CN211975351U - Microfluidic Control Devices and Piezoelectric Actuators - Google Patents

Abstract

The utility model provides a miniature fluid control device and piezoelectric actuator. The microfluidic control device includes a piezoelectric actuator and a housing, wherein the piezoelectric actuator includes: the anti-overflow device comprises a suspension plate, an outer frame, a bracket and an anti-overflow structure; the support is connected between the suspension plate and the outer frame, the first surfaces of the suspension plate, the outer frame and the support are coplanar, and the anti-overflow structure is formed between the second surfaces of the outer frame and the support so as to ensure that the outer frame and the support keep a height difference. The overflow-proof structure can prevent the glue layer from overflowing the outer frame when being coated on the outer frame.

Description

Microfluidic Control Devices and Piezoelectric Actuators

【Technical field】

This case is about a fluid control device, especially a micro ultra-thin and silent micro fluid control device.

【Background technique】

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, micro-pumps, sprayers, inkjet heads, industrial printing devices and other products contain fluid transportation. Structure is its key technology, so how to use innovative structure to break through its technical bottleneck is an important content of development.

For example, in the pharmaceutical industry, many instruments or devices that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of fluid delivery. However, due to the volume limitation of such traditional motors and fluid valves, it is difficult for such instruments to reduce the overall size of the device, that is, it is difficult to achieve the goal of thinning and portability. In addition, these conventional motors and fluid valves also generate noise when actuated, resulting in inconvenience and discomfort in use.

Also shown in FIG. 1 , it is a fluid control device, comprising a casing 1 , a piezoelectric actuator 2 , two insulating sheets 3 a , 3 b and a conductive sheet 4 . The casing 1 includes an outlet plate 11 and a base 12 . The outlet plate 11 is a frame structure with a side wall 111 at the periphery and a plate 112 at the bottom. The side wall 111 and the plate 112 together define a frame structure. The accommodating space 113 is used for the piezoelectric actuator 2 to be arranged in the accommodating space 113 , and the plate 112 is recessed on a surface to form a temporary storage chamber 114 , and the plate 112 is provided with At least one discharge hole 115 penetrates through and communicates with the temporary storage chamber 114 ; and the base 12 includes an inlet plate 121 and a resonance plate 122 , and the inlet plate 121 has at least one inlet hole 1211 , at least one bus groove 1212 and a bus chamber 1213, the inlet hole 1211 correspondingly communicates with the bus groove 1212, and the other end of the at least one bus groove 1212 communicates with the merge chamber 1213, and the merge chamber 1213 constitutes a chamber for a merge fluid for For temporary fluid storage, the depth of the formed chamber is the same as the depth of the busbar groove 1212 , and the resonance plate 122 is made of a flexible material and has a hollow hole 1223 corresponding to the merged chamber 1213 of the inlet plate 121 . It is arranged so that the fluid in the confluence chamber 1213 can flow to the bottom of the resonance plate 122 through the hollow hole 1223 . In this way, an outlet plate 11 , an insulating sheet 3 b , a conductive sheet 4 , an insulating sheet 3 a , the piezoelectric actuator 2 and the base 12 are stacked and glued upward in sequence, and finally the two sides of the side wall 111 of the outlet plate 11 are The accommodating space 113 is coated with a sealant 6 to provide a leak-proof seal and is disposed to form a fluid control device. The structure of the fluid control device is simple and thus can be configured to be thin.

In addition, the piezoelectric actuator 2 is disposed corresponding to the resonance plate 122, and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23 and at least one bracket 24, and the resonance plate 122 corresponds to the confluence chamber 1213. The moving part 1221 is fixed and the part fixed to the base 12 is the fixed part 1222 .

The equipment used in the assembled fluid control device is always in a trend of miniaturization. Therefore, there is a demand for further miniaturization of the fluid control device without reducing the output capability (discharge flow rate and discharge pressure) of the fluid control device. However, as the size of the fluid control device is reduced, the output capability of the fluid control device decreases. Therefore, if the control output capability is to be maintained and miniaturized, there is a limit in the above-described control of the conventional structure. Therefore, in this invention, the control of the structure shown below has been examined.

FIG. 1 is a cross-sectional view showing the configuration of a main part of the above-described fluid control device. The fluid control device is a structure in which an outlet plate 11 , an insulating sheet 3 b , a conductive sheet 4 , an insulating sheet 3 a , a piezoelectric actuator 2 and a base 12 are stacked and fixed in sequence.

