CN213475752U

CN213475752U - Burner for producing titanium-doped quartz glass ingot

Info

Publication number: CN213475752U
Application number: CN202022608858.XU
Authority: CN
Inventors: 张寒; 李得军; 刘志龙; 胡春亚
Original assignee: HUBEI FEILIHUA QUARTZ GLASS CO Ltd
Current assignee: HUBEI FEILIHUA QUARTZ GLASS CO Ltd
Priority date: 2020-11-12
Filing date: 2020-11-12
Publication date: 2021-06-18
Anticipated expiration: 2030-11-12

Abstract

The utility model relates to a burner for producing titanium-doped quartz glass ingots, which belongs to the technical field of quartz glass ingot production instruments. The combustor comprises a discharging pipe, a material storage and an oxygen storage bin, wherein the oxygen storage bin is provided with the material storage in parallel, the material storage is internally provided with the discharging pipe, the periphery of the oxygen storage bin is provided with a lamp housing, the lamp housing is hermetically connected with the oxygen storage bin, the bottom of the oxygen storage bin is provided with a partition plate, lamp tubes are uniformly distributed on the partition plate and communicated with the oxygen storage bin, one end of the material storage and the discharging pipe penetrates through the oxygen storage bin to extend to the lower part of the oxygen storage bin, and the lower end of the material storage and the lower end of the discharging pipe extending to the lower part of the oxygen storage bin are flush with the lower ports. The burner ensures that the moisture is not easy to contact with the titanium source compound, and can accelerate the tail end flow rate of the material, thereby being not easy to accumulate the material to cause blockage; the stable production of the titanium element-doped synthetic quartz glass can be realized; the problem of current combustor easily lead to pipeline and the long-pending material of core and block up is solved.

Description

Burner for producing titanium-doped quartz glass ingot

Technical Field

The utility model relates to a burner for producing titanium-doped quartz glass ingots, which belongs to the technical field of quartz glass ingot production instruments.

Background

The quartz glass burner is a key device for producing synthetic quartz glass by Chemical Vapor Deposition (CVD). The chemical vapor deposition method is widely used for purifying substances, developing new crystals and depositing various single crystal, polycrystal or glass state inorganic film materials which can be oxides, sulfides, nitrides and carbides, and also can be binary or multi-element compounds in III-V, II-IV and IV-VI groups, and the physical functions of the materials can be accurately controlled by a vapor doping deposition process, and the chemical vapor deposition method becomes a new field of inorganic synthetic chemistry. In the process of preparing the titanium-doped quartz glass ingot, a silicon-containing liquid chemical raw material is gasified into gas by an evaporation system, the gas and oxyhydrogen combustion gas enter a burner, and then the gas and the oxyhydrogen combustion gas are decomposed into silicon dioxide particles in oxyhydrogen flame and deposited on a carrier target surface rotating around the longitudinal axis of the carrier target surface to form the fused quartz glass ingot. The synthetic quartz glass is doped with related elements, so that the properties of the synthetic quartz glass can be improved, for example, titanium element is doped, a quartz glass product with an ultralow expansion coefficient or ultraviolet light filtering performance can be obtained, and the synthetic quartz glass can be applied to the specific optical field. The titanium-doped synthetic quartz glass is produced by using octamethylcyclotetrasiloxane as a silicon source and titanium isopropoxide as a titanium source.

Generally, quartz glass is directly synthesized using octamethylcyclotetrasiloxane and titanium isopropoxide as raw materials, which must be separately gasified and mixed before being fed into a burner, but octamethylcyclotetrasiloxane obtained by purchase generally contains 40 to 50ppm of moisture, which is gasified with octamethylcyclotetrasiloxane by an evaporation device, and titanium isopropoxide is very easily decomposed in water to generate solid titanium dioxide, so that the mixing of the two raw materials easily causes clogging of a core material of a burner and a pipe in a long-term production process, and thus, it is necessary to improve the same.

Disclosure of Invention

The utility model aims at: aiming at the defects of the prior art, the burner for producing the titanium-doped quartz glass ingot can effectively avoid blockage caused by material accumulation of a pipeline and a material core due to the decomposition of a titanium source caused by moisture in the silicon source, can realize the stable production of the titanium-doped synthetic quartz glass, and solves the problem that the existing burner is easy to cause the blockage of the pipeline and the material core due to the material accumulation.

