CN204640788U - A kind of large-area nano impression soft mold reproducing unit - Google Patents
A kind of large-area nano impression soft mold reproducing unit Download PDFInfo
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- CN204640788U CN204640788U CN201520368786.2U CN201520368786U CN204640788U CN 204640788 U CN204640788 U CN 204640788U CN 201520368786 U CN201520368786 U CN 201520368786U CN 204640788 U CN204640788 U CN 204640788U
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Abstract
The utility model discloses a kind of large-area nano impression soft mold reproducing unit, comprising: workbench is fixed on base; Master mold is fixed on workbench by vacuum suction; Packing ring is fixed on workbench by vacuum suction, and is embedded in the periphery of master mold; Liquid mold graph layer material drops on master mold; Mould support layer is fixed on the lower surface of dynamic plate by vacuum suction; Spacing module is placed on dynamic plate; Z-direction displacement platform is connected with dynamic plate; Lead is fixed on base, and through dynamic plate.The utility model beneficial effect: the manufacture achieving large scale wafer scale soft mold low cost, efficient, high accuracy and scale, for large-area nano impression and Integral wafer nano-imprinting provide a kind of important supporting tool and technology.
Description
Technical field
The utility model relates to genus technical field of micro-nano manufacture, particularly relates to a kind of large-area nano impression soft mold reproducing unit.
Background technology
Nano-imprint lithography (Nanoimprint Lithography, NIL) is a kind of brand-new micro nano structure manufacture method, and it is that a kind of mould that uses realizes its patterned technology by the stress deformation of resist.Compared with existing micro-nano manufacture method, NIL has high resolution, Ultra Low Cost (a NIL order of magnitude at least lower than traditional optical projection photoetching of the equal production technique of internal authority organization evaluation) and large-duty feature.Especially the large-area nano impression, wafer scale (full wafer wafer) nano impression that in recent years occur, be considered to realize that large area micro-nano structure is efficient, the manufacture of low cost mass has one of technology of industrial applications prospect most.
But; the soft mold that large-area nano impression uses relies on manual manufacture at present; the mould produced also cannot meet the requirement that industrial scaleization is produced far away in quality, cost, efficiency etc.; and existing manufacture method only can realize the manufacture of small size soft mold; but, be difficult to realize large scale (especially the soft mold of more than 4 cun Integral wafer nano-imprinting needs) manufacture.The problems referred to above have become the maximum technical bottleneck of the extensive industrial applications of restriction large-area nano stamping technique at present.
Utility model content
The purpose of this utility model is exactly to solve the problem, and proposes a kind of large-area nano impression soft mold reproducing unit, can realize that large scale (wafer scale) soft mold is efficient, the manufacture of low cost mass.
To achieve these goals, the utility model adopts following technical scheme:
A kind of large-area nano impression soft mold reproducing unit, it comprises: base, workbench, master mold, packing ring, mold graph layer, mould support layer, dynamic plate, spacing module, Z-direction displacement platform, lead.Wherein workbench is fixed on base; Master mold is fixed on workbench by vacuum suction; Packing ring is fixed on workbench by vacuum suction, and surrounds the outside being embedded in master mold; Liquid mold graph layer material drops on master mold; Mould support layer is fixed on the lower surface of dynamic plate by vacuum suction; Spacing module is placed on dynamic plate; Z-direction displacement platform is connected with dynamic plate; Lead is fixed on base, and through dynamic plate.
The structure of described base comprises: aluminium sheet and adjustment screw, and wherein adjustment screw is placed in below aluminium sheet, for the leveling of the adjustment and horizontal plane that realize substructure height.
The structure of described workbench comprises: pedestal, heating element heater, and wherein heating element heater comprises heating tube or heating plate, and it is placed in the inside of pedestal, realizes the heating to pedestal; Pedestal upper surface is provided with cannelure, " cross " groove and gas circuit.Pedestal fixes master mold and packing ring by vacuum suction.
Described master mold comprises: silicon mould, quartz molds, nickel mould etc.
