CN214281505U

CN214281505U - Exposure mechanism and exposure equipment who constitutes thereof

Info

Publication number: CN214281505U
Application number: CN202023215705.5U
Authority: CN
Inventors: 吴康; 熊威; 孙帆
Original assignee: Chibi Wanhuang Intelligent Equipment Co ltd
Current assignee: Chibi Wanhuang Intelligent Equipment Co ltd
Priority date: 2020-12-28
Filing date: 2020-12-28
Publication date: 2021-09-24
Anticipated expiration: 2030-12-28

Abstract

The utility model discloses an exposure mechanism and exposure equipment composed by the exposure mechanism, the exposure mechanism comprises an exposure mechanism body, an alignment platform and a lifting piece, the upper end of the alignment platform is provided with a horizontally arranged drive plate, the exposure mechanism body is arranged above the alignment platform, the exposure mechanism body is connected with the drive plate in a sliding way through a plurality of vertically arranged slide bars, the lifting piece is fixedly connected with the drive plate, the lifting end is connected with the slide bar in a transmission way, the alignment platform is used for driving the exposure mechanism body to move in the horizontal plane to complete alignment, the lifting piece is used for driving the exposure mechanism body to move up and down relative to the alignment platform, the structure is simple, the alignment platform drives the exposure mechanism body to move or rotate in the horizontal plane by the slide bars to realize the active alignment of the exposure mechanism body, in addition, the lifting piece drives the exposure mechanism body to move up and down relative to the alignment platform so as to realize the lifting of the exposure mechanism body.

Description

Exposure mechanism and exposure equipment who constitutes thereof

Technical Field

The utility model belongs to the exposure equipment field especially relates to exposure mechanism and exposure equipment who constitutes thereof.

Background

The exposure mechanism is usually aligned with a workpiece to adapt to the exposure position of the exposure mechanism at present, but the positioning table needs to move in a large range, so that a wire guide of the positioning table needs to move in a large range, and the equipment is large in size and parts are increased.

SUMMERY OF THE UTILITY MODEL

In order to solve the above technical problem, an object of the present invention is to provide an exposure mechanism capable of being actively aligned by an exposure mechanism body.

In order to achieve the above purpose, the technical solution of the present invention is as follows: the utility model provides an exposure mechanism, includes exposure mechanism body, counterpoint platform and lift piece, the upper end of counterpoint platform has the drive plate that the level set up, the exposure mechanism body sets up the top of counterpoint platform, just the exposure mechanism body through many sliding connection spare with sliding connection about the drive plate, just the lift piece with the drive plate is connected fixedly, its lift end with sliding connection spare or exposure mechanism body transmission are connected, the counterpoint platform is used for the drive exposure mechanism body removes in the horizontal plane in order to accomplish the counterpoint, the lift piece is used for the drive the exposure mechanism body for the counterpoint platform reciprocates.

The beneficial effects of the above technical scheme are that: the structure is simple, the alignment platform drives the exposure mechanism body to move or rotate in the horizontal plane by utilizing the slide bar to realize active alignment of the exposure mechanism body, and the lifting piece drives the exposure mechanism body to move up and down relative to the alignment platform to realize the lifting of the exposure mechanism body.

In the technical scheme, the sliding connecting pieces are a plurality of sliding rods which are arranged on the left side and the right side of the driving plate at intervals, the sliding rods penetrate through the driving plate, the upper ends of the sliding rods are fixedly connected with the exposure mechanism body, and the lower ends of the sliding rods are in transmission connection with the driving end of the lifting piece.

The beneficial effects of the above technical scheme are that: the structure is simple.

In the technical scheme, the lifting piece is a telescopic electric cylinder.

The beneficial effects of the above technical scheme are that: the structure is simple, and the control is convenient.

A second object of the utility model is to provide an exposure apparatus that simple structure and compactness can realize exposure mechanism body initiative counterpoint simultaneously.

