CN212286974U

CN212286974U - Cutting blade back scratch processing apparatus

Info

Publication number: CN212286974U
Application number: CN202020859610.8U
Authority: CN
Inventors: 聂伟; 许秀真; 孟强; 丁培杰
Original assignee: Jiangsu Union Semiconductor Co Ltd
Current assignee: Jiangsu Union Semiconductor Co Ltd
Priority date: 2020-05-21
Filing date: 2020-05-21
Publication date: 2021-01-05
Anticipated expiration: 2030-05-21

Abstract

The utility model discloses a cutting blade back scratch processing apparatus in the semiconductor processing field, including the rectangle workstation that the level set up, the workstation downside is provided with a plurality of vertical supporting legs, has vertically run through on the workstation and has seted up the processing groove, is provided with and the support frame below the processing groove, rotates on the support frame and is connected with vertical main pivot, and main pivot is connected with the transmission of rotary driving mechanism, and cutting blade fixes in main pivot upper end, and cutting blade is circular, and cutting blade's axis vertical setting; a movable seat capable of moving longitudinally is arranged on the workbench corresponding to the processing groove, a transversely moving seat capable of moving transversely is arranged on the movable seat, a cutter seat capable of moving up and down is arranged on the transversely moving seat, a processing cutter is arranged on the cutter seat, and the processing cutter is arranged corresponding to the cutting blade; and a feeding and discharging mechanism is arranged corresponding to the workbench. The utility model discloses can conveniently level cutting blade's surface grinding for cutting blade's reuse rate improves.

Description

Cutting blade back scratch processing apparatus

Technical Field

The utility model belongs to the semiconductor processing field, in particular to cutting blade back scratch processing apparatus.

Background

Among the prior art, the wafer becomes a plurality of IC products after horizontal, vertical cutting for a plurality of times, and the cutting machine that the wafer cutting adopted has a rotatory main shaft, fixedly connected with flange on the main shaft, and the flange hole has been seted up at the flange center, and cutting blade's centre bore passes through bolt and flange looks fixed connection, and the bolt passes cutting blade's centre bore and the centre bore threaded connection of flange, and the bolt compresses tightly cutting blade setting.

The main shaft flange of cutting machine is the rigidity piece, and the blade is the easy wearing and tearing of aluminium part, if the surperficial unevenness of rigidity flange, can produce the scratch to cutting blade surface, can lead to cutting blade not to laminate well on the flange face because of the scratch of cutting blade surface unevenness when installing cutting blade to the main shaft on. The cutting blade is not attached to the flange surface, so that the cutter mark generated when the wafer is cut is widened, the cutter mark is distinguished from the cutter mark of a normal wafer, normal cutting is influenced, the surface of the cutting blade is not suitable for the wafer product after being scratched, and the cutting blade cannot be put into use. The cutting blade cannot be used mainly due to blade back scratch, and the current coping method is as follows: personnel manually use fine sand paper to polish the processing to the scratch, and not only the efficiency of polishing is lower, has the risk of haring the neighboring edge cutting edge of cutting blade moreover when grinding the blade, if the cutting edge damage, personnel and board can not inspect the cutting edge of cutting blade unusual, can cause the IC product of cutting out to have the abnormal occurrence.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a cutting blade back scratch processing apparatus can conveniently level cutting blade's surface grinding, and degree of automation is higher, guarantees that the cutting blade mounting end face after the grinding levels for cutting blade's reuse rate improves, reduces cutting blade cost, has improved the cutting efficiency to the wafer product.

The purpose of the utility model is realized like this: a scratch processing device for the back of a cutting blade comprises a horizontally arranged rectangular workbench, wherein a plurality of vertical supporting legs are arranged on the lower side of the workbench, a processing groove is vertically formed in the workbench in a penetrating mode, a U-shaped supporting frame fixedly connected with the workbench is arranged below the processing groove, a vertical main rotating shaft is connected to the supporting frame in a rotating mode and is in transmission connection with a rotary driving mechanism, the cutting blade is fixed to the upper end of the main rotating shaft and is circular, and the axis of the cutting blade is vertically arranged; a movable seat capable of moving longitudinally is arranged on the workbench corresponding to the processing groove, a transversely moving seat capable of moving transversely is arranged on the movable seat, a cutter seat capable of moving up and down is arranged on the transversely moving seat, a processing cutter is arranged on the cutter seat, and the processing cutter is arranged corresponding to the cutting blade; and a feeding and discharging mechanism is arranged corresponding to the workbench.

