CN212610893U

CN212610893U - Boat pushing mechanism with auxiliary support and tubular PECVD (plasma enhanced chemical vapor deposition) equipment

Info

Publication number: CN212610893U
Application number: CN202020939948.4U
Authority: CN
Inventors: 朱辉; 梁浩; 谭瞻; 刘帅; 张春成; 赵志然
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2020-05-28
Filing date: 2020-05-28
Publication date: 2021-02-26
Anticipated expiration: 2030-05-28

Abstract

The utility model discloses a push away boat mechanism and tubular PECVD equipment with auxiliary stay pushes away boat mechanism and includes and pushes away the boat seat, pushes away boat oar group, auxiliary stay and horizontal sharp module, pushes away the boat seat and fixes on the sharp slider of horizontal sharp module, and the auxiliary stay includes supporting seat and bracing piece, and the supporting seat is fixed in the below of horizontal sharp module, and the bracing piece is installed on the supporting seat, pushes away boat oar group one end and fixes and pushing away the boat seat, and the other end is taken on the bracing piece. The equipment comprises a furnace body, a purification table and a quartz tube, wherein two electrode rods used for bearing a graphite boat are arranged in the quartz tube, the equipment also comprises the boat pushing mechanism with the auxiliary support, and the auxiliary support is arranged at one end, close to the furnace body, of the horizontal straight line module. The utility model discloses a newly-increased auxiliary stay changes the cantilever type atress of large-capacity graphite boat into the simply supported beam formula, and the amount of deflection of greatly reduced graphite boat handling realizes sending the boat and getting the safe touch of no in boat process.

Description

Boat pushing mechanism with auxiliary support and tubular PECVD (plasma enhanced chemical vapor deposition) equipment

Technical Field

The utility model relates to a solar wafer's production facility especially relates to a push away boat mechanism and tubular PECVD equipment with auxiliary stay.

Background

Solar energy is inexhaustible clean energy on the earth, and the cell can convert the solar energy into electric energy, so that the solar cell has wide market prospect. The silicon wafer is processed into the solar cell after a plurality of processes, and the surface coating is one of the core processes of the solar cell processing. The graphite boat is a carrier of a solar cell in a surface coating process, along with the market competition for the high-capacity and high-efficiency requirements, the graphite boat becomes longer and larger to meet the requirements of high capacity, the boat pushing mechanism corresponding to the graphite boat also becomes longer correspondingly, the deflection of the boat pushing mechanism becomes larger under the action of the longer boat pushing mechanism and the heavier graphite boat, and the boat feeding and taking processes collide with a reaction chamber. The existing technology is a push boat with a cantilever beam structure, no auxiliary support is provided, and when the push boat is used for graphite boats with smaller production capacity, the deflection is controlled within a reasonable range, and no collision occurs.

The conventional boat pushing mechanism is shown in fig. 1 and mainly comprises a boat pushing seat 1 and boat pushing paddles 22, wherein the two boat pushing paddles 22 are directly fixed on the boat pushing seat 1 side by side, the boat pushing seat 1 is connected with a horizontal linear module 4 on a purification table, and the horizontal linear module 4 drives the boat pushing seat 1 to move so as to drive the boat pushing paddles 22 to enter and exit the reaction chamber. The existing boat pushing mechanism is a cantilever beam model, and due to small capacity, the length of a cantilever is short, the boat mass is relatively light, so that the deflection is within a safety range, and the requirement that the boat is delivered and taken without touching a reaction chamber is met. However, as the productivity is increased, the graphite boat 7 is lengthened and enlarged, and the boat pushing cantilever beam (boat pushing paddle) is also corresponding to the side length, so that the deflection is increased under the action of a longer cantilever and larger gravity, and the boat feeding and taking are affected. The schematic diagram after the boat pushing mechanism is simplified into the cantilever beam is shown in fig. 2, wherein a part in fig. 2 is in an original state, and b part is in a stressed state, and compared with the original state, the deflection under different forces and action points is shown in fig. 2, wherein the force 2 is greater than the force 1, and the action point is farther away from the fixed point of the cantilever, so that the deflection is larger. Force 1 may be similar to the current typical capacity deflection change and force 2 may be similar to the high capacity deflection change.

