CN213149471U - Nano-imprinting mold turnover machine tool fixture - Google Patents

Abstract

The utility model discloses a nanometer impression mold turnover machine tool fixture, which comprises a hard template, an annular retainer ring which is arranged on the hard template and can float up and down, and a material taking disc which is arranged above the hard template and is used for taking out a soft template; the outer side of the annular retainer ring is provided with a circle of ion wind diffusion devices moving back and forth along the radius direction of the annular retainer ring, ion wind outlet holes are uniformly formed in the inner side wall of each ion wind diffusion device, and a main air inlet channel communicated with the ion wind outlet holes and an air inlet communicated with the main air inlet channel are formed in each ion wind diffusion device; and the driving device is also arranged for driving the ion wind diffusion device to move. The utility model discloses a plasma wind eliminates the static on mantle surface, reduces the granule and the adhesion of surperficial nanometer size in mantle surface to guarantee the cleanliness of mantle, satisfy the requirement of high accuracy processing, improve the quality of product.

Description

Nano-imprinting mold turnover machine tool fixture

Technical Field

The utility model belongs to the technical field of the LED substrate is made and specifically relates to a mould machine frock tool is turned over in nanometer impression is related to.

Background

The nanoimprint technology was first proposed in 20 th 1995 by the university of princeton, chinese scientist, and the most advanced degree of the technology has reached the level of 5nm or less. Nanoimprint techniques mainly include thermal imprint (HEL), ultraviolet imprint (UV-NIL) (including flash imprint (S-FIL)), micro-contact printing.

The existing ultraviolet imprinting is mainly applied to the field of LED substrate manufacturing, the technological process comprises glue mixing, mold turning and imprinting, wherein the mold turning means that mixed AB glue is uniformly dripped onto the surface of a hard film, a soft template is formed through the processes of bubble removal, heating, curing and the like, the used machine is a mold turning machine, and the quality of the mold turning directly influences the quality of a wafer subjected to nanoimprint, so that the ultraviolet imprinting is very important. The existing mold turning machine tool jig can meet micron-scale imprinting, but when a nano-scale soft template is manufactured, because electrostatic force exists in the process of separating the soft template from a hard template, the nano-scale soft template can adsorb tiny particles and nano-scale patterns and adhesion phenomenon exists when the nano-scale soft template is taken. And when the existing material taking disc structure is used for taking the soft template, the back of the effective graph of the soft template can be contacted, and certain pressure is applied, so that the effective graph of the soft template with the nanometer size is damaged, and the quality of a nanoimprint product is directly influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a mould machine frock tool is turned over in nanometer impression solves current mould machine frock tool that turns over and easily receives electrostatic force influence at the in-process of making soft template, causes the problem that the mantle pollutes.

The utility model provides a technical scheme that its technical problem adopted is: a nanometer impression mold turnover machine tool fixture comprises a hard template, an annular retainer ring which is arranged on the hard template and can float up and down, and a material taking disc which is arranged above the hard template and is used for taking out a soft template; the outer side of the annular retainer ring is provided with a circle of ion wind diffusion devices moving back and forth along the radius direction of the annular retainer ring, ion wind outlet holes are uniformly formed in the inner side wall of each ion wind diffusion device, and a main air inlet channel communicated with the ion wind outlet holes and an air inlet communicated with the main air inlet channel are formed in each ion wind diffusion device; and the driving device is also arranged for driving the ion wind diffusion device to move.

Preferably, the ion wind diffusion device is of a plurality of arc structures matched with the annular check ring, and an adjusting inclined plane is arranged on the upper end face of the ion wind diffusion device, so that when the annular check ring is lifted, the ion wind diffusion device is clamped below the annular check ring and keeps closed; and each ion wind diffusion device is provided with an independent driving device.

Preferably, the driving device is a driving cylinder, and the movable end of the driving cylinder is fixedly connected with the ionic wind diffusion device.

In order to reduce the damage to the effective pattern of the soft template when the soft template is taken, the material taking disc and the bottom surface matched with the soft template are provided with sealing rings, a first vacuum pipeline is connected and arranged on the material taking disc in the sealing rings, a group of vacuum suckers are arranged on the material taking disc outside the sealing rings, and a second vacuum pipeline communicated with the vacuum suckers is further arranged.

The utility model has the advantages that: the utility model discloses an increase a set of ion wind diffusion equipment that blows to soft template surface on hard template, make at the in-process of getting soft template, through the static that plasma wind dispelled the soft membrane surface, reduce the granule and the adhesion of surperficial nanometer size figure of soft template to guarantee the cleanliness and the validity of soft template, satisfy the requirement of high accuracy processing. The ion wind diffusion device adopts an arc-shaped structure, controls the front and back movement through the driving device, and is simple in structure and convenient to control. The material taking disc is of a matching structure of the sealing ring, the first vacuum pipeline and the vacuum chuck, when the soft template is taken by the material taking disc, the vacuum chuck can be prevented from acting on the back face of the effective graph of the soft template, and the quality of the effective graph of the soft template is guaranteed. The soft template is lifted by the contact of the vacuum sucker outside the sealing ring and the soft template, meanwhile, the negative pressure generated by the first vacuum tube inside the sealing ring gives a lifting force to the soft template, and the part of the soft template is kept from being contacted with other structures, so that effective patterns on the soft template are well protected, and the quality of the soft template is ensured.

The present invention will be described in more detail with reference to the accompanying drawings and examples.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a schematic view of the three-dimensional structure of the medium hard template and the matching structure thereof.