The utility model discloses during operation, the cutting blade that has the scratch on the surface is collected and is deposited in waiting to process the district, go up unloading mechanism work and send cutting blade to the processing groove below on the workstation from waiting to process the district, fix cutting blade in main pivot upper end, then remove the seat longitudinal movement to the position that is close to cutting blade, the tool rest descends to the position that processing cutter and cutting blade correspond, rotary drive mechanism drives main pivot and rotates, main pivot drives cutting blade and rotates, the sideslip seat removes and carries out the polishing processing of about 2 microns to the up end of cutting blade of processing cutter, grind the scratch flat; after polishing, the feeding and discharging mechanism conveys the processed cutting blade to a processing completion area. Compared with the prior art, the beneficial effects of the utility model reside in that: can conveniently level cutting blade's surface grinding, degree of automation is higher, guarantees that the cutting blade mounting end face after the grinding levels for cutting blade's reuse rate improves, reduces cutting blade cost, has improved the cutting efficiency to the wafer product.

As a further improvement of the utility model, the supporting leg is provided with four, and the below level of each supporting leg is provided with the bottom plate, every supporting leg lower extreme and bottom plate looks fixed connection. The four supporting legs ensure that the workbench is stably supported.

As a further improvement of the present invention, the processing groove includes a rectangular main groove and a first tool groove, the width of the main groove is greater than that of the first tool groove, a sliding cover plate and a guide plate are disposed in the main groove and distributed vertically in a corresponding manner, the front and rear sides of the sliding cover plate are both slidably connected to the side walls of the corresponding main groove, the guide plate is fixed to the inner wall of the main groove, and when the sliding cover plate moves rightwards to be attached to the right side wall of the main groove, the cutting blade is located in the vertical downward projection area of the sliding cover plate; a second cutter groove is formed in the sliding cover plate in a vertical penetrating mode corresponding to the cutting blade, and the first cutter groove and the second cutter groove correspond to the machining cutter. Before the machining cutter polishes the cutting blade, the sliding cover plate is staggered with the cutting blade; after the cutting blade is arranged on the main rotating shaft, the sliding cover plate moves to a position capable of shielding the cutting blade, and the machining cutter moves along the cutter groove I and the cutter groove II and polishes the cutting blade; in the course of working, the sliding cover plate plays the role of shielding and protecting, and flying chips are prevented from jumping in disorder.

As a further improvement, the corresponding sliding cover plate transversely is provided with a first lead screw seat on the workstation, and both ends all are provided with the bearing frame about the first lead screw seat, and rotationally the level is provided with a first lead screw between two bearing frames, is provided with a first lead screw nut on the first lead screw, and a first lead screw nut downside is provided with a first slider, is provided with a first guide rail that parallels with a lead screw on the lead screw seat, a first and a guide rail looks sliding connection of slider, lead screw nut is connected with the sliding cover plate through L shape connecting piece, and the one end and the motor or the hand wheel of a lead screw are transmission connection mutually. The motor or the hand wheel drives the first lead screw to rotate, and the first lead screw nut drives the sliding cover plate to move through the connecting piece.

As the utility model discloses a further improvement, rotary driving mechanism is including corresponding the main motor of main pivot setting in the support frame below, and the vertical output of main motor is connected with main reducer's input end transmission, and main reducer's output and main pivot looks transmission are connected, and cutting blade passes through collet chuck to be fixed in main pivot. After the main motor is decelerated by the main speed reducer, the main rotating shaft is driven to rotate, and the cutting blade is driven to rotate.

As a further improvement, the vertical threaded hole in main pivot upper end, fastening bolt pass cutting blade's centre bore and with threaded hole threaded connection, fastening bolt's bolt seat compresses tightly cutting blade. The cutting blade is fixed with the main rotating shaft through the fastening bolt, and the cutting blade can also be fixed through the annular workpiece positioning clamp.