FIG. 3 is a schematic diagram showing the position of the graphite boat 7 in the reaction chamber when the boat pushing mechanism is used to feed and take the graphite boat under different deflections. It can be seen from FIG. 3 that the conventional graphite boat can be used to transport and take out the graphite boat normally, while the high-capacity graphite boat has been touched with the quartz tube due to the larger deflection (P is the touch of the graphite boat 7 with larger deflection with the inner wall of the quartz tube). The large deflection collides with a quartz tube in the reaction chamber in the boat feeding and taking processes of the boat pushing mechanism, so that the quartz tube is possibly damaged, the sealing performance of the reaction chamber is influenced, the film coating effect is influenced, and the price of the quartz tube is high.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is overcome prior art not enough, provide one kind through newly-increased auxiliary stay, change the graphite boat cantilever beam formula atress of large capacity into simply supported beam formula, greatly reduced graphite boat handling's amount of deflection realizes sending the boat and getting the boat process safe and does not have the boat mechanism and the tubular PECVD equipment that pushes away that have auxiliary stay of touching.

In order to solve the technical problem, the utility model discloses a following technical scheme:

the utility model provides a push away boat mechanism with auxiliary stay, is including pushing away the boat seat, pushing away boat oar group, auxiliary stay and horizontal sharp module, it fixes on the sharp slider of horizontal sharp module to push away the boat seat, the auxiliary stay includes supporting seat and bracing piece, the supporting seat is fixed in the below of horizontal sharp module, the bracing piece is installed on the supporting seat, push away boat oar group one end and fix and push away the boat seat, and the other end is taken on the bracing piece.

As a further improvement of the above technical solution:

the push boat oar group includes mobile jib and two push boat oars, the diameter of mobile jib is greater than the diameter of push boat oar, the length of mobile jib is less than the length of push boat oar, mobile jib one end is fixed on pushing the boat seat, and two push boat oars are fixed side by side at the other end of mobile jib, the mobile jib overlaps with push boat oar part.

The utility model provides a tubular PECVD equipment, includes furnace body, clean bench and locates the quartz capsule in the furnace body, one side of clean bench is located to the furnace body, be equipped with two electrode rods that are used for bearing the graphite boat in the quartz capsule, tubular PECVD equipment still includes foretell boat pushing mechanism that has the auxiliary stay, horizontal straight line module is installed on the clean bench, the auxiliary stay is established in the one end that horizontal straight line module is close to the furnace body.

As a further improvement of the above technical solution:

the quartz capsule is internally provided with a furnace lifting support for supporting the pushing paddle group, the furnace lifting support comprises a support cylinder and a support piece arranged at the drive end of the support cylinder, the pushing paddle group can be lapped on the support piece, and the furnace lifting support is arranged between two electrode rods.

The top support part is a top support round rod.

The auxiliary support further comprises a lifting module used for driving the supporting rod to lift, the lifting module is installed on the supporting seat, and the supporting rod is connected with the lifting module.

Be equipped with guide mounting panel and two sets of guide structure on the supporting seat, guide structure includes direction slider and installation pole, the installation pole both ends are fixed on the supporting seat, the mobilizable installation pole of wearing to locate of direction slider, the guide mounting panel is fixed on two direction sliders, the bracing piece is fixed on the guide mounting panel.

The guide mounting plate is provided with a C-shaped clamping sleeve, clamping portions are arranged at two ends of the C-shaped clamping sleeve, the supporting rod is sleeved in the C-shaped clamping sleeve, and locking bolts penetrate through the clamping portions at the two ends.

The lifting module is a cylinder, and a piston rod of the cylinder is connected with the guide mounting plate.

Compared with the prior art, the utility model has the advantages of:

(1) the utility model discloses a push away boat mechanism with auxiliary stay under the condition that does not increase quartz capsule (reacting chamber) internal diameter, through newly-increased auxiliary stay, change the graphite boat cantilever beam formula atress of large capacity into the letter beam type, the amount of deflection of greatly reduced graphite boat handling realizes sending the boat and getting the safe touch that does not have of boat process. In addition to the additional auxiliary support to solve the deflection problem, the height of the apparatus can be well controlled because the apparatus needs to control the height, which is increased by 5 times if the reaction chamber diameter is increased.