However, an adhesive layer 5 is arranged between the outer frame 23 of the suspension board 21 and the resonance plate 122 . When the adhesive layer 5 is applied, the outer frame 23 is capillary due to the coating of the adhesive layer 5 on the piezoelectric actuated outer frame 23 . The relationship between the adhesive layer 5 and the outer frame 23 flows toward the bracket 24, so the flow easily overflows the outer frame 23 and sticks to the bracket 24, resulting in the adhesive layer 5 between the bracket 24 and the resonance sheet 122. Further, the resonance effect of the resonant sheet 122 and the bracket 24 is affected, thus affecting the working efficiency of the fluid control device, or the flow of the adhesive layer 5 into the micro fluid control device will also affect the operation of other components, so it is necessary to improve.

Therefore, how to develop a micro air pressure fluid device that can improve the above-mentioned deficiencies in the known technology, and can make the traditional instrument or equipment using the fluid control device achieve small size, miniaturization and quietness, thereby achieving the purpose of being portable and comfortable. Piezoelectric actuators are an urgent problem to be solved at present.

【Content of utility model】

The main purpose of this case is to provide a micro fluid control device, by disposing an anti-overflow structure on the second surface of the outer frame close to the second surface of the bracket, so that the outer frame and the bracket maintain a height difference to suppress the adhesive layer Glue overflow problem.

In order to achieve the above purpose, a broader implementation aspect of the present case provides a micro fluid control device, comprising a piezoelectric actuator and a housing, the piezoelectric actuator comprising: a suspension board having a first a surface and a corresponding second surface, and the second surface has a convex portion; an outer frame is disposed around the outer side of the suspension board, and has a first surface and a corresponding second surface, The first surface of the suspension board is coplanar with the first surface of the outer frame; at least one bracket is connected between the suspension board and the outer frame, and has a first surface and a corresponding second surface , the first surface of the bracket is coplanar with the first surface of the outer frame; at least one overflow prevention structure is formed between the outer frame and the bracket to keep a height difference between the outer frame and the bracket; and a piezoelectric ceramic plate attached to the first surface of the suspension board; and the shell includes: an outlet plate, the outlet plate is a frame structure with a side wall around the periphery to form an accommodating space , so that the piezoelectric actuator is arranged in the accommodating space; and a base is formed by joining an inlet plate and a resonance plate, and is combined in the accommodating space of the outlet plate to close the pressure an electric actuator, the inlet plate has at least one air inlet hole and at least one confluence row hole communicated with it to form a confluence chamber, the resonance plate is arranged and fixed on the inlet plate, and has a hollow hole, Relative to the confluence chamber of the inlet plate, and corresponding to the convex portion of the suspension board; wherein a glue is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance plate of the base layer, so that a depth is maintained between the piezoelectric actuator and the resonance plate of the base to form a compression chamber, and the height difference of the anti-overflow structure can be used to fill the overflowing adhesive layer, so as to restrain the adhesive layer from overflowing on this frame.

A broader implementation aspect of the present application provides a piezoelectric actuator, comprising: a suspension board having a first surface and a corresponding second surface, and the second surface has a convex portion; an outer frame surrounding the outer side of the suspension board and having a first surface and a corresponding second surface, the first surface of the suspension board and the first surface of the outer frame are coplanar; at least one a bracket, connected between the suspension board and the outer frame, and has a first surface and a corresponding second surface, the first surface of the bracket and the first surface of the outer frame are coplanar; at least one an overflow prevention structure formed between the second surface of the outer frame and the second surface of the bracket to keep a height difference between the outer frame and the bracket; and a piezoelectric ceramic plate attached to the suspension on the first surface of the board.

【Description of drawings】

FIG. 1 is a schematic cross-sectional structure diagram of a fluid control device.

Figure 2A shows a schematic exploded front view of the relevant components of the fluid control device.

Figure 2B shows a schematic exploded rear view of the relevant components of the fluid control device.

FIG. 3 is a schematic cross-sectional view of the piezoelectric actuator assembled on the base.

FIG. 4A is a schematic perspective view of the piezoelectric actuator viewed from the front.

FIG. 4B is a schematic three-dimensional appearance view of the piezoelectric actuator viewed from the back.

FIG. 5 is a schematic cross-sectional view of the first embodiment of the overflow prevention structure of the fluid control device.

