CN219917099U - Diffusion and LPCVD quartz boat - Google Patents
Diffusion and LPCVD quartz boat Download PDFInfo
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- CN219917099U CN219917099U CN202321663643.5U CN202321663643U CN219917099U CN 219917099 U CN219917099 U CN 219917099U CN 202321663643 U CN202321663643 U CN 202321663643U CN 219917099 U CN219917099 U CN 219917099U
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- clamping
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- rod
- quartz boat
- diffusion
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- 239000010453 quartz Substances 0.000 title claims abstract description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 238000009792 diffusion process Methods 0.000 title claims abstract description 25
- 238000004518 low pressure chemical vapour deposition Methods 0.000 title claims abstract description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 44
- 239000010703 silicon Substances 0.000 claims abstract description 44
- 235000012431 wafers Nutrition 0.000 claims abstract description 35
- 230000007423 decrease Effects 0.000 claims description 2
- 238000007747 plating Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000004140 cleaning Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 4
- 238000004804 winding Methods 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a diffusion and LPCVD quartz boat, which comprises two square fixing plates, a plurality of cross bars and a plurality of clamping rods, wherein the cross bars are arranged in parallel with the clamping rods, the cross bars and the clamping rods are provided with a plurality of clamping grooves for clamping silicon wafers along the respective axial directions, and in a working state, the cross bars and the clamping rods of the quartz boat extend along the horizontal direction, and the clamping grooves of the cross bars and the clamping grooves of the clamping rods are in one-to-one correspondence in the same vertical direction; the fixing plate is provided with a first side, a second side and a third side, wherein the first side and the second side are oppositely arranged, the third side is positioned between the first side and the second side, a cross rod is respectively arranged on the first side and the second side of the corresponding fixing plate, and clamping rods are respectively arranged on the two opposite sides of the cross rod; two cross bars are arranged on the third side of the corresponding fixing plate, and clamping rods are arranged between the two cross bars. According to the quartz boat provided by the utility model, the two silicon wafers in the cross rod clamping groove and the clamping rod clamping groove can be closely attached, so that the winding plating and winding expansion of the crystal silicon battery are reduced or even avoided, the subsequent chemical cleaning process steps are omitted, and the production cost is saved.
Description
Technical Field
The utility model relates to a diffusion and LPCVD quartz boat.
Background
The preparation process of the N-type single crystal solar cell is approximately as follows: texturing, diffusing, cleaning, back polishing, tunneling passivation layer deposition, alumina deposition, silicon nitride deposition, metallization and the like. Wherein, diffusion is the main procedure for preparing PN junction, and phosphorus oxychloride is introduced into a diffusion furnace for P-type silicon wafer to form a phosphorus doped layer, namely an N-type layer. And (3) introducing boron tribromide or boron trichloride into the N-type silicon wafer to form a boron doped layer, namely a P-type layer. The P-type junction or the N-type junction is manufactured only by single-sided diffusion, and the other side is not required. In addition, due to the consideration of productivity, two silicon wafers are basically placed back to back in the same clamping groove of the traditional quartz boat, and one surface of the silicon wafers, which is attached, is prevented from being doped in a back to back attaching and placing mode.
The existing quartz boat has few clamping points on three sides of the silicon wafer, the silicon wafer deforms at high temperature, particularly the silicon wafer with the thickness of 18Xmm or 210mm, after the size is further increased, the silicon wafers are heated and bent seriously, the silicon wafers are inapplicable, two silicon wafers in the same clamping groove can be separated, a certain gap exists, a certain doping layer can be formed at the edge of the other side of the silicon wafer to form a PN junction, namely, the generation of coiling and plating and coiling and expanding are realized, a cleaning procedure is needed at the back, and the coiling and expanding and coiling and plating are removed by using chemical liquid medicine, so that the production cost and the complexity of the technological process are increased; in addition, after the winding plating and the winding expansion are deepened, the uniformity of diffusion is affected, and the conversion efficiency of the battery is further affected.