The material of described packing ring is the low-surface-energy material such as Teflon, PU, it is placed in pedestal upper surface, surround the outside being embedded in master mold, the internal diameter size of packing ring is equal with the external diameter of master mold, the height of packing ring is higher than the height of master mold, the difference in height of packing ring and master mold is exactly the height of mold feature graph layer, the width 3-10 millimeter of packing ring.Packing ring is provided with through hole, is expressed in the cannelure of Workbench base by unnecessary liquid graphic material.
The described soft mold copied, which comprises at least mold graph layer (feature structure layer) and mould support layer (backing), wherein the thickness 0.05-1 millimeter of mold graph layer, and the thickness of mould support layer is 0.2-3 millimeter; Mold graph layer and mould support layer can be same material, also can be different types of materials.
The structure of described dynamic plate comprises: gripper shoe, glass cover-plate, pressure ring, linear bearing, and wherein glass cover-plate is fixed on the upper surface of gripper shoe; Pressure ring is placed in the annular groove of gripper shoe lower surface, and is fixed in the annular groove of gripper shoe by vacuum suction; The lower surface of gripper shoe is also provided with cannelure, gas circuit, is fixed the supporting layer of compound soft mold by vacuum suction; The central axis of gripper shoe is also provided with a through hole, for passing of spacing pressure head; Linear bearing is fixed on 4 bights of gripper shoe, matches realize leading to dynamic plate with lead, guarantees that dynamic plate moves up and down in process that to keep with workbench parallel.
The structure of described spacing module comprises: support, spacing pressure head, and its medium-height trestle is fixed on base, and spacing pressure head is placed on the crossbeam of support.2 through holes on the central axis of the gripper shoe of its center and dynamic plate coincide.
The structure of described Z-direction displacement platform comprises: support, displacement platform, connecting plate, and the base plate of its medium-height trestle is connected with base and is fixed on base; Displacement platform is fixed on the riser of support; L shape connecting plate one end is fixed on displacement platform, and the other end is fixed in the gripper shoe of dynamic plate.Dynamic plate is driven to realize moving up and down of dynamic plate by Z-direction displacement platform.
Described lead matches with the linear bearing of dynamic plate, plays guide effect, guarantees that dynamic plate moves up and down and keeps parallel with workbench in process.
The quantity of described lead is 2,3 or 4.
The described height copying soft mold graph layer is regulated by the height of packing ring.
The beneficial effects of the utility model are:
(1) structure is simple, easy to operate, cost is low.
(2) wide adaptability of system, flexible high, may be used for the manufacture of different size (such as may be used for manufacture 4 inches, 6 inches and 8 inches with the manufacture of first-class wafer scale soft mold), difformity soft mold.
(3) efficient, low cost mass manufacture soft mold can be realized, meet the requirement of industrial scale applications.
(4) the soft mold quality manufactured by is good, precision is high, defect is low.
(5) the utility model achieves the manufacture of large scale wafer scale soft mold low cost, efficient, high accuracy and scale, for large-area nano impression and Integral wafer nano-imprinting provide a kind of important supporting tool and technology.
Accompanying drawing explanation
Fig. 1 is the utility model large-area nano impression soft mold reproducing unit structural representation one;
Fig. 2 is the utility model large-area nano impression soft mold reproducing unit structural representation two;
Fig. 3 is the base construction schematic diagram of utility model works platform;
Fig. 4 is the utility model embodiment soft mold structural representation;
Fig. 5 is the supporting plate structure schematic diagram that the utility model moves plate;
Fig. 6 is the spacing modular structure schematic diagram of the utility model;
Fig. 7 is the utility model Z-direction displacement platform structural representation;
Fig. 8 is the utility model embodiment soft mold replication work process flow diagram flow chart.
Wherein, 1 base, 2 workbench, 3 master molds, 4 packing rings, 5 mold graph layers, 6 mould support layers, 7 dynamic plates, 8 spacing modules, 9 Z-direction displacement platforms, 10 leads;
201 pedestals, 202 heating tubes, 203 cannelures, 204 " cross " groove, 205 gas circuit one, 206 gas circuits two; 30 soft molds; 701 gripper shoes, 702 glass cover-plates, 703 gas circuits, 704 linear bearings, 705 through holes; 801 supports, 802 spacing pressure heads, 803 crossbeams; 901 supports, 902 displacement platforms, 903 connecting plates, 904 base plates, 905 risers.