In order to achieve the above purpose, the technical solution of the present invention is as follows: an exposure device comprises a slide rail, a driving piece, a workpiece platform, a CCD camera unit and an exposure mechanism as above, wherein the slide rail is horizontally arranged along the front and back direction, the workpiece platform is slidably arranged on the slide rail, the driving piece is arranged on the slide rail, the driving end of the driving piece is in transmission connection with the workpiece platform, the CCD camera unit is suspended above the middle part corresponding to the length direction of the slide rail, the exposure mechanism is positioned at the back of the CCD camera unit, the back end of the slide rail penetrates through the space between an exposure mechanism body and an alignment platform, the alignment platform is arranged on the slide rail, the driving piece is used for driving the workpiece platform to drive a workpiece placed on the workpiece platform to move to the lower part of the exposure mechanism body from front to back and pass through the lower part of the CCD camera unit, and the CCD camera unit is used for taking pictures of the workpiece passing through the lower part of the workpiece, the exposure mechanism is used for driving the exposure mechanism body to move on the horizontal plane through the alignment platform according to the information of the pictures shot by the CCD camera unit so as to realize alignment, and the lifting piece is used for driving the exposure mechanism body to move downwards until the lower end of the exposure mechanism body is attached to the upper end of the workpiece table and exposing the workpiece.

The beneficial effects of above-mentioned technical scheme lie in, its simple structure, and the work piece platform is the material loading station when being located the slide rail front end, and the work piece platform is located the slide rail rear end and is the unloading station, and the driving piece is shot to the work piece by CCD camera unit when moving to CCD camera unit below in addition, is driven by the driving piece again the work piece platform moves to the below of exposure mechanism body this moment counterpoint the platform drive exposure mechanism body, and by the lifter drive exposure mechanism body downwardly moving to its lower extreme with the laminating of work piece bench upper end is in order to carry out the exposure processing, after the exposure, exposure mechanism body upwards moves under the drive of lifter to reseing, and the driving piece continues the drive this moment the work piece platform moves to the rear end of slide rail backward.

Among the above-mentioned technical scheme CCD camera unit includes slide, five CCD cameras and five fine setting pieces, five the fine setting piece all sets up the front side of slide and along left and right sides interval distribution, and five CCD camera and five fine setting piece one-to-one, every the CCD camera is installed respectively and is being corresponded the drive end of fine setting piece, wherein three fine setting piece fixed mounting be in the front side of slide, two in addition the fine setting piece respectively through the slider with slide sliding connection, the slider can drive the correspondence under the exogenic action fine setting piece slides along left and right sides direction, every install a retaining member on the slider respectively, the retaining member is used for corresponding the slider is fixed in the optional position department of its slip orbit, the fine setting piece is used for the drive to correspond the CCD camera is removed along the fore-and-aft direction.

The beneficial effects of the above technical scheme lie in that, its simple structure, so can realize taking a picture accurately to the side of four sides of the work piece of the square plate shape of equidimension not through five CCD cameras.

Among the above-mentioned technical scheme the retaining member is locking bolt, every be equipped with an orientation on the slider the slide and with retaining member screw-thread fit's screw, every retaining member respectively with correspond screw threaded connection screws up the retaining member so that its threaded end with slide looks butt is in order to correspond the slider is fixed on the slide, unscrews the retaining member is in order to correspond the slider is loosened.

In the technical scheme, the fine adjustment piece is a mechanical fine adjustment sliding table.

The beneficial effects of the above technical scheme are that: the CCD camera fine-tuning device is simple in structure, and the position of the CCD camera can be fine-tuned, so that the precision is higher.

Drawings

FIG. 1 is a schematic view of an exposure mechanism according to embodiment 1 of the present invention;

FIG. 2 is a schematic view of an exposure apparatus according to embodiment 2 of the present invention;

fig. 3 is a schematic structural diagram of the CCD camera unit according to embodiment 2 of the present invention;

fig. 4 is a schematic view of a multi-station exposure system according to embodiment 3 of the present invention.

