CN214244673U

CN214244673U - Threaded horizontal assembled silicon boat

Info

Publication number: CN214244673U
Application number: CN202022008761.5U
Authority: CN
Inventors: 范明明; 韩颖超; 李长苏
Original assignee: Hangzhou Dunyuan Poly Core Semiconductor Technology Co Ltd
Current assignee: Hangzhou Dunyuan Poly Core Semiconductor Technology Co Ltd
Priority date: 2020-09-14
Filing date: 2020-09-14
Publication date: 2021-09-21
Anticipated expiration: 2030-09-14

Abstract

The utility model relates to a horizontal equipment silicon boat of screw thread relates to semiconductor manufacturing technical field, include: the baffle, the ditch stick includes first link, accepts section and second link, is equipped with the guiding hole that link up along its thickness direction on the baffle, and the ditch stick passes through the fastener with the baffle and can dismantle and be connected, and the silicon boat is dismantled and assembled modular structure, and the dismouting is convenient and transport conveniently, and is less to occuping of space, and the silicon chip that loads is more, and it is relatively poor to have solved among the prior art silicon boat stability, and it is less to load silicon chip to and dismantle the great technical problem of the equipment degree of difficulty.

Description

Threaded horizontal assembled silicon boat

Technical Field

The utility model relates to a semiconductor manufacturing technology field especially relates to a horizontal equipment silicon boat of screw thread.

Background

Silicon wafers are the main substrate material of modern very large scale integrated circuits and are generally manufactured by the processes of crystal pulling, slicing, chamfering, lapping, etching, back sealing, polishing, cleaning and the like. The heat treatment of the silicon wafer is an important process in the processing process of the silicon device substrate, and the heat treatment can enable oxygen in the silicon wafer to form deposition, so that the resistivity of the silicon wafer is stabilized, and the silicon wafer has very important influence on the preparation performance of an integrated circuit. At this time, a carrier for loading silicon wafers is required, and the silicon wafers are placed on the carrier and then placed in a heat treatment furnace for treatment. The carrier generally used for horizontal heat treatment in the market at present is made of high-purity quartz or silicon carbide, the carrier used as a silicon wafer carrier in the horizontal heat treatment is the only solid material in contact with the silicon wafer, the temperature in the heat treatment process usually exceeds 1000 ℃, even reaches 1250 ℃, the quartz can deform and soften after being used for a long time at the high temperature, the silicon wafer placed in the quartz boat is broken, the quartz boat and the silicon wafer are made of different materials, the coefficients of expansion with heat and contraction with cold are obviously different, cold spots can occur during temperature rising and lowering, crystal lattices are collapsed, crystal grain dislocation is formed, and the quality of the silicon wafer can be influenced by the factors. For the silicon carbide boat, along with the increase of the size of the silicon wafer, the fineness of an integrated circuit is higher and higher, the requirements of the production process are also harsher, and oxidation reaction can occur in the high-temperature treatment process to influence the quality of the silicon wafer. Horizontal heat treated carriers would also involve carrier cleaning and carrier storage. Therefore, with the development of semiconductor technology, ordinary quartz boats or silicon carbide boats have become unable to meet the production and application requirements of high-purity silicon wafers.

Chinese patent application No. CN201620958227.1 discloses a silicon boat, which comprises a boat body, wherein an accommodating groove is arranged in the middle of the boat body, push-pull grooves are respectively arranged at two ends of the boat body, and the depth of the push-pull grooves is greater than that of the accommodating groove; the pressing assembly is characterized by further comprising a pressing assembly, the pressing assembly comprises a plurality of flat pressing blocks, a first triangular pressing block and a second triangular pressing block, the flat pressing blocks are vertically arranged in the accommodating groove, the first triangular pressing block and the second triangular pressing block are located in the accommodating groove and are connected in an inclined plane matching mode, and the first triangular pressing block and the second triangular pressing block are parallel to the outer side surface of the accommodating groove and are perpendicular to the horizontally arranged accommodating groove.

Above-mentioned patent compresses tightly the subassembly through setting up for place the silicon chip in the storage tank and reliably compress tightly, and its problem lies in, and the stability of above-mentioned silicon boat structure is relatively poor, and the silicon chip quantity of loading is less, and the degree of difficulty of just dismantling the equipment is great.