6 is a schematic cross-sectional view of a second embodiment of the overflow prevention structure of the fluid control device.

FIG. 7 is a schematic cross-sectional view of a third embodiment of the overflow prevention structure of the fluid control device.

FIG. 8A is a schematic three-dimensional appearance diagram of the fourth embodiment of the overflow prevention structure of the fluid control device.

8B is a schematic cross-sectional view of the fourth embodiment of the overflow prevention structure of the fluid control device.

【Detailed ways】

Some typical embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially for illustrative purposes rather than limiting the present case.

As shown in FIG. 1 , FIG. 2A , FIG. 2B and FIG. 3 , the fluid control device of the present application includes a housing 1 , a piezoelectric actuator 2 , two insulating sheets 3 a and 3 b and a conductive sheet 4 . The housing 1 includes an outlet plate 11 and a base 12, and the base 12 includes an inlet plate 121 and a resonance plate 122, but not limited thereto. The piezoelectric actuator 2 is arranged corresponding to the resonance plate 122, and the outlet plate 11, the piezoelectric actuator 2, the resonance plate 122 of the base 12, the inlet plate 121, etc. are stacked upward in order, and the piezoelectric actuator The device 2 is assembled from a suspension board 21 , a piezoelectric element 22 , an outer frame 23 and at least one bracket 24 .

In this embodiment, the outlet plate 11 of the casing 1 is a frame structure with a side wall 111 at the periphery and a plate 112 at the bottom, and a accommodating space 113 is jointly defined by the side wall 111 and the plate 112 for For the piezoelectric actuator 2 to be disposed in the accommodating space 113, the plate 112 is recessed on a surface to form a temporary storage chamber 114, and at least one discharge hole 115 is formed on the plate 112 to communicate with the The temporary storage chamber 114 and the side wall 111 and the plate 112 together define an accommodating space 113 for the piezoelectric actuator 2 to be disposed in the accommodating space 113 . The base 12 includes an inlet plate 121 and a resonance plate 122 , wherein the inlet plate 121 has at least one inlet hole 1211 . In this embodiment, the number of the inlet holes 1211 is four, but not limited to this. The upper and lower surfaces of the inlet plate 121 are mainly used for fluid to flow into the fluid control device from the at least one inlet hole 1211 according to the action of atmospheric pressure from outside the device; and the inlet plate 121 has at least one confluence row groove 1212, each confluence groove 1212. The row groove 1212 is disposed correspondingly to communicate with an inlet hole 1211 , and there is a convergence chamber 1213 at the center of the bus row groove 1212 , and the convergence chamber 1213 is communicated with the bus row groove 1212 , so that the at least The fluid entering the bus bar slot 1212 through an inlet hole 1211 is directed and collected to the bus chamber 1213 .

In this embodiment, the inlet plate 121 has an integrally formed inlet hole 1211 , a bus groove 1212 and a confluence chamber 1213 , and after the inlet plate 121 and the resonance plate 122 are assembled correspondingly, a confluence is formed at the confluence chamber 1213 . Fluid chamber for temporary storage of fluid.

In some embodiments, the material of the inlet plate 121 is stainless steel, but not limited thereto. In other embodiments, the depth of the chamber formed by the bus chamber 1213 is the same as the depth of the bus grooves 1212 , but not limited thereto.

The above-mentioned piezoelectric actuator 2 is arranged corresponding to the resonance plate 122, and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23 and at least one bracket 24, and the resonance plate 122 corresponds to the confluence chamber 1213. The movable portion 1221 is fixedly bonded to the base 12 as the fixed portion 1222 , and the resonance plate 122 has a hollow hole 1223 corresponding to the confluence chamber 1213 of the inlet plate 121 to allow fluid to flow. In this embodiment, the resonance plate 122 is a flexible material, but not limited thereto. In other embodiments, the resonant plate 122 is made of copper, but not limited thereto.

The above-mentioned piezoelectric element 22 is a square plate-like structure, and the side length of the piezoelectric element 22 is not greater than the side length of the suspension board 21 , and can be attached to the suspension board 21 . In this embodiment, the suspension board 21 is a flexible square plate-like structure, and an outer frame 23 is arranged around the outer side of the suspension board 21 , and the shape of the outer frame 23 is also roughly corresponding to the shape of the suspension board 21 . In this embodiment, the outer frame 23 is also a square hollow frame structure; and the suspension board 21 and the outer frame 23 are connected by four brackets 24 to provide elastic support. Please refer to FIG. 2A and FIG. 2B at the same time, the suspension board 21 , the outer frame 23 and the four brackets 24 are integrally formed structures, and can be formed of a metal plate, such as stainless steel, but not limited thereto. Therefore, the piezoelectric actuator 2 of the fluid control device of the present application is formed by bonding the piezoelectric element 22 and the metal plate, but it is not limited thereto. The outer frame 23 is disposed around the outer side of the suspension board 21, and has a conductive pin 231 protruding outward for power supply connection, but not limited thereto; and the four brackets 24 are connected to the suspension board 21 and between the outer frames 23 to provide elastic support. In this embodiment, one end of each of the brackets 24 is connected to the side of the suspension board 21 , and the other end is connected to the inner side of the outer frame 23 , and further between the bracket 24 , the suspension board 21 and the outer frame 23 There is at least one gap 25 for fluid circulation, and the shape and quantity of the suspension board 21 , the outer frame 23 and the brackets 24 are variously changed. Through the bracket 24 straddled between the suspension board 21 and the outer frame 23, the non-uniform deflection angle of the suspension board 21 during operation is reduced, and the amplitude of the suspension board 21 on the Z axis is increased, so that the suspension board 21 can be suspended. The plate 21 can have a better displacement state when it vibrates up and down, that is, the suspension plate 21 is more stable and consistent when it is actuated, which is beneficial to improve the stability and performance of the piezoelectric actuator 2 when acting. Also in this embodiment, the suspension board 21 is a square structure with a stepped surface, that is, there is a convex portion 26 on a surface of the suspension board 21. The convex portion 26 can be a circular convex structure, but Not limited to this.

In addition, the above-mentioned two insulating sheets 3a and 3b are provided so as to sandwich the conductive sheet 4 up and down. In addition, in some embodiments, the insulating sheets 3a, 3b are made of an insulating material, such as plastic, but not limited thereto, for insulating purposes; in other embodiments, the conductive sheet 4 is a conductive sheet Material, such as metal, but not limited to, for electrical conduction. And, in this embodiment, a conductive pin 41 can also be provided on the conductive sheet 4 for conducting electrical conduction.

When the fluid control device in this case is assembled, the outlet plate 11, an insulating sheet 3b, a conductive sheet 4, an insulating sheet 3a, a piezoelectric actuator 2, and a base 12 are sequentially stacked, assembled and fixed. It is accommodated in the accommodating space 113 of the outlet plate 11, and finally the accommodating spaces 113 on both sides of the side wall 111 of the outlet plate 11 are coated with sealant 6 to provide a leak-proof seal to form a small fluid volume, and Miniaturized form factor fluid control device. In the above configuration, when a driving voltage is applied to the piezoelectric element 22, the suspension board 21 is flexurally vibrated by the expansion and contraction of the piezoelectric element 22, and the movable portion 1221 of the resonance plate 122 is vibrated with the vibration of the suspension board 21. Thereby, the fluid control device sucks the fluid from the at least one inlet hole 1211 of the base 12 , the fluid enters the at least one confluence groove 1212 , and then flows into the confluence chamber 1213 through the hollow hole 1223 and into the temporary storage chamber 114 . The suspension plate 21 of the piezoelectric actuator 2 vibrates and the resonance effect of the resonant plate 122 compresses the volume of the temporary storage chamber 114, and is discharged from at least one discharge hole 115 of the outlet plate 11, constituting a fluid control device for transmitting fluid. operate.

As shown in FIG. 1 and FIG. 3 , there is a gap h between the resonance plate 122 and the piezoelectric actuator 2 , which is filled in the gap h between the resonance plate 122 and the outer frame 23 of the piezoelectric actuator 2 . An adhesive layer 5, such as, but not limited to, conductive adhesive, so that the depth of the gap h can be maintained between the resonant sheet 122 and the suspension plate 21 of the piezoelectric actuator 2, thereby guiding the airflow more quickly and, according to the depth of the gap h, a compression chamber 116 can be formed between the resonance plate 122 and the piezoelectric actuator 2 , and the fluid can be guided between the chambers through the hollow hole 1223 of the resonance plate 122 The flow is more rapid, and since the suspension plate 21 and the resonance plate 122 maintain a proper distance, the contact and interference of each other are reduced, so that the noise generation can be reduced.

In this case, in order to improve the relationship between the outer frame 23 of the suspension board 21 and the resonant sheet 122 when the adhesive layer 5 is set during the coating operation, the adhesive layer 5 is coated on the piezoelectrically actuated outer frame 23 and is subjected to the capillary action of the outer frame 23. , so that the adhesive layer 5 flows along the outer frame 23 toward the bracket 24, so the flow easily overflows the outer frame 23 and sticks to the bracket 24 and other problems. In this case, the structure of the outer frame 23 of the piezoelectric actuator 2 is further improved. The second surface 23b of the frame 23 is provided with an anti-overflow structure 27 (as shown in FIG. 4A ) near the second surface 24b of the bracket 24 . The overflow of the glue layer 5 can use the anti-overflow structure 27 to suppress the glue overflow problem of the glue layer 5 .

As shown in FIG. 4A and FIG. 5 , the piezoelectric actuator 2 in this case includes: a suspension board 21 having a first surface 21 a and a second surface 21 b corresponding to the first surface 21 a , and the second surface 21 b There is a convex part 26 on it; an outer frame 23 is arranged around the outer side of the suspension board 21, and also has a first surface 23a and a second surface 23b corresponding to the first surface 23a. The first surface of the suspension board 21 The surface 21a is coplanar with the first surface 23a of the outer frame; at least one bracket 24, connected between the suspension board 21 and the outer frame 23, also has a first surface 24a and a second surface 24a corresponding to the first surface 24a The surface 24b, the first surface 24a of the bracket and the first surface 23a of the outer frame are coplanar; at least one anti-overflow structure 27 is formed between the outer frame 23 and the bracket 24 to keep a height difference between the outer frame 23 and the bracket 24 ; And a piezoelectric ceramic plate 22, attached to the first surface 21a of the suspension board.

As shown in FIG. 4A , FIG. 4B and FIG. 5 , in the first embodiment of the present case, the overflow prevention structure 27 is connected to the bracket 24 at the edge of the outer frame 23 and extends toward the second surface 24 b of the outer frame 23 to form a first step difference The surface 28a, the first stage difference surface 28a and the second surface 23b of the outer frame maintain a first overflow prevention depth s1, and the first stage difference surface 28a and the second surface 24b of the bracket 24 form a coplanar adjacency, and the overflow prevention structure provided in this way 27 can use the edge to connect the bracket 24 and extend to the second surface 24b to form a space of a first step surface 28a and a first overflow prevention depth s1 to fill the overflow of the glue layer 5, thereby preventing the glue layer 5 from overflowing.

As shown in FIG. 6 , in the second embodiment of this case, the overflow prevention structure 27 is formed at the edge of the outer frame 23 where the bracket 24 is connected and extends toward the second surface 24 b of the outer frame 23 to form a second step surface 28 b . 28b and the second surface 23b of the outer frame 23 maintain a second overflow prevention depth s2, the second step surface 28b and the second surface 23b of the bracket 23 maintain a third overflow prevention depth s3, and the second overflow prevention depth s2 is greater than The third overflow prevention depth s3, such that the space between the second step difference surface 28b and the second overflow prevention depth s2 fills the overflow of the adhesive layer 5, and the third overflow prevention depth s3 provides a further overflow prevention effect, blocking the adhesive layer. The overflow of glue 5 flows along the direction of the bracket 24 , which can also suppress the problem of glue overflow of the glue layer 5 .

As shown in FIG. 7 , in the third embodiment of the present case, the overflow prevention structure 27 is provided with an overflow prevention concave portion 27 a and an overflow prevention convex portion at the edge of the outer frame 23 connecting the bracket 24 and extending toward the second surface 24 b of the outer frame 23 . 27b, the overflow prevention concave portion 27a is adjacent to the outer frame 23, and the overflow prevention convex portion 27b is adjacent to the overflow prevention concave portion 27a. The overflow prevention concave portion 27a has a third step surface 28c and the second surface 23b of the outer frame 23 maintains a fourth overflow prevention depth. s4 , and the top surface of the overflow prevention protrusion 27 b is coplanar with the second surface 23 b of the outer frame 23 , and maintains a fifth overflow prevention depth s5 with the bracket 24 . In this example, the space between the third step surface 28c and the fourth overflow prevention depth s4 formed by the overflow prevention concave portion 23a is used to fill the overflow of the glue layer 5, and the fifth overflow prevention depth s5 of the overflow prevention convex portion 27b provides a better overflow prevention depth s5. The anti-overflow effect can prevent the overflow of the adhesive layer 5 from flowing along the direction of the bracket 24, which can also suppress the overflow of the adhesive layer 5.

In addition to the overflow prevention structure 27 in the above-mentioned embodiment, in the fourth embodiment, the overflow prevention structure 27 can also be provided in the form of a ring at the edge of the outer frame 23 connecting the bracket 24 and extending toward the second surface 24 b of the outer frame 23 . To be more specific, as shown in FIGS. 8A and 8B , the overflow prevention structure 27 is connected to the bracket 24 at the edge of the outer frame 23 and extends toward the second surface 24 b of the outer frame 23 in a ring shape to form a The fourth step surface 28d, the fourth step surface 28d and the second surface 23b of the outer frame 23 maintain a sixth overflow prevention depth s6, and the fourth step surface 28d and the second surface 24b of the bracket 24 are formed Coplanar adjacency. The overflow prevention structure 27 set in this way can use the edge to connect the bracket 24 and extend a ring shape to the second surface 24b to form a space of a fourth step difference surface 28d and a sixth overflow prevention depth s6 to fill the overflow of the adhesive layer 5. glue, thereby preventing the glue overflow problem of the glue layer 5.

To sum up, the present application provides a micro-fluid control device, by disposing an anti-overflow structure on the second surface of the outer frame close to the second surface of the bracket to suppress the overflow of the glue layer, and the miniaturized piezoelectric The actuator can further reduce the overall volume and thinning of the micro fluid control device, so as to achieve the purpose of being portable and comfortable.

【Symbol Description】

1: Shell

11: Exit board

111: Sidewall

112: Plate

113: accommodating space

114: Temporary storage chamber

115: drain hole

116: Compression chamber

12: Base

121: Entry Plate

1211: Access hole

1212: Busbar slot

1213: Convergence Chamber

122: Resonance sheet

1221: Movable part

1222: Fixed part

1223: Hollow Hole

2: Piezoelectric actuator

21: Hoverboard

21a: The first surface of the hoverboard

21b: Second surface of the hoverboard

22: Piezoelectric element

23: Outer frame

23a: The first surface of the outer frame

23b: Second surface of outer frame

231: Conductive pins

24: Bracket

24a: The first surface of the stent

24b: Second surface of bracket

25: void

26: Convex

27: Spill-proof structure

27a: Anti-overflow recess

27b: Overfill prevention protrusions

28a: The first stage difference

28b: Second stage difference surface

28c: The third stage difference

28d: Fourth stage difference

3a, 3b: insulating sheet

4: Conductive sheet

41: Conductive pins

5: Adhesive layer

6: Sealing

h: gap

s1: The first overflow prevention depth

s2: The second overflow prevention depth

s3: The third overflow prevention depth

s4: Fourth overflow prevention depth

s5: The fifth overflow prevention depth

s6: sixth overflow prevention depth

Claims (10)

1. A microfluidic control device, comprising:

a piezoelectric actuator, comprising:

a suspension plate having a first surface and a corresponding second surface, wherein the second surface has a convex portion;

the outer frame is arranged around the outer side of the suspension plate and is provided with a first surface and a corresponding second surface, and the first surface of the suspension plate and the first surface of the outer frame are coplanar;

at least one bracket connected between the suspension plate and the outer frame and provided with a first surface and a corresponding second surface, wherein the first surface of the bracket and the first surface of the outer frame are coplanar;

at least one overflow-proof structure formed between the outer frame and the support to make the outer frame and the support maintain a height difference; and

the piezoelectric ceramic plate is attached to the first surface of the suspension plate;

a housing, comprising:

the outlet plate is a frame structure with a side wall at the periphery and a plate at the bottom to form an accommodating space, so that the piezoelectric actuator is arranged in the accommodating space; and

a base seat formed by joining an inlet plate and a resonance plate, and combined in the containing space of the outlet plate to seal the piezoelectric actuator, wherein the inlet plate is provided with at least one air inlet hole and at least one bus bar hole communicated with the air inlet hole to form a bus chamber, the resonance plate is arranged and fixed on the inlet plate and is provided with a hollow hole, and the hollow hole is opposite to the bus chamber of the inlet plate and corresponds to the convex part of the suspension plate;

wherein, a glue layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance sheet of the base, a depth is maintained between the piezoelectric actuator and the resonance sheet of the base to form a compression chamber, and the height difference of the overflow-proof structure can be used for filling the overflowing glue layer so as to inhibit the glue layer from overflowing out of the outer frame.

2. The microfluidic control device according to claim 1, wherein the overflow prevention structure is formed by a first step difference surface formed at the position where the frame edge is connected to the bracket and extending toward the second surface of the frame, the first step difference surface and the second surface of the frame maintain a first overflow prevention depth, and the first step difference surface and the second surface of the bracket form a coplanar abutment.

3. The micro fluid control device according to claim 1, wherein the overflow preventing structure is formed by connecting the edge of the outer frame to the bracket and extending toward the second surface of the outer frame to form a second step difference surface, the second step difference surface and the second surface of the outer frame maintain a second overflow preventing depth, the second step difference surface and the second surface of the bracket maintain a third overflow preventing depth, and the second overflow preventing depth is greater than the third overflow preventing depth.

4. The microfluidic control device according to claim 1, wherein the anti-overflow structure comprises an anti-overflow recess and an anti-overflow protrusion extending from the edge of the frame to the second surface of the frame, the anti-overflow recess is adjacent to the frame, the anti-overflow protrusion is adjacent to the anti-overflow recess, the anti-overflow recess has a third section difference surface that maintains a fourth anti-overflow depth with the second surface of the frame, and a top surface of the anti-overflow protrusion is coplanar with the second surface of the frame and maintains a fifth anti-overflow depth with the frame.

5. The microfluidic control device of claim 1 wherein the overflow prevention structure is a fourth stepped surface formed by a ring shape extending from the edge of the frame to the second surface of the frame, the fourth stepped surface and the second surface of the frame maintain a sixth overflow prevention depth, and the fourth stepped surface and the second surface of the frame form a coplanar abutment.

6. A piezoelectric actuator, comprising:

a suspension plate having a first surface and a corresponding second surface, wherein the second surface has a convex portion;

the outer frame is arranged around the outer side of the suspension plate and is provided with a first surface and a corresponding second surface, and the first surface of the suspension plate and the first surface of the outer frame are coplanar;

at least one bracket connected between the suspension plate and the outer frame and provided with a first surface and a corresponding second surface, wherein the first surface of the bracket and the first surface of the outer frame are coplanar;

at least one overflow-proof structure formed between the second surface of the outer frame and the second surface of the support to make the outer frame and the support maintain a height difference; and

and the piezoelectric ceramic plate is attached to the first surface of the suspension plate.

7. The piezoelectric actuator according to claim 6, wherein the spill-proof structure is formed by a first step difference surface extending from the edge of the outer frame to the support toward the second surface, the first step difference surface and the second surface of the outer frame maintain a first spill-proof depth, and the first step difference surface and the second surface of the support form a coplanar abutment.

8. The piezoelectric actuator according to claim 6, wherein the anti-overflow structure is formed by a second step difference surface formed at the position where the edge of the frame is connected to the bracket and extending toward the second surface of the frame, the second step difference surface and the second surface of the frame maintain a second anti-overflow depth, the second step difference surface and the second surface of the bracket maintain a third anti-overflow depth, and the second anti-overflow depth is greater than the third anti-overflow depth.

9. The piezoelectric actuator according to claim 6, wherein the anti-overflow structure is formed by disposing an anti-overflow concave portion and an anti-overflow convex portion at the position where the edge of the outer frame is connected to the bracket and extending toward the second surface of the outer frame, the anti-overflow concave portion is adjacent to the outer frame, the anti-overflow convex portion is adjacent to the anti-overflow concave portion, the anti-overflow concave portion has a third section difference surface that maintains a fourth anti-overflow depth with the second surface of the outer frame, and a top surface of the anti-overflow convex portion is coplanar with the second surface of the outer frame and maintains a fifth anti-overflow depth with the bracket.

10. The piezoelectric actuator according to claim 6, wherein the spill-proof structure is a ring-shaped fourth stepped surface formed where the rim of the frame is connected to the frame and extending toward the second surface of the frame, the fourth stepped surface maintains a sixth spill-proof depth with respect to the second surface of the frame, and the fourth stepped surface is in coplanar abutment with the second surface of the frame.

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