In the figure: the device comprises an exposure mechanism 1, an exposure mechanism 11, an alignment platform 12, a 121 driving plate, a 13 lifting piece, a 14 sliding rod, a 2 sliding rail, a 3 workpiece table, a 4 CCD camera unit, a 41 sliding plate, a 42 CCD camera, a 43 fine adjustment piece, a 431 sliding block, a 432 locking piece and a 5 sliding table.

Detailed Description

The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.

Example 1

As shown in fig. 1, this embodiment provides an exposure mechanism, which includes an exposure mechanism body 11, an alignment platform 12 and a lifting member 13, wherein the upper end of the alignment platform 12 has a driving plate 121 horizontally disposed, the exposure mechanism body 11 is disposed above the alignment platform 12, the exposure mechanism body 11 is slidably connected to the driving plate 121 through a plurality of vertically disposed sliding rods 14, the lifting member 13 is fixedly connected to the driving plate 121, the lifting end of the lifting member is in transmission connection with the sliding rods 14, the alignment platform 12 is configured to drive the exposure mechanism body 11 to move in a horizontal plane to complete alignment, the lifting member 13 is configured to drive the exposure mechanism body 11 to move up and down relative to the alignment platform 12, the alignment platform is simple in structure, the alignment platform drives the exposure mechanism body to move or rotate in the horizontal plane by the sliding rods to realize active alignment of the exposure mechanism body, in addition, the lifting piece drives the exposure mechanism body to move up and down relative to the alignment platform so as to realize the lifting of the exposure mechanism body. Wherein, the lift passes through the connecting rod and is connected fixedly with the drive plate, wherein, the counterpoint platform is XY theta counterpoint platform, and it belongs to prior art, does not describe here any more. Wherein, the upper end of the slide bar is fixedly connected with the exposure mechanism body.

In the above technical solution, the plurality of the slide bars 14 are arranged at the left and right sides of the drive plate 121 at intervals, the slide bars 14 penetrate through the drive plate 121, the upper ends of the slide bars are fixedly connected with the exposure mechanism body 11, the lower ends of the slide bars are in transmission connection with the driving end of the lifting piece 13, and the lifting piece 13 in the above technical solution is a telescopic electric cylinder. Wherein, the exposure mechanism body can be directly purchased as a finished product, and the light emitting part of the exposure mechanism body faces downwards.

Example 2

As shown in fig. 2, this embodiment provides an exposure apparatus, which includes a slide rail 2, a driving member, a workpiece stage 3, a CCD camera unit 4, and the exposure mechanism 1 as described above, wherein the slide rail 2 is horizontally disposed along a front-back direction, the workpiece stage 3 is slidably mounted on the slide rail 2, the driving member is mounted on the slide rail 2, and a driving end thereof is in transmission connection with the workpiece stage 3, the CCD camera unit 4 is suspended above a middle portion of the slide rail 2 corresponding to a length direction thereof, the exposure mechanism is located behind the CCD camera unit, a rear end of the slide rail 2 passes through a space between an exposure mechanism body 11 and an alignment platform 12, the alignment platform 12 is mounted on the slide rail 2, the driving member is configured to drive the workpiece stage 3 to drive a workpiece placed thereon to move from front to back to a position below the exposure mechanism body 11, and passes below the CCD camera unit 4, the CCD camera unit 4 is used for taking pictures of workpieces passing below the CCD camera unit, the exposure mechanism 1 is used for driving the exposure mechanism body 11 to move on the horizontal plane by the alignment platform 12 according to the picture information taken by the CCD camera unit 4 so as to realize alignment, and the lifting piece 13 drives the exposure mechanism body 11 to move downwards to the lower end to be attached to the upper end of the workpiece table 3 and expose the workpieces, the structure is simple, the workpiece table is a feeding station when positioned at the front end of the slide rail, the rear end of the slide rail is a blanking station, in addition, the driving piece drives the CCD camera unit to take pictures of the workpieces when driving the workpiece table to move below the CCD camera unit, and then the driving piece drives the workpiece table to move to the lower part of the exposure mechanism body, at this time, the alignment platform drives the exposure mechanism body to perform alignment, and the lifting piece drives the exposure mechanism body to move downwards until the lower end of the exposure mechanism body is attached to the upper end of the workpiece table so as to carry out exposure treatment, after exposure is finished, the exposure mechanism body is driven by the lifting piece to move upwards until the exposure mechanism body is reset, and at the moment, the driving piece continues to drive the workpiece table to move backwards to the rear end of the slide rail. The driving part is preferably a screw rod driving mechanism or a linear module.