Disclosure of Invention

The utility model discloses an it is relatively poor to overcome silicon boat stability among the prior art, and it is less to load silicon chip quantity to and dismantle the great technical problem of the equipment degree of difficulty, provide a screw thread horizontal equipment silicon boat, the silicon boat is modular structure, and the dismouting is convenient and transport is convenient, and is less to occuping of space, and the silicon chip quantity of loading is more.

In order to achieve the above purpose, the present invention adopts the following technical solution.

A threaded horizontal pack silicon boat comprising: the baffle comprises a first baffle and a second baffle which are arranged at intervals; the ditch stick is positioned between the first baffle and the second baffle and comprises a first connecting end, a bearing section and a second connecting end, and ditch teeth are arranged on the bearing section; the groove rods comprise a limiting groove rod and a supporting groove rod, and a height difference exists between the limiting groove rod and the supporting groove rod; the baffle is provided with a guide hole which is communicated along the thickness direction of the baffle, and the ditch rod is detachably connected with the baffle through a fastener. The application provides a horizontal equipment silicon boat of screw thread, the silicon boat is dismantled and assembled modular structure, ditch stick and baffle pass through the fastener and can dismantle the connection, when needs use the silicon boat to carry out the silicon chip and bear, use the fastener to assemble the silicon boat and accomplish, because be equipped with the guiding hole on the baffle, so the ditch stick can accomplish the location on the baffle fast, the assembly operation of silicon boat is convenient high-efficient, after the silicon boat uses, loosen the fastener and separate ditch stick and baffle, each part after the split occupies less to the space, and it is very convenient to transport the reprint; in addition, the groove rods are designed into two groups, wherein one group is a limiting groove rod, the other group is a supporting groove rod, the limiting groove rod limits the silicon wafer inserted on the silicon boat, the silicon wafer is prevented from sliding from two sides of the silicon boat, and the supporting groove rod effectively bears the silicon wafer, so that the stability of the silicon wafer is kept; the mode of baffle is widened to this application accessible realizes arranging side by side of a plurality of silicon rods to promote the quantity upper limit that the silicon boat can load the silicon chip by a wide margin.

Preferably, spacing ditch stick includes left spacing ditch stick and right spacing ditch stick, supports the ditch stick and lies in between left spacing ditch stick and the right spacing ditch stick along the width direction of baffle, supports the ditch stick and includes left support ditch stick and right support ditch stick. Spacing ditch stick is located both sides, supports the ditch stick and is located between the spacing ditch stick, has the difference in height between spacing ditch stick and the support ditch stick, and two spacing ditch sticks and two support ditch sticks are symmetrical arrangement structure, and silicon chip focus and silicon boat focus are in same straight line behind the silicon chip cartridge, are convenient for load the holistic stable placement of back silicon chip and silicon boat.

Preferably, the baffle is arc-shaped plate-shaped, the number of the guide holes is four, the guide holes are arranged at intervals along the arc-shaped direction of the baffle, and the projection of the guide holes along the normal direction of the baffle is in a round-angle rectangular shape. The guiding hole corresponds with the ditch stick one by one, and the guiding hole is arranged along the pitch arc direction of baffle, and the guiding hole that is located both sides promptly corresponds spacing ditch stick, and the guiding hole that is located the middle part corresponds and supports the ditch stick, treats that the silicon boat equipment accomplishes the back, and spacing ditch stick and the vertical position relation that supports the ditch stick are injectd promptly.

Preferably, the number of the groove teeth is a plurality of and the groove teeth are arranged at equal intervals along the length direction of the bearing section, two adjacent groove teeth are matched to form a slot, and the slots at corresponding positions on the left limiting groove rod, the right limiting groove rod, the left supporting groove rod and the right supporting groove rod are matched to form a silicon wafer slot for inserting a silicon wafer.

Preferably, the first connecting end comprises a first transition section and a first thread section, the aperture of the guide hole is larger than the diameter of the first thread section, one end of the first transition section is connected with the bearing section, and the other end of the first transition section is connected with the first thread section. The first thread section penetrates out of the guide hole and then is connected with the fastener, one end of the groove rod is fixed with the baffle, the first transition section is located on the upper portion of the bearing section, the first transition section protrudes out of the outer contour of the baffle and plays a role of a silicon boat supporting leg so as to raise the ground clearance of the silicon wafer and further benefit to gas circulation.

