CN214191651U - Device for adsorbing and grabbing optical parts from viscous blue film - Google Patents
Device for adsorbing and grabbing optical parts from viscous blue film Download PDFInfo
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- CN214191651U CN214191651U CN202023213584.0U CN202023213584U CN214191651U CN 214191651 U CN214191651 U CN 214191651U CN 202023213584 U CN202023213584 U CN 202023213584U CN 214191651 U CN214191651 U CN 214191651U
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Abstract
The utility model discloses a device for grabbing optical parts by adsorption from a viscous blue film, which comprises a grabbing device and an adsorption device; the gripping device comprises a mounting substrate, a connecting spring, a suction nozzle mounting disc and a suction nozzle assembly; one end of the connecting spring is connected with the mounting substrate, and the other end of the connecting spring is connected with the suction nozzle mounting disc; the suction nozzle assembly is arranged on the suction nozzle mounting disc; the adsorption device comprises a heating module, a first vacuum pump, a thimble and a stroke control device; the center of the top of the heating module is provided with a heat conducting column, and the periphery of the heating module is provided with a surrounding baffle; the top of the enclosure is provided with an adsorption plate which is full of air holes; the heating module, the enclosure, the heat conducting column and the adsorption plate form a vacuum cavity, and the vacuum cavity is communicated with the first vacuum pump; the heat-conducting column and the heating module are provided with through stroke holes, the tail part of the thimble is connected with the stroke control device, and the head part of the thimble extends into the stroke holes. The device effectively improves the success rate of grabbing the sample by adsorption from the viscous blue film, and reduces the requirement on the positioning precision of the mechanical arm.
Description
Technical Field
The utility model relates to a adsorb device that snatchs optical element from viscidity blue membrane belongs to optical element's preparation field.
Background
Microelectronic, micro-optical, and micro-optoelectronic devices often use an adhesive blue film to support the devices during their production, and each micro-device needs to be removed from the blue film to enter a subsequent process (e.g., cleaning, inspecting, sorting, packaging, etc.) after the previous process is completed.
The product is taken off from the blue film, which is a difficult problem in the current production practice. The materials for producing microelectronic, micro-optical and micro-optoelectronic devices are all special materials which are brittle, soft, easy to crack and easy to rub and damage, and the success rate of taking off a sample from a blue film by means of negative pressure adsorption is low in practice, on one hand, the extrusion force of a suction nozzle on the sample needs to be increased during adsorption so as to improve the adsorption stability as much as possible, so that the sample is easily damaged during adsorption, and on the other hand, when a sample is pulled from the blue film during stripping, the suction nozzle leaks air, so that the sample falls off from the suction nozzle, and sampling failure is caused. Meanwhile, under the actual working condition, the space positioning precision of the mechanical arm is limited to a certain extent, and the overhigh requirement not only causes the great increase of the equipment cost, but also brings serious burden to the production and the use of equipment such as calibration, maintenance and the like.
SUMMERY OF THE UTILITY MODEL
The utility model provides a adsorb device that snatchs optical element from blue epimembranal of viscidity has effectively improved and has adsorbed the success rate that snatchs optical element from blue epimembranal of viscidity, has reduced the requirement to arm positioning accuracy simultaneously.
For solving the technical problem, the utility model discloses the technical scheme who adopts as follows:
a device for sucking and grabbing optical parts from a viscous blue film comprises a grabbing device and a sucking device;
the gripping device comprises a mounting substrate, a connecting spring, a suction nozzle mounting disc and a suction nozzle assembly; the mounting substrate and the suction nozzle mounting disc are oppositely arranged; the connecting spring is positioned between the mounting substrate and the suction nozzle mounting disc, one end of the connecting spring is connected with the mounting substrate, and the other end of the connecting spring is connected with the suction nozzle mounting disc; the suction nozzle assembly is provided with a flexible suction nozzle, the suction nozzle assembly is arranged on the suction nozzle mounting disc, and the flexible suction nozzle extends out of the outer side surface of the suction nozzle mounting disc, wherein the space between the mounting substrate and the suction nozzle mounting disc is inner, and the space between the mounting substrate and the suction nozzle mounting disc is outer on the contrary;
the adsorption device comprises a heating module, a first vacuum pump, a thimble and a stroke control device; the top of the heating module is provided with a surrounding baffle along the periphery; the top of the heating module on the inner side of the enclosure is provided with a heat conduction column; the top of the enclosure outside the heat-conducting column is provided with an adsorption plate, the adsorption plate is annular, the inner periphery of the adsorption plate is connected with the periphery of the top of the heat-conducting column, the top of the adsorption plate is flush with the top of the heat-conducting column, the outer periphery of the adsorption plate is connected with the periphery of the enclosure, and the adsorption plate is distributed with air holes; the heating module, the enclosure, the heat conducting column and the adsorption plate form a vacuum cavity, and the vacuum cavity is communicated with the first vacuum pump through a pipeline; the heat-conducting column and the heating module are provided with a stroke hole which is axially arranged and is communicated with each other, the length of the ejector pin is larger than the axial length of the stroke hole, one end of the ejector pin is a head part, the other end of the ejector pin is a tail part, the tail part of the ejector pin is connected to the stroke control device, the head part of the ejector pin extends into the stroke hole from one side of the heating module, and under the driving of the stroke control device, the ejector pin axially moves along the heat-conducting column, and the head part of the ejector pin can extend out from.
