CN216210006U - Concave grating manufacturing device - Google Patents
Concave grating manufacturing device Download PDFInfo
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- CN216210006U CN216210006U CN202122756252.5U CN202122756252U CN216210006U CN 216210006 U CN216210006 U CN 216210006U CN 202122756252 U CN202122756252 U CN 202122756252U CN 216210006 U CN216210006 U CN 216210006U
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Abstract
The utility model discloses a manufacturing device of a concave grating. The stamping device comprises a transmission device, a stamping workpiece, a stamping soft die, a glue dripping unit, a concave substrate, a base and a back plate; the concave surface basement is placed on the base, and the backplate is located concave surface basement top, and the backplate supports through the transmission that has raising and lowering functions and installs on the base, and the bottom surface of backplate is fixed with the impression work piece, and the bottom surface external fixation parcel of impression work piece has the impression soft mould, and the top of concave surface basement and the below of impression soft mould are equipped with the glue dripping unit. According to the utility model, through the imprinting form, the imprinting material on the concave substrate is imprinted by the arc imprinting soft mold, so that the rapid batch preparation of the concave grating is realized, the structural precision of the grating is greatly improved, and the problems of long period, low precision and high cost in the preparation of the concave grating by scribing are solved.
Description
Technical Field
The utility model relates to a manufacturing device in the field of microstructure preparation, in particular to a manufacturing device of a concave grating.
Background
The nanoimprint technology is not influenced by factors such as numerical aperture, optical diffraction effect, light wave wavelength and the like in the traditional optical photoetching technology, and the micro-nano structure is formed on the adhesive layer by imprinting in a mechanical force mode, so that the nanoimprint technology has the advantages of high production efficiency, low cost, high resolution and the like, and has important application in the field of manufacturing micro-nano devices.
The existing process method for preparing the concave grating is realized by a machining process, a mechanical scribing technology is a main manufacturing method in the machining process, and a series of parallel lines are scribed on the concave surface of the high-reflection metal in a certain period to form the reflection grating, so that the high-reflection metal of the concave surface has light splitting and condensing capacity. However, the mechanical scribing process has low processing precision, so that the size and precision of the structure are limited, the structure is easily damaged by mechanical force during scribing, and in addition, the scribing speed is slow, so that the preparation period of the grating is long, and the yield is extremely low and the cost is high.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems in the prior art, the utility model provides a manufacturing device of a concave grating.
By using the device, the grating structure is imprinted on the concave surface by a nano imprinting method, the grating structure can be quickly transferred and copied to the concave surface substrate, and the problems of long period, high cost and low structure precision of the traditional mechanical scribing for preparing the concave grating are solved.
The technical scheme adopted by the utility model is as follows:
the utility model comprises a transmission device, an imprinting workpiece, an imprinting soft mold, a glue dripping unit, a concave substrate, a base and a back plate; the concave substrate is placed on the base, the back plate is located above the concave substrate and supported and installed on the base through a transmission device with a lifting function, the bottom surface of the back plate is fixedly provided with a stamping workpiece, the bottom surface of the stamping workpiece is provided with a stamping soft mold, and glue dripping units are arranged above the concave substrate and below the stamping soft mold.
Further, still include the absorption platform, the concave surface basement passes through the absorption platform and adsorbs to be fixed on the base.
Furthermore, the top surface of the concave substrate is provided with an arc concave groove, and impression glue is arranged in the arc concave groove.
Further, the stamping device comprises a shell, wherein the shell covers the base, so that the transmission device, the stamping workpiece, the stamping soft mold, the glue dripping unit, the concave substrate and the back plate are all arranged in the shell.
Furthermore, the bottom surface of the stamping workpiece is an arc-shaped convex surface, and the material can be ceramic, rubber, other synthetic materials and the like, and is used for carrying out stamping manufacture by matching with the arc-shaped concave surface groove of the concave surface substrate.
Furthermore, the surface of the imprinting workpiece is provided with a vacuum groove for adsorbing and fixing the imprinting soft mold, the imprinting soft mold is used for imprinting the concave substrate adsorbed and fixed on the surface of the adsorption table, and the surface of the adsorption table is provided with a vacuum groove for adsorbing the concave substrate and fixing the concave substrate.
Furthermore, the impression soft mould is composed of a PET soft film or a PC soft mould and a grating structure of resin materials on the soft mould.
Furthermore, the surface of the adsorption table is provided with a vacuum groove for adsorbing and fixing the concave substrate.
The concave substrate material may be quartz, glass, metal, or the like.
Furthermore, the transmission device is a vacuum or air pressure lifting pipe, a hydraulic lifting pipe or a transmission motor and is used for controlling and driving the stamping workpiece to ascend or descend for stamping.
Further, the control panel is arranged on the outer side wall of the shell.
