CN213866497U - Automatic heating and warming device of silicon core furnace and silicon core furnace - Google Patents
Automatic heating and warming device of silicon core furnace and silicon core furnace Download PDFInfo
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- CN213866497U CN213866497U CN202022229059.1U CN202022229059U CN213866497U CN 213866497 U CN213866497 U CN 213866497U CN 202022229059 U CN202022229059 U CN 202022229059U CN 213866497 U CN213866497 U CN 213866497U
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Abstract
The utility model discloses a silicon core stove self-heating rising temperature device and silicon core stove, the device includes: a silicon core material positioned inside the silicon core furnace; the heating coil is arranged above the silicon core material; the heating sheet is arranged between the heating coil and the top of the silicon core material; the first driving motor is connected with the heating sheet; the lower shaft is fixedly connected with the bottom of the silicon core material; the second driving motor is connected with the lower shaft; the temperature monitoring device is used for monitoring the internal temperature of the silicon core furnace; and the control unit is connected with the temperature monitoring device, the first driving motor and the second driving motor and is used for controlling the first driving motor and the second driving motor according to the received temperature inside the silicon core furnace so as to control the heating plate and the lower shaft. The utility model discloses mainly used polycrystalline silicon core grows, and concretely relates to preheats and heats the step, need not artifical observation constantly to the heating state can obtain the feedback.
Description
Technical Field
The utility model relates to a polycrystalline silicon processing field especially relates to silicon core stove self-heating rising temperature device and silicon core stove.
Background
With the increasing severity of the world energy crisis, the utilization of green energy, diversified energy and renewable energy becomes a strategic choice for sustainable development in China, wherein solar photovoltaic power generation becomes one of the hot topics developed by current power technologists. Polycrystalline silicon is a direct raw material for producing monocrystalline silicon, is an electronic information base material of semiconductor devices such as modern artificial intelligence, automatic control, information processing, photoelectric conversion and the like, and has higher purity, better electronic performance and higher corresponding photoelectric conversion rate. Meanwhile, due to the energy crisis and the call for low carbon economy, renewable energy is being actively developed and utilized globally. Solar energy is most attractive among renewable energy sources because of its cleanliness, safety, and abundance of resources. One method of utilizing solar energy is to convert solar energy into electrical energy through the photoelectric effect. Silicon solar cells are the most commonly used devices based on the photovoltage effect. In addition, due to the development of the semiconductor industry and solar cells, the demand for high-purity polycrystalline silicon is increasing.
The mainstream process for growing the polycrystalline silicon is an improved Siemens method, and the improved Siemens method for growing the polycrystalline silicon must use a high-purity silicon core as a carrier to carry out chemical vapor deposition; at present, links such as preheating, heating and material melting of a silicon core furnace need manual observation at any time, time and labor are wasted, and the heating state cannot be fed back in real time.
Therefore, in order to solve the above problems, it is an urgent technical problem in the art to provide an automatic heating and warming device for a silicon core furnace and a silicon core furnace.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the not enough of prior art, provide a silicon core stove self-heating rising temperature device and silicon core stove, solve prior art and preheat-heating-melting material etc. to the silicon core stove and need artifical problem of observing constantly.
The purpose of the utility model is realized through the following technical scheme:
the utility model discloses an aspect provides silicon core stove self-heating rising temperature device, include:
a silicon core material positioned inside the silicon core furnace;
the heating coil is arranged above the silicon core material;
the heating sheet is arranged between the heating coil and the top of the silicon core material; the first driving motor is connected with the heating sheet;
the lower shaft is fixedly connected with the bottom of the silicon core material; the second driving motor is connected with the lower shaft;
the temperature monitoring device is used for monitoring the internal temperature of the silicon core furnace; and
and the control unit is connected with the temperature monitoring device, the first driving motor and the second driving motor and is used for controlling the first driving motor and the second driving motor according to the received temperature inside the silicon core furnace so as to control the heating plate and the lower shaft.
Further, the first driving motor is a shifting fork motor, and the shifting fork motor is arranged outside the silicon core furnace; the output shaft of the shifting fork motor is connected with a shifting fork body, the shifting fork body is fixedly connected with the heating plate, and the shifting fork body penetrates through a shifting fork opening of the silicon core furnace.
Further, the lower shaft includes:
the shaft body comprises an inner shaft and an outer shaft which are integrally formed, the inner shaft is positioned inside the silicon core furnace, and the outer shaft is positioned outside the silicon core furnace;
the material seat is fixedly connected with the top of the inner shaft; the silicon core material is arranged on the material seat.
