CN213184239U

CN213184239U - Vertical equipment silicon boat of screw thread

Info

Publication number: CN213184239U
Application number: CN202022006159.8U
Authority: CN
Inventors: 范明明; 韩颖超; 李长苏
Original assignee: Hangzhou Dunyuan Poly Core Semiconductor Technology Co Ltd
Current assignee: Hangzhou Dunyuan Poly Core Semiconductor Technology Co Ltd
Priority date: 2020-09-14
Filing date: 2020-09-14
Publication date: 2021-05-11
Anticipated expiration: 2030-09-14

Abstract

The utility model discloses an overcome the production needs that quartz boat or carborundum boat can't adapt to high standard silicon chip among the prior art, there is the risk of polluting the silicon chip in the fixed silicon boat part combination mode of chemical agent to and the unstable technical problem of simple fixed silicon boat structure of contact, provide a vertical equipment silicon boat of screw thread, include: the mounting plate comprises a top plate and a flange, and the top plate and the flange are arranged at intervals; the groove rods are arranged between the top plate and the flange, a plurality of groove teeth are arranged on the groove rods along the length direction of the groove rods, and the number of the groove rods is a plurality and the groove rods are arranged at intervals along the circumferential direction of the mounting plate; be equipped with the spacing draw-in groove to the ditch stick on the terminal surface that the mounting panel is close to the ditch stick, be equipped with the mounting hole that link up along mounting panel thickness direction in the draw-in groove, the ditch stick passes through the fastener can be dismantled with the mounting panel and is connected.

Description

Vertical equipment silicon boat of screw thread

Technical Field

The utility model relates to a semiconductor manufacturing technology field especially relates to a vertical equipment silicon boat of screw thread.

Background

The silicon chip is the main substrate material of the modern super-large scale integrated circuit, and is generally made into an integrated circuit grade semiconductor silicon chip by the processes of crystal pulling, slicing, chamfering, lapping, corrosion, back sealing, polishing, cleaning and the like. The heat treatment of silicon wafers is an important process in the process of manufacturing semiconductor devices or circuits, and the heat treatment comprises numerous processes such as CVD, oxidation, diffusion, annealing and the like, and occupies most of the process of manufacturing integrated circuits. At this time, a carrier for loading semiconductor silicon wafers is needed, the semiconductor silicon wafers are placed on the carrier and then put into a heat treatment furnace for treatment, and the carrier is called a silicon wafer boat in the industry. The boat commonly used for bearing silicon wafers in the market is made of high-purity quartz or silicon carbide. However, when the quartz boat is used as a carrier of a silicon wafer, the quartz boat may deform and soften after long-term use at a processing temperature of over 1000 ℃, which causes the process of placing the silicon wafer therein to be abnormal, and the quartz boat and the silicon wafer are made of different materials and have obviously inconsistent coefficients of expansion with heat and contraction with cold, and cold spots appear during temperature rise and fall, which causes lattice collapse and crystal grain dislocation, thereby affecting the quality of the silicon wafer. For the silicon carbide boat, along with the increase of the size of the silicon wafer, the fineness of an integrated circuit is higher and higher, the requirements of the production process are more and more strict, and oxidation reaction may occur in the high-temperature treatment process, which may affect the quality of the silicon wafer. Therefore, with the development of semiconductor technology, quartz boats or silicon carbide boats have become unable to meet the production requirements of high-standard silicon wafers. In addition, the combination mode of different parts on the silicon boat is another technical difficulty, the silicon wafer is polluted when the silicon boat is fixed by using a chemical agent, the simple contact type fixation has the technical problem that the structure of the silicon boat is unstable, and the safety of the silicon wafer heat treatment processing cannot be effectively guaranteed.