Disclosure of Invention
The utility model aims to provide a diffusion and LPCVD quartz boat, which solves the problems of coiling plating and coiling expansion deepening caused by easy separation of two silicon wafers in a clamping groove of the quartz boat during processing.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a diffusion and LPCVD quartz boat, includes two square fixed plates that set up relatively and sets up a plurality of horizontal poles, a plurality of clamping bars between two fixed plates, the horizontal pole with the clamping bar parallel arrangement, horizontal pole with the clamping bar along the each axial set up a plurality of draw-in grooves that are used for joint silicon chip, under operating condition, horizontal pole, the clamping bar of quartz boat all extend along the horizontal direction, the draw-in groove of horizontal pole with the draw-in groove of clamping bar in same vertical direction one-to-one;
the fixing plate is provided with a first side, a second side and a third side, wherein the first side and the second side are oppositely arranged, the third side is positioned between the first side and the second side, the first side and the second side of the fixing plate are respectively provided with a cross rod, and the opposite sides of the cross rods are respectively provided with clamping rods; two cross bars are arranged on the third side of the fixing plate correspondingly, and clamping rods are arranged between the two cross bars.
Preferably, in the working state, the fourth side of the fixing plate faces upwards, the third side faces downwards, the cross bars corresponding to the first side and the second side of the fixing plate and the clamping grooves of the clamping rods are obliquely arranged, and the oblique directions of the clamping grooves are consistent.
Preferably, the cross bars and the clamping grooves of the clamping rods corresponding to the third side of the fixing plate are obliquely arranged, and the oblique directions of the clamping grooves are consistent with those of the cross bars and the clamping grooves of the clamping rods corresponding to the first side and the second side of the fixing plate.
Preferably, the cross bar corresponding to the third side of the fixing plate and the clamping groove of the clamping rod are vertically arranged.
Preferably, the cross bar corresponding to the third side of the fixing plate and the clamping groove on the clamping rod comprise a first section and a second section which are communicated with each other, the first section is closer to the opening of the clamping groove than the second section, the width of the first section is gradually reduced from the first section to the second section, and the width of the second section is consistent.
Preferably, the included angle between the clamping rod, the clamping groove on the cross rod and the vertical surface is more than 0 degrees and less than or equal to 6 degrees.
Preferably, the clamping rod and the cross rod are both cylinders or square columns, and when the clamping rod and the cross rod are both cylinders, the diameter of the clamping rod is smaller than or equal to the diameter of the cross rod.
Preferably, the clamping groove of the clamping rod and the cross rod comprises a bottom surface and two side surfaces which are oppositely arranged, the two side surfaces are connected to the same side of the bottom surface, a space for accommodating one side of the silicon wafer is formed among one side surface, the bottom surface and the other side surface, and the distance between the top end of the side surface of the clamping groove on the clamping rod and the bottom surface is smaller than or equal to the distance between the top end of the side surface of the clamping groove on the cross rod and the bottom surface.
Preferably, the distance between the two sides of the clamping groove on the clamping rod is smaller than the distance between the two sides of the clamping groove on the cross rod.
Preferably, a supporting plate is further arranged between the two fixing plates, the supporting plate is parallel to the fixing plates, and the supporting plate is provided with a through hole for the cross rod and the clamping rod to pass through.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
according to the diffusion and LPCVD quartz boat provided by the utility model, the cross rod and the clamping rod are arranged, so that two silicon wafers in the cross rod clamping groove and the clamping rod clamping groove can be closely attached, the coiling plating and coiling expansion of a crystal silicon battery are reduced or even avoided, the subsequent chemical cleaning process steps are omitted, the production cost is saved, the production efficiency is improved, and the conversion efficiency of the solar battery is further improved.
