CN211956009U - Optical system with annular light spots - Google Patents

Optical system with annular light spots Download PDF

Info

Publication number
CN211956009U
CN211956009U CN202020091614.6U CN202020091614U CN211956009U CN 211956009 U CN211956009 U CN 211956009U CN 202020091614 U CN202020091614 U CN 202020091614U CN 211956009 U CN211956009 U CN 211956009U
Authority
CN
China
Prior art keywords
spiral phase
laser
spiral
phase plate
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202020091614.6U
Other languages
Chinese (zh)
Inventor
秦应雄
葛佳琪
昌思怡
张怀智
唐霞辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huazhong University of Science and Technology
Original Assignee
Huazhong University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huazhong University of Science and Technology filed Critical Huazhong University of Science and Technology
Priority to CN202020091614.6U priority Critical patent/CN211956009U/en
Application granted granted Critical
Publication of CN211956009U publication Critical patent/CN211956009U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The utility model belongs to the laser processing field and discloses an optical system of annular facula, which comprises a collimation unit, a phase modulation unit and a focusing unit which are arranged along a light path in sequence, wherein the phase modulation unit comprises at least one spiral phase plate positioned in the light path; the laser beam can be added with a spiral phase factor to realize phase modulation through a spiral phase plate positioned in the light path, so that the energy distribution of the laser beam is changed into annular distribution. Further, the spiral phase plates may be provided on the rotation shaft, and the states of being located inside and outside the optical path are switched by rotating around the rotation shaft, so that the variable annular light spot can be realized by switching the respective spiral phase plates. The utility model discloses a to optical system's subassembly and the cooperation mode between each subassembly etc. improve, can obtain energy distribution and concentrate on the edge, the diameter is bigger, the longer annular facula of depth of focus, the size of further facula is adjustable, is applicable to multiple laser beam machining fields such as laser cutting.