As shown in fig. 3, in the above technical solution, the CCD camera unit 4 includes a sliding plate 41, five CCD cameras 42 and five fine-adjustment members 43, five fine-adjustment members 43 are all disposed at the front side of the sliding plate 41 and are distributed at intervals along the left and right direction, and five CCD cameras 42 are in one-to-one correspondence with the five fine-adjustment members 43, each CCD camera 42 is respectively installed at the driving end corresponding to the fine-adjustment member 43, wherein three fine-adjustment members 43 are fixedly installed at the front side of the sliding plate 41, the other two fine-adjustment members 43 are respectively connected with the sliding plate 41 through a sliding block 431, the sliding block 431 can drive the corresponding fine-adjustment member 43 to slide along the left and right direction under the action of external force, a locking member 432 is respectively installed on each sliding block 431, the locking member 432 is used for fixing the corresponding sliding block 431 at any position of the sliding track thereof, the fine-adjustment members 43 are used for driving the corresponding CCD cameras 42 to move, its simple structure can realize taking a picture accurately to the side of four sides of the work piece of the square plate shape of equidimension not so through five CCD cameras. The two fine adjustment parts which are connected with the sliding plate in a sliding mode through the sliding block are located on two sides of the other three fine adjustment parts, three of the five CCD cameras are located above three side edges of the workpiece respectively, and the rest two CCD cameras are located above the other side edge of the workpiece and distributed at intervals.

In the above technical solution the retaining member 432 is a locking bolt, each the slide block 431 is provided with a screw hole facing the sliding plate 41 and matching with the thread of the retaining member 432, each retaining member 432 is respectively connected with the corresponding screw hole thread, the retaining member 432 is screwed down so that the thread end of the retaining member 432 abuts against the sliding plate 41 to be corresponding to the slide block 431 is fixed on the sliding plate 41, and the retaining member 432 is unscrewed to be corresponding to the slide block 431. In the above technical solution, the fine adjustment part 43 is a mechanical fine adjustment sliding table, which has a simple structure and can finely adjust the position of the CCD camera so that the precision is higher.

Example 3

As shown in fig. 4, this embodiment provides a multistation exposure system, and it includes a plurality of exposure equipment as embodiment 2, and a plurality of exposure equipment set up side by side along the left and right sides square, and is a plurality of CCD camera unit 4 of exposure equipment sharing, add one simultaneously and set up in a plurality ofly along left right direction the top at 2 middle parts of slide rail and be located a plurality of slip table 5 in exposure mechanism the place ahead (for electronic unipolar slip table), CCD camera unit 4 is installed the drive end of slip table 5, slip table 5 is used for driving CCD camera unit 4 removes to every in proper order along the left and right sides square removal in proper order the top of slide rail 2 is shot.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. An exposure mechanism is characterized by comprising an exposure mechanism body (11), an alignment platform (12) and a lifting piece (13), the upper end of the alignment platform (12) is provided with a horizontally arranged driving plate (121), the exposure mechanism body (11) is arranged above the alignment platform (12), the exposure mechanism body (11) is connected with the driving plate (121) in a vertical sliding way through a plurality of sliding connecting pieces, the lifting piece (13) is connected and fixed with the driving plate (121), the lifting end of the aligning platform is in transmission connection with the sliding connecting piece or the exposure mechanism body (11), the aligning platform (12) is used for driving the exposure mechanism body (11) to move in the horizontal plane to complete alignment, the lifting piece (13) is used for driving the exposure mechanism body (11) to move up and down relative to the alignment platform (12).

