CN117170184A

CN117170184A - Nanometer impression device

Info

Publication number: CN117170184A
Application number: CN202310979120.XA
Authority: CN
Inventors: 程鑫; 娄飞
Original assignee: Shenzhen Diaotou Technology Co ltd; Shenzhen Lihexing Co ltd; Southwest University of Science and Technology
Current assignee: Shenzhen Diaotou Technology Co ltd; Shenzhen Lihexing Co ltd; Southwest University of Science and Technology
Priority date: 2023-08-04
Filing date: 2023-08-04
Publication date: 2023-12-05

Abstract

The application relates to a nano imprinting device, which comprises a supporting mechanism, a lower die mechanism and an upper die mechanism, wherein the supporting mechanism comprises a first supporting plate, and at least one guide rod is arranged on the first supporting plate; the lower die mechanism comprises a second supporting plate, a guide sleeve and a supporting plate are fixed on the second supporting plate, a plurality of mounting holes and a plurality of air grooves are arranged on the supporting plate, and air holes corresponding to the air grooves are arranged on the bottom plate; the upper die mechanism comprises a third supporting plate, the third supporting plate is fixedly connected with the upper end of the guide rod, a supporting plate through hole is arranged on the third supporting plate, and air holes are arranged on the side face of the third supporting plate; the edge area of the imprinting soft membrane is fixedly connected to the lower side of the third supporting plate, the organic glass plate is fixedly connected to the upper side of the third supporting plate, and the supporting plate through holes, the organic glass plate and the imprinting soft membrane form an air cavity. The nano imprinting device can improve the imprinting precision and the imprinting efficiency in the imprinting process and can be compatible with products with various dimensions.

Description

Nanometer impression device

Technical Field

The application relates to the field of micro-nano processing, in particular to a nano imprinting device which can realize the transfer of template patterns with high precision.

Background

The nano imprinting technology is a nano structure manufacturing technology based on a nano scale template, specifically, a template structure inscribed by technologies such as electron beam lithography, X-ray lithography or extreme ultraviolet lithography is transferred onto a substrate in a mechanical contact manner, the transferred medium is usually a layer of thin imprinting glue, the imprinting glue is solidified by a method such as heating, cooling or irradiation, and then the copying of the transferred structure is completed by a process such as plasma etching. Compared with the traditional photoetching technology, the structure scale of the nanoimprint technology is not limited by the wavelength of light waves, and the resolution ratio is high; compared with electron beam lithography, X-ray lithography or extreme ultraviolet lithography, the nano imprinting technology has low equipment cost and high production efficiency. Nanoimprint technology has been widely used in biomedical applications, high density storage, photonic crystals, solar cells, fabrication of high precision printed circuit boards and other semiconductor devices, and the like. Common nanoimprint techniques are hot embossing, ultraviolet embossing, and the like.

The accuracy of the nanoimprint technology in the imprinting process is influenced by factors such as parallelism of a template and a substrate, surface roughness of the substrate, imprinting force uniformity, post-imprinting structural uniformity and the like. CN201610105092.9 proposes an imprinting device with a mechanical leveling mechanism, which is difficult to effectively ensure parallelism between an imprinting template and a substrate due to errors in machining mechanical parts, execution errors of servo driving, and non-uniformity of an elastic member, and has a complex adjusting mechanism. CN201610790060.7 proposes a vacuum negative pressure embossing method, but the method requires low embossing adhesiveness, and the produced embossing force is small, and the structural uniformity is easy to be poor. CN201721260146.5 proposes a flip-type nanoimprint mechanism, where the attaching parallelism between the template and the substrate cannot be ensured.

The defects of the existing nano imprinting equipment in the imprinting process mainly comprise three points: firstly, the imprinting precision is low, the parallelism between the template and the substrate is poor, the imprinting force is small, and the structural uniformity after imprinting is poor; secondly, the imprinting efficiency is low, the heating or cooling time is long, or the number of steps requiring manual intervention is large; thirdly, the product size compatibility is low.