Description

Optical system with annular light spots
Technical Field
The utility model belongs to the laser beam machining field, more specifically relates to an optical system of annular facula.
Background
Most energy of light spots with common Gaussian energy distribution is concentrated at the central part, while the energy of light spots with annular energy distribution is distributed at the periphery, and the energy at the center is low. The light spots with the energy distribution have great advantages in the fields of laser cutting, marking, cladding, micro-processing and the like.
When laser processing is performed by using light spots with Gaussian energy distribution, ablation and other phenomena may occur when the central energy is too high, and due to insufficient energy of the edge, the deeper the processing depth is, the more insufficient the energy of the edge is, so that the cutting section is not flat. The problems can be effectively solved by adopting the light spots distributed by the annular energy, the annular distribution is compared with Gaussian distribution, the distribution on the energy is more uniform, the energy of the annular light spots is distributed at the edge, and the problem of uneven section caused by insufficient edge energy can be effectively avoided when the thick plate of the laser is cut. The main method for generating the annular light beam in the prior art is a computer generated hologram method, according to the principle of computer generated hologram, the annular light beam can be generated in any spatial distribution by designing a holographic pattern. This approach has a certain damage threshold and the conversion efficiency of the ring beam is not high due to the loss of energy and diffraction effects of the beam.
SUMMERY OF THE UTILITY MODEL
In view of the above drawbacks or needs of the prior art, an object of the present invention is to provide an optical system with an annular light spot, especially an optical system with a variable annular light spot, wherein the annular light spot with a larger diameter and a longer focal depth and energy distribution concentrated at the edge can be obtained by improving the components of the optical system and the cooperation mode between the components; and the rotating shaft is further arranged to regulate and control the quantity and the topological charge number inserted into the light path, so that the diameter of the light spot can be changed, the size of the light spot can be adjusted, and the laser processing device is suitable for various laser processing fields such as laser cutting. Laser beams are collimated by the collimating unit and enter from one end (such as a plane end) of a spiral phase plate in the phase modulation unit, emergent beams are added with spiral phase factors with corresponding topological charge numbers to become annular beams, and finally annular light spots with annular energy distribution are obtained through the focusing unit. The utility model discloses can produce annular facula through spiral phase plate, have great significance in laser beam machining technique to can further independently adjust spiral phase plate's quantity, realize that the topology load number of annular focusing facula is variable, can adjust according to the demand is nimble when processing different materials.
To achieve the above object, according to one aspect of the present invention, there is provided an optical system of annular light spot, comprising a collimating unit, a phase modulating unit and a focusing unit sequentially arranged along an optical path, wherein,
the collimation unit is used for collimating the input laser to obtain a collimated laser beam;
the phase modulation unit comprises at least one spiral phase plate positioned in an optical path; any one spiral phase plate comprises two end faces, wherein one end face is of a plane structure, and the other end face is an opposite face with a spiral step; for any spiral phase plate, the central axis of the spiral phase plate is overlapped with the beam center of the collimated laser beam, the laser beam can be incident from the plane end face of the corresponding spiral phase plate or can be incident from the step end face of the corresponding spiral phase plate, and a spiral phase factor is added through the spiral phase plate to perform phase modulation, so that the energy distribution of the laser beam is changed into annular distribution; the phase modulation unit can modulate the phase of the collimated laser beam through the action of the spiral phase plate, so that the laser beam with the changed phase is emitted;
the focusing unit is used for focusing the laser beam with the changed phase, so that an annular light spot is obtained.
As the utility model discloses a further preferred before the collimation unit, still be provided with the laser instrument, the laser of this laser instrument outgoing is as the input laser of collimation unit, the laser of this laser instrument outgoing are the laser that gaussian distribution is for the light intensity.
As a further preferred aspect of the present invention, the number of the spiral phase plates is plural, and the phase of one cycle around the optical axis of one spiral phase plate having a topological charge number of l is changed to 2 pi × l.
As a further preference of the present invention, the collimating unit includes a lens group used in cooperation.
As a further preference of the present invention, the focusing unit includes a lens group used in cooperation.
According to another aspect of the present invention, there is provided an optical system of variable annular spot, comprising a collimating unit, a phase modulating unit and a focusing unit sequentially arranged along an optical path, wherein,