As a further improvement of the present invention, the movable base is provided with two parallel longitudinal guide rails on the worktable, at least two longitudinal sliders are provided at the lower side of the movable base, each longitudinal slider is slidably connected with the corresponding longitudinal guide rail, longitudinal movement driving mechanisms are provided at the left and right sides of the movable base on the worktable, each longitudinal movement driving mechanism includes two bearing blocks corresponding to each other in the front and back direction, a second lead screw is rotatably and longitudinally provided between the two bearing blocks, a second lead screw nut is provided on the second lead screw, the second lead screw nut is connected with the movable base through a connecting piece, and one end of the second lead screw is in transmission connection with a motor through a first speed reducer; the automatic cutting machine is characterized in that an electro-hydraulic proportional servo cylinder is arranged on the moving seat, the working end of the electro-hydraulic proportional servo cylinder is in transmission connection with the transverse moving seat, a transverse guide rail is arranged on the moving seat, the transverse moving seat is in sliding connection with the transverse guide rail, the transverse moving seat is in an L shape, the cutter seat is in sliding connection with a vertical guide rail on the transverse moving seat through a sliding block, a U-shaped cutter frame is arranged on the cutter seat, the upper end of a machining cutter upwards penetrates through a rectangular hole of the cutter frame, a fastener fixedly connects the cutter frame with the machining cutter, and a micrometer used for adjusting the vertical position of the cutter seat is further arranged. The motor drives the second lead screw to rotate after the first speed reducer decelerates, the second lead screw nut drives the moving seat to move along the longitudinal guide rail, the electro-hydraulic proportional servo cylinder drives the transverse moving seat to move along the transverse guide rail, the cutter seat moves up and down along the vertical guide rail, and the vertical position of the cutter seat is finely adjusted through the high-precision micrometer.

As a further improvement of the utility model, the feeding and discharging mechanism comprises a frame, the frame comprises two top guide rails which are parallel to each other, the top guide rails are longitudinally arranged, at least three vertical support columns are arranged below each top guide rail along the length direction at intervals, the lower ends of the support columns are provided with supports which are contacted with the ground, a movable support is arranged between the two top guide rails, the axis of the movable support is vertical to the top guide rails, the left end and the right end of the movable support are both provided with roller frames, the front side and the rear side of each roller frame are respectively and rotatably provided with a front roller and a rear roller, the middle part of the movable support is vertically provided with a second driving motor, the output shaft of the second driving motor is arranged downwards, the movable support is provided with a second speed reducer corresponding to the second driving motor, the second speed reducer is provided with two output shafts which are, the left side and the right side of the second speed reducer on the movable support are respectively provided with a rotating shaft, the left end and the right end of the movable support are respectively provided with a supporting seat, one end, facing outwards, of each rotating shaft is rotatably supported on the corresponding supporting seat, the other end of each rotating shaft is in transmission connection with the corresponding output shaft of the second speed reducer, one end, facing outwards, of each rotating shaft extends to the other side of the corresponding supporting seat and is provided with a first chain wheel, a roller shaft is rotatably arranged on the roller frame and is parallel to the rotating shafts, two ends of the roller shaft are respectively provided with a second chain wheel and a driving roller wheel, the chain wheels are in transmission connection with the second chain wheel through chains, the driving roller wheels, the front roller wheels and the rear roller wheels are correspondingly arranged and are all. The driving motor II drives the rotating shafts on the two sides to rotate through the speed reducer II, the rotating shafts drive the chain wheels I to rotate, the chain wheels I drive the chain wheels II to rotate, the driving idler wheels obtain power, the idler wheel frames on the two sides move along the top guide rail through the driving idler wheels, the front idler wheels and the rear idler wheels, and the moving support can move longitudinally.

As a further improvement, the guiding mechanism includes the adjustment seat with movable support sliding connection, and the adjustment seat includes horizontal part and vertical portion, and fixed mounting has motor three on the adjustment seat horizontal part, and the movable support downside is provided with the rack along length direction, and the output of motor three is mutually perpendicular with the rack, and the output of motor three is provided with the gear, and the gear meshes with the rack mutually and is connected, elevating mechanism includes the crane of sliding connection in the vertical portion of adjustment seat, and the vertical portion of adjustment seat is located the equal vertical lift cylinder that is equipped with in the left and right sides of crane, and the piston rod of lift cylinder stretches out the end and is connected with one side of corresponding of crane through the connecting seat, and the lower extreme of crane is provided with vertical lifing arm, and the cross-sectional area of lifing. The third motor drives the gear to move along the rack, the adjusting seat can transversely move along the length direction of the movable support, the extending end of the piston rod of the lifting cylinder drives the lifting frame to move up and down, and the vertical position of the grabbing mechanism is adjusted.