When the device is used, the mounting substrate is connected with a mechanical arm, an automatic XYZR mobile station and other moving parts, the mounting substrate and the nozzle mounting plate are arranged up and down in a normal condition, and the flexible nozzles are positioned at the bottom of the nozzle mounting plate.
In the gripping device, the arrangement of the connecting spring is very important; the applicant finds that when the flexible suction nozzle works along with the mechanical arm or the XYZ movement mechanism, the flexible suction nozzle comes above an operated target sample, gradually descends and starts the suction nozzle to suck negative pressure to prepare for sucking the target sample, generally, a hemispherical negative pressure area is generated near the suction nozzle due to the negative pressure of the suction nozzle, and when the suction nozzle is close to the target sample, a tiny part sample can be sucked by the suction nozzle without direct contact between the suction nozzle and the sample; however, if the target sample is adhered to the blue film, the negative pressure of the suction nozzle is difficult to suck the part due to the large viscosity of the blue film, and the suction nozzle is inevitably lowered further until the suction nozzle contacts the surface of the sample; however, materials for producing microelectronic, micro-optical and micro-optoelectronic devices are all special materials which are brittle, soft, easy to break and easy to rub and damage, the mechanical arm is in hard contact, a destructive effect is generated on a target sample due to too large impact force, the space positioning precision of the mechanical arm is limited to a certain extent under the condition of actual working conditions, and the too high requirement not only causes the great increase of the equipment cost, but also brings serious burden on the production and use of equipment such as calibration, maintenance and the like; according to the device, the mechanical interaction force generated by direct contact between the suction nozzle and the target sample is absorbed by the spring more, and the quality of the surface of the sample is not damaged; meanwhile, the requirement on the positioning precision of the mechanical arm is reduced, certain Z-direction position tolerance is allowed, and the working effect of sucking the target sample cannot be influenced.
The adsorption device takes the heating module as a core, the heating module is provided with a raised columnar heat conduction column, a main body below the heat conduction column is a heating area, the periphery of the heat conduction column is provided with an annular vacuum cavity, the outer periphery of the adsorption plate is tightly matched with the periphery of the enclosure, and the inner periphery of the adsorption plate is tightly matched with the periphery of the heat conduction column; the heat-conducting column and the heating module are provided with run-through travel holes, the ejector pin moves along the axial direction of the heat-conducting column, and the head of the ejector pin can extend out of the end of the heat-conducting column.
The lower surface of blue membrane does not have bonding glue, and the upper surface is equipped with bonding glue, and the setting of bleeder vent on the adsorption plate is used for adsorbing blue membrane lower surface, and during the use, blue membrane is firmly adsorbed on the adsorption plate at vacuum chamber top, and blue membrane is equipped with one side that bonding glue and is last, and optical part adheres on blue membrane's bonding glue, accomplishes behind the manufacturing procedure of some rows, takes optical part away from blue membrane safety through the device of this application.
The heating module realizes the heating of the blue film through the heat conduction columns, and aims to reduce the adhesion of the blue film.
The heat conduction column and the heating module are provided with stroke holes which are axially arranged and communicated, the heat conduction column and the heating module are provided with stroke holes, the stroke holes on the heat conduction column and the heating module are communicated with each other and are coaxially arranged, and the ejector pin can move up and down in the stroke holes.
The row control device is the device that can drive the thimble and reciprocate, and stroke control device's concrete structure can with reference to prior art, and this application does not have special improvement to stroke control device's concrete structure, consequently no longer gives unnecessary details.
Generally, the gripping device is arranged on the upper portion, the adsorption device is arranged on the lower portion, the thimble is driven by the stroke control device to move along the axial direction of the heat conduction column (up and down) and extend out of the end of the heat conduction column (top of the heat conduction column) to separate the optical part bonded on the blue film from the blue film, the optical part can be separated from the blue film from the periphery to the center in the process of gradually jacking the optical part, and finally, one point of contact of the head portion of the thimble is remained.
During assembly, in order to facilitate mechanical installation, the suction nozzle assembly is installed on the suction nozzle installation disc firstly, and then is connected with the installation substrate through the connecting spring.
The applicant finds that if the adsorption device is not structurally designed, the optical part is adhered to the blue film, due to the elasticity of the blue film, the XY position of the optical part is uncertain to a certain extent, and the position uncertainty in the Z direction is very large, so that great difficulty is brought to subsequent operation, and operation failure is easily caused; and if the mechanical arm is only adsorbed by negative pressure, the mechanical arm drives the suction nozzle to press down to the surface of the optical part, a larger downward pressure is needed, the stress condition that the middle is pressed down and the edge is pressed up by the blue film is caused on the optical part, the stress condition is similar to the stress condition that the middle is broken off from the edge, and the optical part is fragile and easy to crack, the stress condition is easy to cause the fracture of the operated sample, which can not only cause the failure of the absorption operation, but also affect the yield, the application only needs the mechanical arm to drive the suction nozzle to adsorb the optical part without large downward pressure, after the suction nozzle adsorbs the optical part, the thimble moves upwards under the control of the program control device, the head part of the thimble stretches out from the top of the heat conducting column, under the action of the downward negative pressure adsorption force and the upward thrust force of the thimble, the optical part gradually leaves the blue film from the periphery to the center, and finally only the small-area contact is remained at the head part, in the process that the ejector pin pushes a target optical part to move upwards, the suction nozzle only needs to move upwards synchronously, and meanwhile, the heat-conducting column heats the blue film and reduces the adhesive force of the blue film, so that the early peeling of the optical part is mainly completed under the actions of reducing the adhesive force by heating the heat-conducting column, pushing the ejector pin upwards and adsorbing the adsorption plate downwards, and finally, the blue film with the size of the head of the ejector pin is in contact with the optical part, and at the moment, the suction nozzle can easily remove the optical part; and through the setting of connecting spring, can also cushion the effort that absorbs suction nozzle and optical part, further reduce the part damage, still reduced the requirement to the arm precision simultaneously.