the collimation unit is used for collimating the input laser to obtain a collimated laser beam;
the phase modulation unit comprises a plurality of spiral phase plates positioned on a rotating shaft, and the spiral phase plates can switch the states of being positioned in an optical path and being positioned outside the optical path by rotating around the rotating shaft; any one spiral phase plate comprises two end faces, wherein one end face is of a plane structure, and the other end face is an opposite face with a spiral step; when any one spiral phase plate is rotated to be positioned in the light path, the central axis of the spiral phase plate is overlapped with the beam center of the collimation laser beam, the laser beam can be incident from the plane end face of the corresponding spiral phase plate or can be incident from the step end face of the corresponding spiral phase plate, and a spiral phase factor is added to the laser beam through the spiral phase plate for phase modulation, so that the energy distribution of the laser beam is changed into annular distribution; the phase modulation unit can modulate the phase of the collimated laser beam through the action of the spiral phase plate, so that the laser beam with the changed phase is emitted;
the focusing unit is used for focusing the laser beam with the changed phase so as to obtain an annular light spot;
the variable annular light spot optical system can realize variable annular light spots by switching the states of the spiral phase plates which are positioned in the light path and outside the light path.
As the utility model discloses a further preferred before the collimation unit, still be provided with the laser instrument, the laser of this laser instrument outgoing is as the input laser of collimation unit, the laser of this laser instrument outgoing are the laser that gaussian distribution is for the light intensity.
As a further preferred aspect of the present invention, the number of the spiral phase plates is plural, and the phase of one cycle around the optical axis of one spiral phase plate having a topological charge number of l is changed to 2 pi × l.
As a further preference of the present invention, the collimating unit includes a lens group used in cooperation.
As a further preference of the present invention, the focusing unit includes a lens group used in cooperation.
Through the utility model discloses above technical scheme who thinks, compare with prior art, the focus facula to gaussian energy distribution energy concentration and marginal energy not enough problem in laser beam machining, the utility model discloses for the first time produce annular focus facula with this kind of optical element of spiral phase plate. The utility model applies the conventional optical element in the prior art, namely the spiral phase plate, to the laser processing for the first time to generate the relevant application of annular facula; furthermore, the number of the topological charges of the final output laser beam can be adjusted by controlling the number of the spiral phase plates inserted into the light path. And the utility model discloses utilize spiral phase plate to produce annular beam, this kind of mode easily realizes, and the step height of spiral phase plate is the micron magnitude usually to initial light beam is all expanded through the system of expanding the beam, does not basically diverge, consequently, spiral phase plate does not basically attenuate to the light beam light intensity, and just changes the phase place of light beam, and to the light source that monochromaticity is good, the annular beam purity of production is higher.
The utility model uses spiral phase plates to construct phase modulation units, and the spiral phase plates are consistent with the prior art and are transparent plates with fixed refractive index, one surface of each spiral phase plate is of a plane structure, and the opposite surface of each spiral phase plate is of a spiral structure (similar to a rotating step); the spiral phase plate has a thickness that varies with azimuthal angle. After the laser beam passes through the spiral phase plate, the optical paths of the laser beam passing through different azimuth angles are different, so that the phase of the emergent beam is correspondingly changed, a spiral phase factor exp (il theta) is added to the emergent beam, wherein l is the topological charge number of the spiral phase plate, and i represents a complex number symbol, so that the emergent beam is changed into an annular beam.
When the refractive index and the thickness parameter of the spiral phase plate and the wavelength of incident light are determined, the topological charge number of the obtained annular light beam is determined accordingly and cannot be flexibly adjusted; therefore, the utility model discloses a more preferred changeable optical system of annular facula size is further provided. That is to say, because a spiral phase plate can only produce the annular facula of a topology charge number after refracting index and thickness parameter confirm, in view of this the utility model discloses a design rotation axis can switch in a flexible way certain spiral phase plate and be located the light path in and be located the outer state of light path, so, based on annular light beam's topology charge number stack principle, utilize polylith spiral phase plate to produce the annular focus facula of different topology charge numbers, and then realized that annular facula size is variable.
