CN213998197U

CN213998197U - Laser processing device for glass with non-smooth surface

Info

Publication number: CN213998197U
Application number: CN201821476367.0U
Authority: CN
Inventors: 蒋仕彬
Original assignee: Hangzhou Yinhu Laser Technology Co ltd
Current assignee: Hangzhou Yinhu Laser Technology Co ltd
Priority date: 2018-09-10
Filing date: 2018-09-10
Publication date: 2021-08-20
Anticipated expiration: 2028-09-10

Abstract

The utility model discloses a non-smooth surface glass's laser beam machining device comprises green glow pulse train laser instrument, focusing lens and focus guiding mechanism, its characterized in that: the green light pulse train laser mainly comprises a pulse train seed laser with the output wavelength of 1020-1090 nanometers, a multi-stage or single-stage optical fiber amplifier, a collimator and a frequency doubling device, wherein the output light of the pulse train seed laser is amplified by the optical fiber amplifier, collimated by the collimator and frequency-doubled by the frequency doubling device to output a green light pulse train; the green light is focused on the position to be processed of the glass material with the non-smooth surface through the focusing lens; and a liquid adding device is arranged above the material to be processed. The utility model discloses can accurately realize that the material of non-smooth surface glass material gets rid of, improve the process velocity.

Description

Laser processing device for glass with non-smooth surface

Technical Field

The utility model relates to a processing device for non-smooth surface glass, in particular to a laser processing device for non-smooth surface glass.

Background

Glass materials have become an indispensable part of people's daily life, and with the development of economy, the demand for glass products is increasing day by day. In the glass production industry, glass processing is a very important step.

Generally, glass working (cold working) mainly includes polishing, cutting, drilling, engraving, edging, and the like. For the purpose of industrially realizing the above-mentioned glass and sapphire processing, the processing methods adopted in the prior art mainly include a mechanical processing method, a chemical processing method (mainly used for polishing and etching), a high-pressure water jet processing method (mainly used for cutting and drilling), and a laser processing method. Among them, the laser processing method is far superior to other methods in terms of processing speed and degree of automation.

The traditional laser glass processing uses CO with the wavelength of about 10.6 mu m₂The output power of the laser is generally required to be over 100W. CO 2₂Laser processing of glass and sapphire is achieved by laser incidence which causes glass to break when heated. Taking the cutting of sheet glass as an example, CO is added₂Laser beams emitted by the laser are focused on the flat glass, the high-power laser enables the glass to be heated and broken at the focal position of the laser, and the cracks extend to the upper surface and the lower surface of the glass so as to finish cutting. During the thermal cutting process, it is usually necessary to use a quenching nozzle to spray cold water or gas onto the cutting path to break the glass apart. The method has low cutting precision and is difficult to process complex patterns.

Chinese patent CN105149773A discloses a method for processing transparent glass, which adopts a pulse output fiber laser with wavelength near 532nm (green light) to process the transparent glass, and uses the traditional CO as a raw material₂The laser is different, the output green light is focused to the position of the transparent glass to be processed by the focusing lens after passing through the scanning galvanometer, the glass is blasted in a micron order, and the position of the focus is moved by the scanning galvanometer, so that blasting points are superposed in the area to be processed, and the processing is realized. This method provides a significant increase in processing speed.

In order to avoid the influence of dust generated in the processing process on the laser and improve the energy coupling efficiency, the laser beam needs to be focused on the lower surface and processed from bottom to top. However, if the material has microstructures such as patterns and pits on the upper surface, the laser beam is scattered, diffracted or refracted in different directions when the laser beam irradiates the upper surface, and then the light beam propagates in the material and is dispersed, so that the light beam cannot be focused on the lower surface, and the effective energy density is seriously reduced, so that the processing cannot be realized. Therefore, for hard and brittle transparent materials with uneven surfaces, such as patterned glass, ground quartz, etc., laser processing cannot be performed in the bottom-up manner.

The Chinese patent application CN108381043A discloses a laser processing method of a non-smooth surface transparent hard and brittle material, which comprises the following steps: (1) applying a layer of transparent liquid on the upper surface of the material to be processed, wherein the difference between the refractive index of the transparent liquid and the refractive index of the material to be processed is not more than 0.45; (2) covering a transparent flat plate on the transparent liquid layer; (3) removing air bubbles between the transparent flat plate and the material to be processed, and sequentially forming a material layer to be processed, a transparent liquid layer and a transparent flat plate from bottom to top; (4) the method comprises the steps of placing a component to be processed on a laser processing workbench for processing, enabling a laser beam to penetrate through a transparent flat plate and a transparent liquid layer, focusing the laser beam to the lower surface of a material layer to be processed, processing according to a set track, gradually raising a focusing point, and realizing punching or cutting of the material to be processed from bottom to top. This method enables the processing of, for example, patterned glass, but the processing speed is not yet fast enough.