The technical scheme of the utility model is that:

a burner for producing titanium-doped quartz glass ingots is composed of a blanking pipe, a material storage and an oxygen storage bin, and is characterized in that: the oxygen storage bin is provided with a material storage tube in parallel, a discharging tube is arranged in the material storage tube, a lamp shell is arranged on the periphery of the oxygen storage bin, the lamp shell is hermetically connected with the oxygen storage bin, a partition plate is arranged at the bottom of the oxygen storage bin, lamp tubes are uniformly distributed on the partition plate and communicated with the oxygen storage bin, one end of the material storage tube and one end of the discharging tube penetrate through the oxygen storage bin and extend to the lower part of the oxygen storage bin, and the lower ends of the material storage tube and the discharging tube extending to the lower part of the oxygen storage bin are flush with the lower ports.

The oxygen storage bin is provided with a combustion assisting gas pipe which is communicated with the oxygen storage bin.

The material is kept and is provided with the material oxygen storage storehouse of fish maw form between the unloading pipe in a sealed way, is provided with material oxygen protection pipe on the material oxygen storage storehouse, material oxygen protection pipe and material oxygen protection storehouse intercommunication.

The lamp body upper end be provided with the hydrogen storage storehouse of fish maw form, be provided with the gas pipe on the hydrogen storage storehouse, gas pipe and hydrogen storage storehouse intercommunication.

The beneficial effects of the utility model reside in that:

according to the burner for producing the titanium-doped quartz glass ingot, the silicon source compound and the titanium source compound are respectively fed through different feeding pipes, so that moisture in the silicon source compound is not easy to contact with the titanium source compound before the titanium source compound reacts, and meanwhile, the tail end flow rate of the material can be accelerated through the diameter change of the feeding pipe during feeding, so that the material accumulation is not easy to cause blockage; materials are isolated from fuel gas and combustion-supporting gas through material oxygen-retaining gas, so that a titanium source compound is not easy to contact with water vapor generated by combustion before reaction to generate titanium dioxide to block the end port of a blanking pipe, and stable production of the titanium element-doped synthetic quartz glass is realized; solves the problem that the existing burner is easy to cause the blockage of the pipeline and the material core due to the material accumulation, and is particularly suitable for generating the titanium-doped quartz glass ingot.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is a schematic bottom view of fig. 1.

In the figure: 1. the gas burner comprises a discharging pipe, 2 a material storage, 3 an oxygen storage bin, 4 a hydrogen storage bin, 5 a material oxygen storage bin, 6 a material oxygen storage tube, 7 a combustion assisting gas tube, 8 a gas tube, 9 a partition board, 10, a lamp tube, 11 and a lamp shell.

Detailed Description

The burner for producing the titanium-doped quartz glass ingot is composed of a blanking pipe 1, a material storage pipe 2 and an oxygen storage bin 3, wherein the material storage pipe 2 is arranged on the oxygen storage bin 3 in parallel, the blanking pipe 1 is arranged in the material storage pipe 2, and the blanking pipe 1 is a reducing pipe, so that when materials and high-purity nitrogen pass through the reducing part of the blanking pipe 1 in the blanking process, the flow velocity of the materials and the high-purity nitrogen at the tail end of the blanking pipe 1 is increased due to the reducing of the blanking pipe 1, the materials are not easy to accumulate in the blanking pipe 1 under the same pressure to cause the blockage of the blanking pipe 1, and the problem that the existing burner is easy to cause the blockage due to the accumulation of the pipelines and material cores is solved; the blanking pipes 1 are arranged in parallel, so that a silicon source compound and a titanium source compound are respectively blanked through the symmetrically arranged blanking pipes 1, the silicon source compound and the titanium source compound are prevented from contacting in the blanking process, moisture in the silicon source compound is prevented from contacting with the titanium source compound, the titanium source compound is prevented from reacting to generate solid titanium dioxide, and therefore the blanking pipes 1 are prevented from being blocked due to material accumulation in the blanking pipes 1, and the problem that the existing burner is easy to cause blockage due to material accumulation of a pipeline and a material core is further solved; the material storage 2 has the function of wrapping the material sprayed out from the port of the blanking pipe 1 through the material oxygen-retaining gas, so that the material at the port of the blanking pipe 1 is not easy to contact with the water vapor generated after combustion, the material is not easy to react with the water vapor generated by combustion at the port of the blanking pipe 1 before reaction, the material is not easy to accumulate at the port of the blanking pipe 1, and the problem that the existing burner is easy to cause the accumulation of the material in a pipeline and a material core and block the material can be further solved; the periphery of the oxygen storage bin 3 is provided with a lamp shell 11, the lamp shell 11 is hermetically connected with the oxygen storage bin 3, the lamp shell 11 is used for enabling gas to be sprayed out along the lamp shell 11, the gas is sprayed out along the lamp shell 11 and is combusted to form a circular fire curtain, the middle of the lamp shell 11 is isolated from the outside through the fire curtain, so that external impurity gas is prevented from entering the middle of the lamp shell 11 and polluting a silicon source compound and a titanium source compound before reaction and titanium dioxide and silicon dioxide generated after reaction, and the quality of the generated titanium-doped quartz glass ingot is further ensured; the bottom of the oxygen storage bin 3 is provided with a partition plate 9, lamp tubes 10 are uniformly distributed on the partition plate 9, the lamp tubes 10 are communicated with the oxygen storage bin 3, and the lamp tubes 10 are used for uniformly spraying combustion-supporting gas so that the combustion process is more uniform, thereby ensuring the temperature at each position to be consistent and ensuring the reaction to be more stable; one end of the material storage tube 2 and one end of the discharging tube 1 penetrate through the oxygen storage bin 3 and extend to the lower part of the oxygen storage bin 3, and the lower ends of the material storage tube 2 and the discharging tube 1 which extend to the lower part of the oxygen storage bin 3 are flush with the lower ports of the lamp tube 10 and the lamp shell 11.