Disclosure of Invention

In order to solve the problems, the application provides a nano imprinting device, which comprises a supporting mechanism, a lower die mechanism and an upper die mechanism, wherein the supporting mechanism, the lower die mechanism arranged on the supporting mechanism and the upper die mechanism arranged on the lower die mechanism are arranged on the parts of the nano imprinting device from bottom to top in sequence; wherein,

the support mechanism comprises a first support plate and at least one guide rod, and the guide rod is fixedly arranged on the support plate;

the lower die mechanism comprises a second supporting plate, a guide sleeve, a supporting plate and a bottom plate, wherein the guide sleeve is fixedly connected to the second supporting plate, a guide rod is matched with the guide sleeve for installation, the supporting plate is fixedly connected to the supporting plate, a plurality of mounting holes and a plurality of air grooves are arranged on the supporting plate, the bottom plate is fixedly connected with the supporting plate, and a plurality of air holes corresponding to the air grooves are arranged on the bottom plate;

the upper die mechanism comprises a third supporting plate, an embossing soft film and an organic glass plate, wherein the third supporting plate is fixedly connected with the upper end of the guide rod, a supporting plate through hole is arranged in the central area of the third supporting plate, and a plurality of air holes are arranged on the side surface of the third supporting plate and are communicated with the supporting plate through hole; the edge area of the imprinting soft film is fixedly connected to the lower side of the third supporting plate, the edge area is fixed to the periphery of the supporting plate through hole, the imprinting soft film covers the supporting plate through hole, the organic glass plate is fixedly connected to the upper side of the third supporting plate and covers the supporting plate through hole, an air cavity is formed by the supporting plate through hole, the organic glass plate and the imprinting soft film, and the air cavity conducts air flow through a plurality of air holes of the third supporting plate.

In one embodiment, the support mechanism further comprises a lower die mechanism power device, the lower die mechanism power device is fixedly connected to the lower side of the first support plate, through holes are further formed in the first support plate, and one end of the lower die mechanism power device penetrates through the through holes of the first support plate and is fixedly connected to the lower side of the second support plate.

In one embodiment, the lower die mechanism further comprises one or more positioning sleeves fixedly connected to the upper side of the second support plate, and the upper die mechanism further comprises one or more positioning rods fixedly connected to the lower side of the third support plate, wherein the positioning sleeves are matched with the positioning rods for positioning.

In one embodiment, the lower die mechanism further comprises a plurality of heating pipes, wherein the heating pipes are installed in the installation holes of the supporting plate, and the installation holes are positioned on the lower sides of the air grooves and are not communicated.

In one embodiment, the air groove is an annular groove, the air grooves are concentrically arranged, and the air holes on the bottom plate are concentrically arranged in a ring shape and correspond to the positions of the air grooves.

In one embodiment, the lower die mechanism further comprises a top plate, a temperature sensor and a ventilation chamber, wherein the top plate is fixedly connected to the upper side of the second supporting plate and is arranged on the periphery of the supporting plate, the temperature sensor is fixedly connected to the second supporting plate and is arranged on the lower side of the supporting plate, the ventilation chamber is fixedly connected to the lower side of the second supporting plate, the ventilation chamber is of a sealing cover structure, and an air inlet and an air outlet are arranged.

In one embodiment, the upper die mechanism further comprises a pressing plate, wherein the pressing plate is arranged at the edge area of the imprinting flexible film, and the imprinting flexible film is fixedly connected to the third supporting plate through the imprinting flexible film.

In one embodiment, the upper die mechanism further comprises an adjusting mechanism, a UV lamp and a protective cover, wherein the UV lamp is arranged on the upper side of the third supporting plate through the adjusting mechanism, the adjusting mechanism is used for adjusting the height of the UV lamp, and the protective cover is fixedly connected with the third supporting plate and is arranged on the periphery of the UV lamp.