Detailed description of the invention
Below in conjunction with accompanying drawing and embodiment, the utility model is described further:
Should be appreciated that in the utility model, as gripper shoe, it act as support platform, must not represent that it is plate-shaped members, and therefore, the expression of technical problem that term used herein is mainly used in specific purpose and solves, not by its title is limited.
As depicted in figs. 1 and 2, a kind of large-area nano impression soft mold reproducing unit, comprising: base 1, workbench 2, master mold 3, packing ring 4, mold graph layer 5, mould support layer 6, dynamic plate 7, spacing module 8, Z-direction displacement platform 9, lead 10.
As shown in Figure 1, workbench 2 is fixed on base 1; Master mold 3 is fixed on workbench 2 by vacuum suction; Packing ring 4 is fixed on workbench 2 by vacuum suction, and surrounds the outside being embedded in master mold 3; Liquid mold graph layer material 5 is coated with and is layered on master mold 3; Mould support layer 6 is fixed on the lower surface of dynamic plate 7 by vacuum suction; Spacing module 8 is placed on dynamic plate 7; Z-direction displacement platform 9 is connected with dynamic plate 6; Lead 10 is fixed on base, and through dynamic plate 7.
The structure of base 1 is: comprise aluminium sheet and adjustment screw, and wherein 4 adjustment screw are placed in below aluminium sheet, for the leveling of the Height Adjustment and horizontal plane that realize base 1.
The structure of workbench 2 is: comprise pedestal 201, heating element heater, and wherein heating element heater is heating tube 202, and it is placed in the inside of pedestal 201, realizes the heating to pedestal 201; Pedestal 201 upper surface is provided with cannelure 203, " cross " groove 204 and gas circuit 1 and gas circuit 2 206; Vacuum gas is sent to cannelure 203 by " cross " groove 204, realize fixing the vacuum suction of master mold, gas path joint is screwed in gas circuit 1, the lateral aperture of gas circuit 1 is connected with the upright opening of gas circuit 2 206, further by gas circuit 2 206, vacuum gas is sent to cannelure 203 by " cross " groove 204 be connected, realizes fixing the vacuum suction of master mold.Pedestal 201 fixes master mold 3 by vacuum suction.Wherein the structure of pedestal 201 as shown in Figure 3.
Master mold 3 is the silicon mould of 4 inches, and its diameter is 100 millimeters, height 1.5 millimeters.
In other embodiment, master mold can also be quartz molds or nickel mould etc.
The material of packing ring 4 is Teflon, and it is placed in pedestal 201 upper surface, surrounds the outside being embedded in master mold 3, the internal diameter of packing ring 4 equal with the external diameter of master mold (diameter 100 millimeters), the height of packing ring 4 0.7 millimeter, the width of packing ring 45 millimeters.
The soft mold 30 copied, as shown in Figure 4, it comprises mold graph layer 5 and mould support layer 6, and wherein mold graph layer 5 is liquid PDMS, and mould support layer 6 adopts PET, and its thickness is 0.5 millimeter.The height copying soft mold graph layer is regulated by the height of packing ring 4.
The structure of dynamic plate 7 is: comprise gripper shoe 701, glass cover-plate 702, pressure ring, linear bearing 704; Wherein the structure of gripper shoe 701 as shown in Figure 5, and glass cover-plate 702 is fixed on the upper surface of gripper shoe 701; Pressure ring is placed in the annular groove of gripper shoe lower surface, and is fixed in the annular groove of gripper shoe 701 by vacuum suction; The lower surface of gripper shoe is also provided with cannelure, gas circuit 703, is fixed the supporting layer 6 of compound soft mold by vacuum suction; The central axis of gripper shoe 701 is also provided with 2 through holes 705, for passing through of spacing pressure head; 4 linear bearings 704 are fixed in the groove at 4 angles of gripper shoe, match realize leading to dynamic plate 7 with lead 10, guarantee that dynamic plate 7 moves up and down in process that to keep with workbench 2 parallel.
As shown in Figure 6, the structure of spacing module 8 is: comprise support 801, spacing pressure head 802, and its medium-height trestle 801 is fixed on base 1, and spacing pressure head 802 is placed on the crossbeam 803 of support 801.2 through holes 705 on the central axis of the gripper shoe 701 of its center and dynamic plate 7 coincide.