Further, the second driving motor is a servo motor, and the servo motor is arranged outside the silicon core furnace; the servo motor is connected with the outer shaft.
Further, when the temperature inside the silicon core furnace sent by the temperature monitoring device received by the control unit exceeds a first temperature, the control unit controls the first driving motor to drive the heating sheet to be far away from the heating coil.
Further, when the temperature inside the silicon core furnace sent by the temperature monitoring device received by the control unit exceeds a second temperature, the control unit controls a second driving motor to drive the lower shaft to rotate.
Further, the second temperature is higher than the first temperature.
Further, the rotation is a uniform rotation in the same direction.
Furthermore, a preheating viewing mirror is arranged on the silicon core furnace body, and the temperature monitoring is arranged outside the preheating viewing mirror.
The second aspect of the utility model provides a silicon core stove, include silicon core stove self-heating rising temperature device.
The utility model has the advantages that:
(1) in an exemplary embodiment of the present invention, the method is mainly used for polysilicon growth, and particularly relates to preheating and heating steps, which do not need to be observed manually at any time, and the heating state can be fed back. After the silicon core material is arranged on the lower shaft, the heating sheet is placed on the top of the silicon core material, the heating coil starts to heat at the moment, and the heating sheet preheats the silicon core material; after heating begins, the temperature monitoring device monitors the internal temperature of the silicon core furnace all the time, so that the preheating effect can be judged. And after preheating is finished, under the control of the control unit, the heating sheet is driven by the first driving motor to exit the position of the silicon core material, and then the heating step is carried out, and at the moment, the heating coil directly heats the silicon core material. When the silicon core material is melted, the second driving motor drives the lower shaft to rotate under the control of the control unit, so that the silicon core material rotates in the silicon core furnace, and the silicon core material gradually forms a melting zone to prepare for entering the subsequent processing step.
(2) In another exemplary embodiment of the present invention, the first driving motor, i.e. the shifting fork motor, is disposed outside the silicon core furnace, the shifting fork body connected to the output shaft of the shifting fork motor is disposed inside the silicon core furnace, and the shifting fork body belongs to the replaceable component, thereby prolonging the service life of the whole apparatus.
(3) In another exemplary embodiment of the present invention, the silicon core material is conveniently fixed in the silicon core furnace by additionally providing the material seat on the shaft body.
(4) In another exemplary embodiment of the present invention, similar to the first driving motor, the second driving motor, i.e. the servo motor, is disposed outside the silicon core furnace, and is connected to the lower shaft through the outer shaft, so as to prolong the service life of the whole instrument.
(5) In another exemplary embodiment of the present invention, the first temperature is a threshold temperature of the preheating step, and the heating plate is controlled to exit the silicon core material, i.e. to be away from the heating coil, after the detection that the threshold temperature of the preheating step is exceeded.
(6) In another exemplary embodiment of the present invention, the second temperature is a determination temperature of the heating step, and after the detection exceeds the determination temperature of the heating step, the silicon core material is gradually melted, so that the lower shaft is controlled to rotate in order to melt the silicon core material uniformly.
(7) In another exemplary embodiment of the present invention, since the heating temperature in the silicon core furnace is higher, in order to avoid the damage of the temperature monitoring device, the temperature monitoring device is disposed outside the silicon core furnace, and the preheating sight glass is used for the purpose. In addition, the preheating sight glass can also be used for observing the internal condition of the silicon core furnace by workers.
Drawings
Fig. 1 is a schematic structural view of an automatic heating and warming device of a silicon core furnace according to an exemplary embodiment of the present invention;
in the figure, 1-silicon core furnace, 2-silicon core material, 3-heating coil, 4-heating plate, 5-first driving motor, 6-lower shaft, 7-second driving motor, 8-temperature monitoring device, 9-control unit, 10-fork body, 11-inner shaft, 12-outer shaft and 13-material seat.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like are the directions or positional relationships indicated on the basis of the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
Referring to fig. 1, fig. 1 shows a silicon core furnace self-heating warming device provided by an exemplary embodiment of the present invention, including:
a silicon core material 2 positioned in the silicon core furnace 1;
a heating coil 3 disposed above the silicon core 2;
the heating sheet 4 is arranged between the heating coil 3 and the top of the silicon core material 2; the first driving motor 5 is connected with the heating sheet 4;
the lower shaft 6 is fixedly connected with the bottom of the silicon core material 2; the second driving motor 7 is connected with the lower shaft 6;
the temperature monitoring device 8 is used for monitoring the internal temperature of the silicon core furnace 1; and
and the control unit 9 is connected with the temperature monitoring device 8, the first driving motor 5 and the second driving motor 7 and is used for controlling the first driving motor 5 and the second driving motor 7 according to the received internal temperature of the silicon core furnace 1 so as to control the heating plate 4 and the lower shaft 6.