Preferably, the second connecting end comprises a second transition section and a second thread section, the aperture of the guide hole is larger than the diameter of the second thread section, one end of the second transition section is connected with the bearing section, and the other end of the second transition section is connected with the second thread section. The second screw thread section is connected with the fastener after penetrating out along the guide hole, one end of the groove rod is fixed with the baffle plate, the second transition section is located at the upper part of the bearing section, the second transition section protrudes out of the outer contour of the baffle plate, the silicon boat supporting leg is played, the ground clearance of the silicon wafer is raised, and then the gas circulation is benefited.

Preferably, the fastening piece is a nut, the nut is located on one side, away from the channel bar, of the baffle, and the nut is matched with the first connecting end and the second connecting end.

Preferably, the silicon boat is made of high purity czochralski polysilicon. The high-purity czochralski method polycrystalline silicon has the characteristics of high melting point and high purity, has the same thermal expansion coefficient with the silicon wafer, can effectively avoid the warping of the silicon wafer, improves the surface dislocation of the silicon wafer, and further improves the qualification rate of the silicon wafer.

To sum up, the utility model discloses following beneficial effect has: (1) the silicon boat has stable structure; (2) the assembly and disassembly are convenient, and the occupied space is reduced; (3) the silicon boat is assembled in a physical splicing mode, so that the risk of pollutants at the joint position is reduced; (4) the two ditch rods are in hollow structures, so that gas circulation and heat exchange are facilitated; (5) the groove rods are connected with the baffle plates by using the fasteners, so that the processing difficulty and the assembly difficulty are reduced, and the processing cost is saved; (6) the thermal expansion coefficients of the silicon boat and the silicon wafer are consistent, the warping of the silicon wafer can be effectively avoided, the surface dislocation of the silicon wafer is improved, and the qualification rate of the silicon wafer is further improved.

Drawings

Fig. 1 is a plan view of the present invention.

Fig. 2 is a left side view of the present invention.

Fig. 3 is a schematic view of the baffle plate of the present invention.

Fig. 4 is a schematic view of the middle channel rod of the present invention.

In the figure:

baffle 1, first baffle 1.1, second baffle 1.2, ditch stick 2, left spacing ditch stick 2.1, left side support ditch stick 2.2, right side support ditch stick 2.3, right side spacing ditch stick 2.4, first link 2a accepts section 2b, second link 2c, ditch tooth 3, guiding hole 4, fastener 5.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example (b):

as shown in fig. 1 to fig. 1, a screw thread horizontal assembled silicon boat comprises: the baffle plate 1 comprises a first baffle plate 1.1 and a second baffle plate 1.2 which are arranged at intervals; the ditch stick 2 is positioned between the first baffle and the second baffle and comprises a first connecting end 2a, a bearing section 2b and a second connecting end 2c, and ditch teeth 3 are arranged on the bearing section; the groove rods comprise a limiting groove rod and a supporting groove rod, and a height difference exists between the limiting groove rod and the supporting groove rod; the baffle is provided with a guide hole 4 which is penetrated through along the thickness direction of the baffle, and the ditch rod is detachably connected with the baffle through a fastener 5; the limiting groove rods comprise a left limiting groove rod 2.1 and a right limiting groove rod 2.4, the supporting groove rods are located between the left limiting groove rod and the right limiting groove rod along the width direction of the baffle, and the supporting groove rods comprise a left supporting groove rod 2.2 and a right supporting groove rod 2.3; the baffle is arc-shaped plate-shaped, the number of the guide holes is four, the guide holes are arranged at intervals along the arc-shaped surface direction of the baffle, and the projection of the guide holes along the normal direction of the baffle is in a round-angle rectangular shape; the number of the groove teeth is a plurality of groove teeth, the groove teeth are arranged at equal intervals along the length direction of the bearing section, two adjacent groove teeth are matched to form a slot, and the slots at corresponding positions on the left limiting groove rod, the right limiting groove rod, the left supporting groove rod and the right supporting groove rod are matched to form a silicon wafer slot for inserting a silicon wafer; the first connecting end comprises a first transition section and a first thread section, the aperture of the guide hole is larger than the diameter of the first thread section, one end of the first transition section is connected with the bearing section, and the other end of the first transition section is connected with the first thread section; the second connecting end comprises a second transition section and a second thread section, the aperture of the guide hole is larger than the diameter of the second thread section, one end of the second transition section is connected with the bearing section, and the other end of the second transition section is connected with the second thread section; the fastening piece is a nut, the nut is positioned on one side of the baffle plate far away from the ditch rod, and the nut is matched with the first connecting end and the second connecting end; the silicon boat is made of high purity Czochralski polysilicon.

