CN213932442U - Hemisphere coating uniformity detects frock - Google Patents
Hemisphere coating uniformity detects frock Download PDFInfo
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- CN213932442U CN213932442U CN202022797691.6U CN202022797691U CN213932442U CN 213932442 U CN213932442 U CN 213932442U CN 202022797691 U CN202022797691 U CN 202022797691U CN 213932442 U CN213932442 U CN 213932442U
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Abstract
A hemispherical coating uniformity detection tool relates to the field of coating detection and comprises a substrate, a quartz test piece and a clamping rod; the substrate is hemispherical and is provided with a concave cavity; a plurality of loading holes extending towards the spherical center of the substrate are distributed on the outer spherical surface of the substrate, and each loading hole does not completely penetrate through the substrate so that a step is formed between the loading hole and the inner spherical surface of the substrate; the step is provided with a through hole, and the cavity is communicated with the loading hole through the through hole; the quartz test piece is in the same shape as the loading hole and can be installed in the loading hole; the clamping rod is fixed on the substrate to support the substrate; the substrate with the same shape as the hemispherical gyroscope vibrator is designed, the substrate is used for simulating the film coating effect of the film coating equipment on the hemispherical gyroscope vibrator, and finally the detection instrument is used for measuring the height of the film layer formed on the quartz test piece, so that the uniformity data of the film coating equipment can be accurately obtained.
Description
Technical Field
The utility model relates to a coating film detection area especially relates to a hemisphere coating film homogeneity detects frock.
Background
The hemispherical resonator gyroscope is a gyroscope without a high-speed rotor and a movable support, and realizes angle or rotating speed measurement by utilizing the mode shift caused by the Goldfish effect generated by the rotation of a harmonic oscillator vibrating by radial standing waves; the gyroscope has the advantages of good stability, long service life, high reliability, nuclear radiation resistance, high impact vibration resistance, short starting time and the like, and is considered as the most ideal element in the strapdown inertial navigation system advanced in twenty-first century by the inertial technology field.
Because the hemispherical gyroscope vibrator adopts various precise processing technologies to lead the hemispherical gyroscope vibrator to be as close to an ideal axial symmetry shape as possible, and the vibration shape of the hemispherical gyroscope vibrator is sensitive to external defects, higher requirements on the uniformity of a film layer are provided in the process of coating the surface of the hemispherical gyroscope vibrator, but the problem of how to adjust and detect the uniformity of the coating effect of the coating equipment on the hemispherical gyroscope vibrator is a big problem.
SUMMERY OF THE UTILITY MODEL
To the problem that exists among the prior art, the utility model provides a detect scheme of frock before utilizing coating film equipment to the semi-spherical gyroscope oscillator coating film, test the coating film in advance with this detection frock and coating film equipment earlier, then the test detects the coating film effect on the frock to judge the coating film effect of coating film equipment and the even effect of rete on the semi-spherical gyroscope oscillator.
The utility model provides a technical scheme as follows:
a hemispherical coating uniformity detection tool comprises a substrate, a quartz test piece and a clamping rod; the substrate is hemispherical and is provided with a concave cavity; a plurality of loading holes extending towards the spherical center of the substrate are distributed on the outer spherical surface of the substrate, and each loading hole does not completely penetrate through the substrate so that a step is formed between the loading hole and the inner spherical surface of the substrate; the step is provided with a through hole, and the cavity is communicated with the loading hole through the through hole; the quartz test piece is in the same shape as the loading hole and can be installed in the loading hole; the clamping rod is fixed on the substrate to support the substrate.
Furthermore, the loading hole is a cylindrical hole, and the through hole and the loading hole are coaxially arranged.
Furthermore, the thickness of the step is 0.5 mm-1 mm.
Further, the clamping rod is arranged at the bottom of the concave cavity and is integrally formed with the substrate.
Furthermore, the bottom of the substrate is provided with a threaded hole, the surface of the clamping rod is provided with an external thread matched with the threaded hole, and the clamping rod is in spiral fit connection with the substrate.
Furthermore, a clamping flange is arranged on the outer spherical surface of the substrate and opposite to the clamping rod, and the extending and rising direction of the clamping flange is opposite to that of the clamping rod.
Further, the diameter of the cavity is D1, the diameter of the loading hole is D2, wherein D1: d2 ═ 10: 1.
The beneficial effect that adopts this technical scheme to reach does:
through the design with the same substrate of hemisphere top oscillator shape, utilize the substrate to come the coating film effect of imitation coating film equipment to hemisphere top oscillator, utilize at last contourgraph, interferometer, instrument such as atomic force microscope to measure the height that the rete formed on quartz specimen to the homogeneity data of accurate acquisition coating film equipment has realized the detection of hemisphere top oscillator about the coating film homogeneity index simultaneously, is favorable to the quantification of product to be checked and accepted.
Drawings
Fig. 1 is an explosion structure diagram of the present invention.
Fig. 2 is an assembly structure diagram of the present invention.