In one embodiment, the device further comprises a vacuum pump mechanism, a compression pump mechanism and a controller, wherein the air channel of the vacuum pump is communicated with the air grooves and the air holes of the lower die mechanism, the air channel of the compression pump is communicated with the air holes of the upper die mechanism, and the controller controls the action parameters and the action flow of the device.

In one embodiment, the embossed flexible film is a transparent elastic sheet, and the material of the embossed flexible film is PDMS, PMMA, PUA, PVA, PVC, PTFE, PC, or PET.

According to the nano imprinting device, the imprinting precision and the imprinting efficiency in the imprinting process are improved through the high-pressure air cavity with the imprinting soft film, the curved surface contact imprinting mode, the automatic control of temperature detection and heating pipe temperature rise, the automatic control of temperature detection and ventilation chamber temperature reduction and the bottom plate of the lower die mechanism with a plurality of adsorption holes, and the nano imprinting device can be compatible with products with various sizes and specifications.

Drawings

FIG. 1 is a perspective view of a nanoimprint apparatus according to an embodiment;

FIG. 2 is a front view of a nanoimprint apparatus in one embodiment;

FIG. 3 is a schematic diagram of a nanoimprint apparatus according to an embodiment;

FIG. 4 is a schematic diagram showing an imprinting state of the nano-imprinting apparatus according to an embodiment;

FIG. 5 is a schematic diagram showing an imprinting state of a nano-imprinting apparatus according to an embodiment;

fig. 6 is a schematic diagram illustrating an imprinting state of the nano-imprinting apparatus according to an embodiment.

Detailed Description

The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.

Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The terms "first," "second," "third," and the like in the description and in the claims and drawings, if any, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the objects so described may be interchanged where appropriate. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. The directional terms mentioned in this application are, for example: upper, lower, left, right, front, rear, inner, outer, side, etc., are only with reference to the directions of the drawings. The embodiments described below by referring to the drawings are exemplary only for explaining the present application and are not to be construed as limiting the present application. Furthermore, the present application in various examples repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present application provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.

As shown in fig. 1-3, the present application proposes a nano-imprinting apparatus 1, which at least includes a supporting mechanism 10, a lower mold mechanism 20, an upper mold mechanism 30, a vacuum pump mechanism, a compression pump mechanism and a controller, wherein the structure of the nano-imprinting apparatus 1 is sequentially, from bottom to top, the supporting mechanism 10, the lower mold mechanism 20 disposed on the supporting mechanism 10, and the upper mold mechanism 30 disposed on the lower mold mechanism 20.

The support mechanism 10 comprises a first support plate 11 and at least one guide bar 12, the guide bar 12 being fixedly arranged on the first support plate. Further, the support mechanism 10 further includes a lower die mechanism power device 13, and the lower die mechanism power device 13 drives the lower die mechanism 20 to move in the vertical direction.

Preferably, the four guide rods 12 are disposed at four corners of the first support plate 11 and fixedly connected with the first support plate 11. The two lower die mechanism power devices 13 are arranged at the lower side of the first supporting plate 11 and fixedly connected with the first supporting plate 11.

The lower die mechanism 20 at least comprises a second supporting plate 21, a guide sleeve 22, a supporting plate 23 and a bottom plate 24, wherein the guide sleeve 22 is fixedly connected to the second supporting plate 21, the guide rod 12 of the supporting mechanism 10 is matched with the guide sleeve 22 of the lower die mechanism 20, the supporting plate 23 is fixedly connected to the second supporting plate 21, a plurality of mounting holes 26 and a plurality of air grooves are arranged on the supporting plate 23, the bottom plate 24 is fixedly connected with the supporting plate 23, and a plurality of air holes corresponding to the air grooves are arranged on the bottom plate 24.

Preferably, the lower die mechanism power device 13 is fixedly connected to the lower side of the first supporting plate 11, a through hole is further arranged on the first supporting plate 11, one end of the lower die mechanism power device 13 penetrates through the through hole of the first supporting plate 11 and is fixedly connected to the lower side of the second supporting plate 21, and the lower die mechanism 20 axially reciprocates along the guide rod 12 through the expansion and contraction of the lower die mechanism power device 13.