Chinese patent with application number CN201721824924.9 discloses a bolt formula silicon boat for the silicon chip is at the support of thermal treatment in-process with thermal-insulated, bolt formula silicon boat includes parallel arrangement and corresponding flange, day board, arranges in and is used for the bearing between the two a plurality of silicon tooth stick of silicon chip and the location bolt that is used for fixed silicon tooth stick tip, the silicon tooth stick perpendicular to the flange medial surface, silicon tooth stick inboard are equipped with a plurality of equidistance and the ditch tooth that is parallel to each other, and the silicon chip inserts and shelves in on the ditch tooth.

The patent adopts the positioning bolt to position and lock the end part of the silicon tooth bar, thereby eliminating the possible degumming phenomenon caused by adopting glue dripping bonding; the silicon chip is inconvenient to insert and take in the structure, and the fixed mounting mode of the positioning bolt is easy to cause the phenomenon of blocking.

Disclosure of Invention

The utility model discloses an overcome among the prior art quartz boat or carborundum boat unable production needs that adapt to the high standard silicon chip, the fixed silicon boat part combination mode of chemical agent exists the risk of polluting the silicon chip to and the unstable technical problem of silicon boat structure of simple contact is fixed, provide a screw thread vertical equipment silicon boat, silicon boat stable in structure and silicon chip insert and get convenient, can effectively avoid the high temperature silicon boat to cause the pollution to the silicon chip when reducing manufacturing cost.

In order to achieve the above purpose, the present invention adopts the following technical solution.

A threaded vertical assembled silicon boat comprising: the mounting plate comprises a top plate and a flange, and the top plate and the flange are arranged at intervals; the groove rods are arranged between the top plate and the flange, a plurality of groove teeth are arranged on the groove rods along the length direction of the groove rods, and the number of the groove rods is a plurality and the groove rods are arranged at intervals along the circumferential direction of the mounting plate; be equipped with the spacing draw-in groove to the ditch stick on the terminal surface that the mounting panel is close to the ditch stick, be equipped with the mounting hole that link up along mounting panel thickness direction in the draw-in groove, the ditch stick passes through the fastener can be dismantled with the mounting panel and is connected. The fixed connection of the ditch rod and the mounting plate is realized by using the fastener, the silicon boat after the mounting is stable in structure, and the connection position of the ditch rod and the mounting plate has no pollution source; in addition, the silicon boat can adopt different numbers of groove teeth to bear the silicon wafers according to the process requirements, and only the groove rods need to be replaced correspondingly under different process requirements, so that the silicon boat is low in manufacturing cost and extremely wide in application range; finally, the connecting mode dismouting of fastener is convenient, and can not take place dead phenomenon of card like the connecting mode of location bolt.

Preferably, the central position of the mounting plate is provided with a material reducing hole which penetrates through the mounting plate along the thickness direction of the mounting plate, and a plurality of groove teeth are arranged in parallel at equal intervals along the length direction of the groove rod. The material reducing holes are used for reducing the overall weight of the silicon boat, facilitating transportation and reducing the physical consumption of operators; and because the silicon boat is used vertically, the load of the ditch rod can be synchronously reduced by reducing the quality of the mounting plate, the structural deformation of the ditch rod due to overlarge load is effectively avoided, and the service life of the ditch rod is further prolonged.

Preferably, the trench rods comprise two front trench rods and one rear trench rod, trench teeth at the same height on the front trench rods and the rear trench rods are matched to form the silicon wafer placing groove, and the distance between the two front trench rods is larger than that between the front trench rods and the rear trench rod. Based on circular structural feature can know, its arc length is positive correlation with the chord length, so when the distance between two front ditch stick is greater than the distance between front ditch stick and the back ditch stick, arc opening between two front ditch stick is greater than the arc opening between front ditch stick and the back ditch stick in step, and the corresponding ditch tooth on three ditch sticks forms the silicon chip storage tank that one side opening is big and both sides opening is little in addition promptly, the structure can make the silicon chip insert the storage tank easily to can utilize the manipulator to insert from the big one side of opening, the silicon chip is inserted and is got convenient and fast, and the holding security is good, and vapor deposition is even.