Specifically, for the growth of polysilicon, the method specifically comprises the steps of preheating, heating and material melting. Wherein the heating coil 3 and the heating plate 4 are mainly used in the preheating step during the growth of the polysilicon, specifically:
after the silicon core material 2 is arranged on the lower shaft, the heating plate 4 is placed on the top of the silicon core material 2, the heating coil 3 starts to heat at the moment, and the heating plate 4 preheats the silicon core material; after the heating is started, the temperature monitoring device 8 monitors the temperature inside the silicon core furnace 1 all the time, so that the preheating effect can be judged.
And after preheating is finished (according to the temperature judgment of the temperature monitoring device 8), under the control of the control unit 9, the heating plate 4 is driven by the first driving motor 5 to exit the position of the silicon core material 2, and then the heating step is carried out, and at the moment, the heating coil 3 directly heats the silicon core material 2. When the silicon core material 2 is molten (judged according to the temperature of the temperature monitoring device 8), under the control of the control unit 9, the second driving motor 7 drives the lower shaft 6 to rotate, so that the silicon core material 2 rotates in the silicon core furnace 1, and the silicon core material 2 gradually forms a molten zone to prepare for entering a drawing step.
The control unit 9 may be implemented by a PLC controller.
More preferably, in an exemplary embodiment, as shown in fig. 1, the first driving motor 5 is a fork motor provided outside the silicon core furnace 1; an output shaft of the shifting fork motor is connected with a shifting fork body 10, the shifting fork body 10 is fixedly connected with the heating plate 4, and the shifting fork body 10 penetrates through a shifting fork opening of the silicon core furnace 1.
Specifically, in this exemplary embodiment, the first driving motor 5, i.e., the shift fork motor, is disposed outside the silicon core furnace 1, only the shift fork body 10 connected to the output shaft of the shift fork motor is disposed inside the silicon core furnace 1, and the shift fork body 10 is a replaceable component, which improves the service life of the entire apparatus.
More preferably, in an exemplary embodiment, as shown in fig. 1, the lower shaft 6 comprises:
the shaft body comprises an inner shaft 11 and an outer shaft 12 which are integrally formed, wherein the inner shaft 11 is positioned inside the silicon core furnace 1, and the outer shaft 12 is positioned outside the silicon core furnace 1;
the material seat 13 is fixedly connected with the top of the inner shaft 11; the silicon core material 2 is arranged on the material seat 13.
Specifically, in the application, the material seat 13 is additionally arranged on the shaft body, so that the silicon core material 2 is conveniently fixed in the silicon core furnace.
More preferably, in an exemplary embodiment, as shown in fig. 1, the second driving motor 7 is a servo motor, which is disposed outside the silicon core furnace 1; the servomotor is connected to the outer shaft 12.
In particular, similar to the first drive motor 5, the second drive motor 7, i.e. the servo motor, is arranged outside the silicon core furnace 1 and is connected with the outer shaft 12 of the lower shaft 6, so that the service life of the whole instrument is prolonged.
More preferably, in an exemplary embodiment, when the temperature inside the silicon core furnace 1, which is received by the control unit 9 and sent by the temperature monitoring device 8, exceeds a first temperature, the first driving motor 5 is controlled to drive the heating sheet 4 away from the heating coil 3.
Specifically, the first temperature is the threshold temperature of the preheating step mentioned in the above exemplary embodiment, and when it is detected that the threshold temperature of the preheating step is exceeded, the heating sheet 4 is controlled to exit the silicon core 2, i.e., to be away from the heating coil 3.
Preferably, in an exemplary embodiment, when the temperature inside the silicon core furnace 1 sent by the temperature monitoring device 8 received by the control unit 9 exceeds a second temperature, the second driving motor 7 is controlled to drive the lower shaft 6 to rotate.
Specifically, the second temperature is a judgment temperature of the heating step mentioned in the above exemplary embodiment, and when it is detected that the judgment temperature of the heating step is exceeded, the silicon core 2 is gradually melted, and thus the lower shaft 6 is controlled to rotate in order to be uniformly melted.
More preferably, in an exemplary embodiment, the second temperature is higher than the first temperature.
Since the preheating step and the heating step are in a sequential order, typically, the second temperature is higher than the first temperature. Of course, in other exemplary embodiments, the lower shaft 6 may be controlled to rotate in advance, if there are other effects.