(2) The utility model discloses a tubular PECVD equipment through newly-increased outer auxiliary stay of stove and the interior lift support of stove, no matter push away the boat oar in the stove still outside the stove, what push away the boat oar group is simple beam structure, and cantilever structure, greatly reduced the amount of deflection, after the boat oar group gets into the quartz capsule, bump the probability reduction of touching the quartz capsule inner wall, reduce the amount of deflection of pushing away the boat oar group at graphite boat handling, realize sending the boat and get boat process safety and do not have the touching.

Drawings

Fig. 1 is a schematic structural diagram of a boat pushing mechanism in the prior art.

FIG. 2 is a diagram of the deflection of the prior art propeller in the original state and the stressed state.

FIG. 3 is a diagram of the position of a graphite boat, a conventional graphite boat, and a high-capacity graphite boat in a quartz tube in an ideal state in the prior art.

Fig. 4 is a schematic structural view of a boat pushing mechanism with auxiliary support according to embodiment 1 of the present invention.

Fig. 5 is a schematic perspective view (a) of the auxiliary support in embodiment 1 of the present invention.

Fig. 6 is a schematic perspective view (ii) of the auxiliary support in embodiment 1 of the present invention.

Fig. 7 is a schematic view of the deflection of the propeller in embodiment 1 of the present invention.

Fig. 8 is a schematic front view of a boat pushing paddle set in embodiment 1 of the present invention.

Fig. 9 is a schematic perspective view of a boat pushing paddle set in embodiment 1 of the present invention.

Fig. 10 is a schematic structural view of a tubular PECVD apparatus according to embodiment 2 of the present invention.

Fig. 11 is a schematic view of a graphite boat in embodiment 2 of the present invention, wherein the graphite boat is placed on the boat pushing paddle and the support rod is in a supporting state.

Fig. 12 is a schematic view of a graphite boat in embodiment 2 of the present invention, in which the graphite boat is fed into the quartz tube, the lifting support is in a supporting state, and the supporting rod is in an unsupported state.

Fig. 13 is a schematic view of the graphite boat in the embodiment 2 of the present invention completely entering the quartz tube.

Fig. 14 is a schematic view of the graphite boat in the state where the graphite boat falls on the electrode rod and the boat pushing paddle starts to exit in embodiment 2 of the present invention.

Fig. 15 is a schematic view of a state in which the boat-pushing paddle completely exits the quartz tube according to embodiment 2 of the present invention.

Fig. 16 is a schematic view of a state in which a boat pushing paddle enters a quartz tube to take a boat in embodiment 2 of the present invention.

Fig. 17 is a schematic view of a state where the boat is taken out by the boat pushing paddle in embodiment 2 of the present invention and the quartz tube is completely withdrawn.

The reference numerals in the figures denote:

1. a boat pushing seat; 2. a boat pushing paddle group; 21. a main rod; 22. pushing a boat oar; 3. auxiliary supporting; 31. a supporting seat; 32. a support bar; 33. a lifting module; 34. a guide mounting plate; 35. a guide slider; 36. mounting a rod; 37. a C-shaped cutting sleeve; 38. a clamping portion; 39. locking the bolt; 4. a horizontal straight line module; 41. a linear slider; 5. a furnace body; 6. a quartz tube; 7. a graphite boat; 8. an electrode rod; 9. lifting and supporting in the furnace; 91. a support cylinder; 92. and (4) supporting the round rod.

Detailed Description

The invention is described in further detail below with reference to the drawings and specific examples.

Example 1

As shown in fig. 4 to 9, the boat pushing mechanism with auxiliary support of this embodiment includes a boat pushing seat 1, a boat pushing paddle set 2, an auxiliary support 3 and a horizontal linear module 4, the boat pushing seat 1 is fixed on a linear slider 41 of the horizontal linear module 4, the auxiliary support 3 includes a support seat 31 and a support rod 32, the support seat 31 is fixed below the horizontal linear module 4, the support rod 32 is installed on the support seat 31, one end of the boat pushing paddle set 2 is fixed on the boat pushing seat 1, and the other end of the boat pushing paddle set is lapped on the support rod 32.

