CN217333106U - Vacuum chuck and nanoimprint equipment - Google Patents
Vacuum chuck and nanoimprint equipment Download PDFInfo
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- CN217333106U CN217333106U CN202220564105.XU CN202220564105U CN217333106U CN 217333106 U CN217333106 U CN 217333106U CN 202220564105 U CN202220564105 U CN 202220564105U CN 217333106 U CN217333106 U CN 217333106U
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- vacuum
- vacuum chuck
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- impression
- groove
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a vacuum chuck and nanoimprint equipment, nanoimprint equipment includes rolling mechanism, vacuum chuck includes: the sucker body and the adsorption holes are arranged, the adsorption hole array is arranged on the sucker body, one or more columns of adsorption holes in the direction vertical to the rolling advancing direction of the rolling mechanism are communicated to form an adsorption unit, and the adsorption hole array forms a plurality of adsorption units. The utility model discloses an useful part lies in, through setting up the absorption hole that the array was arranged, progressively inhales the vacuum at the impression in-process, makes the mantle at impression in-process disappearance fold and bubble, makes the mantle inseparabler with the base plate cooperation simultaneously, and the impression effect is better, accomplishes the back at processing, progressively breaks the vacuum, makes things convenient for taking of mantle.
Description
Technical Field
The utility model relates to a nanoimprint lithography technical field, specificly relate to a vacuum chuck and nanoimprint equipment.
Background
The substrate is required to be adsorbed and fixed by a sucker in the nano-imprinting process, but in the imprinting process, relative movement can occur between the soft film and the substrate, or the soft film has bubbles in the processing process, or wrinkles occur, so that the imprinting effect is poor, the situation that a certain part is not imprinted successfully occurs, and the next processing is influenced.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model discloses a vacuum chuck and nanometer impression equipment through setting up the absorption hole that the array was arranged, progressively inhales the vacuum along with the plastic film laminating sucking disc at the in-process of impression, fixes the plastic film on the sucking disc, progressively breaks the vacuum after processing is accomplished, makes things convenient for the plastic film to get and puts.
Specifically, the utility model discloses a vacuum chuck for nanoimprint equipment, nanoimprint equipment includes rolling mechanism, vacuum chuck includes: the rolling mechanism comprises a sucker body and adsorption holes, wherein the adsorption hole array is arranged on the sucker body, one or more columns of adsorption holes in the direction vertical to the rolling advancing direction of the rolling mechanism are communicated to form an adsorption unit, and the adsorption hole array forms a plurality of adsorption units.
The utility model discloses an useful part lies in, through setting up the absorption hole that the array was arranged, progressively inhales the vacuum at the impression in-process, makes the mantle at impression in-process disappearance fold and bubble, makes the mantle inseparabler with the base plate cooperation simultaneously, and the impression effect is better, accomplishes the back at processing, progressively breaks the vacuum, makes things convenient for taking of mantle.
Further, the adsorption unit is connected with a negative pressure control device, and the negative pressure control device can independently control the adsorption unit.
The technical scheme has the beneficial effects that the negative pressure control device is arranged to independently control each adsorption unit in the processing process, so that each adsorption unit can independently act.
Further, the negative pressure control device is connected with the vacuum generating device.
The vacuum generating device is used for forming a vacuum environment in the adsorption unit, and adsorbing the soft film in the processing process to enable the soft film to be flat.
Furthermore, the upper surface of the sucker body is also provided with a positioning groove, a plurality of annular vacuum grooves are arranged in the positioning groove, and air holes are arranged in the vacuum grooves.
The technical scheme has the beneficial effects that the product is positioned by arranging the positioning groove, and the vacuum groove and the air hole are arranged in the positioning groove and used for vacuumizing, so that the product is further fixed.
Furthermore, a through groove which penetrates through the vacuum groove is arranged in the positioning groove.
The vacuum groove has the beneficial effects that the through groove is communicated with the vacuum groove, so that air in the vacuum groove can be discharged through the air holes when air is sucked, and the condition that the adsorbed product is not flat due to blockage of the air holes in the vacuum groove is avoided.
Further, the vacuum groove is provided with a chamfer or radius.
Adopt above-mentioned technical scheme's beneficial part to lie in, at the in-process of adsorbing the product, the product can be inhaled to inside the production of vacuum tank, and the product is adsorbed regional can produce certain indent deformation, probably produces the strain to the product surface, inhales the mode that the groove set up chamfer or radius through the vacuum, this phenomenon of avoiding that can be better.
Further, the chamfer or radius is no more than 0.5 mm.
Further, the nanoimprint equipment comprises a rolling mechanism and the vacuum chuck in any one of the technical schemes.
The nano-imprinting equipment adopting the technical scheme has the beneficial effects that the nano-imprinting equipment comprises the vacuum chuck, the vacuum chuck can be used for adsorbing the soft membrane in the processing process, and the soft membrane part has good wrinkle and bubble imprinting effects.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the embodiments or the description of the prior art will be briefly described below.
Fig. 1 is a schematic view of the structure of the vacuum chuck of the present invention.
Wherein the reference numbers referred to in the figures are as follows:
a suction cup body 1; an exhaust hole 11; an adsorption hole 2; a positioning groove 12; a vacuum tank 13; through the slot 14.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in the figure, the utility model discloses a vacuum chuck for nanometer impression equipment, nanometer impression equipment includes rolling mechanism, vacuum chuck includes: the automatic rolling device comprises a sucker body 1 and adsorption holes 2, wherein the adsorption holes 2 are arranged in an array mode on the sucker body 1, one or more columns of adsorption holes 2 in the direction vertical to the rolling advancing direction of the rolling mechanism are communicated to form an adsorption unit, and the adsorption holes 2 are arranged in an array mode to form a plurality of adsorption units.