As a further improvement, the cutting blade includes annular cutting portion and wheel hub portion, and wheel hub portion and the coaxial setting of cutting portion, wheel hub portion external diameter are less than the cutting portion external diameter, and the cutting portion periphery is provided with the cutting edge, and the centre bore aperture of wheel hub portion and cutting portion equals, snatchs the mechanism and includes a plurality of vacuum chuck that set up at the lifing arm lower extreme, and vacuum chuck's cross-sectional area is 1~2cm²Each vacuum chuck is provided with at least two circles, and each circle of vacuum chuck is distributed around the periphery of the central hole of the cutting part. Each vacuum chuck on the lifting arm adsorbs and fixes the end surface of the annular cutting part of the cutting blade, so that the cutting blade is driven to move freely; the cutting blade can also be moved by a robot.

Drawings

Fig. 1 is a three-dimensional structure diagram of the present invention.

Fig. 2 is a perspective view of the movable stand.

FIG. 3 is a diagram of the driving relationship of the first sprocket and the second sprocket.

Fig. 4 is a perspective view of the movable stand.

Fig. 5 is a positional relationship diagram of the gear and the rack.

Fig. 6 is a schematic structural view of the rack mounted on the moving bracket.

Fig. 7 is a schematic structural view of the table.

Fig. 8 is an enlarged view of the table.

Fig. 9 is a partially enlarged view of fig. 8.

Fig. 10 is a sectional view of the table.

Fig. 11 is a cross-sectional view of a cutting blade.

Fig. 12 is a schematic view of a vacuum chuck sucking and fixing a cutting blade.

Wherein, 1, a workbench, 2 support legs, 3 support frames, 4 main rotating shafts, 5 cutting blades, 5a cutting parts, 5b hub parts, 6 moving seats, 7 traversing seats, 8 cutter seats, 8a machining cutters, 9 bottom plates, 10 machining grooves, 10a main body grooves, 10b cutter grooves I, 11 sliding cover plates, 11a cutter grooves II, 12 guide plates, 13 lead screw seats I, 13a bearing seats, 14 lead screw I, 14a lead screw nuts I, 15 slide block I, 16 connecting pieces, 17 main motors, 18 main reducers, 19 longitudinal guide rails, 19a longitudinal slide blocks, 20 bearing seats, 21 lead screw II, 21a lead screw nuts II, 22 connecting pieces, 23 reducers I, 24 motor I, 25 electro-hydraulic proportional servo cylinders, 26 transverse guide rails, 27 vertical guide rails, 28 cutter frames, 29 micrometers, 30 top guide rails, 31, support columns 31a supports, 32 moving supports, 33 roller frames, 33a front rollers, 33b of rear roller, 34 of driving motor II, 35 of reducer II, 36 of rotating shaft, 37 of supporting seat, 38 of chain wheel I, 39 of roller shaft, 40 of chain wheel II, 41 of driving roller, 42 of adjusting seat, 42a of horizontal part, 42b of vertical part, 43 of motor III, 44 of gear, 45 of rack, 46 of lifting frame, 47 of lifting cylinder, 48 of lifting arm and 49 of vacuum suction cup.