In specific application, the boat pushing mechanism is installed on a purification table (not shown in the figure) of the tubular PECVD equipment through a horizontal linear module 4, a furnace body 5 is arranged on one side of the purification table, a quartz tube 6 is arranged in the furnace body 5, and the auxiliary support 3 is close to the section of the quartz tube 6. The graphite boat 7 is loaded on the boat pushing paddle group 2, the front end of the boat pushing paddle group 2 is abutted against the support rod 32, the boat pushing paddle group 2 is not of a cantilever structure, but of a simply supported beam type with supports at two ends, the linear sliding block 41 of the horizontal linear module 4 drives the boat pushing paddle group 2 to move forward, the graphite boat 7 is sent into the quartz tube 6, the deflection is greatly reduced due to the fact that the auxiliary support 3 is arranged before the graphite boat enters the quartz tube 6, the probability of touching the inner wall of the quartz tube 6 is reduced after the boat pushing paddle group 2 enters the quartz tube 6, the deflection of the boat pushing paddle group 2 in the graphite boat carrying process is reduced, and safety and no touch in the boat sending and taking processes are achieved.

This push away boat mechanism with auxiliary stay under the condition that does not increase quartz capsule 6 (reaction chamber) internal diameter, through newly-increased auxiliary stay 3, changes the cantilever beam formula atress of high-capacity graphite boat into simply supporting beam formula, and the amount of deflection of greatly reduced graphite boat 7 handling realizes sending the boat and getting the safe nothing of boat process and touch. In addition to solving the problem of deflection, the added auxiliary support 3 can also control the height of the equipment well, because the equipment needs to control the height, if the equipment is solved by increasing the diameter of the reaction chamber, the height direction is increased by 5 times, the existing commonly adopted 5-tube PECVD equipment is that the equipment has 5 reaction chambers in the height direction, the inner diameter of each reaction chamber is increased, and the height of the whole equipment is increased undoubtedly.

In this embodiment, the boat pushing paddle group 2 includes a main rod 21 and two boat pushing paddles 22, the diameter of the main rod 21 is greater than the diameter of the boat pushing paddles 22, the length of the main rod 21 is less than the length of the boat pushing paddles 22, one end of the main rod 21 is fixed on the boat pushing base 1, the two boat pushing paddles 22 are fixed at the other end of the main rod 21 side by side, and the main rod 21 and the boat pushing paddles 22 are partially overlapped.

In this embodiment, it is preferable that the diameter of the main rod 21 is 80mm, the diameter of the pusher paddle 22 is 55mm, the effective length of the pusher paddle 22 is shortened, and the diameter of the main rod 21 is larger and has strong rigidity resistance, so that the deflection can be reduced.

In this embodiment, after the auxiliary support 3 is added, the stress on the propeller 22 is changed from the front cantilever beam stress to the simply supported beam stress, and the stress after the auxiliary support 3 is added is schematically shown in fig. 7. As can be seen from fig. 7, after the stress of the boat pushing paddle 22 is changed, the deflection (solid line in fig. 7) is obviously improved, and the requirement of the deflection of the large-capacity graphite boat is met.

In this embodiment, the support rod 32 is a circular rod, which reduces the contact area with the propeller 22 and reduces the friction coefficient, so that the propeller 22 is reduced to receive the resistance from the auxiliary support 3, and the circular rod is favorable for reducing the collision between the propeller 22 and the support rod 32, so that the contact can be more gentle.

Example 2

As shown in fig. 4 and 10, the tubular PECVD apparatus of this embodiment includes a furnace body 5, a purification stage and a quartz tube 6 disposed in the furnace body 5, the furnace body 5 is disposed at one side of the purification stage, two electrode rods 8 for bearing a graphite boat 7 are disposed in the quartz tube 6, the tubular PECVD apparatus further includes the boat pushing mechanism with auxiliary support of embodiment 1, the horizontal linear module 4 is mounted on the purification stage, and the auxiliary support 3 is disposed at one end of the horizontal linear module 4 close to the furnace body 5.

Through newly-increased auxiliary stay 3, change the cantilever structure of pushing away boat oar group 2 into the simply supported beam structure, greatly reduced the amount of deflection, after pushing away boat oar group 2 and getting into quartz capsule 6, the probability that touches the 6 inner walls of quartz capsule reduces, reduces the amount of deflection of pushing away boat oar group 2 in graphite boat handling process, realizes sending the boat and getting the boat process safety and do not have the touching.