Drawings
FIG. 1 is a side view of a mounting plate of a diffusion LPCVD quartz boat according to the present utility model;
FIG. 2 is a front view of a mounting plate of the diffusion LPCVD quartz boat of the present utility model;
FIG. 3 is an enlarged view of FIG. 2;
FIG. 4 is an enlarged view of FIG. 3;
FIG. 5 is a block diagram of the cross bar and the clamping groove on the clamping bar;
fig. 6 is another structure diagram of the cross bar and the clamping groove on the clamping bar.
In the above figures:
1-a fixing plate; 2-supporting plates; 3-cross bars, 31-clamping grooves, 311-first sections, 312-second sections, 313-side surfaces and 314-bottom surfaces; 4-clamping rods and 41-clamping grooves; 5-lugs; 6-boat feet; 7-silicon wafer.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Referring to the diffusion and LPCVD quartz boat shown in fig. 1-6, the diffusion and LPCVD quartz boat comprises two fixing plates 1 which are oppositely arranged, a plurality of cross bars 3 and a plurality of clamping rods 4 which are arranged between the two fixing plates 1, one ends of the cross bars 3 and the clamping rods 4 are penetrated on one fixing plate 1, the other ends of the cross bars 3 and the clamping rods 4 are penetrated on the other fixing plate 1, the cross bars 3 and the clamping rods 4 are arranged in parallel, and a gap is kept between the cross bars 3 and the clamping rods 4.
The cross rod 3 and the clamping rod 4 are provided with a plurality of clamping grooves (31, 41) for clamping the silicon wafers 7 along the respective axial directions, and in a working state, the cross rod 3 and the clamping rod 4 of the quartz boat extend along the horizontal direction, and the clamping grooves 31 of the cross rod 3 and the clamping grooves 41 of the clamping rod 4 are in one-to-one correspondence in the same vertical direction, so that the silicon wafers 7 are positioned in the corresponding clamping grooves, and one silicon wafer 7 can be inserted into the corresponding clamping grooves of the cross rod 3 and the clamping rod 4; or, in the working state, the cross rod 3 and the clamping rod 4 of the quartz boat extend along the vertical direction, and the clamping grooves of the cross rod 3 and the clamping grooves of the clamping rod 4 are in one-to-one correspondence in the same horizontal direction, so that one silicon wafer 7 can be inserted into the corresponding clamping grooves of the cross rod 3 and the clamping rod 4.
The fixing plate 1 has a first side (indicated by a in fig. 1) and a second side (indicated by b in fig. 1) which are oppositely arranged, a third side (indicated by c in fig. 1) and a fourth side (indicated by d in fig. 1) which are oppositely arranged, the first side is adjacently arranged with the fourth side, the second side is adjacently arranged with the third side, the first side and the second side corresponding to (approaching) the fixing plate 1 are respectively provided with a cross rod 3, and two opposite sides of the cross rod 3 are respectively provided with a clamping rod 4, namely: the first side of the corresponding fixed plate 1 is provided with a cross rod 3, two opposite sides of the cross rod 3 are respectively provided with one or more clamping rods 4, in the working state, the cross rod 3 and the clamping rods 4 of the quartz boat extend along the horizontal direction, the cross rod 3 and the clamping rods 4 positioned on the first side of the fixed plate 1 are distributed along the upper direction, and at the moment, the center lines of the cross rod 3 and the clamping rods 4 can be not in the same vertical plane (i.e. staggered), or the center lines of the cross rod 3 and the clamping rods 4 are in the same vertical plane; the second side corresponding to the fixed plate 1 is provided with a cross rod 3, two opposite sides of the cross rod 3 are respectively provided with one or more clamping rods 4, in the working state, the cross rod 3 and the clamping rods 4 of the quartz boat extend along the horizontal direction, the cross rod 3 and the clamping rods 4 positioned at the second side of the fixed plate 1 are distributed along the up-down direction, and at the moment, the center lines of the cross rod 3 and the clamping rods 4 can be not in the same vertical plane (i.e. staggered), or the center lines of the cross rod 3 and the clamping rods 4 are in the same vertical plane; the third side corresponding to the fixed plate 1 is provided with two cross bars 3, a clamping rod 4 is arranged between the two cross bars 3, the cross bars 3 and the clamping rods 4 positioned on the third side of the fixed plate 1 are distributed along the left-right direction, and at this time, the center lines of the cross bars 3 and the clamping rods 4 are not in the same horizontal plane (i.e. staggered), or the center lines of the cross bars 3 and the clamping rods 4 are in the same horizontal plane. Through setting up horizontal pole 3 and draw-in bar 4, the pinch point to silicon chip 7 increases for two silicon chips 7 in horizontal pole 3 draw-in groove and the draw-in bar 4 draw-in groove can closely laminate.
