CN213702246U - Optical system for realizing adjustable processing of micropore taper - Google Patents
Optical system for realizing adjustable processing of micropore taper Download PDFInfo
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- CN213702246U CN213702246U CN202022383957.2U CN202022383957U CN213702246U CN 213702246 U CN213702246 U CN 213702246U CN 202022383957 U CN202022383957 U CN 202022383957U CN 213702246 U CN213702246 U CN 213702246U
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Abstract
The utility model provides an optical system for realizing micropore taper adjustable processing, which comprises a laser beam shaping unit, a laser beam deflection unit and a focusing unit which are arranged along a light path in sequence, wherein the laser beam shaping unit, the laser beam deflection unit and the focusing unit are positioned on the same central axis; the laser beam deflection unit comprises a deflection lens, the end face of the light beam incidence end of the deflection lens is of a plane structure, the end face of the light beam emergence end of the deflection lens is a conical surface, and a certain angle is formed between the generatrix of the conical surface and the end face of the light beam incidence end of the deflection lens; the relative distance between the focusing unit and the laser beam deflection unit is adjustable. The utility model discloses a through the cooperation between each optical element, obtain energy distribution at the edge, can satisfy the annular laser beam of different apertures and the micropore processing requirement of tapering, it is less effectively to have solved current annular facula radius and adjusted, is difficult to satisfy the problem of different processing requirements.
Description
Technical Field
The utility model belongs to the technical field of laser beam machining, concretely relates to an optical system for realizing adjustable processing of micropore tapering.
Background
Laser drilling is widely applied in many fields, and how to make a drilled hole meet the required aperture and achieve the required taper is a main problem to be considered in laser drilling. At present, the mainstream mode of punching is the rotary cutting mode of punching, even if optical device deflects the laser and then realizes drilling through rotatory mode, the laser beam of its use mainly is the gaussian distribution, the energy is concentrated in central zone, and in laser welding, laser drilling, laser cutting etc. processing fields, the gaussian beam can not satisfy all processing demands, can appear great tapering and inclined plane when short burnt deep hole and cutting material deeply, the laser beam marginal zone's of gaussian distribution energy is less strong, but still can exert an influence to the processing material, can produce the heat accumulation when processing the material, and then cause the processing edge to have the burr, burn serious scheduling problem.
The problem can be effectively solved by using the annular light spots, and the energy of the annular light spots is uniformly distributed on the edge relative to the laser beams in Gaussian distribution, so that the condition that the processed edge is not flat due to insufficient edge energy can be effectively avoided. The existing technology for generating the annular light spot mainly comprises the steps of generating a combined annular light spot based on a computer-generated hologram method, wherein the computer-generated hologram can be designed to generate any light spot containing the combined annular light spot in principle, but because the computer-generated hologram generally uses off-axis first-order diffraction light and factors such as loss and the like, the light energy utilization rate is low, so that the use amount is relatively small; the other method is to adopt a laser with an adjustable light spot mode based on an optical fiber to generate a combined annular light spot, the difficulty and the cost of the method for realizing the adjustment of the light spot distribution mode in the optical fiber are high, and due to the fact that no adjustable external light path exists, the flexibility and the convenience in use are all deficient.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the degree of difficulty and the cost of the regulation of annular facula distribution pattern great among the prior art, be difficult to satisfy the problem of different processing requirements.
Therefore, the utility model provides an optical system for realizing the micro-hole taper adjustable processing, which comprises a laser beam shaping unit, a laser beam deflection unit and a focusing unit which are arranged along an optical path in sequence, wherein,
the laser beam shaping unit, the laser beam deflection unit and the focusing unit are positioned on the same central axis, and laser beams enter along the central axis;
the laser beam shaping unit is used for shaping a laser beam and changing an incident parallel light beam into a convergent light beam or a divergent light beam so as to change the size of an emergent light spot;
the laser beam deflection unit comprises a deflection lens, the end face of the light beam incidence end of the deflection lens is of a plane structure, the end face of the light beam emergence end of the deflection lens is of a conical surface, the rotating shaft of the conical surface is superposed with the center of the laser beam shaped by the laser beam shaping unit, and the bus of the conical surface and the end face of the light beam incidence end of the deflection lens form a certain angle; the laser beam shaped by the laser beam shaping unit is incident from the plane end face of the deflection lens, and the energy of the laser beam is changed into annular distribution after the conical surface deflection and has a certain deflection angle;
the focusing unit is used for focusing the annular laser beam to obtain an annular light spot with concentrated energy; the relative distance between the focusing unit and the laser beam deflection unit is adjustable.