Preferably, the clamping grooves comprise two front clamping grooves and a rear clamping groove, the rear clamping groove is arranged along the radial direction of the mounting plate, an included angle between the front clamping groove and the rear clamping groove is an acute angle, and an included angle between the two front clamping grooves is an obtuse angle. The groove rod is positioned by the clamping groove, the installation position of the groove rod is synchronously determined after the position of the clamping groove is determined, and the installation process is convenient and efficient; simultaneously, the fixed back draw-in groove of accomplishing of ditch stick and mounting panel is effective spacing to the ditch stick to guarantee silicon boat overall structure stable.

Preferably, the projection of the clamping groove along the normal direction of the mounting plate is in a right trapezoid shape, one end of the clamping groove along the length direction penetrates through the circumferential surface of the mounting plate, and the number of the mounting holes is two and the two mounting holes are arranged at intervals along the length direction of the clamping groove.

Preferably, the mounting hole is a cylindrical counter bore. The cylindrical counter bore is used for accommodating a nut, the nut is hidden in the cylindrical counter bore after the ditch rod and the mounting plate are fixed through the bolt, and the nut does not protrude out of the end face of the mounting plate, so that the silicon boat can be stably placed on a plane.

Preferably, the fastener is a bolt made of silicon material, and the two ends of the channel bar along the length direction of the channel bar are provided with internal thread holes which are matched with the threads of the bolt.

Preferably, the silicon boat is made of high purity polycrystalline silicon. The silicon boat made of high-purity polysilicon has the characteristics of high melting point, high purity, thermal expansion coefficient consistent with that of a silicon wafer and the like, can effectively avoid warping of the silicon wafer and improve surface fault layers of the silicon wafer, and therefore the qualified rate of the silicon wafer is improved.

Preferably, the cross section of the groove tooth is in a right trapezoid shape, and two sides of the groove tooth along the width direction are respectively provided with a hollow area. The left and right sides that the ditch stick is located ditch tooth and distributes is the fretwork region, and the mutual symmetric distribution of both sides fretwork region, can guarantee through above-mentioned structure that the contact area of ditch stick and mounting panel both ends is sufficient under the prerequisite reduces the contact area of ditch tooth and silicon chip as far as to silicon chip contact dislocation and back fish tail problem have been weakened.

To sum up, the utility model discloses following beneficial effect has: (1) the contact area between the silicon chip and the groove teeth is reduced, and the problems of silicon chip contact dislocation, back scratch and the like are reduced; (2) the defects that the quartz boat is softened and deformed at high temperature, the silicon wafer is oxidized and polluted by the silicon carbide boat at high temperature, and the cost is high are overcome; (3) a stable and reliable silicon part connecting mode is provided, and the possibility that the connecting part brings in external pollutants is eliminated; (4) the silicon boat has a stable structure and the silicon wafers are convenient to insert and take; (5) effectively reducing the manufacturing cost.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a schematic structural view of the middle ditch rod of the present invention.

Fig. 3 is a sectional view taken along line a-a in fig. 2.

Fig. 4 is a schematic end view of the middle channel rod of the present invention.

Fig. 5 is a front schematic view of the middle panel of the present invention.

Fig. 6 is a back schematic view of the middle ceiling of the present invention.

Fig. 7 is a schematic front view of a flange according to the present invention.

Fig. 8 is a schematic back view of the flange of the present invention.

Fig. 9 is a schematic structural view of the bolt of the present invention.