A spiral phase plate in the phase modulation unit, which is required to keep the light beam incident from the plane end (or step end) of the spiral phase plate; when the spiral phase plate in the phase modulation unit is inserted into the optical path (i.e., rotated to a state of being located within the optical path), the center of the spiral phase plate must be aligned with the center of the laser beam. Laser beams with Gaussian distribution enter from the plane end face of each spiral phase plate or the step end face of each spiral phase plate, the centers of the laser beams are aligned with the centers of the spiral phase plates, the phases of the emergent laser beams are changed, a spiral phase factor is added, energy distribution is changed into annular distribution, and finally annular light spots are obtained through focusing.
The size of the annular light spot obtained by the optical system of the variable annular light spot is influenced by the topological charge number, and the larger the topological charge number is, the larger the energy depression area of the obtained annular light spot is, and the larger the diameter of the light spot is. The utility model discloses a setting is located the epaxial a plurality of spiral phase place board of rotation, can superpose the spiral phase place piece of inserting the system, changes topology load number, realizes the variable adjustable of annular facula. That is to say, based on the utility model discloses, through the quantity that the adjustment is located the spiral phase plate in the light path, can adjust the facula size. The phase modulation unit in the variable annular spot optical system is fixed on a rotating shaft by a plurality of spiral phase plates, and the spiral phase plates can be inserted into or removed from the optical path on the rotating shaft through rotation (namely, the state of being positioned in the optical path and the state of being positioned outside the optical path are switched). When any one of the spiral phase plates is inserted into the optical path, the center of the spiral phase plate can be aligned with the collimating unit and the focusing unit in the system.
The topological charge number of the ring-shaped light beam meets the superposition principle, that is, the topological charge number of the ring-shaped light beam meets the summation relationship, for example, two ring-shaped light beams with completely the same topological charge number can be superposed into a ring-shaped light beam with twice topological charge number, and for example, if two ring-shaped light beams with the same topological charge number and opposite signs are superposed, a light beam (namely, a planar light field) with zero topological charge number is formed; therefore, the topological charge l of the annular light beam can be changed by superposing the spiral phase plates, and the size of the annular light spot obtained by final focusing is further changed.
Specifically speaking, the utility model has the following characteristics:
(1) under the same condition, the light beam is added with a spiral phase factor, and the focused annular light spot has larger radius and longer focal depth than the common focused light spot. The edge energy is high, so that the adverse effects such as ablation in laser processing can be effectively avoided, the material is heated more uniformly, and the processing quality is better;
(2) annular light spots are generated through the spiral phase plate, the annular light spots can be regarded as pure phase modulation, the change of the amplitude can be ignored, the energy conversion rate is high, the loss is reduced, and the laser high-power processing device is suitable for laser high-power processing;
(3) the annular light spot generated by the spiral phase plate has higher purity and stronger stability, and is not easily influenced by optical effects such as diffraction and the like;
(4) according to the actual working requirement, the number of the spiral phase plates in the system can be automatically adjusted, the topological load number of the spiral phase plates is changed in a mode of superposing the spiral phase plates, the size of the annular focusing light spot is further changed, the size of the annular light spot is continuously adjustable, and the cutting requirements of different plate thicknesses can be met;
(5) the system has good anti-maladjustment characteristic, and the change of the size of a light spot, the light beam offset and the focus offset can not influence the light field of annular energy distribution;
(6) when the laser beam is used for laser additive manufacturing or laser surface treatment, the topological charge number of the light spot is changed, the width of the light spot is adjustable, the uniformity of the light field distribution is not influenced, and the action effect with the consistent uniformity effect can be obtained.
To sum up, utilize the utility model discloses an optical system, laser beam are collimated into the parallel light after through the collimation unit, then obtain annular beam through phase modulation, at last through the focus unit, focus into the annular facula of high energy, can be used for laser cutting, beat a plurality of fields such as mark, cladding, micro-processing. The utility model can generate annular facula through the spiral phase plate, has great significance in laser processing technology, can independently adjust the number of the spiral phase plate, realizes the variable topological load number of the annular focusing facula, and can be flexibly adjusted according to the requirements when processing different materials; the laser thick plate cutting device can effectively solve the negative problems of uneven cutting section of the laser thick plate, ablation and the like in processing caused by overhigh central energy and insufficient edge energy of the Gaussian beam at present, and is adjustable in spot size, flexible in use method, high in energy utilization rate and suitable for high-power laser processing.