Correspondingly, the silicon wafer 7 is provided with a first side, a second side, a fourth side and a third side which are oppositely arranged, the first side, the second side, the fourth side and the third side of the silicon wafer 7 are respectively corresponding to the first side, the second side, the fourth side and the third side of the fixed plate 1, and the cross rod 3 and the clamping rod 4 are arranged on the first side, the second side and the third side of the fixed plate 1, namely three sides of the clamping silicon wafer 7.
The draw-in groove of clamping lever 4, horizontal pole 3 of this example includes the bottom surface, two sides that set up relatively, two sides all connect the same side at the bottom surface, form the space on one side of holding silicon chip 7 between a side, the bottom surface, another side, under operating condition, horizontal pole 3 and clamping lever 4 all extend along the horizontal direction, the side of draw-in groove extends along vertical direction, interval between the side top and the bottom surface of draw-in groove 41 on the clamping lever 4 is less than or equal to the interval between side 313 top and the bottom surface 314 of draw-in groove 31 on the horizontal pole 3, under the prerequisite of guaranteeing draw-in groove chucking silicon chip 7, reduce the area of contact with silicon chip 7.
Further, the distance between the two sides of the clamping groove is larger than or equal to the thickness of the silicon wafer 7, so that the silicon wafer 7 is clamped in the clamping groove, preferably, the distance between the two sides of the clamping groove on the clamping rod 4 is smaller than the distance between the two sides 313 of the clamping groove on the cross rod 3, the two silicon wafers 7 can be tightly clamped in the clamping groove, and the two silicon wafers 7 are not easy to separate.
In one embodiment, the spacing between the clamping bar and the two sides of the clamping groove of the cross bar is in the range of 0.5mm to 1mm.
Further, draw-in groove all inclines to set up on draw-in bar 4, the horizontal pole 3, the inclination of draw-in groove is unanimous, the central line of draw-in groove is located same one side promptly, under operating condition, the horizontal pole 3 of quartz boat, draw-in bar 4 all extends along the horizontal direction, fixed plate 1 vertical setting, the draw-in groove is to being close to the upwards extension of the slope of a fixed plate 1 direction, keep the acute angle contained angle between the side of draw-in groove and the vertical face promptly, when the 7 joint of silicon chip in the draw-in groove, the 7 slope setting of silicon chip can let two silicon chips 7 in the draw-in groove closely laminate.
In one embodiment, in the working state, the included angle between the clamping grooves on the clamping rod 4 and the cross rod 3 and the vertical surface is larger than 0 ° and smaller than or equal to 6 °, and preferably, the included angle between the clamping grooves on the clamping rod 4 and the cross rod 3 and the vertical surface is larger than or equal to 3 ° and smaller than or equal to 6 °.