Therefore, it is necessary to design a new device for processing glass with non-smooth surface to increase the processing speed while ensuring the processing precision.

Disclosure of Invention

The invention aims to provide a laser processing device for non-smooth surface glass, which aims to overcome the problem of limited processing speed in the prior art and improve the processing precision and speed of the laser non-smooth surface glass.

In order to achieve the purpose of the invention, the technical scheme adopted by the utility model is as follows: a processing device for glass materials with non-smooth surfaces comprises a green light laser, a focusing lens and a focus adjusting mechanism, wherein the green light pulse train laser mainly comprises a pulse train seed laser with an output wavelength of 1020-1090 nanometers, a multi-stage or single-stage optical fiber amplifier, a collimator and a frequency doubling device, and output light of the pulse train seed laser is amplified by the optical fiber amplifier, collimated by the collimator and then frequency-doubled by the frequency doubling device to output a green light pulse train; the green light is focused on the position to be processed of the glass material with the non-smooth surface through the focusing lens; and a liquid adding device is arranged above the material to be processed.

When the device is used, a layer of transparent liquid is applied to the upper surface of the glass with the non-smooth surface to be processed by using liquid adding equipment, and the difference between the refractive index of the transparent liquid and the refractive index of the glass with the non-smooth surface to be processed is not more than 0.45; controlling the output of a green pulse laser so that each laser pulse train comprises at least two laser pulses, the pulse width of each laser pulse is less than 10ns, the peak power of the pulse is more than 5KW, the interval time between adjacent laser pulses in the pulse train is less than 120ns, the interval time between the pulse trains is more than 300ns, and the total number of pulses per second is more than 100000; wherein, the laser beam output by the laser only adopts the optical fiber amplifier to amplify the energy. And the laser beam penetrates through the transparent liquid layer, is focused on the lower surface of the glass with the non-smooth surface to be processed, is processed according to a set track, gradually raises the focus point, and processes the glass with the non-smooth surface from bottom to top.

In the above technical solution, the focus adjustment mechanism includes a scanning galvanometer, and the scanning galvanometer is located between the output of the green burst laser and the focusing lens in the light path.

The scanning galvanometer is one of a two-dimensional galvanometer, a 2.5-dimensional galvanometer or a three-dimensional galvanometer.

Or the green light pulse train laser and the focusing lens form an optical head, the focus adjusting mechanism comprises an optical head position adjusting mechanism, the plane of the transparent material to be processed is an X-Y plane, the Z axis is vertical to the X-Y plane, and the optical head position adjusting mechanism enables the optical head to have the freedom degrees of translation of the X axis, the Y axis and the Z axis.

Or the focus adjusting mechanism comprises a platform for placing the transparent material to be processed, the plane of the transparent material to be processed is an X-Y plane, the Z axis is perpendicular to the X-Y plane, the focus adjusting mechanism enables the platform to have the freedom degree of translation of the X axis and the Y axis, and the freedom degree of relative motion along the Z axis is arranged between the focusing lens and the platform.

Because of the application of the technical scheme, compared with the prior art, the utility model has the following advantages:

1. the utility model discloses in add equipment through setting up liquid, can form the one deck liquid layer on non-smooth surface glass in the course of working to make the laser beam can the accurate focus to the material lower surface, realize that the material from bottom to top is got rid of.

2. The utility model discloses a laser instrument can generate green glow pulse train, and first pulse is used and is made the material take place the blasting of micron magnitude (5~50 microns) on the material, produces the temperature that the material got rid of and increased material on every side. This burst mode can greatly improve material removal efficiency by the second pulse reaching and further rapidly increasing the temperature of the surrounding material before the heat of the surrounding material is released, and then creating more material removal.

3. When only a focusing lens is adopted and a scanning galvanometer is not adopted, the device is light and convenient due to the adoption of the fiber laser, and can be installed on mobile equipment.

Drawings

Fig. 1 is a schematic diagram of a structural framework of a green burst laser according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a first embodiment of the present invention;

fig. 3 is a schematic structural diagram of a second embodiment of the present invention.