Furthermore, a laser is arranged in front of the laser beam shaping unit, the laser emits parallel laser beams with Gaussian distribution light intensity, a reflector for enabling the laser beams emitted by the laser to enter along the central axis of the laser beam shaping unit is arranged between the laser and the laser beam shaping unit, and the center of the laser beams is overlapped with the central axis of the laser beam shaping unit.
Furthermore, the laser beam shaping unit comprises a fixed first focusing lens and a second focusing lens which can move back and forth along the direction of the light path, and the first focusing lens and the second focusing lens are positioned on the same central axis.
Furthermore, the deflection lens is formed by combining a first lens with a cylindrical structure and a second lens with a conical structure, and the conical bottom surface of the second lens is superposed with the cylindrical bottom surface of the first lens.
Further, the focusing unit includes a lens group used in cooperation.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model provides an optical system for realizing adjustable processing of micropore tapering, what its output is an annular facula, and the even distribution of energy is on the annular facula of focus unit focus department, processes for the laser beam that directly uses the light intensity to be gaussian distribution, and the energy evenly distributed of annular facula is around the ring, and marginal area's energy is strongest, can not produce because the energy at edge is weak and influence the problem of the roughness of material machined surface.
(2) The utility model provides a mode that this kind of an optical system for realizing adjustable processing of micropore tapering carries out processing is annular facula to the synchronous processing of millipore ring footpath, required time is shorter relatively, and annular facula, energy dispersion is around the ring, the power of single point is less, can effectively avoid using the laser beam of gauss distribution directly to punch to the work piece and add the time can cause when power is higher collapse limit, back hole edge thermal reaction is too big, phenomenons such as black edge, the laser beam power of simultaneous use further increases, can further shorten process time.
(3) The utility model provides a micropore aperture that is arranged in realizing the adjustable processing of micropore tapering optical system processing carries out the coarse adjustment by laser beam deflection unit, finely tunes by laser beam shaping unit, and adjustable wide range, adjustable precision is high, and the micropore tapering is decided by the relative distance between laser beam deflection unit and the focusing unit, can satisfy the micropore processing requirement of various tapering, and it is less effectively to have solved among the prior art annular facula radius regulation, is difficult to satisfy the problem of different processing requirements.
The present invention will be described in further detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of an optical system for implementing taper-adjustable processing of micro-holes in an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a deflection lens in an embodiment of the present invention;
FIG. 3 is a schematic structural view of the change in the pore diameter of the micro-pores processed in the embodiment of the present invention;
fig. 4 is a schematic structural diagram of the change of the taper of the micro-holes processed in the embodiment of the present invention.
Description of reference numerals: 1. a laser beam; 2. a first focusing mirror; 3. a second focusing mirror; 4. a laser beam deflection unit; 5. a focusing unit; 6. a first lens; 7. and a second lens.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of the present invention, "a plurality" means two or more unless otherwise specified.
As shown in fig. 1, this embodiment provides an optical system for implementing taper-adjustable machining of micro-holes, including a laser beam shaping unit, a laser beam deflection unit 4, and a focusing unit 5, which are sequentially disposed along an optical path, where the laser beam shaping unit, the laser beam deflection unit 4, and the focusing unit 5 are located on a same central axis, a laser beam 1 enters along the central axis, and a center of the laser beam 1 coincides with a center of the central axis of the optical system.
The laser beam shaping unit is used for shaping the laser beam 1, and changing the incident parallel light beam into a convergent light beam or a divergent light beam, so that the size of the emergent light spot is changed. Specifically, the laser beam shaping unit comprises a fixed first focusing mirror 2 and a second focusing mirror 3 which can move back and forth along the direction of the light path, and the first focusing mirror 2 and the second focusing mirror 3 are positioned on the same central axis, so that the center of incidence of the laser beam 1 is positioned on the central axis of the laser beam shaping unit; the diameter of the output light spot can be finely adjusted by adjusting the position of the second focusing lens 3 in the laser beam shaping unit, specifically, the focal lengths of the first focusing lens 2 and the second focusing lens 3 are respectively f1And f2Controlling the relative distance d between the first focusing lens 2 and the second focusing lens 3 by moving the position of the second focusing lens 3, when d < f1+ f2, the output converging inward at a small angleThe laser beam 1 is evenly divided by the laser beam deflection unit 4, the energy of the laser beam 1 is evenly distributed in a ring shape, the energy is converged by the focusing unit 5 to obtain an annular light spot, and the output annular light spot is increased along with the reduction of d, and when d is more than f1＋f2The output annular light spot decreases with increasing d.
