CN212161771U - 一种干法去胶机驱动装置 - Google Patents
一种干法去胶机驱动装置 Download PDFInfo
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CN115360126A (zh) * | 2022-10-17 | 2022-11-18 | 谷微半导体科技(江苏)有限公司 | 一种晶圆去胶机及其使用方法 |
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CN115360126A (zh) * | 2022-10-17 | 2022-11-18 | 谷微半导体科技(江苏)有限公司 | 一种晶圆去胶机及其使用方法 |
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GR01 | Patent grant | ||
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Effective date of registration: 20210926 Address after: 214000 Guanshan Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 333-1-801, Jincheng East Road, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee before: Wuxi Yimian Microelectronics Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 214000 Guanshan Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Wuxi Yiwen Microelectronics Technology Co.,Ltd. Address before: 214000 Guanshan Road, Xinwu District, Wuxi City, Jiangsu Province Patentee before: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. |