As shown in Figure 7, the structure of Z-direction displacement platform 9 is: comprise support 901, displacement platform 902, connecting plate 903, and the base plate 904 of its medium-height trestle 901 is connected with base 1 and is fixed on base 1; Displacement platform 902 is fixed on the riser 905 of support 901; L shape connecting plate 903 one end is fixed on displacement platform 902, and the other end is fixed in the gripper shoe 701 of dynamic plate 7.Drive the realization of dynamic plate 7 to move moving up and down of plate 7 by Z-direction displacement platform 9, described displacement platform 902 adopts manual translation platform.
In other embodiment, described Z-direction displacement platform also can adopt electricity driving displacement platform.In addition, Z-direction displacement platform also can centering position.
Lead 10 matches with the linear bearing 704 of dynamic plate 7, plays guide effect, guarantees moving up and down of dynamic plate 7 maintenance level.The quantity of lead can be set to 2,3 or 4 according to actual conditions.
Fig. 8 is the utility model embodiment soft mold replication work flow chart, based on device of the present utility model, the general principle that mould copies and specific works process as follows:
(1) mould copies preparation
1. master mold 3 and packing ring 4 are placed on the pedestal 201 of workbench 2, open vacuum line system, by vacuum suction, master mold 3 and packing ring 4 are fixed on the pedestal 201 of workbench 2;
2. first rotation displacement platform 902, it drives dynamic plate 7 to be elevated to the extreme higher position of setting, subsequently pressure ring 703 is placed in the annular groove of gripper shoe 701 lower surface of dynamic plate 7, and then mould support layer PET 6 is placed in gripper shoe 701 lower surface of dynamic plate 7, open vacuum line system, pressure ring 703 and mould support layer PET 6 are fixed in gripper shoe 701 annular groove of dynamic plate 7 and lower surface by vacuum suction;
3. the spacing pressure head 802 of spacing module 8 is placed in the highest order of setting.
(2) mould copies
1. the liquid PDMS material of mold graph layer 5 of 20 milliliters is dripped in master mold 3 central authorities;
2. hand rotation displacement platform 902, Z-direction displacement platform 9 drives dynamic plate 7 downward (master mold 3) slowly to decline, and can see the liquid PDMS of mold graph layer 5 slow uniform drawout on master mold 3 through glass cover-plate 702 and mould support layer 6 PET (being also transparent);
3. mould support layer 6 PET and Teflon packing ring 4 and liquid PDMS close contact is made, the liquid PDMS of mold graph layer 5 fills completely to master mold 3 feature cavity, and unnecessary liquid PDMS is flow to by the opening of packing ring 4 inside the groove of the groove in the pedestal 201 of workbench 2.
(3) dynamic plate removes
1. remove the vacuum of dynamic plate 7 gripper shoe 701, the vacuum suction of mould support layer 6 PET and pressure ring 703 is removed;
2. the spacing pressure head 802 of spacing module 8 declines, until spacing pressure head 802 pushes down pressure ring 703;
3. Z-direction displacement platform 9 rises, and drive dynamic plate 7 upwards to rise, dynamic plate 7 is elevated to the extreme higher position of setting;
4. the spacing pressure head 802 of spacing module 8 rises, and the spacing pressure head 802 of spacing module 8 rises to the extreme higher position of setting;
5. pressure ring 703 is removed.
(4) solidify
1. the heating element heater heat pipe 202 of workbench 2 is opened, until pedestal 201 is heated to 70-80 degree;
2. heat preservation solidification 1 hour.
(5) demoulding
1., after solidifying completely, remove the vacuum of workbench 2, master mold 2, mold graph layer 5, mould support layer 6 PET are together taken off from workbench 2;
2. adopt open-type release method, soft mold 30 is separated with master mold 3.
By reference to the accompanying drawings detailed description of the invention of the present utility model is described although above-mentioned; but the restriction not to the utility model protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical solution of the utility model, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection domain of the present utility model.