In another embodiment, in the working state, the cross rod 3 and the clamping rod 4 of the quartz boat extend along the horizontal direction, the fourth side of the fixed plate 1 faces upwards, the third side faces downwards, the clamping grooves corresponding to the cross rod 3 and the clamping rod 4 of the first side and the second side of the fixed plate 1 are obliquely arranged, and the clamping grooves corresponding to the cross rod 3 and the clamping rod 4 of the third side of the fixed plate 1 are vertically arranged (i.e. are not oblique). Further, the cross rod 3 corresponding to the third side of the fixing plate 1 and the clamping groove on the clamping rod 4 respectively comprise a first section 311 and a second section 312 which are communicated, the first section 311 is an opening of the clamping groove, the second section 312 is close to the bottom wall of the clamping groove, the width of the first section 311 gradually decreases from the first section 311 to the second section 312, the cross rod is Y-shaped, the maximum width of the first section 311 is larger than the thickness of the silicon wafer 7, and the width of the second section 312 is consistent. The arrangement is convenient for the silicon wafer 7 to enter the clamping groove, and simultaneously reduces the contact area between the silicon wafer 7 and the clamping groove.
In a preferred embodiment, referring to fig. 1, a cross bar 3 is provided corresponding to a first side of the fixing plate 1, and two opposite sides of the cross bar 3 are respectively provided with a clamping rod 4; a cross rod 3 is arranged corresponding to the second side of the fixed plate 1, and two clamping rods 4 are respectively arranged on two opposite sides of the cross rod 3; two cross bars 3 are arranged corresponding to the fourth side of the fixed plate 1, and a clamping rod 4 is arranged between the two cross bars 3.
The clamping rod 4 and the cross rod 3 are both cylinders or square columns, when the clamping rod 4 and the cross rod 3 are both cylinders, the diameter of the clamping rod 4 is smaller than or equal to the diameter of the cross rod 3, and the diameter of the clamping rod 4 is smaller than the diameter of the cross rod 3; when the clamping rod 4 and the cross rod 3 are Fang Tizhu, the cross section area of the clamping rod 4 is smaller than or equal to the cross section area of the cross rod 3, and thus, the size of the clamping groove on the clamping rod 4 can be smaller than that of the clamping groove on the cross rod 3, namely, the length of the side surface of the clamping groove on the clamping rod 4 (namely, the distance between the top end of the side surface of the clamping groove and the bottom surface of the clamping groove) is smaller than or equal to that of the side surface of the clamping groove on the cross rod 3 (namely, the distance between the top end of the side surface of the clamping groove and the bottom surface of the clamping groove), and the contact area with the silicon wafer 7 is reduced on the premise of ensuring that the silicon wafer 7 is clamped by the clamping groove.
Further, a supporting plate 2 is further arranged between the two fixing plates 1, the supporting plate 2 is parallel to the fixing plates 1, through holes for the cross rod 3 and the clamping rods to pass through are formed in the supporting plate 2, and the supporting plate 2 is used for supporting the cross rod 3 and the clamping rods 4 and preventing the cross rod 3 and the clamping rods 4 from sagging. The backup pad 2 is square board, and the centre bore can be seted up at backup pad 2 middle part, lightens whole weight when guaranteeing support strength, convenient transport.
The two fixing plates 1 are provided with lugs 5 at the sides far away from each other, so that the manipulator can be lifted conveniently; the bottom of fixed plate 1 is provided with boat foot 6, guarantees the bearing of horizontal pole 3.
The diffusion and LPCVD quartz boat of this example is through setting up horizontal pole and kelly for two silicon chips in horizontal pole draw-in groove and the kelly draw-in groove can closely laminate, reduce even avoid the crystalline silicon battery around plating and around expanding, save follow-up chemical cleaning's process step, save manufacturing cost and improved production efficiency, and then improve solar cell's conversion efficiency.
The above embodiments are provided to illustrate the technical concept and features of the present utility model and are intended to enable those skilled in the art to understand the content of the present utility model and implement the same, and are not intended to limit the scope of the present utility model. All equivalent changes or modifications made in accordance with the spirit of the present utility model should be construed to be included in the scope of the present utility model.