Further, the power device 13 of the lower die mechanism can be a hydraulic cylinder, an air cylinder, a servo motor and other commonly used execution units. Preferably, the lower die mechanism power device 13 is a hydraulic cylinder.

Further, the lower die mechanism 20 further includes one or more positioning sleeves 25, each positioning sleeve 25 is fixedly connected to the upper side of the second support plate 21, preferably, two positioning sleeves 25 of the lower die mechanism 20 are fixedly connected to the support plate of the lower die mechanism 20, and are symmetrically arranged on two sides of the upper surface of the second support plate 21.

Further, the mounting holes 26 on the supporting plate 23 are used for mounting heating pipes, and a plurality of air grooves are arranged on the supporting plate 23 for conducting air flow. One heating pipe is installed in one installation hole 26 of the pallet 23, the number of the heating pipes is not greater than the number of the installation holes 26, and the installation holes 26 are positioned at the lower sides of the air grooves and are not communicated. Preferably, the lower die mechanism 20 comprises six heating pipes, six mounting holes 26 are formed in the supporting plate 23, and accordingly, one heating pipe is respectively mounted in each mounting hole 26, and the six mounting holes 26 are parallel and located on the same plane.

Further, the air grooves on the supporting plate 23 may have various shapes such as square, round, oval, and straight line, preferably, the air grooves on the supporting plate 23 are all annular grooves, and the plurality of air grooves are all arranged in concentric circles, and the plurality of air holes on the bottom plate 24 for conducting air flow are also arranged in concentric circles, and correspond to the positions of the air grooves on the supporting plate 23.

Further, the lower die mechanism 20 further comprises a top plate 27, a temperature sensor 28 and a ventilation chamber 29, wherein the top plate 27 is fixedly connected to the upper side of the second supporting plate 21 and is arranged on the periphery of the supporting plate 23, the temperature sensor 28 is fixedly connected with the second supporting plate 21 and is arranged on the lower side of the supporting plate 23, the ventilation chamber 29 is fixedly connected with the second supporting plate 21 and is arranged below the second supporting plate 21, and the ventilation chamber 29 is of a sealed cover structure and is provided with an air inlet and an air outlet. The ventilation chamber 29 is not limited to one-side air intake and one-side air outlet, and may be multi-side air intake and multi-side air outlet, or may be bottom air intake and side air outlet, and the air intake hole is communicated with the ventilation mechanism. Preferably, the air inlet and the air outlet are distributed on two sides of the ventilation chamber 29.

The upper mold mechanism 30 includes at least a third support plate 31, an imprint flexible film 32, and a plexiglass plate 33, the third support plate 31 being fixedly connected to the upper end of the guide rod 12 of the support mechanism 10, a support plate through hole being arranged in the central region of the third support plate 31, preferably one support plate through hole. The side of the third support plate 31 is provided with a plurality of air holes communicating with the support plate through holes, preferably three air holes are arranged and distributed in parallel on the same plane.

The embossing soft film 32 of the upper mold mechanism 30 includes a central region and an edge region, the edge region of the embossing soft film 32 is fixedly connected with the third support plate 31 and disposed at the lower side of the third support plate 31, while the edge region of the embossing soft film 32 is fixed at the periphery of the support plate through hole, and the central region of the embossing soft film 32 covers the support plate through hole. Further, the imprint soft film 32 is colorless and transparent, and preferably, the imprint soft film 32 is a transparent elastic sheet, and the material of the imprint soft film 32 is not limited to PDMS, PMMA, PUA, PVA, PVC, PTFE, PC, or PET.

Further, the upper mold mechanism 30 further includes a pressing plate 34, the pressing plate 34 is disposed at an edge region of the imprint template 32, and the imprint template 32 is fixedly connected to the third support plate 31 through the imprint template 32.