In specific implementation, the control panel can be further connected with the transmission device and the glue dripping unit and used for controlling the work of the transmission device and the glue dripping unit. The control panel is used for adjusting the embossing parameters and controlling the transmission device, the embossing workpiece and the glue dripping unit.
The utility model utilizes nano-imprinting to imprint the grating structure on the surface of the imprinting soft mold on the concave substrate, thereby realizing the preparation of the concave grating.
The utility model has the beneficial effects that:
in conclusion, the utility model realizes the rapid batch preparation of the concave grating by impressing the impressing material on the concave substrate by the arc-shaped impressing soft mold in the impressing form, greatly improves the structure precision of the grating, and solves the problems of long period, low precision and high cost of the concave grating prepared by scribing.
Drawings
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in detail with reference to the accompanying drawings 1 to 4, in which:
FIG. 1 is a three-dimensional schematic view of the apparatus of the present invention;
FIG. 2 is a schematic plan view of the present invention for imprinting a concave grating.
FIG. 3 is a schematic plan view of the present invention for imprinting a concave grating.
FIG. 4 is a schematic plan view of the present invention for imprinting a concave grating using the apparatus.
In the figure: the stamping device comprises a shell 1, a transmission device 2, a stamping workpiece 3, a stamping soft mold 5, a glue dripping unit 6, a concave substrate 7, an adsorption table 8, stamping glue 9, a base 11, a back plate 12 and a control panel 13.
Detailed Description
In order to make the technical scheme of the utility model clearer, the utility model is described in detail below with reference to the accompanying drawings.
As shown in fig. 1, the concave grating fabrication apparatus includes: the device comprises a base 11, an adsorption table 8, a shell 1, a control panel 13, a transmission device 2, a back plate 12, an imprinting workpiece 3, an imprinting soft mold 5, a glue dripping unit 6 and a concave substrate 7.
As shown in fig. 1, a housing 1 is formed on a base 11 by welding, an adsorption stage 8 is formed and contained in the housing 1, a control panel 13 is formed on the housing 1, transmission devices 2 are formed on both sides of the top surface of the base 11, an imprinting workpiece 3 is formed on the bottom surface of a back plate 12 by hydraulic control transmission to form an imprinting unit, and both sides of the back plate 12 are formed in the central area of the top surface of the base 11 by being connected with the transmission devices 2 in a liftable manner. Specifically, the base 11 is kept fixed, the concave base 7 is placed on the base 11, the back plate 12 is located above the concave base 7, the back plate 12 is supported and installed on the base 11 through the transmission device 2 with the lifting function, and in the specific implementation, four corners of the middle plate 12 are supported and installed on the base 11 through the respective transmission devices 2. An imprinting workpiece 3 is fixed on the bottom surface of the back plate 12, an imprinting soft mold 5 is arranged on the bottom surface of the imprinting workpiece 3, and a glue dripping unit 6 is arranged above the concave substrate 7 and below the imprinting soft mold 5.
In the specific implementation, the concave substrate 7 is formed on the base 11 through adsorption, the imprinting glue 9 is dripped onto the concave substrate 7 through the glue dripping unit 6, and the imprinting soft mold 5 with the grating structure is adsorbed on the imprinting workpiece 3.
In this example, the transmission device 2 is realized by air pressure, the air pressure range is 0.5 MP-1 MP, and the air pressure transmission is convenient to maintain and low in later use cost compared with other transmission modes.
In the present embodiment, the stamped workpiece 3 is a cambered surface, and is made of rubber, ceramic, other synthetic materials, or the like.
Specifically, one inch, two inches, four inches and six inches of the surface of the imprinting workpiece 3 are provided with vacuum grooves, and vacuum holes are reserved for adsorbing the imprinting soft mold 5 to form the main imprinting structure.
In this embodiment, the soft imprint mold 5 is composed of a PET film and a grating structure of a resin material on the soft mold, and hot imprint, ultraviolet imprint, soft etching, and the like may be used to fabricate the soft imprint mold.
The soft stamping mould 5 is formed on the surface of the stamping workpiece 3, and the thickness of the soft stamping mould 5 is greater than or equal to 200 micrometers and less than or equal to 400 micrometers. If the thickness of the soft imprint mold 5 is less than 200 μm, defects are likely to occur in the preparation of the concave grating, and demolding is difficult. If the thickness of the imprinting soft mold 5 is larger than 400 micrometers, the problem of excessive thickness of a residual layer is caused, and the subsequent process is influenced.
In this embodiment, the surface of the adsorption stage 8 has vacuum grooves and vacuum holes.
Specifically, the vacuum grooves on the surface of the adsorption table 8 are distributed in a cross shape in a circle, so that the concave substrate 7 can be aligned with the imprinting soft mold 5 more quickly and better when the concave substrate 7 is placed.
In this embodiment, the glue dripping unit 6 is composed of a dropper, a control panel 13 and a glue box, the glue box is loaded with glue to be dripped, the control panel 13 adjusts the glue dripping parameters, and the dropper drips the glue into the concave surface of the concave substrate.