Detailed Description

As shown in fig. 1-12, the scratch processing device for the back of the cutting blade comprises a horizontally arranged rectangular workbench 1, a plurality of vertical supporting legs 2 are arranged on the lower side of the workbench 1, and a processing groove is vertically arranged on the workbench 1 in a penetrating manner10, a U-shaped support frame 3 fixedly connected with the workbench 1 is arranged below the processing tank 10, a vertical main rotating shaft 4 is rotatably connected to the support frame 3, the main rotating shaft 4 is in transmission connection with a rotary driving mechanism, a cutting blade 5 is fixed at the upper end of the main rotating shaft 4, the cutting blade 5 is circular, and the axis of the cutting blade 5 is vertically arranged; a movable seat 6 capable of moving longitudinally is arranged on the workbench 1 corresponding to the processing groove 10, a transversely moving seat 7 capable of moving transversely is arranged on the movable seat 6, a cutter seat 8 capable of moving up and down is arranged on the transversely moving seat 7, a processing cutter 8a is arranged on the cutter seat 8, and the processing cutter 8a is arranged corresponding to the cutting blade 5; a loading and unloading mechanism is arranged corresponding to the worktable 1. The supporting legs 2 are provided with four, the lower level of each supporting leg 2 is provided with a bottom plate 9, and the lower end of each supporting leg 2 is fixedly connected with the bottom plate 9. The machining groove 10 comprises a rectangular main body groove 10a and a cutter groove I10 b, the width of the main body groove 10a is larger than that of the cutter groove I10 b, a sliding cover plate 11 and a guide plate 12 which are vertically and correspondingly distributed are arranged in the main body groove 10a, the front side and the rear side of the sliding cover plate 11 are in sliding connection with the side wall of the corresponding main body groove 10a, the guide plate 12 is fixed with the inner wall of the main body groove 10a, and when the sliding cover plate 11 moves rightwards to be attached to the right side wall of the main body groove 10a, the cutting blade 5 is located in a vertical downward projection area of the sliding; the sliding cover plate 11 is vertically penetrated by a cutter groove two 11a corresponding to the cutting blade 5, and the cutter groove one 10b and the cutter groove two 11a are both arranged corresponding to the machining cutter 8 a. The workbench 1 is transversely provided with a first screw seat 13 corresponding to the sliding cover plate 11, the left end and the right end of the first screw seat 13 are respectively provided with a bearing seat 13a, a first screw 14 is rotatably and horizontally arranged between the two bearing seats 13a, the first screw 14 is provided with a first screw nut 14a, the lower side of the first screw nut 14a is provided with a first sliding block 15, the first screw seat is provided with a first guide rail parallel to the first screw 14, the first sliding block 15 is in sliding connection with the first guide rail, the first screw nut 14a is connected with the sliding cover plate 11 through an L-shaped connecting piece 16, and one end of the first screw 14 is in transmission connection with a motor or a. The rotary driving mechanism comprises a main motor 17 which is arranged below the support frame 3 corresponding to the main rotating shaft 4, the vertical output end of the main motor 17 is in transmission connection with the input end of a main speed reducer 18, the output end of the main speed reducer 18 is in transmission connection with the main rotating shaft 4, and the cutting blade 5 is connected with the main rotating shaft through a spring chuckIs fixed on the main rotating shaft 4. The cutting blade 5 can also be fixed in another mode, a threaded hole is vertically formed in the upper end of the main rotating shaft 4, a fastening bolt penetrates through a center hole of the cutting blade 5 and is in threaded connection with the threaded hole, and a bolt seat of the fastening bolt presses the cutting blade 5 tightly. The workbench 1 is provided with two longitudinal guide rails 19 which are parallel to each other and correspond to the moving seat 6, at least two longitudinal sliding blocks 19a are arranged on the lower side of the moving seat 6, each longitudinal sliding block 19a is connected with the corresponding longitudinal guide rail 19 in a sliding manner, longitudinal movement driving mechanisms are arranged on the left side and the right side of the moving seat 6 on the workbench 1 and comprise two bearing blocks 20 which correspond to each other in a front-back manner, a lead screw II 21 is rotatably and longitudinally arranged between the two bearing blocks 20, the lead screw II 21 is provided with a lead screw nut II 21a, the lead screw nut II 21a is connected with the moving seat 6 through a connecting piece 22, and one end of the lead screw II 21 is in transmission connection with a motor I; an electro-hydraulic proportional servo cylinder 25 is arranged on the moving seat 6, the working end of the electro-hydraulic proportional servo cylinder 25 is in transmission connection with the transverse moving seat 7, a transverse guide rail 26 is arranged on the moving seat 6, the transverse moving seat 7 is in sliding connection with the transverse guide rail 26, the transverse moving seat 7 is L-shaped, the cutter seat 8 is in sliding connection with a vertical guide rail 27 on the transverse moving seat 7 through a sliding block, a U-shaped cutter frame 28 is arranged on the cutter seat 8, the upper end of a machining cutter 8a upwards penetrates through a rectangular hole of the cutter frame 28, the cutter frame 28 is fixedly connected with the machining cutter 8a through a fastener, and a micrometer 29 used for adjusting the vertical position of the cutter seat 8 is further arranged on the cutter seat 8. The feeding and discharging mechanism comprises a rack, the rack comprises two top guide rails 30 which are parallel to each other, the top guide rails 30 are longitudinally arranged, at least three vertical support columns 31 are arranged below each top guide rail 30 at intervals along the length direction, supports 31a which are in contact with the ground are arranged at the lower ends of the support columns 31, a movable support 32 is arranged between the two top guide rails 30, the axis of the movable support 32 is perpendicular to the top guide rails 30, roller frames 33 are arranged at the left end and the right end of the movable support 32, front rollers 33a and rear rollers 33b are respectively and rotatably arranged on the front side and the rear side of each roller frame 33, a second driving motor 34 is vertically arranged in the middle of the movable support 32, the output shaft of the second driving motor 34 is downwards arranged, a second speed reducer 35 is arranged on the movable support 32 corresponding to the second driving motor 34An output shaft of the driving motor II 34 is in transmission connection with an input shaft of the speed reducer II 35, rotating shafts 36 are arranged on the left side and the right side of the speed reducer II 35 on the movable support 32, supporting seats 37 are arranged on the left end and the right end of the movable support 32, one end, facing outwards, of each rotating shaft 36 is rotatably supported on the corresponding supporting seat 37, the other end of each rotating shaft 36 is in transmission connection with the corresponding output shaft of the speed reducer II 35, one end, facing outwards, of each rotating shaft 36 extends to the other side of the corresponding supporting seat 37 and is provided with a chain wheel I38, a roller shaft 39 is rotatably arranged on the roller frame 33, the roller shaft 39 is parallel to the rotating shafts 36, two ends of the roller shaft 39 are respectively provided with a chain wheel II 40 and a driving roller 41, the chain wheel I38 is in transmission connection with the chain wheel II 40, the driving roller 41, a front roller 33a and a, the adjusting mechanism is provided with a lifting mechanism, and the lifting mechanism is provided with a grabbing mechanism. The adjusting mechanism comprises an adjusting seat 42 in sliding connection with the moving support 32, the adjusting seat 42 comprises a horizontal part 42a and a vertical part 42b, a third motor 43 is fixedly mounted on the horizontal part 42a of the adjusting seat 42, a rack 45 is arranged on the lower side of the moving support 32 along the length direction, the output end of the third motor 43 is perpendicular to the rack 45, a gear 44 is arranged at the output end of the third motor 43, the gear 44 is meshed with the rack 45, the lifting mechanism comprises a lifting frame 46 in sliding connection with the vertical part 42b of the adjusting seat 42, lifting cylinders 47 are vertically arranged on the left side and the right side of the lifting frame 46 at the vertical part 42b of the adjusting seat 42, the extending end of a piston rod of each lifting cylinder 47 is connected with one corresponding side of the lifting frame 46 through a connecting seat, a vertical lifting arm 48 is arranged at the lower end of the lifting frame 46. Cutting blade 5 includes annular cutting part 5a and hub portion 5b, and hub portion 5b and the coaxial setting of cutting part 5a, and the external diameter of hub portion 5b is less than cutting part 5a external diameter, and cutting part 5a periphery is provided with the cutting edge, and the central hole aperture of hub portion 5b and cutting part 5a equals, and the mechanism of snatching includes a plurality of vacuum chuck 49 that set up at the lower extreme of lifing arm 48, and vacuum chuck 49's cross-sectional area is 1~2cm²Each vacuum cup 49 is provided with at least two rings, and each ring of vacuum cups 49 is distributed around the periphery of the central hole of the cutting part 5 a.