The adjustment of the position of the second focusing mirror 3 in the laser beam shaping unit can be realized by manual adjustment or automatic adjustment by an electric control system with a power supply and controlled wirelessly.
The laser beam deflection unit 4 is used for deflecting the beam shaped by the laser beam shaping unit, so as to obtain a laser beam with energy being annular and focused towards the center at a certain angle. Specifically, the laser beam deflection unit 4 includes a deflection lens, the end face of the light beam incident end of the deflection lens is a plane structure, the end face of the light beam emergent end of the deflection lens is a conical surface, the rotating shaft of the conical surface coincides with the center of the laser beam shaped by the laser beam shaping unit, and the bus of the conical surface and the end face of the light beam incident end of the deflection lens form a certain angle; the laser beam shaped by the laser beam shaping unit is incident from the plane end face of the deflection lens, and the divergent or convergent laser beam output by the laser beam shaping unit is deflected and split by the conical surface to be changed into a convergent laser beam, and simultaneously the energy of the laser beam is changed into annular distribution, wherein the shape and the manufacturing material of the conical surface are different, and the mode and the spot size of the output annular spot are also different.
In a specific embodiment, as shown in fig. 2, the deflecting lens is formed by combining a first lens 6 with a cylindrical structure and a second lens 7 with a conical structure, and the conical bottom surface of the second lens 6 coincides with the cylindrical bottom surface of the first lens 6, and the diameter of the output annular light spot can be roughly adjusted by adjusting the angular relationship between the conical surface of the second lens 7 with a conical structure and the conical bottom surface; specifically, the larger the angle formed by the conical surface bus of the deflection lens and the light beam incident end face of the deflection lens is, the larger the light beam deflection is, the larger the annular light spot output by the focusing unit is, so that the aperture of the processed micropore is enlarged; on the contrary, the smaller the angle formed by the conical surface generatrix of the deflection lens and the light beam incidence end surface of the deflection lens, the smaller the aperture of the processed micropore becomes.
As shown in fig. 3, the aperture of the processed micro-hole is roughly adjusted by controlling the angle formed by the conical surface bus of the deflection lens in the laser beam deflection unit 4 and the light beam incident end face of the deflection lens, and the aperture of the processed micro-hole is finely adjusted by adjusting the relative distance between the first focusing lens 2 and the second focusing lens 3 in the laser beam shaping unit, so that the aperture of the micro-hole meets the processing requirement, and the micro-hole has wide adjustable range and high adjustable precision.
The focusing unit 5 is used for focusing the annular laser beam to obtain an annular light spot with concentrated energy, and the focusing unit 5 comprises a lens group used in cooperation; the relative distance between the focusing unit 5 and the laser beam deflection unit 4 is adjustable, the taper of the processing surface of the micropore can be influenced by the relative distance, and the taper of the processed micropore can be adjusted by controlling the relative distance between the laser beam deflection unit 4 and the focusing unit 5, so that the processing requirements of micropores with different tapers can be met. Specifically, as shown in fig. 4, when the relative distance between the laser beam deflection unit 4 and the focusing unit 5 is increased, the machined micro-hole forms a machined surface with a positive taper, when the relative distance between the laser beam deflection unit 4 and the focusing unit 5 is decreased, the machined micro-hole forms a machined surface with a negative taper, and when the relative distance between the laser beam deflection unit 4 and the focusing unit 5 is at a critical point position, the machined micro-hole forms a machined surface without a taper, and the critical point position can be obtained through debugging.
The relative distance between the laser beam deflection unit 4 and the focusing unit 5 is changed by adjusting the position of the laser beam deflection unit 4, the position of the laser beam deflection unit 4 can be adjusted manually, or can be adjusted automatically by using an electric control system with a power supply and controlled wirelessly.