For a better understanding of the method of using the device in this embodiment, a four-inch concave grating is stamped, as shown in fig. 2-4:
firstly, preparing a soft mold: the silicon wafer with the grating structure is manufactured by using the traditional grating manufacturing technology and is used as an original mould, PDMS is slowly poured on the original mould, the grating structure is transferred to a flexible mould through a hot stamping process, and the flexible mould is heated at 70 ℃ for 12 hours and then is separated from a template, so that the high-precision flexible mould is obtained.
The concave substrate 7 is then cleaned: the quartz concave substrate 7 is cleaned in an ultrasonic cleaning machine for 15 minutes by using absolute ethyl alcohol and deionized water in sequence, then dried by using nitrogen and then placed on a hot plate to be heated for 30 seconds, so that no ethyl alcohol and water are attached to the surface.
The concave substrate 7 is then embossed: the surface of an imprinting workpiece 3 is wiped clean, a soft mould with a grating structure is adsorbed on the surface of the imprinting workpiece 3, then a concave substrate is aligned to and adsorbed on an adsorption table, ultraviolet imprinting glue consisting of benzyl methacrylate, polydimethylsiloxane, photoinitiator and the like is injected into the concave substrate 7, the imprinting worker slowly descends at a certain speed until the glue in the concave substrate 7 is completely contacted with the soft mould, and then the descent is stopped.
The stamp was then exposed to light with an ultraviolet lamp to cure the glue, release the vacuum, and lift the stamp work piece 3. And demolding the imprinted grating structure and the soft mold to obtain the concave grating with the grating structure.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (10)
1. The manufacturing device of the concave grating is characterized in that:
comprises a transmission device (2), an imprinting workpiece (3), an imprinting soft mold (5), a glue dripping unit (6), a concave substrate (7), a base (11) and a back plate (12); the concave base (7) is placed on the base (11), the back plate (12) is located above the concave base (7), the back plate (12) is supported and installed on the base (11) through the transmission device (2) with the lifting function, the bottom surface of the back plate (12) is fixed with the imprinting workpiece (3), the bottom surface of the imprinting workpiece (3) is provided with an imprinting soft mold (5), and the glue dripping units (6) are arranged above the concave base (7) and below the imprinting soft mold (5).
2. The apparatus for manufacturing a concave grating according to claim 1, wherein:
the device also comprises an adsorption table (8), and the concave substrate (7) is adsorbed and fixed on the base (11) through the adsorption table (8).
3. The apparatus for manufacturing a concave grating according to claim 1, wherein:
the top surface of the concave substrate (7) is provided with an arc concave groove, and impression glue (9) is arranged in the arc concave groove.
4. The apparatus for manufacturing a concave grating according to claim 1, wherein:
the stamping die further comprises a shell (1), wherein the shell (1) is covered on the base (11), so that the transmission device (2), the stamping workpiece (3), the stamping soft die (5), the glue dripping unit (6), the concave substrate (7) and the back plate (12) are all arranged in the shell (1).
5. The apparatus for manufacturing a concave grating according to claim 3, wherein:
the bottom surface of the imprinting workpiece (3) is an arc convex surface and is used for being matched with the arc concave surface groove of the concave surface substrate (7) to carry out imprinting manufacture.
6. The apparatus for manufacturing a concave grating according to claim 1, wherein:
and the surface of the imprinting workpiece (3) is provided with a vacuum groove for adsorbing and fixing the imprinting soft mold (5).
7. The apparatus for manufacturing a concave grating according to claim 1, wherein:
the soft impression mold consists of a PET soft film or a PC soft mold and a grating structure of a resin material on the soft mold.
8. The apparatus for manufacturing a concave grating according to claim 2, wherein:
and the surface of the adsorption platform (8) is provided with a vacuum groove for adsorbing and fixing the concave substrate (7).
9. The apparatus for manufacturing a concave grating according to claim 1, wherein:
the transmission device (2) is a vacuum or air pressure lifting pipe, a hydraulic lifting pipe or a transmission motor.
10. The apparatus for manufacturing a concave grating as claimed in claim 4, wherein:
the multifunctional shell is characterized by further comprising a control panel (13), wherein the control panel (13) is installed on the outer side wall of the shell (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122756252.5U CN216210006U (en) | 2021-11-11 | 2021-11-11 | Concave grating manufacturing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122756252.5U CN216210006U (en) | 2021-11-11 | 2021-11-11 | Concave grating manufacturing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216210006U true CN216210006U (en) | 2022-04-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122756252.5U Active CN216210006U (en) | 2021-11-11 | 2021-11-11 | Concave grating manufacturing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216210006U (en) |
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2021
- 2021-11-11 CN CN202122756252.5U patent/CN216210006U/en active Active
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