The utility model discloses during operation, cutting blade 5 that there is the scratch on the surface collects and leaves in the district to be processed, go up unloading mechanism work and send cutting blade 5 to the processing groove 10 below on the workstation 1 from the district to be processed, before processing cutter 8a polishes cutting blade 5, sliding cover 11 staggers with cutting blade 5 mutually, fix cutting blade 5 in main pivot 4 upper end, then remove seat 6 longitudinal movement to the position that is close to cutting blade 5, cutter seat 8 descends to the position that processing cutter 8a corresponds with cutting blade 5, sliding cover 11 moves to the position that can shelter from cutting blade 5, rotary drive mechanism drives main pivot 4 and rotates, main pivot 4 drives cutting blade 5 and rotates, electro-hydraulic proportion servo cylinder 25 drives sideslip seat 7 and moves along transverse guide 26, sideslip seat 7 moves and makes processing cutter 8a carry out the processing of polishing about 2 microns to the up end face of cutting blade 5, grinding the scratch; for the cutting blades 5 with different outer diameter sizes, the annular surface areas are different, the movable seat 6 can move longitudinally to adapt to the outer diameter sizes of the cutting blades 5, the machining cutter 8a moves along the first cutter groove 10b and the second cutter groove 11a and polishes the cutting blades 5, and the sliding cover plate 11 plays a role in shielding and protecting in the machining process, so that flying chips are prevented from jumping disorderly; after polishing, the feeding and discharging mechanism conveys the processed cutting blade 5 to the processing completion area.

The second driving motor 34 drives the rotating shafts on the two sides to rotate through the second speed reducer 35, the rotating shafts drive the first chain wheels 38 to rotate, the first chain wheels 38 drive the second chain wheels 40 to rotate, the driving roller 41 obtains power, the roller frames 33 on the two sides move along the top guide rail 30 through the driving roller 41, the front roller 33a and the rear roller 33b, and the moving support 32 can move longitudinally; the third motor 43 drives the gear 44 to move along the rack 45, the adjusting seat 42 can transversely move along the length direction of the movable support 32, the extending end of the piston rod of the lifting cylinder 47 drives the lifting frame 46 to move up and down, and the upper position and the lower position of the grabbing mechanism are adjusted, so that the cutting blade 5 can be freely loaded and unloaded.