As shown in fig. 10, in this embodiment, a furnace internal lifting support 9 for supporting the boat pushing paddle group 2 is arranged in the quartz tube 6, the furnace internal lifting support 9 includes a support cylinder 91 and a support member arranged at the drive end of the support cylinder 91, the boat pushing paddle group 2 can be put on the support member, and the furnace internal lifting support 9 is arranged between the two electrode rods 8. The auxiliary support 3 is adopted outside the furnace and used for supporting the pushing paddle group 2 before entering the quartz tube 6, and the pushing paddle group 2 is supported by the top support part of the lifting support 9 in the furnace after entering the quartz tube 6. The top brace is preferably a top brace rod 92.

The working principle of the lifting support 9 in the furnace is as follows: when the boat pushing paddle group 2 starts to enter the quartz tube 6 and is supported on the top support round rod 92, the support cylinder 91 does not act at the moment, after the boat pushing paddle group 2 completely enters the quartz tube 6, the boat pushing paddle group 2 starts to descend, the support cylinder 91 also descends, in the descending process, the graphite boat 7 falls on the two electrode rods 8, and then the boat pushing paddle group 2 withdraws from the quartz tube 6. The arrangement of the lifting support 9 in the furnace ensures that the pushing paddle group 2 enters the quartz tube 6 and is also of a simply supported beam structure instead of a cantilever structure, thereby greatly reducing the deflection of the pushing paddle group 2 and avoiding the contact between the pushing paddle group 2 and the inner wall of the quartz tube 6.

In this embodiment, two sets of in-furnace elevating supports 9 are provided, one behind the other, arranged in the quartz tube 6. The auxiliary support 3 further comprises a lifting module 33 for driving the support rod 32 to lift, the lifting module 33 is installed on the support seat 31, and the support rod 32 is connected with the lifting module 33.

Wherein, be equipped with direction mounting panel 34 and two sets of guide structure on the supporting seat 31, guide structure includes direction slider 35 and installation pole 36, and the installation pole 36 both ends are fixed on supporting seat 31, and the mobilizable installation pole 36 of wearing to locate of direction slider 35 is fixed on two direction sliders 35 to direction mounting panel 34, and bracing piece 32 is fixed on direction mounting panel 34. The guide mounting plate 34 is provided with a C-shaped cutting sleeve 37, two ends of the C-shaped cutting sleeve 37 are provided with clamping portions 38, the support rod 32 is sleeved in the C-shaped cutting sleeve 37, and the clamping portions 38 at the two ends are provided with locking bolts 39 in a penetrating manner. The lifting module 33 is preferably a cylinder, the piston rod of which is connected to the guide mounting plate 34. In other embodiments, the lifting module 33 may be a belt drive, a ball screw, an electric cylinder, or the like.

The cooperative action of the auxiliary support 3 and the furnace lifting support 9 is as follows:

before the pusher paddle 22 enters the quartz tube 6, the auxiliary support 3 functions to support the pusher paddle 22. When the pusher paddle 22 enters the quartz tube 6 and starts to be lapped on the top support round rod 92, the support rod 32 of the auxiliary support 3 outside the quartz tube 6 needs to descend and leaves the pusher paddle 22, and at the moment, the rear end of the front end of the pusher paddle 22 forms a simple beam structure instead of a cantilever structure, so that the support rod 32 is withdrawn, firstly, the pusher paddle 22 and the pusher seat 1 do not collide with the support rod 32 when being withdrawn into the chamber, secondly, the front end of the pusher paddle 22 is ensured to be supported on the top support round rod 92, and thirdly, redundant friction generated in the moving process of the pusher paddle 22 can be reduced.

The boat entering and exiting process of the tubular PECVD equipment comprises the following steps:

1) as shown in fig. 11, the graphite boat 7 loaded with the silicon wafer to be coated is placed on the pushing paddle 22 by the robot arm, and the supporting rod 32 outside the furnace is in a supporting state;

2) as shown in fig. 12, the pushing paddle 22 sends the graphite boat 7 into the quartz tube 6, the furnace inner lifting support 9 is in a supporting state under stress, and the furnace outer support rod 32 descends and exits the support;

3) as shown in fig. 13, the boat pushing seat 1 crosses the support rod 32, and the graphite boat 7 is completely put into the quartz tube 6;

4) as shown in fig. 14 and 15, the pusher paddle 22 descends, the support cylinder 91 descends, the furnace lifting support 9 is in a non-support state, the graphite boat 7 falls onto the electrode rod 8 in a soft landing state, and the pusher paddle 22 exits from the quartz tube 6;