Drawings
Fig. 1 is a schematic view of a variable annular spot optical system according to embodiment 1 of the present invention.
Fig. 2 is a schematic structural diagram of the spiral phase plate in the variable annular spot optical system of the present invention.
Fig. 3 is a schematic diagram of a collimated gaussian beam according to embodiment 1 of the present invention.
Fig. 4 is a phase diagram of a spiral phase plate with a topological charge number of 1 in the phase modulation unit according to embodiment 1 of the present invention.
Fig. 5 is a phase diagram of a spiral phase plate with a topological charge number of 2 in the phase modulation unit according to embodiment 1 of the present invention.
Fig. 6 shows the focusing light spot obtained by collimating the focusing unit only when the light beam does not pass through any spiral phase plate in embodiment 1 of the present invention.
Fig. 7 is a cross-sectional light field distribution diagram on the back focal plane of a spiral phase plate with a topological charge number of 1 in embodiment 1 of the present invention.
Fig. 8 is a cross-sectional light field distribution diagram on the focusing surface after passing through two spiral phase plates with topological charge numbers of 1 and 1 respectively in embodiment 1 of the present invention.
Fig. 9 is a cross-sectional light field distribution diagram on the focusing surface after passing through three spiral phase plates with topological charge numbers 1, 1 and 2 respectively in embodiment 1 of the present invention.
Fig. 10 is a schematic view of a variable annular spot optical system according to embodiment 2 of the present invention.
The meaning of each reference numeral in fig. 1, 2, 10 is as follows: the laser scanning device comprises an incident laser 1, a collimation unit 2, a switching rotating shaft 3, a spiral phase plate 4, a focusing unit 5, a focusing surface 6, a scanning galvanometer 7, a motor connected with the scanning galvanometer 7, another scanning galvanometer 9 and a motor connected with the scanning galvanometer 9, wherein the incident laser 1 is incident laser, the scanning galvanometer 7 is a collimating unit, the motor connected with the scanning galvanometer 7 is a spiral phase plate, the focusing unit 5 is a focusing unit, the motor connected with the scanning galvanomet.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Furthermore, the technical features mentioned in the embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
Example 1:
the first embodiment of the present invention provides a schematic diagram of a variable annular light spot optical system as shown in fig. 1, and the whole system is divided into a collimating unit, a phase modulation unit and a focusing unit. The laser beam is collimated into parallel light by the lens group of the collimating unit, then enters from the plane end of the spiral phase plate in the phase modulating unit, is emitted and changed into an annular beam, and the topological charge number of the annular beam is equal to that of the spiral phase plate. And finally, focusing by a lens group in the focusing unit to obtain annular energy-distributed light spots.
Fig. 2 is a schematic structural diagram of a spiral phase plate in the variable annular light spot optical system of the present invention, the spiral phase plate is an optical element in the prior art, and in the prior art, for convenience of processing, the spiral phase plate is made into a step shape, and the thickness of the step increase of the spiral phase plate (e.g., wumingfu, research on measuring the topological charge of the vortex beam, etc.) can be calculated according to the topological charge of the spiral phase plate and the refractive index of the material by directly referring to the prior art; the thickness of the spiral phase plate is generally micrometer magnitude and can be ignored, so the influence of the phase plate on the light intensity can be ignored.
Fig. 3 shows a schematic diagram of the collimated gaussian beam according to the first embodiment of the present invention, wherein the axis of the gaussian beam is aligned with the axis of the collimating lens and the axis of the focusing lens.
As shown in fig. 1, the utility model discloses a fix a plurality of spiral phase place board on a rotation axis, can independently adjust the number that inserts phase place board in the optical path system through the rotation, that is to say, the spiral phase place board in the optical path can be according to the nimble switching of actual demand, for example:
fig. 4 is a phase simulation diagram of a spiral phase plate with a topological charge number of 1 in a phase modulation unit according to a first embodiment of the present invention, and a corresponding phase factor is added after a light beam passes through the phase plate.
Fig. 5 is a phase simulation diagram of a spiral phase plate with a topological charge number of 2 in a phase modulation unit according to a first embodiment of the present invention, and a corresponding phase factor is added after a light beam passes through the phase plate.
As shown in fig. 6, the first embodiment of the present invention is that when the light beam does not pass through any spiral phase plate, the light field distribution of the focusing light spot can be seen as gaussian distribution only by the focusing light spot obtained by the collimating and focusing unit, and the radius of the light spot is about 0.1 mm.