When the relative distance between the first focusing lens 2 and the second focusing lens 3 and the relative distance between the laser beam deflection unit 4 and the focusing unit 5 are automatically adjusted by an electric control system with a power supply and controlled wirelessly, the aperture and the taper can be controlled in real time in the process of processing the micropores, the micropores with complex structures are processed, and the application range of the micropore is expanded.
In a further optimized implementation mode, a laser is further arranged in front of the laser beam shaping unit, the laser emits parallel laser beams with Gaussian distribution light intensity, a reflector for enabling the laser beams emitted by the laser to enter along the central axis of the laser beam shaping unit is further arranged between the laser and the laser beam shaping unit, and the center of the laser beams is overlapped with the central axis of the laser beam shaping unit.
To sum up, the utility model provides an optical system for realizing adjustable processing of micropore tapering obtains an energy distribution at the edge through the combination between each optical element, can directly be used for miniature round hole processing, the annular laser beam of opposite sex spot processing and cutting, simultaneously through control laser beam shaping unit, laser beam deflection unit, the relative position relation of focus unit, can satisfy different apertures and the mipor processing requirement of tapering, it is less effectively to have solved among the prior art annular facula radius regulation, be difficult to satisfy the problem of different processing requirements, and adjustable range is wide, adjustable precision is high.
The above illustration is merely an illustration of the present invention, and does not limit the scope of the present invention, and all designs identical or similar to the present invention are within the scope of the present invention.
Claims (5)
1. An optical system for realizing micro-hole taper adjustable processing is characterized in that: comprises a laser beam shaping unit, a laser beam deflection unit and a focusing unit which are arranged along an optical path in sequence, wherein,
the laser beam shaping unit, the laser beam deflection unit and the focusing unit are positioned on the same central axis, and laser beams enter along the central axis;
the laser beam shaping unit is used for shaping a laser beam and changing an incident parallel light beam into a convergent light beam or a divergent light beam so as to change the size of an emergent light spot;
the laser beam deflection unit comprises a deflection lens, the end face of the light beam incidence end of the deflection lens is of a plane structure, the end face of the light beam emergence end of the deflection lens is of a conical surface, the rotating shaft of the conical surface is superposed with the center of the laser beam shaped by the laser beam shaping unit, and the bus of the conical surface and the end face of the light beam incidence end of the deflection lens form a certain angle; the laser beam shaped by the laser beam shaping unit is incident from the plane end face of the deflection lens, and the energy of the laser beam is changed into annular distribution after the conical surface deflection and has a certain deflection angle;
the focusing unit is used for focusing the annular laser beam to obtain an annular light spot with concentrated energy; the relative distance between the focusing unit and the laser beam deflection unit is adjustable.
2. An optical system for implementing a micro-via taper-tunable process as defined in claim 1, wherein: a laser is arranged in front of the laser beam shaping unit, the laser emits parallel laser beams with Gaussian distribution light intensity, a reflector for enabling the laser beams emitted by the laser to enter along the central axis of the laser beam shaping unit is arranged between the laser and the laser beam shaping unit, and the center of the laser beams is superposed with the central axis of the laser beam shaping unit.
3. An optical system for implementing a micro-via taper-tunable process as defined in claim 1, wherein: the laser beam shaping unit comprises a fixed first focusing lens and a second focusing lens which can move back and forth along the direction of the light path, and the first focusing lens and the second focusing lens are positioned on the same central axis.
4. An optical system for implementing a micro-via taper-tunable process as defined in claim 1, wherein: the deflection lens is formed by combining a first lens with a cylindrical structure and a second lens with a conical structure, and the conical bottom surface of the second lens is superposed with the cylindrical bottom surface of the first lens.
5. An optical system for implementing a micro-via taper-tunable process as defined in claim 1, wherein: the focusing unit comprises a lens group used in cooperation.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022383957.2U CN213702246U (en) | 2020-10-23 | 2020-10-23 | Optical system for realizing adjustable processing of micropore taper |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022383957.2U CN213702246U (en) | 2020-10-23 | 2020-10-23 | Optical system for realizing adjustable processing of micropore taper |
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| CN213702246U true CN213702246U (en) | 2021-07-16 |
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