In order to further improve the use stability of the gripping device, the gripping device further comprises a guide rod which prevents the connecting spring from deviating to the side edge in the stretching process, and the guide rod is of a hollow tubular structure. The guide rod can fix the XY-direction position of the spring, so that the spring is prevented from deviating to the side edge, only the axial (Z-direction) displacement of the spring is allowed, and the grabbing accuracy is improved.
The guide rod is of a hollow tubular structure, so that on one hand, the installation of other parts is facilitated, on the other hand, the material is saved, and meanwhile, the device mass is reduced.
As one specific implementation scheme of the guide rod, the guide rod is of an axially telescopic hollow tubular structure, the guide rod is located on the inner side of the connecting spring, one end of the guide rod is connected with the mounting substrate, and the other end of the guide rod is connected with the suction nozzle mounting disc. When the connecting spring stretches, the guide rod can stretch out and draw back along with the spring, and simultaneously, the guide rod has still effectively prevented the skew of connecting spring to the side.
The guide bar is but axial extending structure, and also the guide bar can be followed its axial and stretched out and drawn back, and specific extending structure and principle refer to prior art can, for example be similar to from the flexible principle of rapping bar, antenna, religion pen etc. this application does not have special improvement to this, consequently, no longer gives unnecessary details.
As another concrete implementation scheme of the guide rod, the guide rod is of a circular tube structure, a through hole is formed in the mounting substrate, the inner diameter of the through hole is not smaller than the outer diameter of the guide rod, the guide rod is located on the inner side of the connecting spring, one end of the guide rod is a connecting end, the other end of the guide rod is a free end, the connecting end of the guide rod is connected with the suction nozzle mounting disc, and the free end of the guide rod extends into the through hole in the mounting substrate. Under the connecting spring free state, the free end of guide bar is arranged in the through hole on the mounting substrate, the guide bar can slide relative to the through hole on the mounting substrate, when the spring is compressed, the guide bar can play the guide role in the Z direction, the connecting spring is effectively prevented from deviating to the side edge, and meanwhile, the compression of the spring is not influenced.
In order to improve the accuracy of suction and discharge, the suction nozzle assembly comprises a vacuum pipe, a second vacuum pump and a flexible suction nozzle; the flexible suction nozzle is arranged on the outer side surface of the suction nozzle mounting disc, one end of the vacuum tube is communicated with the flexible suction nozzle, and the other end of the vacuum tube extends out of the side wall of the suction nozzle mounting disc; one end of the vacuum tube extending out of the side wall of the suction nozzle mounting disc is communicated with a suction tube of a second vacuum pump through a connecting pipeline; in the direction from the flexible suction nozzle to the second vacuum pump, a pressure sensor, an exhaust pipe and a first air valve are sequentially arranged at one end of the vacuum pipe extending out of the side wall of the suction nozzle mounting disc, and a second air valve is arranged on the exhaust pipe; the flexible suction nozzle is made of rubber or silica gel; the vacuum tube is made of a rigid material. When the flexible suction nozzle is used, the second vacuum pump is started, the first air valve is opened, the second air valve is closed, when the flexible suction nozzle completely contacts the surface of the optical part, the flexible suction nozzle is blocked, the vacuum value in the vacuum pipe is instantly and suddenly increased, the pressure sensor senses that the target optical part is sucked, and the downward movement of the flexible suction nozzle is immediately stopped, so that the effective adsorption can be ensured, and the excessive extrusion on the optical part can be avoided; when the target optical part is transferred to the designated position, the first air valve is closed to isolate vacuum, and the second air valve is opened to release vacuum in the vacuum tube. The suction nozzle assembly has the functions of self-sensing and adsorption.
The pressure sensor is a negative pressure type pressure sensor.
In order to improve the adaptability, as one implementation scheme, the enclosure is cylindrical, the heat conducting column is cylindrical, and the vacuum cavity is annular.
Preferably, the heat conduction column is arranged at the center of the top of the heating module, and the stroke hole is arranged along the axes of the heating module and the heat conduction column.
Namely the thimble is arranged at the center of the heating module.
In order to improve the stability of adsorption, the air holes on the adsorption plate are distributed in an array; the head of the thimble is spherical, so that the optical element can be effectively jacked upwards, and the contact area between the jacked optical element and the blue film can be reduced.
The following describes a grasping method by taking an example in which the grasping apparatus and the suction apparatus are arranged vertically, that is, based on the positional relationship shown in the drawings.