As shown in fig. 7, according to a first embodiment of the present invention, after passing through a spiral phase plate with a topological charge number of 1 (in this case, n is equal to 1; of course, n may be preset to be equal to other integers, including positive and negative integers), the cross-sectional light field distribution diagram of the position of the focusing plane 6 is obtained. Therefore, through the phase modulation of the spiral phase plate, the focusing light spot with low central energy and high edge energy and annular energy distribution is obtained, the topological charge number is 1, the phase change amount is 2 pi, and the radius of the light spot is about 0.2 mm.
Fig. 8 shows a cross-sectional light field distribution diagram of the position of the focusing surface 6 after passing through two spiral phase plates with topological charge numbers 1 and 1, respectively. The topological charge number of the annular light spot can be correspondingly superposed through superposition of the topological charge number of the spiral phase plate, the finally obtained topological charge number of the annular light spot is 2 (equal to 1 plus 1, the topological charge number meets the superposition principle), the phase change amount is 4 pi, and the radius of the light spot is about 0.35 mm.
Fig. 9 shows a cross-sectional light field distribution diagram of the position of the focal plane 6 after passing through three spiral phase plates with topological charge numbers 1, 1 and 2 respectively according to the first embodiment of the present invention. The obtained annular light spot topological charge number is 4 (equal to 1 plus 2, the topological charge number meets the superposition principle), the phase change amount is 8 pi, and the light spot radius is about 0.5 mm. The annular light beam of two the same topology charges can superpose, obtains the annular light beam of twice topology charges, the utility model discloses the topology charges of a plurality of spiral phase place board among the phase modulation unit should follow this law.
Example 2:
the utility model discloses a schematic diagram of variable annular facula system that second kind embodiment provided is shown in fig. 10, and behind laser beam passed through collimation unit and phase modulation unit, two scanning galvanometers of rethread, last through focus objective, its principle is the same with embodiment 1, scans through two galvanometers, can change the focus position, beats the mark.
The light path and the light field energy distribution on the focal plane of the embodiment 2 are consistent with those of the embodiment 1, and the annular light spot generated by the spiral phase plate has the characteristic of high stability and can still maintain annular distribution at a position deviated from the focal point, so that the annular energy output can be well maintained in the process of marking by scanning the galvanometer at a high speed.
Generally, the utility model discloses in optical system of variable annular facula, it is low to obtain light intensity loss, and the facula size is adjustable, and central energy is low, and the annular energy distribution facula that the marginal energy is high can be used to laser cutting, beat a plurality of laser beam machining fields such as mark, cladding. The laser thick plate cutting device effectively solves the negative problems of uneven cutting section, ablation and the like of a laser thick plate caused by overhigh central energy and insufficient edge energy of a Gaussian beam in the prior art, and is adjustable in spot size, flexible in use method, high in energy utilization rate and suitable for high-power laser processing.
For the planar end face and the step end face of the spiral phase plate, when they are in the optical path, the laser incident direction needs to be kept consistent, for example, the laser of the first spiral phase plate can be incident from the step face, and all the subsequent spiral phase plates need to be kept consistent with the placing direction of the first spiral phase plate, so that the laser is incident from the step end face of the corresponding spiral phase plate.
The above-mentioned embodiment is with the utility model discloses the best technical scheme-the optical system of variable annular facula introduces in detail, of course, centers on the utility model discloses utilize this kind of conventional optical element of spiral phase plate to produce this theory of annular focus facula most at the core, the utility model discloses also can realize the optical system of fixed annular facula, this optical system of fixed annular facula is including following collimation unit, phase modulation unit and the focus unit that the light path set up in proper order equally to collimation unit and focus unit can refer to the optical system of variable annular facula completely, only phase modulation unit needs the adjustment, phase modulation unit will not set up the rotation axis this moment, but with the fixed setting in the light path of the spiral phase plate that quantity preset (i.e. make the spiral phase plate that quantity preset they can be located the light path all the time). The helical phase plates are at least one helical phase plate, but may be a plurality of helical phase plates.