The utility model has the advantages that: can conveniently level cutting blade 5's surface grinding, degree of automation is higher, guarantees that cutting blade 5 mounting end face after the grinding levels for cutting blade 5's reuse rate improves, reduces cutting blade 5 cost, has improved the cutting efficiency to the wafer product.

The present invention is not limited to the above embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some replacements and transformations for some technical features without creative labor according to the disclosed technical contents, and these replacements and transformations are all within the protection scope of the present invention.

Claims

1. A scratch processing device for the back of a cutting blade is characterized by comprising a horizontally arranged rectangular workbench, wherein a plurality of vertical supporting legs are arranged on the lower side of the workbench, a processing groove is vertically formed in the workbench in a penetrating mode, a U-shaped supporting frame fixedly connected with the workbench is arranged below the processing groove, a vertical main rotating shaft is rotatably connected to the supporting frame and is in transmission connection with a rotary driving mechanism, the cutting blade is fixed to the upper end of the main rotating shaft and is circular, and the axis of the cutting blade is vertically arranged; a movable seat capable of moving longitudinally is arranged on the workbench corresponding to the processing groove, a transversely moving seat capable of moving transversely is arranged on the movable seat, a cutter seat capable of moving up and down is arranged on the transversely moving seat, a processing cutter is arranged on the cutter seat, and the processing cutter is arranged corresponding to the cutting blade; and a feeding and discharging mechanism is arranged corresponding to the workbench.

2. The cutting blade back scratch treatment device as claimed in claim 1, wherein the number of the support legs is four, a bottom plate is horizontally arranged below each support leg, and the lower end of each support leg is fixedly connected with the bottom plate.

3. The device for processing the back scratches of the cutting blade according to claim 1 or 2, wherein the processing groove comprises a rectangular main body groove and a first cutter groove, the width of the main body groove is greater than that of the first cutter groove, a sliding cover plate and a guide plate are arranged in the main body groove and distributed up and down correspondingly, the front side and the rear side of the sliding cover plate are connected with the side walls of the corresponding main body groove in a sliding manner, the guide plate is fixed with the inner wall of the main body groove, and when the sliding cover plate moves rightwards to be attached to the right side wall of the main body groove, the cutting blade is positioned in the vertical downward projection area of the sliding cover plate; a second cutter groove is formed in the sliding cover plate in a vertical penetrating mode corresponding to the cutting blade, and the first cutter groove and the second cutter groove correspond to the machining cutter.

4. The device for processing the scratches on the back surface of the cutting blade as claimed in claim 3, wherein a first screw seat is transversely arranged on the workbench corresponding to the sliding cover plate, bearing seats are respectively arranged at the left end and the right end of the first screw seat, a first screw is rotatably and horizontally arranged between the two bearing seats, a first screw nut is arranged on the first screw, a first slider is arranged at the lower side of the first screw nut, a first guide rail parallel to the first screw is arranged on the first screw seat, the first slider is slidably connected with the first guide rail, the first screw nut is connected with the sliding cover plate through an L-shaped connecting piece, and one end of the first screw is in transmission connection with a motor or a hand wheel.

5. The device for processing the scratches on the back surface of the cutting blade as claimed in claim 1 or 2, wherein the rotary driving mechanism comprises a main motor disposed below the supporting frame corresponding to the main rotating shaft, a vertical output end of the main motor is in transmission connection with an input end of a main speed reducer, an output end of the main speed reducer is in transmission connection with the main rotating shaft, and the cutting blade is fixed on the main rotating shaft through a spring chuck.

6. The device for processing the scratches on the back surface of the cutting blade as claimed in claim 1 or 2, wherein a threaded hole is vertically formed at the upper end of the main rotating shaft, a fastening bolt passes through the central hole of the cutting blade and is in threaded connection with the threaded hole, and a bolt seat of the fastening bolt presses the cutting blade.