More preferably, in an exemplary embodiment, the rotation is a uniform rotation in the same direction. In this way, heating and melting can be made more uniform.
Preferably, in an exemplary embodiment, a preheating view mirror is arranged on the body of the silicon core furnace 1, and the temperature monitoring device 8 is arranged outside the preheating view mirror.
Wherein the preheating sight glass is not shown in the figure. Because the heating temperature in the silicon core furnace 1 is high, the temperature monitoring device 8 is arranged outside the silicon core furnace 1 in order to avoid damage, and is realized by a preheating sight glass. Moreover, the preheating sight glass can also be used for observing the internal condition of the silicon core furnace 1 by workers.
In another exemplary embodiment of the present invention, a silicon core furnace is provided, which includes the silicon core furnace automatic heating temperature rising device described in any of the above exemplary embodiments.
It is to be understood that the above-described embodiments are illustrative only and not restrictive of the broad invention, and that various other modifications and changes in light thereof will be suggested to persons skilled in the art based upon the above teachings. And are neither required nor exhaustive of all embodiments. And obvious changes and modifications can be made without departing from the scope of the invention.
Claims (10)
1. Silicon core stove self-heating rising temperature device, its characterized in that: the method comprises the following steps:
a silicon core material positioned inside the silicon core furnace;
the heating coil is arranged above the silicon core material;
the heating sheet is arranged between the heating coil and the top of the silicon core material; the first driving motor is connected with the heating sheet;
the lower shaft is fixedly connected with the bottom of the silicon core material; the second driving motor is connected with the lower shaft;
the temperature monitoring device is used for monitoring the internal temperature of the silicon core furnace; and
and the control unit is connected with the temperature monitoring device, the first driving motor and the second driving motor and is used for controlling the first driving motor and the second driving motor according to the received temperature inside the silicon core furnace so as to control the heating plate and the lower shaft.
2. The silicon core furnace automatic heating temperature rising device according to claim 1, characterized in that: the first driving motor is a shifting fork motor, and the shifting fork motor is arranged outside the silicon core furnace; the output shaft of the shifting fork motor is connected with a shifting fork body, the shifting fork body is fixedly connected with the heating plate, and the shifting fork body penetrates through a shifting fork opening of the silicon core furnace.
3. The silicon core furnace automatic heating temperature rising device according to claim 1, characterized in that: the lower shaft includes:
the shaft body comprises an inner shaft and an outer shaft which are integrally formed, the inner shaft is positioned inside the silicon core furnace, and the outer shaft is positioned outside the silicon core furnace;
the material seat is fixedly connected with the top of the inner shaft; the silicon core material is arranged on the material seat.
4. The silicon core furnace automatic heating temperature rising device according to claim 3, characterized in that: the second driving motor is a servo motor, and the servo motor is arranged outside the silicon core furnace; the servo motor is connected with the outer shaft.
5. The silicon core furnace automatic heating temperature rising device according to claim 1, characterized in that: when the temperature inside the silicon core furnace sent by the temperature monitoring device received by the control unit exceeds a first temperature, the control unit controls a first driving motor to drive the heating plate to be far away from the heating coil.
6. The silicon core furnace automatic heating temperature rising device according to claim 5, characterized in that: and when the temperature inside the silicon core furnace sent by the temperature monitoring device received by the control unit exceeds a second temperature, controlling a second driving motor to drive the lower shaft to rotate.
7. The silicon core furnace automatic heating temperature rising device according to claim 6, characterized in that: the second temperature is higher than the first temperature.
8. The silicon core furnace automatic heating temperature rising device according to claim 6, characterized in that: the rotation is uniform rotation along the same direction.
9. The silicon core furnace automatic heating temperature rising device according to claim 1, characterized in that: the preheating sight glass is arranged on the silicon core furnace body, and the temperature monitoring is arranged outside the preheating sight glass.
10. A silicon core furnace is characterized in that: the automatic heating and warming device comprises the silicon core furnace as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022229059.1U CN213866497U (en) | 2020-10-09 | 2020-10-09 | Automatic heating and warming device of silicon core furnace and silicon core furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022229059.1U CN213866497U (en) | 2020-10-09 | 2020-10-09 | Automatic heating and warming device of silicon core furnace and silicon core furnace |
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| Publication Number | Publication Date |
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| CN213866497U true CN213866497U (en) | 2021-08-03 |
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| CN202022229059.1U Active CN213866497U (en) | 2020-10-09 | 2020-10-09 | Automatic heating and warming device of silicon core furnace and silicon core furnace |
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| CN (1) | CN213866497U (en) |
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