Additionally, the utility model discloses collimating unit, the focus unit among the optical system use the battery of lens of combination, reduce the aberration. The topological charge number of each spiral phase plate can be preset and comprises each spiral phase plate positioned on the rotating shaft, taking fig. 1 as an example, 5 spiral phase plates shown in fig. 1 have topological charge numbers l of n, 2n, 4n and 8n respectively, wherein n is equal to 1; for any one spiral phase plate with topological charge number of l, the phase of one circle around the optical axis is changed to 2 pi × l. According to the spiral phase plate, by referring to the prior art, the thickness of the spiral phase plate can be calculated according to the material refractive index and the topological charge number of the spiral phase plate, the height of each step is calculated when the thickness of each step is averaged, corresponding manufacturing and processing are carried out, the spiral phase plate is prepared by self, the higher the processing precision is, the better the processing precision is, and the height of each step is generally in the micrometer order; of course, they may also be purchased. The utility model discloses collimation unit among the optical system can be general conventional collimation focusing lens with the focus cell.
It will be understood by those skilled in the art that the foregoing is merely a preferred embodiment of the present invention, and is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. An optical system of annular light spots is characterized by comprising a collimation unit, a phase modulation unit and a focusing unit which are sequentially arranged along an optical path, wherein,
the collimation unit is used for collimating the input laser to obtain a collimated laser beam;
the phase modulation unit comprises at least one spiral phase plate positioned in an optical path; any one spiral phase plate comprises two end faces, wherein one end face is of a plane structure, and the other end face is an opposite face with a spiral step; for any spiral phase plate, the central axis of the spiral phase plate is overlapped with the beam center of the collimated laser beam, the laser beam can be incident from the plane end face of the corresponding spiral phase plate or can be incident from the step end face of the corresponding spiral phase plate, and a spiral phase factor is added through the spiral phase plate to perform phase modulation, so that the energy distribution of the laser beam is changed into annular distribution; the phase modulation unit can modulate the phase of the collimated laser beam through the action of the spiral phase plate, so that the laser beam with the changed phase is emitted;
the focusing unit is used for focusing the laser beam with the changed phase, so that an annular light spot is obtained.
2. The optical system as claimed in claim 1, wherein a laser is further disposed before the collimating unit, the laser emitted from the laser is used as the input laser of the collimating unit, and the laser emitted from the laser has a gaussian distribution of light intensity.
3. The optical system of claim 1, wherein the spiral phase plate is plural, and for any one spiral phase plate with topological charge number l, the phase of one revolution around the optical axis is changed to 2 π x l.
4. The optical system of claim 1, wherein the collimating unit comprises a cooperating lens group.
5. The optical system of claim 1, wherein the focusing element comprises a cooperating lens group.
6. An optical system of variable annular light spots is characterized by comprising a collimation unit, a phase modulation unit and a focusing unit which are sequentially arranged along an optical path, wherein,
the collimation unit is used for collimating the input laser to obtain a collimated laser beam;
the phase modulation unit comprises a plurality of spiral phase plates positioned on a rotating shaft, and the spiral phase plates can switch the states of being positioned in an optical path and being positioned outside the optical path by rotating around the rotating shaft; any one spiral phase plate comprises two end faces, wherein one end face is of a plane structure, and the other end face is an opposite face with a spiral step; when any one spiral phase plate is rotated to be positioned in the light path, the central axis of the spiral phase plate is overlapped with the beam center of the collimation laser beam, the laser beam can be incident from the plane end face of the corresponding spiral phase plate or can be incident from the step end face of the corresponding spiral phase plate, and a spiral phase factor is added to the laser beam through the spiral phase plate for phase modulation, so that the energy distribution of the laser beam is changed into annular distribution; the phase modulation unit can modulate the phase of the collimated laser beam through the action of the spiral phase plate, so that the laser beam with the changed phase is emitted;
the focusing unit is used for focusing the laser beam with the changed phase so as to obtain an annular light spot;
the variable annular light spot optical system can realize variable annular light spots by switching the states of the spiral phase plates which are positioned in the light path and outside the light path.
7. The optical system as claimed in claim 6, wherein a laser is further disposed before the collimating unit, the laser emitted from the laser is used as the input laser of the collimating unit, and the laser emitted from the laser has a gaussian distribution of light intensity.
8. The optical system of claim 6, wherein the spiral phase plate is plural, and for any one spiral phase plate with topological charge number l, the phase of one revolution around the optical axis is changed to 2 π x l.
9. The optical system of claim 6, wherein the collimating unit comprises a cooperating lens group.
10. The optical system of claim 6, wherein the focusing unit comprises a cooperating lens group.
CN202020091614.6U 2020-01-16 2020-01-16 Optical system with annular light spots Active CN211956009U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020091614.6U CN211956009U (en) 2020-01-16 2020-01-16 Optical system with annular light spots