7. The cutting blade back surface scratch processing device as claimed in claim 1 or 2, wherein two longitudinal guide rails parallel to each other are arranged on the corresponding moving seat on the workbench, at least two longitudinal slide blocks are arranged on the lower side of the moving seat, each longitudinal slide block is connected with the corresponding longitudinal guide rail in a sliding manner, a longitudinal movement driving mechanism is arranged on each of the left side and the right side of the moving seat on the workbench, the longitudinal movement driving mechanism comprises two bearing seats corresponding to each other in the front and back direction, a second lead screw is rotatably and longitudinally arranged between the two bearing seats, a second lead screw nut is arranged on the second lead screw, the second lead screw nut is connected with the moving seat through a connecting piece, and one end of the second lead screw is in transmission connection with a motor through a; the automatic cutting machine is characterized in that an electro-hydraulic proportional servo cylinder is arranged on the moving seat, the working end of the electro-hydraulic proportional servo cylinder is in transmission connection with the transverse moving seat, a transverse guide rail is arranged on the moving seat, the transverse moving seat is in sliding connection with the transverse guide rail, the transverse moving seat is in an L shape, the cutter seat is in sliding connection with a vertical guide rail on the transverse moving seat through a sliding block, a U-shaped cutter frame is arranged on the cutter seat, the upper end of a machining cutter upwards penetrates through a rectangular hole of the cutter frame, a fastener fixedly connects the cutter frame with the machining cutter, and a micrometer used for adjusting the vertical position of the cutter seat is further arranged.

8. The cutting blade back scratch processing device as claimed in claim 1 or 2, wherein the feeding and discharging mechanism comprises a frame, the frame comprises two top guide rails parallel to each other, the top guide rails are longitudinally arranged, at least three vertical support columns are arranged below each top guide rail at intervals along the length direction, supports contacting with the ground are arranged at the lower ends of the support columns, a moving support is arranged between the two top guide rails, the axis of the moving support is perpendicular to the top guide rails, roller frames are arranged at the left end and the right end of the moving support, a front roller and a rear roller are respectively and rotatably arranged at the front side and the rear side of each roller frame, a second driving motor is vertically arranged in the middle of the moving support, an output shaft of the second driving motor is arranged downwards, a second speed reducer is arranged on the moving support corresponding to the second driving motor, and two output shafts correspondingly distributed left and right, an output shaft of the driving motor II is in transmission connection with an input shaft of the speed reducer II, rotating shafts are arranged on the left side and the right side of the speed reducer II on the movable support, supporting seats are arranged at the left end and the right end of the movable support, the outer end of the rotating shaft is rotatably supported on the supporting seat, the other end of the rotating shaft is in transmission connection with a corresponding output shaft of the second speed reducer, the outer end of the rotating shaft extends to the other side of the supporting seat and is provided with a first chain wheel, a roller shaft is rotatably arranged on the roller carrier and is parallel to the rotating shaft, two ends of the roller shaft are respectively provided with a second chain wheel and a driving roller, the chain wheels are in transmission connection with the second chain wheel through chains, the driving roller, the front roller and the rear roller are correspondingly arranged and are all in contact with the top guide rail, the moving support is provided with an adjusting mechanism, the adjusting mechanism is provided with a lifting mechanism, and the lifting mechanism.

9. The cutting blade back scratch processing apparatus of claim 8, wherein the adjusting mechanism includes an adjusting seat slidably connected to the movable support, the adjusting seat includes a horizontal portion and a vertical portion, a third motor is fixedly mounted on the horizontal portion of the adjusting seat, a rack is arranged on the lower side of the movable support along the length direction, the output end of the third motor is perpendicular to the rack, a gear is arranged at the output end of the third motor, the gear is meshed with the rack and connected to the rack, the lifting mechanism includes a lifting frame slidably connected to the vertical portion of the adjusting seat, the vertical portion of the adjusting seat is located on the left side and the right side of the lifting frame, a lifting cylinder is vertically arranged on the left side and the right side of the lifting frame, the extending end of a piston rod of the lifting cylinder is connected to one corresponding side of the lifting frame through a connecting seat, a.

10. The device for processing the back scratch of the cutting blade as claimed in claim 9, wherein the cutting blade comprises an annular cutting portion and a hub portion, the hub portion and the cutting portion are coaxially arranged, the outer diameter of the hub portion is smaller than that of the cutting portion, the cutting portion is peripherally provided with a cutting edge, the central holes of the hub portion and the cutting portion are equal in diameter, the grabbing mechanism comprises a plurality of vacuum chucks arranged at the lower end of the lifting arm, and the cross-sectional area of each vacuum chuck is 1-2 cm²Each vacuum chuck is provided with at least two circles, and each circle of vacuum chuck is distributed around the periphery of the central hole of the cutting part.