The utility model discloses an useful part lies in, through setting up the absorption hole 2 that the array was arranged, progressively inhales the vacuum at the impression in-process, makes the mantle at impression in-process disappearance fold and bubble, makes the mantle inseparabler with the base plate cooperation simultaneously, and the impression effect is better, accomplishes the back at processing, progressively breaks the vacuum, makes things convenient for taking of mantle.
In some embodiments, the adsorption unit may adopt a structure scheme that a negative pressure control device is connected to the adsorption unit, and the negative pressure control device can independently control the adsorption unit.
The technical scheme has the advantages that the negative pressure control device is arranged to independently control each adsorption unit in the machining process, so that each adsorption unit can independently act.
In some embodiments, the negative pressure control device may be connected to the vacuum generation device, and the negative pressure control device may be a solenoid valve.
The vacuum generating device is used for forming a vacuum environment in the adsorption unit, and adsorbing the soft film in the processing process to enable the soft film to be flat.
In some embodiments, the suction cup body 1 may adopt a structure scheme that a positioning groove 12 is further disposed on the upper surface of the suction cup body 1, a plurality of annular vacuum grooves 13 are disposed in the positioning groove 12, and an air hole is disposed in each vacuum groove 13 and is communicated with an air exhaust hole 11 disposed on the side surface of the suction cup body.
The beneficial effects of the technical scheme are that the product is positioned by arranging the positioning groove 12, and the vacuum groove 13 and the air hole are arranged in the positioning groove 12 and used for vacuumizing, so that the product is further fixed.
In some embodiments, the positioning groove 12 may adopt a structure in which a through groove 14 is formed through the vacuum groove 13 in the positioning groove 12.
The technical scheme has the beneficial effects that the through groove 14 is communicated with the vacuum groove 13, so that air in the vacuum groove 13 can be discharged through the air holes when air is sucked, and the condition that the adsorbed product is not flat due to blockage of the air holes in the vacuum groove 13 is avoided.
In some embodiments, the exhaust hole 11 may adopt a structure in which the exhaust hole 11 is connected to a solenoid valve and a vacuum generating device, the vacuum generating device is connected to the solenoid valve through a gas pipe, and one solenoid valve is connected to one exhaust hole 11 through a gas pipe.
The technical scheme has the advantages that the electromagnetic valve is used for controlling the exhaust hole 11 to realize gradual exhaust, and the vacuum generating device is used for sucking vacuum.
In some embodiments, the vacuum groove 13 may adopt a structure scheme that the vacuum groove 13 is provided with a chamfer or a radius.
Adopt above-mentioned technical scheme's beneficial part to lie in, at the in-process of adsorbing the product, the product can be inhaled to inside the production that can produce of vacuum tank 13, and the product is adsorbed regional can produce certain indent deformation, probably produces the strain to the product surface, inhales the mode that the groove was gone up through setting up chamfer or radius in the vacuum, this phenomenon of avoiding that can be better.
In some embodiments, the chamfer or radius may be configured to be no more than 0.5 mm.
The utility model also discloses a nanometer impression equipment, including rolling mechanism, still include that above-mentioned technical scheme is arbitrary vacuum chuck.
The beneficial effects of adopting above-mentioned technical scheme lie in that, a nanometer impression equipment includes vacuum chuck, can use vacuum chuck to adsorb the mantle in the course of working, avoids the mantle to appear fold, bubble at the impression in-process, and the impression is effectual.
For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (8)
1. A vacuum chuck for use with a nanoimprint device that includes a rolling mechanism, the vacuum chuck comprising:
a suction cup body (1);
the sucker comprises a sucker body (1), and is characterized in that adsorption holes (2) are arranged in an array mode on the sucker body (1), one or more columns of adsorption holes (2) in the direction perpendicular to the rolling advancing direction of a rolling mechanism are communicated to form an adsorption unit, and a plurality of adsorption units are formed in the adsorption holes (2) in an array mode.
2. The vacuum chuck as claimed in claim 1, wherein a negative pressure control device is connected to the suction unit, and the negative pressure control device can independently control the suction unit.
3. Vacuum chuck according to claim 2, wherein said negative pressure control means is connected to vacuum generating means.
4. The vacuum chuck according to claim 1, wherein the chuck body (1) is further provided with a positioning groove (12) on the upper surface, a plurality of annular vacuum grooves (13) are arranged in the positioning groove (12), and air holes are arranged in the vacuum grooves (13).
5. Vacuum chuck according to claim 4, characterized in that a through slot (14) is provided in the positioning slot (12) through the vacuum slot (13).
6. Vacuum chuck according to claim 4, characterized in that the vacuum groove (13) is provided with a chamfer or a radius.
7. The vacuum chuck of claim 6 wherein the chamfer or radius is no more than 0.5 mm.
8. A nanoimprinting apparatus comprising a rolling mechanism, characterized by comprising the vacuum chuck according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220564105.XU CN217333106U (en) | 2022-03-15 | 2022-03-15 | Vacuum chuck and nanoimprint equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220564105.XU CN217333106U (en) | 2022-03-15 | 2022-03-15 | Vacuum chuck and nanoimprint equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217333106U true CN217333106U (en) | 2022-08-30 |
Family
ID=83000918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220564105.XU Active CN217333106U (en) | 2022-03-15 | 2022-03-15 | Vacuum chuck and nanoimprint equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217333106U (en) |
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2022
- 2022-03-15 CN CN202220564105.XU patent/CN217333106U/en active Active
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