Fig. 3 is a front plan view of the present invention.
Fig. 4 is a sectional structure view of the tool.
Fig. 5 is a partially enlarged view of fig. 4.
FIG. 6 is a block diagram of a quartz plate.
Wherein: 10 substrates, 11 loading holes, 12 steps, 13 through holes, 20 quartz test pieces, 30 clamping rods, 40 clamping flanges and 100 cavities.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.
This embodiment provides a hemisphere coating film homogeneity detects frock, utilizes this homogeneity to detect frock earlier with the coating film equipment and installs fixedly, makes the coating film equipment carry out the coating film on this detection frock, then the staff detects the statistics to the rete that should detect different positions on the frock again to confirm the homogeneity data of coating film equipment, can assess the hemisphere top oscillator coating film effect that will go on, thereby guarantee the precision quality of hemisphere top oscillator.
Referring to fig. 1 to 6, in particular, the uniformity detection tool provided by the present disclosure includes a substrate 10, a quartz test piece 20, and a clamping rod 30.
Wherein, the substrate 10 is hemispherical and has a cavity 100, and the cavity 100 is also spherical, which can be understood as the whole substrate 10 is a stainless steel shell or an aluminum alloy shell with a certain thickness.
A plurality of loading holes 11 are distributed on the outer spherical surface of the substrate 10, the loading holes 11 extend towards the spherical center of the substrate 10, and it should be noted that the loading holes 11 do not completely penetrate through the whole substrate 10, that is, each loading hole 11 does not completely penetrate through the substrate 10, so that a step 12 is formed between the loading hole 11 and the inner spherical surface of the substrate 10; the step 12 has a through hole 13, and the cavity 100 communicates with the loading hole 11 through the through hole 13.
In this embodiment, the thickness of the step 12 ranges from 0.5mm to 1 mm.
Here, the loading holes 11 are distributed on the substrate 10, in this embodiment, referring to fig. 3, the loading holes 11 are distributed on the substrate 10 in a cross-shaped structure on the orthographic projection plane, and in order to ensure the structural coordination of the loading holes 11 and the substrate 10, the diameter of the cavity 100 is defined as D1, the diameter of the loading holes 11 is defined as D2, where D1: d2 ═ 10: 1.
Optionally, the loading hole 11 is a cylindrical hole, and the through hole 13 described above is coaxially arranged with the loading hole 11, so that the whole uniformity detection tool can be conveniently machined, and the whole coordination is enhanced.
Referring to fig. 1, the quartz test piece 20 has the same shape as the loading hole 11 and can be installed in the loading hole 11; the quartz test piece 20 and the substrate 10 can be separated from each other, that is, the quartz test piece 20 can be loaded into the loading hole 11 or the quartz test piece 20 can be taken out from the loading hole 11.
Referring to fig. 1-2 and 6, a quartz test piece 20 is used as a supporting body of a film layer, and the specific use method is that the quartz test piece 20 is firstly loaded into the loading hole 11, and the quartz test piece 20 is attached to and contacted with the step 12; then, starting the coating equipment, wherein the coating equipment coats a layer of film in the cavity 100 of the substrate 10, and because of the existence of the through hole 13 and the step 12, the end face, which is attached to the step 12, of the quartz test piece 20 is also coated with a layer of film, and the film forms a film layer on the quartz test piece 20 and is positioned in the center of the end face of the quartz test piece 20; finally, the quartz test piece 20 is taken out from the loading hole 11, and the quartz test piece 20 is placed on a measuring instrument such as a profiler, an interferometer, an atomic force microscope, or the like to detect the height of the film formed on the quartz test piece 20.
The substrate 10 needs to be matched with the coating equipment, and needs to be fixed with the coating equipment by using a clamping rod 30, wherein the clamping rod 30 is fixed on the substrate 10 to support the substrate 10; the clamping mechanism on the coating equipment is used for clamping the clamping rod 30, so that the whole tool is fixed with the coating equipment.
Optionally, the clamping rod 30 and the substrate 10 are connected in two ways, namely, in a first way: the clamping bar 30 is arranged at the bottom of the cavity 100 and is integrally formed with the substrate 10; the second method comprises the following steps: the bottom of the substrate 10 is provided with a threaded hole, the surface of the clamping rod 30 is provided with an external thread matched with the threaded hole, and the clamping rod 30 is connected with the substrate 10 in a spiral matching manner to realize fixation.
Of course, referring to fig. 4, in the actual operation process, the clamping position may be selected differently according to the coating equipment, so that the clamping flange 40 is provided on the outer spherical surface of the substrate 10 at a position opposite to the clamping rod 30, and the extending direction of the clamping flange 40 is opposite to the extending direction of the clamping rod 30.
The clamping flange 40 is also used for clamping and matching the tool with the coating equipment, and a user can select the clamping rod 30 or the clamping flange 40 to clamp and match with the coating equipment according to actual requirements.