The method for sucking and grabbing the optical parts from the adhesive blue film is completed by using the device for sucking and grabbing the optical parts from the adhesive blue film, and comprises the following steps of:
1) moving the adsorption device to be right below a target optical part (because the target optical part is adhered to the blue film, the target optical part is also right below the blue film of course), starting heating the blue film by the heat conduction column, so as to raise the temperature to reduce the viscosity of the blue film and facilitate the film stripping operation of the optical part, simultaneously starting the first vacuum pump, adsorbing the blue film on the adsorption plate by using negative pressure, fixing the position of the optical part in all directions of XYZ, and firmly fixing the optical part at the position so as to facilitate subsequent operation;
2) the grabbing device is driven by a mechanical arm or an XYZ platform to move right above the target optical part, the flexible suction nozzle is right opposite to the target optical part, and the grabbing device gradually moves downwards to the target optical part until the suction nozzle sucks the optical part;
3) the thimble moves upwards under the control of the row control device, the head part of the thimble extends out of the top of the heat conducting column, under the action of downward negative pressure adsorption force and upward pushing force of the thimble, the optical part gradually leaves from the blue film from the periphery to the center, and finally, only the small-area contact of the head part of the thimble is left (namely, the point that the head part of the thimble is left in the optical part is also bonded with the blue film), and at the moment, the thimble stops moving upwards; wherein, in the process that the thimble pushes the target optical part to move upwards, the flexible suction nozzle also moves upwards synchronously;
4) the flexible suction nozzle drives the target optical part to continuously rise, and the target optical part leaves the blue film and is transferred to a designated position; after the target optical part leaves the blue film, the first vacuum pump is closed, the thimble moves downwards to be reset to the position that the head part is not higher than the top of the heat conducting column, and then the whole adsorption device moves to the next target optical part;
5) and repeating the steps 1) to 4) to carry out batch operation.
The target optical component is transferred to a predetermined position and then the next process is performed.
In the step 2), due to the existence of the spring, even if the position precision of the mechanical arm or the XYZ platform is slightly poor in the descending process, the operation task can be completed, and the optical part is sucked.
In the step 3), due to the arrangement of the connecting spring, the requirement on the synchronous upward movement of the ejector pin and the flexible suction nozzle is not high, and certain errors can be allowed;
in the step 3), because the viscosity of the blue film is too high, but the adhesion force of the blue film is difficult to offset by the suction force of the flexible suction nozzle, the optical component is taken off from the blue film, and on the contrary, the situation that the optical component falls off from the suction nozzle due to the insufficient suction force of the flexible suction nozzle can occur, so that the suction fails, in order to avoid the situation, when the flexible suction nozzle sucks the optical component and starts to withdraw and rise, the thimble in the center of the heating module pushes the blue film to rise along with the flexible suction nozzle at the same speed; the action of tearing the blue film from the edge of the optical part is mainly completed by the interaction of the upward jacking force of the ejector pin, the downward suction force of the adsorption plate on the blue film and the heating module, the temperature of the blue film is increased, and the adhesion force of the blue film is reduced.
In step 3), along with the upward promotion of thimble, blue membrane tears from the optical component edge gradually for the area of contact of optical component and blue membrane is littleer and more, and only there is blue membrane and optical component contact still in the very little area of head department of thimble, has reduced blue membrane to optical component adhesion because two reasons at this moment greatly: (1) the heating module increases the temperature of the blue film and reduces the adhesive force of the blue film; (2) the contact area of the blue film and the optical part is greatly reduced to the area only provided with the thimble ball part, so that the adhesion of the blue film to the optical part is greatly reduced, and the blue film is convenient to take away by the flexible suction nozzle.
In step 3), when only a small area of the head of the thimble still has the blue film to contact with the optical component, only a small suction force is needed to separate the optical component from the blue film, so that the flexible suction nozzle is completely capable of sucking the target optical component away from the blue film to completely separate the target optical component from the blue film,
when the above-described nozzle assembly with self-sensing is employed,
in the step 2), when the grabbing device moves right above the target optical part, a second vacuum pump and a first air valve are started, the second air valve is closed, the grabbing device gradually moves towards the target optical part, when the flexible suction nozzle completely contacts the surface of the optical part, the flexible suction nozzle is blocked, the vacuum value in the vacuum pipe is instantly and rapidly increased, the pressure sensor senses that the target optical part is sucked, and the downward movement of the flexible suction nozzle is immediately stopped;
and 4) closing the first air valve to isolate vacuum when the target optical part is transferred to a designated position, and simultaneously opening the second air valve to release the vacuum in the vacuum tube, wherein the target optical part adsorbed on the flexible suction nozzle can be automatically separated under the action of gravity because the target optical part is not subjected to the vacuum suction force any more.
The application can combine the existing technologies such as automation and the like to realize automation, and the application does not particularly improve the technologies such as automation and the like, so that the details are not repeated.
The technology not mentioned in the present invention refers to the prior art.
The device for adsorbing and grabbing the optical part from the viscous blue film effectively solves the problem of grabbing a sample from the viscous blue film, improves the success rate and reduces the damage; the arrangement of the connecting spring on the gripping device enables the suction nozzle assembly as a whole to have larger elasticity, can allow moving parts such as a mechanical arm or an XYZ module to have larger positioning tolerance, and reduces the difficulty of engineering application; the improvement of the adsorption device is combined, so that the sample can be adsorbed without rigid contact between the suction nozzle and the sample, and the damage caused by the rigid contact between the suction nozzle and the sample is avoided; the sample on the blue film has a determined XYZ position, so that the subsequent operation process is facilitated; the heating module heats the blue film, so that the viscosity of the blue film is reduced, the adhesion force between a sample and the blue film is reduced, and the stripping of the sample is facilitated; the design of the ejector pin utilizes the interaction between the ejecting force of the ejector pin and the suction force of the suction disc on the blue film to realize the peeling of the blue film from the edge of the sample, and greatly reduces the contact surface between the blue film and the sample, thereby reducing the adhesive force between the sample and the blue film, the ejector pin and the suction nozzle assembly are mutually matched in the ascending motion after the sample is sucked, the ejector pin and the suction nozzle assembly are feasible under the matching of a spring mechanism, a slight motion speed difference is allowed between the ejector pin and the suction nozzle assembly, for example, the ascending speed of the ejector pin can be slightly higher than the ascending speed of the suction nozzle assembly, and the assembly and the adjustment during the production of equipment are greatly facilitated.