Be provided with on the oxygen warehouse 3 and help gas pipe 7, help gas pipe 7 and oxygen warehouse 3 intercommunication, oxygen warehouse 3 is through helping gas pipe 7 and the gas source intercommunication of combustion-supporting, and the gas source of combustion-supporting lets in the gas of combustion-supporting to oxygen warehouse 3 through helping gas pipe 7, and the gas of combustion-supporting is high-purity oxygen.

A fish-belly-shaped material oxygen-preserving storage bin 5 is hermetically arranged between the material storage tube 2 and the discharging tube 1, a material oxygen-preserving pipe 6 is arranged on the material oxygen-preserving storage bin 5, the material oxygen-preserving pipe 6 is communicated with the material oxygen-preserving storage bin 5, the material oxygen-preserving storage bin 5 is communicated with a material oxygen-preserving source through the material oxygen-preserving pipe 6, the material oxygen-preserving source introduces material oxygen-preserving gas into the material oxygen-preserving storage bin 5 through the material oxygen-preserving pipe 6, and then introduces material oxygen-preserving gas into the material storage tube 2, and the material oxygen-preserving gas is high-purity oxygen containing no water.

A fish-belly-shaped hydrogen storage bin 4 is arranged at the upper end of the lamp shell 11, a gas pipe 8 is arranged on the hydrogen storage bin 4, the gas pipe 8 is communicated with the hydrogen storage bin 4, the hydrogen storage bin 4 is communicated with a gas source through the gas pipe 8, the gas source introduces gas into the hydrogen storage bin 4 through the gas pipe 8, and the gas is high-purity hydrogen; the material oxygen-protecting storage bin 5, the oxygen storage bin 3 and the hydrogen storage bin 4 have the functions of buffering gas, so that the stability of pressure during gas injection is ensured, the fluctuation of the gas during gas combustion is further reduced, the influence on materials in the reaction process is further reduced, and the stability in the production process is increased; the oxygen storage bin 5, the oxygen storage bin 3 and the hydrogen storage bin 4 are respectively in a fish-belly shape, so that the volume of gas buffering is increased, and gas pressure fluctuation is further reduced.

When the burner for producing the titanium-doped quartz glass ingot works, high-purity nitrogen with moisture removed is used as a carrying gas, a gasified silicon source compound and a gasified titanium source compound are carried to enter the burner, oxygen is used as a material holding gas, and silicon dioxide and titanium dioxide generated by chemical vapor deposition reaction in flame of oxyhydrogen combustion gas are rapidly deposited on a target surface to prepare the titanium-doped quartz glass ingot.