The plexiglass plate 33 of the upper mold mechanism 30 is fixedly connected to the third support plate 31 and is disposed on the upper side of the third support plate 31, and similarly, the plexiglass plate 33 may cover the support plate through-holes. Thus, the support plate through-holes, the plexiglass plate 33 and the imprint flexible film 32 form an air chamber that conducts air flow through the plurality of air holes of the third support plate 31. Preferably, the plexiglass sheet 33 is colorless and transparent and may be of any material known in the art.

Further, the upper die mechanism 30 further includes one or more positioning rods 35, where the positioning rods 35 are fixedly connected with the third support plate 31 and disposed on the lower side of the third support plate 31, and the positioning sleeve 25 of the lower die mechanism 20 is cooperatively positioned with the positioning rods 35 of the upper die mechanism 30. Preferably, the number of the positioning sleeves 25 of the lower die mechanism 20 and the number of the positioning rods 35 of the upper die mechanism 30 are two, and the positioning sleeves 25 and the positioning rods 35 are oppositely arranged and correspond to each other one by one.

Further, the upper mold mechanism 30 further includes an adjusting mechanism 36, a UV lamp 37, and a protective cover 38, the UV lamp 37 is disposed on the upper side of the third support plate 31 through the adjusting mechanism 36, the adjusting mechanism 36 is used for adjusting the height of the UV lamp 37, and the protective cover 38 is fixedly connected with the third support plate 31 and disposed on the outer periphery of the UV lamp 37. Preferably, the adjustment mechanism 36 is a screw mechanism.

Further, the nanoimprint apparatus 1 further includes a vacuum pump mechanism, a compression pump mechanism, and a controller. The vacuum pump mechanism comprises a vacuum pump, a filter valve, a control valve, an air pipe and corresponding auxiliary pneumatic components, and an air path of the vacuum pump is communicated with a plurality of air grooves and a plurality of air holes of the lower die mechanism 20. The compression pump mechanism comprises a compression pump, a filter valve, a control valve, an air pipe and corresponding auxiliary pneumatic components, and an air path of the compression pump is communicated with a plurality of air holes of the upper die mechanism 30. The controller comprises a power supply module, a control module, an I/O module, a cable and corresponding auxiliary electrical components, and controls the action parameters and the action flow of the device.

In one embodiment, the workflow of the nanoimprint apparatus 1 of the present application is as follows:

when the nano-imprinting device 1 is in a standby state, the hydraulic cylinder of the supporting mechanism 10 is in a retracted position, the lower die mechanism 20 is in a lower position, the vacuum pump mechanism and the compression pump mechanism are in a closed or non-conducting state, and the heating pipe and the ventilation mechanism communicated with the ventilation chamber 29 are in a closed or non-conducting state.

When the nanoimprint apparatus 1 is in an operating state, the operating steps are as follows.

Step one, placing the substrate 2 with the imprinting glue coating treatment finished in the previous step in the central area of the bottom plate 24 of the lower die mechanism 20, controlling the vacuum pump to start or conduct by the controller, starting the vacuum pump to work, and adsorbing the substrate 2 through the air groove on the supporting plate 23 for conducting air flow and the air hole on the bottom plate 24 for conducting air flow. Then, the template 3 of the previous step is placed on the adsorbed substrate 2, and since the size of the template 3 is larger than that of the substrate 2, the outer peripheral area of the template 3 beyond the substrate 2 is also adsorbed on the bottom plate 24.

And secondly, the controller controls the heating pipe positioned in the supporting plate 23 to heat, the controller detects the temperature of the substrate 2 in real time through the temperature sensor 28 of the lower die mechanism 20, and after the substrate 2 reaches the set temperature, the controller controls the heating pipe to enter a heat preservation stage.

Step three, as shown in fig. 4, the controller controls the hydraulic cylinder to extend, and the lower die mechanism 20 moves axially upwards along the guide rod 12 of the support mechanism 10 under the action of the hydraulic cylinder until the positioning rod 35 of the upper die mechanism 30 is matched with the positioning sleeve 25 of the lower die mechanism 20, and the top plate 27 of the lower die mechanism 20 is in contact with the third support plate 31 of the upper die mechanism 30.