Claims (9)
1. a large-area nano impression soft mold reproducing unit, is characterized in that, comprising: base, workbench, master mold, packing ring, mold graph layer, mould support layer, dynamic plate, spacing module, Z-direction displacement platform, lead; Wherein workbench is fixed on base; Master mold is fixed on workbench by vacuum suction; Packing ring is fixed on workbench by vacuum suction, and is embedded in the periphery of master mold; Liquid mold graph layer material drops on master mold; Mould support layer is fixed on the lower surface of dynamic plate by vacuum suction; Spacing module is placed on dynamic plate; Z-direction displacement platform is connected with dynamic plate; Lead is fixed on base, and through dynamic plate.
2. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 1, is characterized in that, be provided with the adjustment screw for leveling base below described base.
3. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 1, it is characterized in that, described workbench comprises: pedestal and heating element heater, and heating element heater is placed in the inside of pedestal, realizes the heating to pedestal.
4. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 3, it is characterized in that, described pedestal upper surface is respectively equipped with cannelure, " cross " groove and gas circuit; Vacuum gas is sent to cannelure by " cross " groove be connected by described gas circuit, realizes fixing the vacuum suction of master mold.
5. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 1, it is characterized in that, described packing ring is placed in pedestal upper surface, surround the outside being embedded in master mold, the internal diameter size of packing ring is equal with the external diameter of master mold, the height of packing ring is higher than the height of master mold, and the difference in height of packing ring and master mold is exactly the height of mold feature graph layer, and the width range of packing ring is 3-10 millimeter.
6. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 1, it is characterized in that, described packing ring is provided with through hole, for being expressed in the cannelure of Workbench base by unnecessary liquid graphic material.
7. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 1, it is characterized in that, described dynamic plate comprises: gripper shoe, glass cover-plate, pressure ring and linear bearing, and wherein glass cover-plate is fixed on the upper surface of gripper shoe; Pressure ring is fixed in the annular groove of gripper shoe lower surface by vacuum suction; Linear bearing is fixed on 4 bights of gripper shoe, matches realize leading to dynamic plate with lead, guarantees that dynamic plate moves up and down in process that to keep with workbench parallel.
8. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 1, it is characterized in that, described spacing module comprises: support and spacing pressure head, and its medium-height trestle is fixed on base, and spacing pressure head is placed on the crossbeam of support; The bottom of spacing pressure head is through the through hole on dynamic plate.
9. a kind of large-area nano impression soft mold reproducing unit as claimed in claim 1, it is characterized in that, described Z-direction displacement platform comprises: support, displacement platform and connecting plate, and wherein, the base plate of support is connected with base and is fixed on base; Displacement platform is fixed on the riser of support; L shape connecting plate one end is fixed on displacement platform, and the other end is fixed on dynamic plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520368786.2U CN204640788U (en) | 2015-06-01 | 2015-06-01 | A kind of large-area nano impression soft mold reproducing unit |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520368786.2U CN204640788U (en) | 2015-06-01 | 2015-06-01 | A kind of large-area nano impression soft mold reproducing unit |
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| CN204640788U true CN204640788U (en) | 2015-09-16 |
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| CN201520368786.2U Withdrawn - After Issue CN204640788U (en) | 2015-06-01 | 2015-06-01 | A kind of large-area nano impression soft mold reproducing unit |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105034344A (en) * | 2015-06-01 | 2015-11-11 | 青岛博纳光电装备有限公司 | Large-area nanoimprinting soft die copying device and method |
| CN105137714A (en) * | 2015-10-10 | 2015-12-09 | 兰红波 | Large-size whole wafer nano-impressing device and impressing method thereof |
-
2015
- 2015-06-01 CN CN201520368786.2U patent/CN204640788U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105034344A (en) * | 2015-06-01 | 2015-11-11 | 青岛博纳光电装备有限公司 | Large-area nanoimprinting soft die copying device and method |
| CN105034344B (en) * | 2015-06-01 | 2017-09-29 | 青岛博纳光电装备有限公司 | A kind of large-area nano impressing soft mold reproducing unit and method |
| CN105137714A (en) * | 2015-10-10 | 2015-12-09 | 兰红波 | Large-size whole wafer nano-impressing device and impressing method thereof |
| CN105137714B (en) * | 2015-10-10 | 2019-08-13 | 兰红波 | A kind of device and its method for stamping of large scale wafer full wafer nano impression |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20150916 Effective date of abandoning: 20170929 |
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| AV01 | Patent right actively abandoned |