arranged on the top surface of the top plate 420, the workpiece holder 400 is integrally cylindrical, a plurality of vertical rods 430 vertically arranged are arranged on the outer periphery of the workpiece holder 400, the hanging pieces 431 are arranged on the vertical rods 430, the coated workpieces are sequentially hung on the hanging pieces 431, and the workpiece can be conveniently loaded and unloaded.
In other embodiments, the lift drive assembly may employ other linear lift drive configurations.
In other embodiments, the transfer mechanism may further include an automatic transport assembly that slides the workpiece holder 400 on the transfer rail 200, which may be a belt drive or a chain drive.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that the present invention is not limited to the details of the embodiments shown and described, but is capable of numerous equivalents and substitutions without departing from the spirit of the invention as set forth in the claims appended hereto.

Claims (8)

1. The utility model provides a work rest transfer system for vacuum coating machine which characterized in that: it includes:
the vacuum coating machine shell (100) is internally provided with a vacuum chamber (110), the peripheral wall of the vacuum coating machine shell (100) is provided with a vacuum chamber opening (120), a sealing door (130) is installed at the vacuum chamber opening (120), and the top of the vacuum chamber (110) is provided with a first guide rail (140);
the transfer mechanism comprises a transfer guide rail (200) erected in the air beside the vacuum coating machine shell (100), the transfer guide rail (200) is provided with a first feeding end (210) and at least two second discharging ends (220), and the first feeding end (210) is butted with the first guide rail (140);
the vacuum coating machine comprises at least two material taking and placing mechanisms (300), wherein the at least two material taking and placing mechanisms (300) are respectively in one-to-one correspondence with at least two second material placing ends (220), each material taking and placing mechanism (300) comprises a pit (310) arranged beside a vacuum coating machine shell (100), a lifting frame (320) arranged above the pit (310) and a lifting driving assembly used for driving the lifting frame (320) to move up and down, the pit (310) is provided with a pit opening with an upward opening, and the bottom of the lifting frame (320) is provided with a second guide rail (321) in butt joint with the second material placing ends (220);
the workpiece rack (400) comprises at least two workpiece racks, the top of each workpiece rack (400) is provided with a hanging wheel sliding assembly, and the hanging wheel sliding assemblies are matched with the first guide rail (140), the transfer guide rail (200) and the second guide rail (321) in a sliding hanging mode respectively.
2. The workpiece holder transfer system for a vacuum coater of claim 1 wherein:
get drop feed mechanism (300) still including being fixed in mount (330) above pit (310), mount (330) are annular interval including footstock (331), stand (332) of a plurality of vertical settings, a plurality of stands (332) and set up in the periphery of pithead, the upper end of a plurality of stands (332) with footstock (331) fixed connection, crane (320) set up in the below of footstock (331), lift drive assembly installs between footstock (331) and crane (320).
3. The workpiece holder transfer system for a vacuum coater of claim 2 wherein:
the lifting driving assembly comprises a rhombic expansion bracket (340) which is arranged in an up-and-down extending mode and a telescopic driving piece (350) which is installed on the rhombic expansion bracket (340).
4. The workpiece holder transfer system for a vacuum coater of claim 1 wherein:
and locking assemblies are arranged on the first guide rail (140) and the second guide rail (321) and are used for locking and fixing the workpiece rack (400).
5. The workpiece holder transfer system for a vacuum coater of claim 4 wherein:
the locking assembly comprises a locking positioning pin and a locking pin hole, the locking pin hole is formed in each of the first guide rail (140) and the second guide rail (321), the locking positioning pin is installed on the workpiece frame (400), and the locking positioning pin is in positioning insertion connection with the locking pin hole.
6. The workpiece holder transfer system for a vacuum coater of claim 1 wherein:
the workpiece rack (400) comprises a bottom plate (410), a top plate (420) and a plurality of vertical rods (430) vertically connected between the bottom plate (410) and the top plate (420), wherein the vertical rods (430) are arranged at intervals in a ring shape, a plurality of hanging pieces (431) are arranged on the vertical rods (430), and the hanging wheel sliding assembly is arranged on the top surface of the top plate (420).
7. The workpiece holder transfer system for a vacuum coater of claim 1 wherein:
the sealing door (130) is arranged in a sliding way along a direction vertical to the opening direction of the vacuum chamber port (120).
8. The workpiece holder transfer system for a vacuum coater of claim 7 wherein:
the sealing door (130) is connected with an opening and closing sliding driving assembly, and the opening and closing sliding driving assembly is used for driving the sealing door (130) to slide.
CN202111514011.8A 2021-12-10 2021-12-10 Workpiece frame transfer system for vacuum coating machine Pending CN114164411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111514011.8A CN114164411A (en) 2021-12-10 2021-12-10 Workpiece frame transfer system for vacuum coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111514011.8A CN114164411A (en) 2021-12-10 2021-12-10 Workpiece frame transfer system for vacuum coating machine

Publications (1)

Publication Number Publication Date
CN114164411A true CN114164411A (en) 2022-03-11

Family

ID=80485752

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111514011.8A Pending CN114164411A (en) 2021-12-10 2021-12-10 Workpiece frame transfer system for vacuum coating machine

Country Status (1)

Country Link
CN (1) CN114164411A (en)

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