As shown in fig. 1, the silicon boat is provided with a first baffle, a trench rod and a second baffle from left to right in sequence, the trench rod is connected with the first baffle and the second baffle through fasteners, and the fasteners are nuts; as shown in fig. 2, the trench rods are a left limiting trench rod, a left supporting trench rod, a right supporting trench rod and a right limiting trench rod in sequence from left to right, as can be seen from fig. 3, the baffle is an arc-shaped plate, the upper end surface of the baffle is a plane, the peripheral surface of the baffle is an arc-shaped surface, in this embodiment, the number of the guide holes is four, the guide holes are arranged along the circumferential direction of the baffle, the guide holes are close to the arc surface of the baffle, the profile of the guide holes is in a shape of a rounded rectangle, and the length directions of the four guide holes in this embodiment are all approximately along the radial direction of the baffle; as shown in FIG. 4, the trench rods are a first connecting end, a bearing section and a second connecting end in turn from left to right, the trench teeth are arranged on the bearing section, the number of the trench teeth is a plurality of the trench teeth and are arranged at equal intervals along the length direction of the bearing section, the first connecting end comprises a first screw thread section and a first transition section from left to right, the end surface of the first transition section is in a right trapezoid shape, the first transition section protrudes out of the arc-shaped surface of the first baffle, the second connecting end comprises a second screw thread section and a second transition section from right to left in turn, the end surface of the second transition section is in a right trapezoid shape, the second transition section protrudes out of the arc-shaped surface of the second baffle, the first transition section and the second transition section play a role of a silicon boat supporting leg so as to conveniently raise the ground height of a silicon wafer and benefit the gas circulation, the first screw thread section and the second screw thread section are both provided with threads, the threads are matched and fastened with nuts, and the two limit trench rods and the two trench supporting rods are in a symmetrical arrangement structure, after the silicon wafer is inserted, the gravity center of the silicon wafer and the gravity center of the silicon boat are positioned on the same straight line, so that the silicon wafer and the silicon boat can be conveniently and stably placed integrally after being loaded.

Claims

1. The utility model provides a horizontal equipment silicon boat of screw thread which characterized in that includes:

the baffle comprises a first baffle and a second baffle which are arranged at intervals;

the ditch stick is positioned between the first baffle and the second baffle and comprises a first connecting end, a bearing section and a second connecting end, and ditch teeth are arranged on the bearing section;

the groove rods comprise a limiting groove rod and a supporting groove rod, and a height difference exists between the limiting groove rod and the supporting groove rod;

the baffle is provided with a guide hole which is communicated along the thickness direction of the baffle, and the ditch rod is detachably connected with the baffle through a fastener;

the baffle is arc plate-shaped, and the quantity of guiding hole is four and arranges along baffle cambered surface direction interval, and the guiding hole is fillet rectangle form along baffle normal direction's projection.

2. The threaded horizontal assembled silicon boat of claim 1 wherein the limit trench rods comprise a left limit trench rod and a right limit trench rod, the support trench rods are located between the left limit trench rod and the right limit trench rod along the width direction of the baffle plate, and the support trench rods comprise a left support trench rod and a right support trench rod.

3. The threaded horizontal assembled silicon boat of claim 2, wherein the number of the groove teeth is several and the groove teeth are arranged at equal intervals along the length direction of the receiving section, two adjacent groove teeth cooperate to form a slot, and the slots at corresponding positions on the left limit groove bar, the right limit groove bar, the left support groove bar and the right support groove bar cooperate to form a silicon wafer slot for inserting silicon wafers.

4. The threaded horizontal assembly silicon boat of claim 1 wherein the first connection end comprises a first transition section and a first threaded section, the diameter of the pilot hole is larger than the diameter of the first threaded section, one end of the first transition section is connected to the receiving section, and the other end of the first transition section is connected to the first threaded section.

5. The threaded horizontal assembled silicon boat of claim 1, wherein the second connection end comprises a second transition section and a second threaded section, the diameter of the pilot hole is larger than the diameter of the second threaded section, one end of the second transition section is connected to the receiving section, and the other end of the second transition section is connected to the second threaded section.

6. The threaded horizontal assembly silicon boat of claim 1 or 2, wherein the fastening member is a nut, the nut is located on the side of the baffle away from the channel bar, and the nut is matched with the first connecting end and the second connecting end.

7. The threaded horizontal assembled silicon boat of claim 1 or 2 wherein the silicon boat is made of high purity czochralski polysilicon.