Drawings
FIG. 1 is a schematic view of a grasping apparatus according to embodiment 1;
FIG. 2 is a schematic view of the structure of an adsorption apparatus in example 1;
FIG. 3 is a plan view of an adsorption plate in example 1;
FIG. 4 is a schematic view showing the structure of an apparatus for suction-gripping an optical part from an adhesive blue film in example 1;
FIG. 5 is a schematic diagram showing the raising of the ejector pin of the apparatus for suction-gripping an optical part from an adhesive blue film in example 1;
FIG. 6 is a drawing showing the withdrawal of the grasping means of the apparatus for suction-grasping an optical part from an adhesive blue film in example 1;
FIG. 7 is a schematic view showing the structure of a grasping apparatus according to embodiment 2;
FIG. 8 is a schematic view showing the structure of a grasping apparatus according to embodiment 3;
FIG. 9 is a schematic view showing the structure of a grasping apparatus according to embodiment 4;
in the drawing, 101 is a mounting substrate, 1011 is a through hole, 102 is a connecting spring, 103 is a nozzle mounting plate, 104 is a nozzle assembly, 1041 is a vacuum tube, 1042 is a flexible nozzle, 1043 is a pressure sensor, 1044 is an exhaust tube, 1045 is a first air valve, 1046 is a second air valve, 105 is a guide bar, 201 is a blue film, 202 is a target optical component, 203 is a vacuum chamber, 204 is a heating module, 2041 is a heat-conducting column, 205 is a thimble, 206 is an adsorption plate, and 2061 is an air vent.
Detailed Description
For a better understanding of the present invention, the following examples are provided to further illustrate the present invention, but the present invention is not limited to the following examples.
The terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used herein in an orientation that is based on the orientation or positional relationship shown in the drawings or in use, and are used for convenience in describing the present application, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application.
Example 1
As shown in fig. 1-6, an apparatus for suction-gripping an optical component from an adhesive blue film comprises a gripping device and a suction device;
the gripping device comprises a mounting substrate, a connecting spring, a suction nozzle mounting disc and a suction nozzle assembly; the mounting substrate and the suction nozzle mounting disc are oppositely arranged; the connecting spring is positioned between the mounting substrate and the suction nozzle mounting disc, one end of the connecting spring is connected with the mounting substrate, and the other end of the connecting spring is connected with the suction nozzle mounting disc; the suction nozzle assembly is provided with a flexible suction nozzle, the suction nozzle assembly is arranged on the suction nozzle mounting disc, and the flexible suction nozzle extends out of the outer side surface of the suction nozzle mounting disc, wherein the space between the mounting substrate and the suction nozzle mounting disc is inner, and the space between the mounting substrate and the suction nozzle mounting disc is outer on the contrary;
the adsorption device comprises a heating module, a first vacuum pump, a thimble and a stroke control device; the top of the heating module is provided with a surrounding baffle along the periphery; the center of the top of the heating module on the inner side of the enclosure is provided with a heat conducting column, the enclosure is cylindrical, and the heat conducting column is cylindrical; the top of the enclosure outside the heat-conducting column is provided with an adsorption plate, the adsorption plate is annular, the inner periphery of the adsorption plate is connected with the periphery of the top of the heat-conducting column, the top of the adsorption plate is flush with the top of the heat-conducting column, the periphery of the adsorption plate is connected with the periphery of the enclosure, and the adsorption plate is distributed with air holes distributed in an array manner; a vacuum cavity is formed among the heating module, the enclosure, the heat conducting column and the adsorption plate, the vacuum cavity is annular, the vacuum cavity is communicated with a first vacuum pump through a pipeline, and negative pressure is provided by the first vacuum pump; the axle center of heat conduction post and heating module is equipped with along the axial setting, and the stroke hole that link up, and the length of thimble is greater than the axial length in stroke hole, and the one end of thimble is the head, and the other end is the afterbody, and the afterbody of thimble is connected on the stroke control device, and the head of thimble stretches into the stroke hole from heating module one side, and under the drive of stroke control device, the thimble moves along the heat conduction post axial (also along the axial displacement in stroke hole), and the head of thimble can follow the heat conduction post end and stretch out, and the head of thimble is globular.
When the device is used, the mounting substrate is connected with moving parts such as a mechanical arm and an automatic XYZR mobile station, and the mounting substrate and the suction nozzle mounting disc are arranged up and down under normal conditions, and the flexible suction nozzle is positioned at the bottom of the suction nozzle mounting disc; the adsorption device is positioned below the gripping device.