5) as shown in fig. 16, after the process is finished and the oven door is opened, the boat pushing paddle 22 enters the quartz tube 6, the graphite boat 7 is lifted up, the graphite boat 7 leaves the electrode rod 8 and is located on the boat pushing paddle 22, the supporting cylinder 91 is lifted up, the supporting function is continued, the boat pushing paddle 22 is lapped on the top supporting round rod 92, and the quartz tube 6 starts to be pushed back;

6) as shown in fig. 17, the graphite boat is moved out of the quartz tube 6 by the boat pushing paddle 22, the support rod 32 outside the furnace is lifted to restore the support before the boat pushing paddle 22 is separated from the top support round rod 92, the graphite boat 7 is waited for the mechanical arm to pick up, and then the process returns to the 1 st cycle.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention. The technical solution of the present invention can be used by anyone skilled in the art to make many possible variations and modifications, or to modify equivalent embodiments, without departing from the scope of the technical solution of the present invention, using the technical content disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments by the technical entity of the present invention should fall within the protection scope of the technical solution of the present invention.

Claims

1. The utility model provides a push away boat mechanism with auxiliary stay which characterized in that: including pushing away boat seat (1), pushing away boat oar group (2), auxiliary stay (3) and horizontal straight line module (4), push away boat seat (1) and fix on straight line slider (41) of horizontal straight line module (4), auxiliary stay (3) are including supporting seat (31) and bracing piece (32), the below at horizontal straight line module (4) is fixed in supporting seat (31), install on supporting seat (31) bracing piece (32), push away boat oar group (2) one end and fix and push away boat seat (1), the other end is taken on bracing piece (32).

2. The boat pushing mechanism with auxiliary support of claim 1, wherein: push away boat oar group (2) including mobile jib (21) and two push away boat oar (22), the diameter of mobile jib (21) is greater than the diameter that pushes away boat oar (22), the length of mobile jib (21) is less than the length that pushes away boat oar (22), mobile jib (21) one end is fixed on pushing away boat seat (1), and two push away boat oar (22) are fixed side by side at the other end of mobile jib (21), mobile jib (21) with push away boat oar (22) partial overlap.

3. The utility model provides a tubular PECVD equipment, includes furnace body (5), clean bench and locates quartz capsule (6) in furnace body (5), one side of clean bench is located in furnace body (5), be equipped with two electrode rod (8) that are used for bearing graphite boat (7) in quartz capsule (6), its characterized in that: the tubular PECVD equipment also comprises a boat pushing mechanism with an auxiliary support according to claim 1 or 2, wherein the horizontal linear module (4) is arranged on the purification table, and the auxiliary support (3) is arranged at one end of the horizontal linear module (4) close to the furnace body (5).

4. The tubular PECVD apparatus of claim 3, wherein: be equipped with in quartz capsule (6) and be used for supporting stove lift support (9) of pushing away boat oar group (2), stove lift support (9) is including supporting cylinder (91) and locating the piece of shoring of supporting cylinder (91) drive end, push away boat oar group (2) can be put up on the piece of shoring, stove lift support (9) are located between two electrode pole (8).

5. The tubular PECVD apparatus of claim 4, wherein: the top support is a top support round bar (92).

6. The tubular PECVD apparatus of claim 5, wherein: the auxiliary support (3) further comprises a lifting module (33) used for driving the supporting rod (32) to lift, the lifting module (33) is installed on the supporting seat (31), and the supporting rod (32) is connected with the lifting module (33).

7. The tubular PECVD apparatus of claim 6, wherein: be equipped with direction mounting panel (34) and two sets of guide structure on supporting seat (31), guide structure includes direction slider (35) and installation pole (36), install pole (36) both ends and fix on supporting seat (31), the mobilizable installation pole (36) of wearing to locate of direction slider (35), direction mounting panel (34) are fixed on two direction sliders (35), bracing piece (32) are fixed on direction mounting panel (34).

8. The tubular PECVD apparatus of claim 7, wherein: be equipped with C shape cutting ferrule (37) on guide mounting board (34), the both ends of C shape cutting ferrule (37) are equipped with clamping part (38), bracing piece (32) cover is worn to be equipped with locking bolt (39) on clamping part (38) at both ends in C shape cutting ferrule (37).

9. The tubular PECVD apparatus of claim 7 or 8, characterized in that: the lifting module (33) is an air cylinder, and a piston rod of the air cylinder is connected with the guide mounting plate (34).