In the figure:

the structure comprises a top plate 1, an upper clamping groove 1.1, an upper mounting hole 1.2, a flange 2, a lower clamping groove 2.1, a lower mounting hole 2.2, a groove rod 3, a front groove rod 3.1, a rear groove rod 3.2, groove teeth 3.3, a hollow area 3.4, an internal thread hole 3.5, a bolt 4, a screwing groove 4.1, a stud 4.2 and an external thread 4.3.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example (b):

as shown in fig. 1 to 9, a screw-threaded vertical assembled silicon boat comprises: the mounting plate comprises a top plate 1 and a flange 2, and the top plate and the flange are arranged at intervals; the groove rods 3 are arranged between the top plate and the flange, a plurality of groove teeth 3.3 are arranged on the groove rods along the length direction of the groove rods, and the number of the groove rods is a plurality and the groove rods are arranged at intervals along the circumferential direction of the mounting plate; the end face, close to the ditch rod, of the mounting plate is provided with a clamping groove for limiting the ditch rod, a mounting hole which is through along the thickness direction of the mounting plate is arranged in the clamping groove, and the ditch rod is detachably connected with the mounting plate through a fastener 4; the center of the mounting plate is provided with a material reducing hole which is communicated along the thickness direction of the mounting plate, and a plurality of groove teeth are arranged in parallel at equal intervals along the length direction of the groove rod; the trench rods comprise two front trench rods 3.1 and one rear trench rod 3.2, trench teeth at the same height on the front trench rods and the rear trench rods are matched to form a silicon wafer placing groove, and the distance between the two front trench rods is greater than that between the front trench rods and the rear trench rods; the clamping grooves comprise two front clamping grooves and one rear clamping groove, the rear clamping groove is arranged along the radial direction of the mounting plate, an included angle between the front clamping groove and the rear clamping groove is an acute angle, and an included angle between the two front clamping grooves is an obtuse angle; the projection of the clamping grooves along the normal direction of the mounting plate is in a right trapezoid shape, one end of each clamping groove along the length direction of the clamping groove penetrates through the circumferential surface of the mounting plate, and the number of the mounting holes is two and the clamping grooves are arranged at intervals along the length direction of the clamping grooves; the mounting hole is a cylindrical counter bore; the fastener is a bolt made of silicon material, two ends of the channel bar along the length direction of the channel bar are respectively provided with an internal thread hole 3.5, and the internal thread holes are matched with the threads of the bolt; the silicon boat is made of high-purity polysilicon; the cross section of the groove tooth is in a right-angled trapezoid shape, and two sides of the groove tooth in the width direction are respectively provided with a hollow area 3.4.

As shown in fig. 1, the threaded vertical assembled silicon boat of the present application comprises, from top to bottom, a top plate, trench rods and a flange in sequence, wherein the top plate and the flange are both annular plates and are coaxially arranged, the number of the trench rods is three, and the trench rods are circumferentially arranged at intervals, as shown in the figure, two trench rods close to the outer side are front trench rods, and a back trench rod is positioned at the inner side along the normal direction of the drawing, and the distance between the two front trench rods is greater than the distance between the front trench rods and the back trench rods; a plurality of groove teeth are arranged on the groove rods from top to bottom, the upper and lower adjacent groove teeth are matched to form a groove for inserting silicon wafers, the groove teeth on the three groove rods are arranged oppositely, the groove teeth at the same height on the two front groove rods and the rear groove rod are matched to form a silicon wafer placing groove, and the placing groove is parallel to the mounting plate. As shown in fig. 2, the two ends of the channel bar along the length direction are provided with mounting parts, the mounting parts are not provided with channel teeth, and a plurality of channel teeth are arranged between the two mounting parts in parallel at equal intervals; the cross section of the groove rod is shown in fig. 3, the right side of the groove rod is a groove rod body, the groove teeth are in a right-angled trapezoid shape, and both sides of the groove teeth in the width direction are provided with a hollow area; as shown in fig. 4, the two ends of the channel bar are both provided with internal thread holes, the number of the internal thread holes is two, the internal thread holes are arranged at intervals, the clamping grooves on the mounting plate are provided with mounting holes, and the mounting holes correspond to the internal thread holes. As shown in fig. 5, the end surface of the top plate close to the channel bar is provided with three upper clamping grooves 1.1, the upper clamping grooves are arranged at intervals along the circumferential direction of the top plate, the bottom of each upper clamping groove is provided with an upper mounting hole 1.2, the upper mounting holes are communicated along the thickness direction of the top plate, and as can be seen from fig. 6, the upper mounting holes are cylindrical counter bores; as shown in fig. 7, the end face, close to the channel bar, of the flange is provided with three lower clamping grooves 1.1, the number of the lower clamping grooves is three, the lower clamping grooves are circumferentially arranged at intervals along the flange, the bottom of the lower clamping groove is provided with lower mounting holes 1.2, the lower mounting holes are communicated along the thickness direction of the flange, and as can be seen in combination with fig. 8, the lower mounting holes are cylindrical counter bores. As shown in fig. 9, the bolt consists of a screwing groove 4.1, a stud 4.2 and an external thread 4.3, the bolt is made of silicon material, the external thread is matched with the internal thread holes at the two ends of the groove rod, the appearance of the stud is the same as that of the upper mounting hole and the lower mounting hole, and the screwing groove is used for screwing the torque wrench; when the bolt is used for connection, a torque wrench (0.4 N.m in the embodiment) capable of fixing torque force is needed, and the problem that a common wrench is excessively stressed to cause breakage of a silicon product or is insufficiently stressed to cause connection is solved.