Step four, the controller controls the compression pump to start and/or conduct, the compression pump starts to work, and high-pressure gas is introduced into the through holes of the support plate, the air cavity formed by the organic glass plate 33 and the imprinting flexible film 32 through the air holes for conducting air flow on the third support plate 31 of the upper die mechanism 30, the pressure of the high-pressure gas is gradually increased under the control of the controller, at the moment, the imprinting flexible film 32 starts to gradually deform, as shown in fig. 5, the central area of the imprinting flexible film 32 starts to bulge downwards, and the template 3 and the substrate 2 adsorbed on the bottom plate 24 of the lower die mechanism 20 are pressed. Since the center portions of the mold plate 3 and the substrate 2 are pressed first, the degree of adhesion between the center portions of the mold plate 3 and the substrate 2 increases, and air remaining in the imprint resist in the center region of the substrate 2 is discharged to the periphery. As the pressure of the high-pressure gas controlled by the controller is further increased, as shown in fig. 6, the area of the embossing soft film 32 protruding downward is further increased, the area of the template 3 attaching to the substrate 2 is further increased, and the air remaining in the embossing glue of the substrate 2 is further discharged to the periphery until the embossing soft film 32 fully presses the entire area of the substrate 2. The residual air discharged from the imprint resist is discharged through the air holes on the bottom plate 24. The controller continuously controls the high-pressure gas to reach the set imprinting load and maintain the pressure.

And fifthly, the controller controls the heating pipe of the lower die mechanism 20 to stop heating, and simultaneously, the controller controls the fan of the ventilation mechanism to start, the ventilation chamber 29 of the lower die mechanism 20 starts to ventilate and cool the substrate 2, the controller detects the temperature of the substrate 2 in real time through the temperature sensor 28 of the lower die mechanism 20, and controls the ventilation quantity and the ventilation speed, and after the set temperature is reached, the controller controls the fan to be closed.

Step six, the controller controls the UV lamp 37 to be started, and after the UV lamp 37 is started for a set time, the controller controls the UV lamp 37 to be turned off.

Step seven, the controller controls the hydraulic cylinder to descend, the lower die mechanism 20 moves downwards along the guide rod 12 of the supporting mechanism 10 under the retraction of the hydraulic cylinder, the top plate 27 of the lower die mechanism 20 is separated from the third supporting plate 31 of the upper die mechanism 30, and the positioning rod 35 of the upper die mechanism 30 is separated from the positioning sleeve 25 of the lower die mechanism 20.

And step eight, the controller controls the vacuum pump to be closed or not to be conducted, the vacuum pump stops working, the template 3 and the substrate 2 on the bottom plate 24 of the lower die mechanism 20 are taken out, and the flow goes to the subsequent working procedure.

Further, the curved surface contact imprinting method in the above step is not limited to the method of diffusing from the center point of the template 3 to the periphery, and may be the method of diffusing from the center point of the template 3 to both sides, or the method of diffusing from one side of the template 3 to the other side.

The application provides a nano imprinting device, which can effectively eliminate or reduce tiny bubbles, ensure the parallelism between a template and a substrate and greatly improve the uniformity of a structure after imprinting by a high-pressure air cavity with an imprinting soft film and a curved surface contact imprinting mode. Through the many heating pipes, temperature detection sensor and controller, the ventilation room of base plate bearing structure, promote the heating up and cooling efficiency and the degree of automation in the impression process. The bottom plate of the lower die mechanism with a plurality of adsorption holes is compatible with products with various sizes and specifications.