The method specifically comprises the following steps: hydrogen, oxygen and material oxygen-retaining gas are respectively and sequentially introduced into the hydrogen storage bin 4, the oxygen storage bin 3 and the material oxygen-retaining storage bin 5 through the gas pipe 8, the combustion-supporting gas pipe 7 and the material oxygen-retaining gas pipe 6, so that the hydrogen, the oxygen and the material oxygen-retaining gas are sprayed out sequentially through the lamp shell 11, the lamp tube 10 and the material storage bin 2, after the pressure of the sprayed gas is stable, mixed gas of the hydrogen and the oxygen is ignited, a flame curtain is formed at the port of the lamp shell 11 by the hydrogen and the oxygen, impurities or impurity gases are prevented from entering the lamp shell 11, and the port of the discharging pipe 1 is isolated from the outside through the flame curtain; after ignition, high-purity nitrogen with water removed is used as a carrying gas, a carrying gaseous silicon source compound enters one blanking pipe 1, and a carrying gaseous titanium source compound enters the other blanking pipe 1, so that the silicon source compound and the titanium source compound are conveyed downwards through different blanking pipes 1, the silicon source compound and the titanium source compound are ensured not to be contacted in the conveying process, and the blanking pipes 1 are further not blocked; the method comprises the following steps that a silicon source compound and a titanium source compound are conveyed to the tail end of the bottom of a blanking pipe 1 through different blanking pipes 1 and are sprayed out of the tail end of the bottom of the blanking pipe 1, in the spraying process of the silicon source compound and the titanium source compound, oxygen is respectively coated on the silicon source compound and the titanium source compound by a material protection gas sprayed out of a material storage 2, the silicon source compound and the titanium source compound are coated, and the silicon source compound and the titanium source compound are further isolated at the port of the blanking pipe 1, so that the silicon source compound and the titanium source compound cannot be contacted at the port of the blanking pipe 1, and further, solid can not be generated through reaction and deposited at the port of the blanking pipe; after the silicon source compound and the titanium source compound are heated by flame, silicon dioxide and titanium dioxide generated by chemical vapor deposition reaction are rapidly deposited on a target surface to prepare the titanium-doped quartz glass ingot.

According to the burner for producing the titanium-doped quartz glass ingot, the silicon source compound and the titanium source compound are respectively fed through different feeding pipes 1, so that moisture in the silicon source compound is not easy to contact with the titanium source compound before the titanium source compound reacts, and meanwhile, the tail end flow rate of the material can be accelerated through the diameter change of the feeding pipe 1 during feeding, so that the blockage caused by material accumulation is not easy to occur; materials are isolated from fuel gas and combustion-supporting gas through material oxygen-retaining gas, so that a titanium source compound is not easy to contact with water vapor generated by combustion before reaction to generate titanium dioxide to block the end port of a blanking pipe, and stable production of the titanium element-doped synthetic quartz glass is realized; solves the problem that the existing burner is easy to cause the blockage of the pipeline and the material core due to the material accumulation, and is particularly suitable for generating the titanium-doped quartz glass ingot.

Claims

1. A burner for producing titanium-doped quartz glass ingots is composed of a blanking pipe (1), a material storage pipe (2) and an oxygen storage bin (3), and is characterized in that: the oxygen storage bin (3) is provided with material storage tubes (2) in parallel, the material storage tubes (2) are internally provided with discharge tubes (1), the periphery of the oxygen storage bin (3) is provided with a lamp shell (11), the lamp shell (11) is hermetically connected with the oxygen storage bin (3), the bottom of the oxygen storage bin (3) is provided with a partition plate (9), lamp tubes (10) are uniformly distributed on the partition plate (9), the lamp tubes (10) are communicated with the oxygen storage bin (3), one ends of the material storage tubes (2) and the discharge tubes (1) penetrate through the oxygen storage bin (3) and extend to the lower part of the oxygen storage bin (3), and the lower ends of the material storage tubes (2) and the discharge tubes (1) extending to the lower part of the oxygen storage bin (3) are flush with the lower end openings of the lamp tubes (10).

2. A burner for producing a titanium-doped quartz glass ingot in accordance with claim 1, wherein: the oxygen storage bin (3) is provided with a combustion assisting gas pipe (7), and the combustion assisting gas pipe (7) is communicated with the oxygen storage bin (3).

3. A burner for producing a titanium-doped quartz glass ingot in accordance with claim 1, wherein: the material is kept (2) and is provided with material oxygen-conserving storage bin (5) of fish maw form between unloading pipe (1) in the sealed way, be provided with material oxygen-conserving pipe (6) on material oxygen-conserving storage bin (5), material oxygen-conserving pipe (6) and material oxygen-conserving storage bin (5) intercommunication.

4. A burner for producing a titanium-doped quartz glass ingot in accordance with claim 1, wherein: the lamp shell (11) upper end be provided with the hydrogen storage storehouse (4) of fish maw form, be provided with on hydrogen storage storehouse (4) gas pipe (8), gas pipe (8) and hydrogen storage storehouse (4) intercommunication.