In the gripping device, the arrangement of the connecting spring is very important; the applicant finds that when the flexible suction nozzle works along with the mechanical arm or the XYZ movement mechanism, the flexible suction nozzle comes above an operated target sample, gradually descends and starts the suction nozzle to suck negative pressure to prepare for sucking the target sample, generally, a hemispherical negative pressure area is generated near the suction nozzle due to the negative pressure of the suction nozzle, and when the suction nozzle is close to the target sample, a tiny part sample can be sucked by the suction nozzle without direct contact between the suction nozzle and the sample; however, if the target sample is adhered to the blue film, the negative pressure of the suction nozzle is difficult to suck the part due to the large viscosity of the blue film, and the suction nozzle is inevitably lowered further until the suction nozzle contacts the surface of the sample; however, materials for producing microelectronic, micro-optical and micro-optoelectronic devices are all special materials which are brittle, soft, easy to break and easy to rub and damage, the mechanical arm is in hard contact, a destructive effect is generated on a target sample due to too large impact force, the space positioning precision of the mechanical arm is limited to a certain extent under the condition of actual working conditions, and the too high requirement not only causes the great increase of the equipment cost, but also brings serious burden on the production and use of equipment such as calibration, maintenance and the like; according to the device, the mechanical interaction force generated by direct contact between the suction nozzle and the target sample is absorbed by the spring more, and the quality of the surface of the sample is not damaged; meanwhile, the requirement on the positioning precision of the mechanical arm is reduced, certain Z-direction position tolerance is allowed, and the working effect of sucking the target sample cannot be influenced.
The adsorption device takes the heating module as a core, the heating module is provided with a raised columnar heat conduction column, a main body below the heat conduction column is a heating area, the periphery of the heat conduction column is provided with an annular vacuum cavity, the outer periphery of the adsorption plate is tightly matched with the periphery of the enclosure, and the inner periphery of the adsorption plate is tightly matched with the periphery of the heat conduction column; the heat-conducting column and the heating module are provided with run-through travel holes, the ejector pin moves along the axial direction of the heat-conducting column, and the head of the ejector pin can extend out of the end of the heat-conducting column.
The lower surface of blue membrane does not have bonding glue, and the upper surface is equipped with bonding glue, and the setting of bleeder vent on the adsorption plate is used for adsorbing blue membrane lower surface, and during the use, blue membrane is firmly adsorbed on the adsorption plate at vacuum chamber top, and blue membrane is equipped with one side that bonding glue and is last, and optical part adheres on blue membrane's bonding glue, accomplishes behind the manufacturing procedure of some rows, takes optical part away from blue membrane safety through the device of this application. The heating module realizes the heating of the blue film through the heat conduction columns, and aims to reduce the adhesion of the blue film. The thimble can move along the axial direction of the heat-conducting column and can extend out of the end of the heat-conducting column under the drive of the travel control device, so that the optical part bonded on the blue film is separated from the blue film, the optical part can be separated from the blue film from the periphery to the center in the process of gradually jacking the optical part, and finally, one point of contact of the head of the thimble is remained.
During assembly, in order to facilitate mechanical installation, the suction nozzle assembly is installed on the suction nozzle installation disc firstly, and then is connected with the installation substrate through the connecting spring.
Through practice, if the adsorption device is not structurally designed, the optical part is adhered to the blue film, due to the elasticity of the blue film, the XY position of the optical part is uncertain to a certain extent, and the position uncertainty in the Z direction is very large, so that great difficulty is brought to subsequent operation, and operation failure is easily caused; and if the mechanical arm is only adsorbed by negative pressure, the mechanical arm drives the suction nozzle to press down to the surface of the optical part, a larger downward pressure is needed, the stress condition that the middle is pressed down and the edge is pressed up by the blue film is caused on the optical part, the stress condition is similar to the stress condition that the middle is broken off from the edge, and the optical part is fragile and easy to crack, the stress condition is easy to cause the fracture of the operated sample, which can not only cause the failure of the absorption operation, but also affect the yield, the application only needs the mechanical arm to drive the suction nozzle to adsorb the optical part without large downward pressure, after the suction nozzle adsorbs the optical part, the thimble moves upwards under the control of the program control device, the head part of the thimble stretches out from the top of the heat conducting column, under the action of the downward negative pressure adsorption force and the upward thrust force of the thimble, the optical part gradually leaves the blue film from the periphery to the center, and finally only the small-area contact is remained at the head part, in the process that the ejector pin pushes a target optical part to move upwards, the suction nozzle only needs to move upwards synchronously, and meanwhile, the heat-conducting column heats the blue film and reduces the adhesive force of the blue film, so that the early peeling of the optical part is mainly completed under the actions of reducing the adhesive force by heating the heat-conducting column, pushing the ejector pin upwards and adsorbing the adsorption plate downwards, and finally, the blue film with the size of the head of the ejector pin is in contact with the optical part, and at the moment, the suction nozzle can easily remove the optical part; and through the setting of connecting spring, can also cushion the effort that absorbs suction nozzle and optical part, further reduce the part damage, still reduced the requirement to the arm precision simultaneously.