Claims

1. A threaded vertical assembled silicon boat, comprising:

the mounting plate comprises a top plate and a flange, and the top plate and the flange are arranged at intervals;

the groove rods are arranged between the top plate and the flange, a plurality of groove teeth are arranged on the groove rods along the length direction of the groove rods, and the number of the groove rods is a plurality and the groove rods are arranged at intervals along the circumferential direction of the mounting plate;

the end face, close to the ditch rod, of the mounting plate is provided with a clamping groove for limiting the ditch rod, a mounting hole which is communicated along the thickness direction of the mounting plate is arranged in the clamping groove, and the ditch rod is detachably connected with the mounting plate through a fastener;

the ditch stick includes two preceding ditch sticks and one back ditch stick, and the ditch tooth cooperation that is in same height on preceding ditch stick and the back ditch stick forms the silicon chip standing groove, and the distance between two preceding ditch sticks is greater than the distance between preceding ditch stick and the back ditch stick.

2. The vertical screw-threaded assembled silicon boat as claimed in claim 1, wherein the mounting plate has a relief hole at its center, the relief hole extending through the mounting plate in the thickness direction, and a plurality of groove teeth are arranged in parallel at equal intervals along the length direction of the groove rod.

3. The threaded vertical assembly silicon boat of claim 2, wherein the slots comprise two front slots and one rear slot, the rear slot is arranged along the radial direction of the mounting plate, the included angle between the front slot and the rear slot is an acute angle, and the included angle between the two front slots is an obtuse angle.

4. The threaded vertical assembly silicon boat as claimed in claim 1 or 2, wherein the projection of the slot along the normal direction of the mounting plate is in a right trapezoid shape, one end of the slot along the length direction thereof penetrates through the circumferential surface of the mounting plate, and the number of the mounting holes is two and the mounting holes are arranged at intervals along the length direction of the slot.

5. The threaded vertical assembled silicon boat of claim 1 or 2, wherein the mounting hole is a cylindrical counterbore.

6. The vertical threaded assembled silicon boat as claimed in claim 1 or 2, wherein the fastening member is a bolt made of silicon material, and the groove rod is provided with an internal threaded hole at both ends along the length direction thereof, the internal threaded hole being matched with the thread of the bolt.

7. The threaded vertical assembly silicon boat of claim 1 or 2, wherein the silicon boat is made of high purity polysilicon.

8. The vertical screw-threaded assembled silicon boat as claimed in claim 1 or 2, wherein the cross-section of the teeth is rectangular trapezoid, and the teeth are provided with a hollowed-out area along the two sides of the teeth in the width direction.