The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims

1. The nano imprinting device comprises a supporting mechanism, a lower die mechanism and an upper die mechanism, and is characterized in that the device comprises the supporting mechanism, the lower die mechanism arranged on the supporting mechanism and the upper die mechanism arranged on the lower die mechanism from bottom to top in sequence; wherein,

the support mechanism comprises a first support plate and at least one guide rod, and the guide rod is fixedly arranged on the first support plate;

the lower die mechanism comprises a second supporting plate, a guide sleeve, a supporting plate and a bottom plate, wherein the guide sleeve is fixedly connected to the second supporting plate, the guide rod is installed in a matched mode with the guide sleeve, the supporting plate is fixedly connected to the second supporting plate, a plurality of mounting holes and a plurality of air grooves are formed in the supporting plate, the bottom plate is fixedly connected with the supporting plate, and a plurality of air holes corresponding to the air grooves are formed in the bottom plate;

the upper die mechanism comprises a third supporting plate, an embossing soft film and an organic glass plate, wherein the third supporting plate is fixedly connected with the upper end of the guide rod, a supporting plate through hole is arranged in the central area of the third supporting plate, and a plurality of air holes are arranged on the side face of the third supporting plate and are communicated with the supporting plate through hole; the edge area of the embossing soft film is fixedly connected to the lower side of the third supporting plate, the edge area is fixed to the periphery of the supporting plate through hole, the embossing soft film covers the supporting plate through hole, the organic glass plate is fixedly connected to the upper side of the third supporting plate and covers the supporting plate through hole, an air cavity is formed by the supporting plate through hole, the organic glass plate and the embossing soft film, and the air cavity conducts air flow through a plurality of air holes of the third supporting plate.

2. The apparatus of claim 1, wherein the support mechanism further comprises a lower die mechanism power device fixedly connected to the lower side of the first support plate, a through hole is further arranged in the first support plate, and one end of the lower die mechanism power device passes through the through hole of the first support plate and is fixedly connected to the lower side of the second support plate.

3. The apparatus of claim 2, wherein the lower die mechanism further comprises one or more positioning sleeves fixedly connected to an upper side of the second support plate, and the upper die mechanism further comprises one or more positioning rods fixedly connected to a lower side of the third support plate, the positioning sleeves being cooperatively positioned with the positioning rods.

4. The apparatus of claim 2, wherein the lower die mechanism further comprises a plurality of heating tubes mounted within mounting holes of the pallet, the plurality of mounting holes being located on an underside of the plurality of air slots and not in communication.

5. The device of claim 4, wherein the air groove is an annular groove, the plurality of air grooves are concentrically arranged, and the plurality of air holes on the bottom plate are concentrically arranged in a circular ring shape and correspond to the positions of the air grooves.

6. The apparatus of claim 2, wherein the lower die mechanism further comprises a top plate fixedly connected to an upper side of the second support plate and disposed on an outer periphery of the support plate, a temperature sensor fixedly connected to the second support plate and disposed on a lower side of the support plate, and a ventilation chamber fixedly connected to a lower side of the second support plate, wherein the ventilation chamber is of a sealed cover structure and is provided with an air inlet and an air outlet.

7. The apparatus of any one of claims 1-6, wherein the upper mold mechanism further comprises a platen disposed at an edge region of the imprint membrane, the imprint membrane being fixedly coupled to the third support plate via the imprint membrane.

8. The apparatus according to any one of claims 1 to 6, wherein the upper die mechanism further comprises an adjusting mechanism, a UV lamp and a protective cover, the UV lamp is arranged on the upper side of the third support plate through the adjusting mechanism, the adjusting mechanism is used for adjusting the height of the UV lamp, and the protective cover is fixedly connected with the third support plate and is arranged on the periphery of the UV lamp.

9. The apparatus of claim 1, further comprising a vacuum pump mechanism, a compression pump mechanism, and a controller, wherein the air path of the vacuum pump is in communication with the plurality of air slots and the plurality of air holes of the lower die mechanism, the air path of the compression pump is in communication with the plurality of air holes of the upper die mechanism, and the controller controls the operating parameters and the operating flow of the apparatus.

10. The device of claim 1, wherein the embossed flexible membrane is a transparent elastic sheet, and the material of the embossed flexible membrane is PDMS, PMMA, PUA, PVA, PVC, PTFE, PC, or PET.