The method for sucking and grabbing the optical part from the adhesive blue film by using the device for sucking and grabbing the optical part from the adhesive blue film comprises the following steps:
1) moving the adsorption device to be right below a target optical part (because the target optical part is adhered to the blue film, the target optical part is also right below the blue film of course), starting heating the blue film by the heat conduction column, so as to raise the temperature to reduce the viscosity of the blue film and facilitate the film stripping operation of the optical part, simultaneously starting the first vacuum pump, adsorbing the blue film on the adsorption plate by using negative pressure, fixing the position of the optical part in all directions of XYZ, and firmly fixing the optical part at the position so as to facilitate subsequent operation;
2) the grabbing device is driven by a mechanical arm or an XYZ platform to move right above the target optical part, the flexible suction nozzle is right opposite to the target optical part, and the grabbing device gradually moves downwards to the target optical part until the suction nozzle sucks the optical part;
3) the thimble moves upwards under the control of the row control device, the head part of the thimble extends out of the top of the heat conducting column, under the action of downward negative pressure adsorption force and upward thrust force of the thimble, the optical part gradually leaves from the blue film from the periphery to the center, and finally, only the small-area contact of the head part of the thimble is left, and at the moment, the thimble stops moving upwards; wherein, in the process that the thimble pushes the target optical part to move upwards, the flexible suction nozzle also moves upwards synchronously;
4) the flexible suction nozzle drives the target optical part to continuously rise, and the target optical part leaves the blue film and is transferred to a designated position; after the target optical part leaves the blue film, the first vacuum pump is closed, the thimble moves downwards to be reset to the position that the head part is not higher than the top of the heat conducting column, and then the whole adsorption device moves to the next target optical part;
5) and repeating the steps 1) to 4) to carry out batch operation.
Example 2
On the basis of the embodiment 1, the following improvements are further made: as shown in fig. 7, the gripping device further includes a guide rod for preventing the connecting spring from deviating to the side in the stretching process, the guide rod is of an axially telescopic hollow tubular structure, the guide rod is located inside the connecting spring, one end of the guide rod is connected with the mounting substrate, and the other end of the guide rod is connected with the nozzle mounting plate. When the connecting spring stretches, the guide rod can stretch out and draw back along with the spring, and simultaneously, the guide rod has still effectively prevented the skew of connecting spring to the side.
Example 3
On the basis of the embodiment 1, the following improvements are further made: as shown in fig. 8, the guide rod is a circular tube structure, the mounting substrate is provided with a through hole, the inner diameter of the through hole is not smaller than the outer diameter of the guide rod, the guide rod is located inside the connecting spring, one end of the guide rod is a connecting end, the other end of the guide rod is a free end, the connecting end of the guide rod is connected with the nozzle mounting plate, and the free end extends into the through hole in the mounting substrate. Under the free state of the connecting spring, the free end of the guide rod is positioned in the through hole on the mounting substrate, the guide rod can slide relative to the through hole on the mounting substrate, and when the spring is compressed, the guide rod can play a role in guiding, so that the connecting spring is prevented from deviating to the side edge, and the compression of the spring is not influenced.
Example 4
On the basis of the embodiment 1, 2 or 3, the following improvements are further made: as shown in fig. 9, the nozzle assembly includes a vacuum tube, a second vacuum pump, and a flexible nozzle; the flexible suction nozzle is arranged on the outer side surface of the suction nozzle mounting disc, one end of the vacuum tube is communicated with the flexible suction nozzle, and the other end of the vacuum tube extends out of the side wall of the suction nozzle mounting disc; one end of the vacuum pipe, which extends out of the side wall of the suction nozzle mounting disc, is communicated with a suction pipe of a second vacuum pump through a connecting pipeline (the vacuum pump can be directly bought on the existing equipment, and the vacuum pump is provided with the suction pipe and an exhaust pipe); in the direction from the flexible suction nozzle to the second vacuum pump, a pressure sensor, an exhaust pipe and a first air valve are sequentially arranged at one end of the vacuum pipe extending out of the side wall of the suction nozzle mounting disc, and a second air valve is arranged on the exhaust pipe; the flexible suction nozzle is made of rubber or silica gel; the vacuum tube is made of rigid material; the pressure sensor is a negative pressure type pressure sensor. The structure senses whether the part sample is completely absorbed or not by detecting the vacuum value on the pressure sensor, has the performance similar to touch sense, reduces the precision requirement on robot positioning, and is convenient for promoting the unmanned processing and manufacturing of optical parts.
After the suction nozzle assembly is adopted, the operation method of the suction nozzle assembly is different from that of the embodiment 1 in that: in the step 2), when the grabbing device moves right above the target optical part, a second vacuum pump and a first air valve are started, the second air valve is closed, the grabbing device gradually moves towards the target optical part, when the flexible suction nozzle completely contacts the surface of the optical part, the flexible suction nozzle is blocked, the vacuum value in the vacuum pipe is instantly and rapidly increased, the pressure sensor senses that the target optical part is sucked, and the downward movement of the flexible suction nozzle is immediately stopped; and 4) closing the first air valve to isolate vacuum when the target optical part is transferred to a designated position, and simultaneously opening the second air valve to release the vacuum in the vacuum tube, wherein the target optical part adsorbed on the flexible suction nozzle can be automatically separated under the action of gravity because the target optical part is not subjected to the vacuum suction force any more.