Claims (10)
1. The quartz boat is characterized by comprising two square fixing plates which are oppositely arranged, a plurality of cross bars and a plurality of clamping rods which are arranged between the two fixing plates, wherein the cross bars are arranged in parallel with the clamping rods, a plurality of clamping grooves for clamping silicon wafers are formed in the cross bars and the clamping rods along the respective axial directions, and in a working state, the cross bars and the clamping rods of the quartz boat extend along the horizontal direction, and the clamping grooves of the cross bars and the clamping grooves of the clamping rods are in one-to-one correspondence in the same vertical direction;
the fixing plate is provided with a first side, a second side and a third side, wherein the first side and the second side are oppositely arranged, the third side is positioned between the first side and the second side, the first side and the second side of the fixing plate are respectively provided with a cross rod, and the opposite sides of the cross rods are respectively provided with clamping rods; two cross bars are arranged on the third side of the fixing plate correspondingly, and clamping rods are arranged between the two cross bars.
2. The diffusion and LPCVD quartz boat of claim 1, wherein in the working state, the fourth side of the fixing plate faces upward and the third side faces downward, and the clamping grooves corresponding to the cross bars and the clamping bars of the first side and the second side of the fixing plate are arranged in an inclined manner, and the inclined directions of the clamping grooves are consistent.
3. The diffusion and LPCVD quartz boat of claim 2, wherein the locking grooves of the cross bar and the locking bar corresponding to the third side of the fixing plate are inclined in a direction consistent with the inclination direction of the locking grooves of the cross bar and the locking bar corresponding to the first side and the second side of the fixing plate.
4. The diffusion and LPCVD quartz boat of claim 2, wherein the cross bar and the clamping groove of the clamping bar corresponding to the third side of the fixing plate are vertically arranged.
5. The diffusion and LPCVD quartz boat of claim 4, wherein the cross bar corresponding to the third side of the fixing plate and the clamping groove on the clamping rod each comprise a first section and a second section which are communicated, the first section is closer to the opening of the clamping groove than the second section, the width of the first section gradually decreases from the first section to the second section, and the width of the second section is consistent.
6. The diffusion and LPCVD quartz boat of claim 2, wherein the angle between the clamping groove on the clamping rod and the cross rod and the vertical surface is more than 0 ° and less than or equal to 6 °.
7. The diffusion and LPCVD quartz boat of claim 1 or 2, wherein the clamping rod and the cross rod are both cylindrical or square, and when the clamping rod and the cross rod are both cylindrical, the diameter of the clamping rod is smaller than or equal to the diameter of the cross rod.
8. The diffusion and LPCVD quartz boat of claim 1 or 2, wherein the clamping groove of the clamping rod and the cross rod comprises a bottom surface and two opposite side surfaces, the two side surfaces are connected to the same side of the bottom surface, a space for accommodating one side of the silicon wafer is formed between one side surface, the bottom surface and the other side surface, and the distance between the top end of the side surface of the clamping groove on the clamping rod and the bottom surface is smaller than or equal to the distance between the top end of the side surface of the clamping groove on the cross rod and the bottom surface.
9. The diffusion and LPCVD quartz boat of claim 8, wherein the spacing between the two sides of the clamping groove on the clamping bar is smaller than the spacing between the two sides of the clamping groove on the cross bar.
10. The diffusion and LPCVD quartz boat of claim 1, wherein a support plate is further provided between the two fixing plates, the support plate is parallel to the fixing plates, and the support plate is provided with a through hole for the cross rod and the clamping rod to pass through.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321663643.5U CN219917099U (en) | 2023-06-27 | 2023-06-27 | Diffusion and LPCVD quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321663643.5U CN219917099U (en) | 2023-06-27 | 2023-06-27 | Diffusion and LPCVD quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219917099U true CN219917099U (en) | 2023-10-27 |
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ID=88463737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321663643.5U Active CN219917099U (en) | 2023-06-27 | 2023-06-27 | Diffusion and LPCVD quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219917099U (en) |
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2023
- 2023-06-27 CN CN202321663643.5U patent/CN219917099U/en active Active
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