2. The exposure mechanism according to claim 1, wherein the sliding connection member is a plurality of sliding rods (14), the plurality of sliding rods (14) are arranged on the left and right sides of the driving plate (121) at intervals, the sliding rods (14) penetrate through the driving plate (121), the upper ends of the sliding rods are fixedly connected with the exposure mechanism body (11), and the lower ends of the sliding rods are in transmission connection with the driving end of the lifting member (13).

3. Exposure mechanism according to claim 1, characterised in that the lifting member (13) is a telescopic electric cylinder.

4. An exposure apparatus, comprising a slide rail (2), a driving member, a workpiece stage (3), a CCD camera unit (4) and the exposure mechanism (1) as claimed in any one of claims 1 to 3, wherein the slide rail (2) is horizontally arranged along the front-back direction, the workpiece stage (3) is slidably mounted on the slide rail (2), the driving member is mounted on the slide rail (2), the driving end of the driving member is in transmission connection with the workpiece stage (3), the CCD camera unit (4) is suspended above the middle part corresponding to the length direction of the slide rail (2), the exposure mechanism is located behind the CCD camera unit, the rear end of the slide rail (2) passes through the space between an exposure mechanism body (11) and an alignment platform (12), the alignment platform (12) is mounted on the slide rail (2), and the driving member is used for driving the workpiece stage (3) to drive a workpiece placed thereon to move forward and backward to the exposure machine Construct the below of body (11), and pass through the below of CCD camera unit (4), CCD camera unit (4) are used for shooing the work piece through its below, exposure mechanism (1) be used for according to the photo information that CCD camera unit (4) were shot by counterpoint platform (12) drive exposure mechanism body (11) move at the horizontal plane, in order to realize counterpointing, lift piece (13) are used for driving exposure mechanism body (11) move down to its lower extreme with the laminating of work piece platform (3) upper end is right the work piece exposes.

5. The exposure apparatus according to claim 4, wherein the CCD camera unit (4) comprises a sliding plate (41), five CCD cameras (42) and five trimming parts (43), the five trimming parts (43) are arranged on the front side of the sliding plate (41) and are distributed at intervals along the left and right direction, the five CCD cameras (42) correspond to the five trimming parts (43) one by one, each CCD camera (42) is respectively arranged at the driving end of the corresponding trimming part (43), three trimming parts (43) are fixedly arranged on the front side of the sliding plate (41), the other two trimming parts (43) are respectively connected with the sliding plate (41) in a sliding way through a sliding block (431), the sliding block (431) can drive the corresponding trimming parts (43) to slide along the left and right direction under the action of external force, a locking part (432) is respectively arranged on each sliding block (431), the locking piece (432) is used for fixing the corresponding sliding block (431) at any position of a sliding track of the sliding block, and the fine adjustment piece (43) is used for driving the corresponding CCD camera (42) to move along the front-back direction.

6. Exposure apparatus according to claim 5, wherein the locking members (432) are locking bolts, each of the slides (431) is provided with a threaded hole facing the slide (41) and in threaded engagement with the locking member (432), each locking member (432) is in threaded connection with the corresponding threaded hole, the locking member (432) is tightened such that its threaded end abuts the slide (41) to fix the corresponding slide (431) to the slide (41), and the locking member (432) is loosened such that the corresponding slide (431) is released.

7. Exposure apparatus according to claim 6, characterised in that the fine adjustment means (43) are mechanical fine adjustment slides.