Claims (8)
1. The utility model provides a device that adsorbs snatchs optical part from viscidity blue membrane which characterized in that: comprises a gripping device and an adsorption device;
the gripping device comprises a mounting substrate, a connecting spring, a suction nozzle mounting disc and a suction nozzle assembly; the mounting substrate and the suction nozzle mounting disc are oppositely arranged; the connecting spring is positioned between the mounting substrate and the suction nozzle mounting disc, one end of the connecting spring is connected with the mounting substrate, and the other end of the connecting spring is connected with the suction nozzle mounting disc; the suction nozzle assembly is provided with a flexible suction nozzle, the suction nozzle assembly is arranged on the suction nozzle mounting disc, and the flexible suction nozzle extends out of the outer side surface of the suction nozzle mounting disc, wherein the space between the mounting substrate and the suction nozzle mounting disc is inner, and the space between the mounting substrate and the suction nozzle mounting disc is outer on the contrary;
the adsorption device comprises a heating module, a first vacuum pump, a thimble and a stroke control device; the top of the heating module is provided with a surrounding baffle along the periphery; the top of the heating module on the inner side of the enclosure is provided with a heat conduction column; the top of the enclosure outside the heat-conducting column is provided with an adsorption plate, the adsorption plate is annular, the inner periphery of the adsorption plate is connected with the periphery of the top of the heat-conducting column, the top of the adsorption plate is flush with the top of the heat-conducting column, the outer periphery of the adsorption plate is connected with the periphery of the enclosure, and the adsorption plate is distributed with air holes; the heating module, the enclosure, the heat conducting column and the adsorption plate form a vacuum cavity, and the vacuum cavity is communicated with the first vacuum pump through a pipeline; the heat-conducting column and the heating module are provided with a stroke hole which is axially arranged and is communicated with each other, the length of the ejector pin is larger than the axial length of the stroke hole, one end of the ejector pin is a head part, the other end of the ejector pin is a tail part, the tail part of the ejector pin is connected to the stroke control device, the head part of the ejector pin extends into the stroke hole from one side of the heating module, and under the driving of the stroke control device, the ejector pin axially moves along the heat-conducting column, and the head part of the ejector pin can extend out from the end of the heat-conducting column.
2. The apparatus for suction gripping of an optical component from an adhesive blue film according to claim 1, wherein: the grabbing device further comprises a guide rod which prevents the connecting spring from deviating to the side edge in the stretching process, and the guide rod is of a hollow tubular structure.
3. The apparatus for suction gripping of an optical component from an adhesive blue film according to claim 2, wherein: the guide rod is of an axially telescopic hollow tubular structure, is positioned on the inner side of the connecting spring, and one end of the guide rod is connected with the mounting substrate while the other end is connected with the suction nozzle mounting disc.
4. The apparatus for suction gripping of an optical component from an adhesive blue film according to claim 2, wherein: the guide rod is of a circular tube structure, a through hole is formed in the mounting substrate, the inner diameter of the through hole is not smaller than the outer diameter of the guide rod, the guide rod is located on the inner side of the connecting spring, one end of the guide rod is a connecting end, the other end of the guide rod is a free end, the connecting end of the guide rod is connected with the suction nozzle mounting disc, and the free end of the guide rod stretches into the through hole in the mounting substrate.
5. The apparatus for suction gripping of an optical component from an adhesive blue film according to any one of claims 1 to 4, wherein: the suction nozzle assembly comprises a vacuum pipe, a second vacuum pump and a flexible suction nozzle; the flexible suction nozzle is arranged on the outer side surface of the suction nozzle mounting disc, one end of the vacuum tube is communicated with the flexible suction nozzle, and the other end of the vacuum tube extends out of the side wall of the suction nozzle mounting disc; one end of the vacuum tube extending out of the side wall of the suction nozzle mounting disc is communicated with a suction tube of a second vacuum pump through a connecting pipeline; in the direction from the flexible suction nozzle to the second vacuum pump, a pressure sensor, an exhaust pipe and a first air valve are sequentially arranged at one end of the vacuum pipe, which extends out of the side wall of the suction nozzle mounting disc, and a second air valve is arranged on the exhaust pipe; the flexible suction nozzle is made of rubber or silica gel; the vacuum tube is made of a rigid material.
6. The apparatus for suction gripping of an optical component from an adhesive blue film according to any one of claims 1 to 4, wherein: the enclosure is cylindrical, the heat conducting column is cylindrical, and the vacuum cavity is annular.
7. The apparatus for suction gripping of an optical component from an adhesive blue film according to any one of claims 1 to 4, wherein: the heat conduction post is arranged at the central position of the top of the heating module, and the stroke hole is arranged along the axes of the heating module and the heat conduction post.
8. The apparatus for suction gripping of an optical component from an adhesive blue film according to any one of claims 1 to 4, wherein: the air holes on the adsorption plate are distributed in an array; the head of the thimble is spherical.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202023213584.0U CN214191651U (en) | 2020-12-28 | 2020-12-28 | Device for adsorbing and grabbing optical parts from viscous blue film |
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| CN202023213584.0U CN214191651U (en) | 2020-12-28 | 2020-12-28 | Device for adsorbing and grabbing optical parts from viscous blue film |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114771033A (en) * | 2022-04-23 | 2022-07-22 | 泉州鑫达纸业有限公司 | Automatic cake paper holder forming equipment and working method thereof |
| CN116216305A (en) * | 2022-12-29 | 2023-06-06 | 长园视觉科技(珠海)有限公司 | Feeding and discharging control method, controller, feeding and discharging equipment and storage medium |
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2020
- 2020-12-28 CN CN202023213584.0U patent/CN214191651U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114771033A (en) * | 2022-04-23 | 2022-07-22 | 泉州鑫达纸业有限公司 | Automatic cake paper holder forming equipment and working method thereof |
| CN114771033B (en) * | 2022-04-23 | 2023-10-17 | 泉州鑫达纸业有限公司 | Cake paper holder automatic forming equipment and working method thereof |
| CN116216305A (en) * | 2022-12-29 | 2023-06-06 | 长园视觉科技(珠海)有限公司 | Feeding and discharging control method, controller, feeding and discharging equipment and storage medium |
| CN116216305B (en) * | 2022-12-29 | 2023-11-07 | 长园视觉科技(珠海)有限公司 | Feeding and discharging control method, controller, feeding and discharging equipment and storage medium |
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