Fig. 3 is a schematic view of the three-dimensional structure of the material taking tray of the present invention.

Fig. 4 is a schematic perspective view of the ion wind diffusing device of the present invention.

Detailed Description

In the embodiment, as shown in fig. 1 to 4, a tooling fixture for a nanoimprint mold turnover machine comprises a hard template 1, an annular retainer ring 2 which is arranged on the hard template 1 and can float up and down, and a material taking tray 3 which is arranged above the hard template 1 and is used for taking out a soft template. Specifically, a set of support columns 201 is arranged below the annular retainer ring 2, and the support columns 201 move up and down under the driving of a driving structure such as an air cylinder, a motor and the like, so that the support columns are attached to and separated from the hard template 1. The outside of annular retaining ring 2 is provided with round along annular retaining ring 2 direction of radius back and forth movement's ionic wind diffusion equipment 4, evenly be provided with ionic wind exhaust vent 401 on the inside wall of ionic wind diffusion equipment 4, blow the ionic wind through ionic wind exhaust vent 401 to the soft template in annular retaining ring 2 and get rid of static. A main air inlet duct (not shown) communicating with the ion wind outlet hole 401 and an air inlet 403 communicating with the main air inlet duct are provided in the ion wind diffusing device 4. Ion wind diffusion equipment 4 is a plurality of arc structures with annular retaining ring 2 looks adaptation, adopts the mode of a plurality of arc structures, conveniently removes promptly, simultaneously, can be fine avoid support column 201. The upper end face of the ion wind diffusion device 4 is provided with an adjusting inclined plane 404, so that when the annular retainer ring 2 is lifted, the ion wind diffusion device 4 can be clamped below the annular retainer ring 2 and kept closed, the cleanness of the environment where the soft template is located is improved, and foreign objects are prevented from entering. Each ion wind diffusing device 4 is provided with an independent driving device 5. Preferably, the driving device 5 is a driving cylinder, and the movable end of the driving cylinder is fixedly connected with the ionic wind diffusing device 4.

The bottom surface of the taking tray 3 matched with the soft template is provided with a sealing ring 301, a first vacuum pipeline 302 is connected and arranged on the taking tray 3 in the sealing ring 301, a group of vacuum suckers 304 are arranged on the taking tray 3 outside the sealing ring 301, and a second vacuum pipeline 305 communicated with the vacuum suckers 304 is further arranged. When the soft template is sucked, the vacuum sucker 304 on the outer side of the sealing ring 301 is in contact with the soft template, the inner side of the sealing ring 301 gives the soft template an upward suction force through the first vacuum pipeline 302, but the suction force is not in contact with the soft template, so that the effective graph of the soft template is not damaged when the soft template is lifted, and the quality of a product is improved.

When the soft template is manufactured, the annular retainer ring 2 sinks and presses on the hard template 1 to form a closed cavity. When the soft template is taken after the soft template is manufactured, the annular retainer ring 2 moves upwards to be separated from the hard template 1, then the driving device 5 drives the ion wind diffusion device 4 to move inwards, so that the ion wind diffusion device 4 is clamped between the hard template 1 and the annular retainer ring 2, and the ion wind is blown onto the soft template through the ion wind diffusion device 4 to remove static electricity.

The invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited by the above-described manner. Various insubstantial improvements are made by adopting the method conception and the technical proposal of the utility model; or without improvement, the above conception and technical solution of the present invention can be directly applied to other occasions, all within the protection scope of the present invention.

Claims (4)

1. A nano-imprinting mold turnover machine tool fixture comprises a hard template (1), an annular retainer ring (2) which is arranged on the hard template (1) and can float up and down, and a material taking disc (3) which is arranged above the hard template (1) and used for taking out a soft template; the method is characterized in that: a circle of ion wind diffusion devices (4) moving back and forth along the radius direction of the annular retainer ring (2) are arranged on the outer side of the annular retainer ring (2), ion wind outlet holes (401) are uniformly formed in the inner side wall of each ion wind diffusion device (4), and a main air inlet channel communicated with the ion wind outlet holes (401) and an air inlet (403) communicated with the main air inlet channel are formed in each ion wind diffusion device (4); and a driving device (5) for driving the ion wind diffusion device (4) to move is also arranged.

2. The nanoimprint mold turnover machine tooling fixture of claim 1, characterized in that: the ion wind diffusion device (4) is of a plurality of arc-shaped structures matched with the annular retainer ring (2), and an adjusting inclined plane (404) is arranged on the upper end face of the ion wind diffusion device (4), so that the ion wind diffusion device (4) is clamped below the annular retainer ring (2) and kept closed when the annular retainer ring (2) is lifted; each ion wind diffusion device (4) is provided with an independent driving device (5).

3. The nanoimprint mold turnover machine tooling fixture of claim 1, characterized in that: the driving device (5) is a driving cylinder, and the movable end of the driving cylinder is fixedly connected with the ionic wind diffusion device (4).

4. The nanoimprint mold turnover machine tooling fixture of claim 1, characterized in that: the material taking disc (3) and the bottom surface matched with the soft template are provided with a sealing ring (301), the material taking disc (3) in the sealing ring (301) is connected with a first vacuum pipeline (302), the material taking disc (3) outside the sealing ring (301) is provided with a group of vacuum suckers (304), and a second vacuum pipeline (305) communicated with the vacuum suckers (304) is further arranged.

Images