Detailed Description

The invention will be further described with reference to the following drawings and examples:

the first embodiment is as follows: referring to fig. 2, a device for processing a glass material with a non-smooth surface comprises a green light pulse train laser, a scanning galvanometer and a focusing lens, referring to fig. 1, wherein the green light pulse train laser mainly comprises a pulse train seed laser with an output wavelength of 1020-1090 nanometers, a multi-stage or single-stage optical fiber amplifier, a collimator and a frequency doubling device, and output light of the pulse train seed laser is amplified by the optical fiber amplifier and then collimated by the collimator, and then frequency doubled by the frequency doubling device to output a green light pulse train; the green light pulse train is focused on the position to be processed of the transparent material by a focusing lens after passing through a scanning galvanometer; and a liquid adding device is arranged above the material to be processed.

In this embodiment, the scanning galvanometer is a three-dimensional galvanometer, the repetition frequency of the green laser is greater than 300,000 total pulses per second, the number of laser pulses in the pulse train is 2, the time between each laser pulse in the pulse train is 15ns, and the spot diameter is 20 μm. The overlap ratio of the laser spots during the movement of the green pulse train was 50%, so the laser was advanced at a speed of 1.5 m/s by the galvanometer. A layer of water is applied to the upper surface of the non-smooth surface glass, the refractive index of the water is 1.33, the refractive index of the glass is about 1.4-1.6, and the difference between the refractive indexes of the water and the glass is 0.07-0.27. When drilling holes in glass material, a cut of several tens of microns thickness is produced per revolution. The cutting is advanced by moving the galvanometer, and high-efficiency drilling is realized.

Example two: referring to the attached figure 3, the processing device for the glass material with the non-smooth surface consists of a green light pulse train laser and a focusing lens, referring to figure 1, the green light pulse train laser mainly consists of a pulse train seed laser with the output wavelength of 1020-1090 nanometers, a multi-stage or single-stage optical fiber amplifier, a collimator and a frequency doubling device, and the output light of the pulse train seed laser is amplified by the optical fiber amplifier, collimated by the collimator and then frequency-doubled by the frequency doubling device to output a green light pulse train; the green light pulse train is focused on the position to be processed of the transparent material by a focusing lens; and a liquid adding device is arranged above the material to be processed.

In this embodiment, the burst laser is focused on the transparent material by the lens, the lens is mounted on the moving belt, and the linear cutting is realized by moving the lens. The total number of pulses per second was 900,000, the number of laser pulses in the pulse train was 3, the time between each laser pulse in the pulse train was 15ns, the spot diameter was 20 microns, the overlap rate was 40%, the laser was advanced at a rate of 3.6 meters per second, and a layer of 60% glucose water was applied to the top surface of the non-smooth surface glass. The laser produces ablation on the surface of the glass material. High-speed cutting of the glass material is realized.

Claims

1. The laser processing device for the glass with the non-smooth surface consists of a green light pulse train laser, a focusing lens and a focus adjusting mechanism, and is characterized in that: the green light pulse train laser mainly comprises a pulse train seed laser with the output wavelength of 1020-1090 nanometers, a multi-stage or single-stage optical fiber amplifier, a collimator and a frequency doubling device, wherein the output light of the pulse train seed laser is amplified by the optical fiber amplifier, collimated by the collimator and frequency-doubled by the frequency doubling device to output a green light pulse train; the green light is focused on the position to be processed of the glass material with the non-smooth surface through the focusing lens; and a liquid adding device is arranged above the material to be processed.

2. The laser processing apparatus for non-smooth surface glass according to claim 1, wherein: the focus adjustment mechanism includes a scanning galvanometer positioned in the optical path between the output of the green burst laser and the focusing lens.

3. The laser processing apparatus for non-smooth surface glass according to claim 2, wherein: the scanning galvanometer is one of a two-dimensional galvanometer, a 2.5-dimensional galvanometer or a three-dimensional galvanometer.

4. The laser processing apparatus for non-smooth surface glass according to claim 1, wherein: the green light pulse train laser and the focusing lens form an optical head, the focus adjusting mechanism comprises an optical head position adjusting mechanism, the plane of the transparent material to be processed is an X-Y plane, the Z axis is perpendicular to the X-Y plane, and the optical head position adjusting mechanism enables the optical head to have the freedom degrees of X-axis, Y-axis and Z-axis translation.

5. The laser processing apparatus for non-smooth surface glass according to claim 1, wherein: the focus adjusting mechanism comprises a platform for placing a transparent material to be processed, the plane of the transparent material to be processed is an X-Y plane, the Z axis is perpendicular to the X-Y plane, the focus adjusting mechanism enables the platform to have the freedom degree of translation of the X axis and the Y axis, and the freedom degree of relative motion along the Z axis is arranged between the focusing lens and the platform.