Through designing the substrate 10 the same with hemisphere top oscillator shape, utilize substrate 10 to come the simulation filming equipment to the coating film effect of hemisphere top oscillator, utilize instruments such as contourgraph, interferometer, atomic force microscope to measure the height that the rete formed on quartz test piece 20 at last to the homogeneity data of accurate filming equipment of obtaining has realized the detection about the coating film homogeneity index of hemisphere top oscillator simultaneously, is favorable to the quantification of product to be checked and accepted.
The following description is provided for a specific method for using the detection tool:
the first step is as follows: fixing the provided tool in the coating equipment, wherein the tool can be fixed through a clamping rod 30 or a clamping flange 40;
the step requires that the coating equipment is provided with a clamping mechanism, and if the coating equipment is not provided with the clamping mechanism, the tool can be further processed and manufactured so that the tool is fixed on the coating equipment.
The second step is that: a circular quartz test piece 20 is arranged in the loading hole 11, and the quartz test piece 20 is attached to and contacted with the step 12;
the circular quartz test piece 20 is used for facilitating installation and fixation of the quartz test piece 20 in the tool, and the step 12 supports the quartz test piece 20; meanwhile, the edge of the quartz test piece 20 can be partially chamfered, so that the quartz test piece is convenient to mount and clamp.
The third step: and starting the coating equipment to perform flat coating on the concave cavity 100 of the substrate 10.
The fourth step: after the film coating is finished, a film layer is formed at the center of the end face of the quartz test piece 20, the quartz test piece 20 is taken down, the thickness of the film layer on each different quartz test piece 20 is measured through a step profiler, the film thickness at each point of the hemispherical substrate 10 can be equivalent, and the uniformity of the film coating of the hemispherical device can be calculated;
the selection of the measuring equipment includes but is not limited to using a step meter, and measuring instruments such as a profile meter, an interferometer, an atomic force microscope and the like can also be used according to the precision requirement; the method for calculating the coating uniformity of the hemispherical device comprises the following steps: the unevenness is (Tmax-Tmin)/(Tmax + Tmin) × 100%.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (7)
1. The hemispherical coating uniformity detection tool is characterized by comprising a substrate (10), a quartz test piece (20) and a clamping rod (30);
the substrate (10) is hemispherical and is provided with a concave cavity (100); a plurality of loading holes (11) extending towards the spherical center of the substrate (10) are distributed on the outer spherical surface of the substrate (10), and each loading hole (11) does not completely penetrate through the substrate (10) so that a step (12) is formed between the loading hole (11) and the inner spherical surface of the substrate (10); the step (12) has a through hole (13), the cavity (100) is communicated with the loading hole (11) through the through hole (13);
the quartz test piece (20) is in the same shape as the loading hole (11) and can be installed in the loading hole (11);
the clamping bar (30) is fixed on the substrate (10) to support the substrate (10).
2. The detection tool according to claim 1, wherein the loading hole (11) is a cylindrical hole and the through hole (13) is coaxially arranged with the loading hole (11).
3. The detection tool according to claim 2, wherein the step (12) is 0.5-1 mm thick.
4. The inspection tool according to claim 1, characterized in that the clamping bar (30) is arranged at the bottom of the cavity (100) and is integrally formed with the substrate (10).
5. The detection tool according to claim 1, wherein a threaded hole is formed in the bottom of the substrate (10), an external thread matched with the threaded hole is formed in the surface of the clamping rod (30), and the clamping rod (30) is in threaded fit connection with the substrate (10).
6. The detection tool according to claim 4 or 5, characterized in that a clamping flange (40) is arranged on the outer spherical surface of the substrate (10) at a position opposite to the clamping rod (30), and the extending direction of the clamping flange (40) is opposite to the extending direction of the clamping rod (30).
7. The inspection tool according to claim 1, wherein the diameter of the cavity (100) is D1, the diameter of the loading hole (11) is D2, wherein D1: d2 ═ 10: 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022797691.6U CN213932442U (en) | 2020-11-28 | 2020-11-28 | Hemisphere coating uniformity detects frock |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022797691.6U CN213932442U (en) | 2020-11-28 | 2020-11-28 | Hemisphere coating uniformity detects frock |
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| CN213932442U true CN213932442U (en) | 2021-08-10 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115572954A (en) * | 2022-09-20 | 2023-01-06 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | High-uniformity film coating device and method for hemispherical workpiece |
| CN116592803A (en) * | 2023-07-18 | 2023-08-15 | 西安精谐科技有限责任公司 | Hemispherical harmonic oscillator curved surface coating thickness measuring method and application |
-
2020
- 2020-11-28 CN CN202022797691.6U patent/CN213932442U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115572954A (en) * | 2022-09-20 | 2023-01-06 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | High-uniformity film coating device and method for hemispherical workpiece |
| CN116592803A (en) * | 2023-07-18 | 2023-08-15 | 西安精谐科技有限责任公司 | Hemispherical harmonic oscillator curved surface coating thickness measuring method and application |
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