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020091614.6U CN211956009U (en) 2020-01-16 2020-01-16 Optical system with annular light spots

Publications (1)

Publication Number Publication Date
CN211956009U true CN211956009U (en) 2020-11-17

Family

ID=73174683

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020091614.6U Active CN211956009U (en) 2020-01-16 2020-01-16 Optical system with annular light spots

Country Status (1)

Country Link
CN (1) CN211956009U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112505914A (en) * 2020-12-10 2021-03-16 武汉先河激光技术有限公司 Vortex light beam generation system and method and phase modulation combination device
CN112540457A (en) * 2020-12-10 2021-03-23 武汉先河激光技术有限公司 Vortex light beam generation device, system and method with adjustable topological number

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112505914A (en) * 2020-12-10 2021-03-16 武汉先河激光技术有限公司 Vortex light beam generation system and method and phase modulation combination device
CN112540457A (en) * 2020-12-10 2021-03-23 武汉先河激光技术有限公司 Vortex light beam generation device, system and method with adjustable topological number
CN112540457B (en) * 2020-12-10 2021-10-15 武汉先河激光技术有限公司 Vortex light beam generation device, system and method with adjustable topological number

Similar Documents

Publication Publication Date Title
CN111338089A (en) Optical system with annular light spots
CN203817621U (en) Laser beam splitting and galvanometer scanning processing device
CN211956009U (en) Optical system with annular light spots
CN112540457B (en) Vortex light beam generation device, system and method with adjustable topological number
CN110125536B (en) Laser processing device and method for removing thin film material
CN103706946B (en) A kind of laser beam splitter vibration mirror scanning processing unit (plant)
CN111505831B (en) Focal spot focal depth variable Bessel beam laser processing system and method
US10444521B2 (en) Device for machining material by means of laser radiation
CN103658975A (en) Laser beam splitting and processing device
CN102380709B (en) Flattened Gaussian beam picopulse laser processing system
CN111007587A (en) Full-medium broadband polarization and phase control super-surface and far-field super-resolution focusing device
CN203712073U (en) Laser beam splitting device
CN102841451A (en) Device for generating vector light beam through annular combination half wave plate
CN103033945A (en) Polarization convertor, vector light beam generating system and vector light beam generating method
CN201518072U (en) Multi-focus regulating and controlling system
CN100547440C (en) A kind of three-dimensional ultra-discrimination diffraction optical device and method for designing thereof that is used for the two-photon microfabrication
CN216462460U (en) Multi-light path structure for additive manufacturing equipment
CN213934431U (en) Vortex light beam generation device and system with adjustable topological number
CN217122085U (en) Laser welding system for generating multi-focus adjustable ring light spots
CN112612142A (en) Optical system for generating quasi-flat-top circular light spots
CN104459999A (en) Illuminating system of imaging flow cytometry
CN109375368B (en) Three-dimensional multi-focal-spot array generation method based on space dipole array
CN115113409A (en) Linear flat-top light spot generation system, method and equipment based on Dammann grating
CN112975171B (en) Ultrafast laser micropore rotary-cut processingequipment
CN1186674C (en) Position phase type ultra-high-difinition long focal iris

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant