CN211975351U - Micro fluid control device and piezoelectric actuator - Google Patents

Abstract

The utility model provides a miniature fluid control device and piezoelectric actuator. The microfluidic control device includes a piezoelectric actuator and a housing, wherein the piezoelectric actuator includes: the anti-overflow device comprises a suspension plate, an outer frame, a bracket and an anti-overflow structure; the support is connected between the suspension plate and the outer frame, the first surfaces of the suspension plate, the outer frame and the support are coplanar, and the anti-overflow structure is formed between the second surfaces of the outer frame and the support so as to ensure that the outer frame and the support keep a height difference. The overflow-proof structure can prevent the glue layer from overflowing the outer frame when being coated on the outer frame.

Description

Micro fluid control device and piezoelectric actuator

[ technical field ] A method for producing a semiconductor device

The present invention relates to a fluid control device, and more particularly, to a miniature fluid control device with ultra-thin and quiet structure.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

For example, in the medical industry, many instruments or devices that require pneumatic power are often used with conventional motors and pneumatic valves for fluid delivery purposes. However, the volume of the conventional motor and the fluid valve is limited, so that it is difficult to reduce the volume of the whole device, i.e. to achieve the goal of thinning, and further, the portable purpose of the apparatus cannot be achieved. In addition, these conventional motors and fluid valves also generate noise when they are actuated, which causes inconvenience and discomfort in use.

As shown in fig. 1, a fluid control device includes a housing 1, a piezoelectric actuator 2, two insulating sheets 3a and 3b, and a conductive sheet 4. The casing 1 includes an outlet plate 11 and a base 12, the outlet plate 11 is a frame structure with a side wall 111 at the periphery and a plate 112 at the bottom, and the side wall 111 and the plate 112 define a receiving space 113 together for the piezoelectric actuator 2 to be disposed in the receiving space 113, the plate 112 is recessed on a surface to form a temporary storage chamber 114, and the plate 112 is provided with at least one discharge hole 115 penetrating and communicating with the temporary storage chamber 114; the base 12 includes an inlet plate 121 and a resonator plate 122, the inlet plate 121 has at least one inlet hole 1211, at least one bus slot 1212 and a collecting chamber 1213, the inlet hole 1211 is correspondingly communicated with the bus slot 1212, and the other end of the at least one bus slot 1212 is communicated with the collecting chamber 1213, the collecting chamber 1213 forms a chamber for collecting fluid for temporary storage, the depth of the formed chamber is the same as the depth of the bus slot 1212, the resonator plate 122 is made of a flexible material, and has a hollow hole 1223 corresponding to the collecting chamber 1213 of the inlet plate 121, so that the fluid in the collecting chamber 1213 can flow through the hollow hole 1223 to the lower side of the resonator plate 122. Thus, an outlet plate 11, an insulating sheet 3b, a conductive sheet 4, an insulating sheet 3a, a piezoelectric actuator 2 and a base 12 are sequentially stacked and fixed upwards, and finally, the accommodating spaces 113 on both sides of the sidewall 111 of the outlet plate 11 are coated with the sealant 6 to provide leak-proof sealing, so that the fluid control device is simple in structure and can be thin.

The piezoelectric actuator 2 is disposed corresponding to the resonator plate 122, and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23, and at least one support 24, and the resonator plate 122 is a movable portion 1221 corresponding to the bus chamber 1213, and a fixed portion 1222 is fixed and adhered to the base 12.

The equipment to which the above-described assembled fluid control devices are applied is always in a trend of miniaturization. Therefore, it is required to further reduce the size of the fluid control device without reducing the output capacity (discharge flow rate and discharge pressure) of the fluid control device. However, the more the fluid control device is miniaturized, the more the output capacity of the fluid control device is reduced. Therefore, there is a limit to the control of the conventional configuration in order to maintain the control output capability and to miniaturize the control output capability. Therefore, the present invention has studied the control of the structure shown below.

Fig. 1 is a sectional view showing a configuration of a main part of the fluid control device. The fluid control device is a structure formed by sequentially stacking and adhering an outlet plate 11, an insulating sheet 3b, a conductive sheet 4, an insulating sheet 3a, a piezoelectric actuator 2 and a base 12 upward.

However, the glue layer 5 is disposed between the outer frame 23 of the suspension plate 21 and the resonator plate 122, when the glue layer 5 is applied, the glue layer 5 flows along the outer frame 23 and toward the bracket 24 due to the capillary action of the outer frame 23 when the glue layer 5 is applied to the piezoelectrically actuated outer frame 23, and thus the glue layer 5 easily overflows from the outer frame 23 and adheres to the bracket 24, so that the glue layer 5 adheres to the bracket 24 between the bracket 24 and the resonator plate 122, and the resonance effect of the resonator plate 122 and the bracket 24 is further affected, thereby affecting the working efficiency of the fluid control device, or the glue layer 5 flowing into the micro fluid control device also affects the operation of other components.

Therefore, it is an urgent need to solve the above-mentioned shortcomings in the prior art to develop a micro pneumatic fluid device and a piezoelectric actuator thereof, which can reduce the size, miniaturize and mute the conventional apparatus or equipment using the fluid control device, thereby achieving the portable purpose of portability and comfort.

[ Utility model ] content

The main objective of the present disclosure is to provide a micro fluid control device, wherein an anti-overflow structure is disposed on a second surface of an outer frame close to a second surface of a support, so that a height difference is maintained between the outer frame and the support to prevent an overflow of glue on a glue layer.

To achieve the above object, in one broad aspect, a microfluidic control device is provided, which includes a piezoelectric actuator and a housing, the piezoelectric actuator including: a suspension plate having a first surface and a corresponding second surface, wherein the second surface has a convex portion; the outer frame is arranged around the outer side of the suspension plate and is provided with a first surface and a corresponding second surface, and the first surface of the suspension plate and the first surface of the outer frame are coplanar; at least one bracket connected between the suspension plate and the outer frame and provided with a first surface and a corresponding second surface, wherein the first surface of the bracket and the first surface of the outer frame are coplanar; at least one overflow-proof structure formed between the outer frame and the support to make the outer frame and the support maintain a height difference; the piezoelectric ceramic plate is attached to the first surface of the suspension plate; and the housing includes: the outlet plate is a frame structure with a side wall at the periphery to form an accommodating space, so that the piezoelectric actuator is arranged in the accommodating space; the base is formed by joining an inlet plate and a resonance plate and is combined in the accommodating space of the outlet plate to seal the piezoelectric actuator, the inlet plate is provided with at least one air inlet hole and at least one bus bar hole communicated with the air inlet hole to form a bus chamber, and the resonance plate is arranged and fixed on the inlet plate and is provided with a hollow hole, corresponds to the bus chamber of the inlet plate and corresponds to the convex part of the suspension plate; wherein, a glue layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance sheet of the base, so that a depth is maintained between the piezoelectric actuator and the resonance sheet of the base to form a compression chamber, and the height difference of the overflow-proof structure can be used for filling the overflowing glue layer to inhibit the glue layer from overflowing out of the outer frame.

In one broad aspect, a piezoelectric actuator is provided, comprising: a suspension plate having a first surface and a corresponding second surface, wherein the second surface has a convex portion; the outer frame is arranged around the outer side of the suspension plate and is provided with a first surface and a corresponding second surface, and the first surface of the suspension plate and the first surface of the outer frame are coplanar; at least one bracket connected between the suspension plate and the outer frame and provided with a first surface and a corresponding second surface, wherein the first surface of the bracket and the first surface of the outer frame are coplanar; at least one overflow-proof structure formed between the second surface of the outer frame and the second surface of the support to make the outer frame and the support maintain a height difference; and the piezoelectric ceramic plate is attached to the first surface of the suspension plate.

[ description of the drawings ]

Fig. 1 is a schematic cross-sectional view of a fluid control device.

FIG. 2A is an exploded front view of the components associated with the fluid control device.

FIG. 2B is an exploded rear view of the components associated with the fluid control device.

Fig. 3 is a cross-sectional view of the piezoelectric actuator assembled on the base.

Fig. 4A is a schematic perspective view of the piezoelectric actuator viewed from the front.

Fig. 4B is a perspective view of the piezoelectric actuator viewed from the back.

Fig. 5 is a cross-sectional schematic view of a first embodiment of a spill prevention feature of the fluid control device.

Fig. 6 is a cross-sectional schematic view of a second embodiment of a spill prevention feature of the fluid control device.

Fig. 7 is a cross-sectional schematic view of a third embodiment of a spill prevention feature of the fluid control device.

Fig. 8A is a schematic perspective view of a fourth embodiment of an anti-spill structure of a fluid control device.

Fig. 8B is a cross-sectional schematic view of a fourth embodiment of a spill prevention feature of the fluid control device.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

As shown in fig. 1, fig. 2A, fig. 2B and fig. 3, the fluid control device of the present invention includes a housing 1, a piezoelectric actuator 2, two insulation sheets 3a and 3B and a conductive sheet 4. The housing 1 includes an outlet plate 11 and a base 12, and the base 12 includes an inlet plate 121 and a resonator plate 122, but not limited thereto. The piezoelectric actuator 2 is disposed corresponding to the resonator plate 122, and the outlet plate 11, the piezoelectric actuator 2, the resonator plate 122 of the base 12, the inlet plate 121, and the like are sequentially stacked upward, and the piezoelectric actuator 2 is assembled by the suspension plate 21, the piezoelectric element 22, the outer frame 23, and at least one bracket 24.

In the embodiment, the outlet plate 11 of the housing 1 is a frame structure having a side wall 111 at the periphery and a plate 112 at the bottom, and the side wall 111 and the plate 112 together define an accommodating space 113 for the piezoelectric actuator 2 to be disposed in the accommodating space 113, the plate 112 is recessed on a surface to form a temporary storage chamber 114, and the plate 112 is provided with at least one discharge hole 115 penetrating and communicating with the temporary storage chamber 114, and the side wall 111 and the plate 112 together define an accommodating space 113 for the piezoelectric actuator 2 to be disposed in the accommodating space 113. The base 12 includes an inlet plate 121 and a resonator plate 122, wherein the inlet plate 121 has at least one inlet hole 1211, and in the present embodiment, the number of the inlet holes 1211 is 4, but not limited thereto, and the inlet hole 1211 penetrates through the upper and lower surfaces of the inlet plate 121, and is mainly used for allowing the fluid to flow from the at least one inlet hole 1211 into the fluid control device under the action of the atmospheric pressure from the outside of the device; the inlet plate 121 has at least one bus slot 1212, each bus slot 1212 is correspondingly connected to an inlet 1211, a bus chamber 1213 is disposed at a central portion of the bus slot 1212, and the bus chamber 1213 is connected to the bus slot 1212, so that the fluid entering the bus slot 1212 from the at least one inlet 1211 can be guided and collected to the bus chamber 1213.

In the present embodiment, the inlet plate 121 has an inlet 1211, a bus groove 1212 and a junction chamber 1213 formed integrally, and after the inlet plate 121 and the resonator plate 122 are assembled correspondingly, a chamber for collecting the fluid is formed at the junction chamber 1213 for temporary storage of the fluid.

In some embodiments, the inlet plate 121 is made of a stainless steel material, but not limited thereto. In other embodiments, the depth of the chamber formed by the bus chamber 1213 is the same as the depth of the bus slots 1212, but not limited thereto.

The piezoelectric actuator 2 is disposed corresponding to the resonator plate 122 and is composed of a suspension plate 21, a piezoelectric element 22, an outer frame 23 and at least one support 24, wherein the resonator plate 122 is a movable portion 1221 corresponding to the collecting chamber 1213, and a portion fixedly adhered to the base 12 is a fixed portion 1222, and the resonator plate 122 has a hollow hole 1223 disposed corresponding to the collecting chamber 1213 of the inlet plate 121, so as to allow fluid to flow therethrough. In the present embodiment, the resonator plate 122 is made of a flexible material, but not limited thereto. In other embodiments, the resonator plate 122 is a copper material, but not limited thereto.

The piezoelectric element 22 has a square plate-like structure, has a side length no greater than that of the suspension plate 21, and can be attached to the suspension plate 21. In the present embodiment, the suspension plate 21 is a flexible square plate-shaped structure, the outer side of the suspension plate 21 surrounds the outer frame 23, and the configuration of the outer frame 23 also substantially corresponds to the configuration of the suspension plate 21. In the present embodiment, the outer frame 23 is also a square hollow frame structure; and the suspension plate 21 is connected with the outer frame 23 by four brackets 24 and provides elastic support. Referring to fig. 2A and fig. 2B, the suspension plate 21, the outer frame 23 and the four brackets 24 are integrally formed, and may be made of a metal plate, such as stainless steel, but not limited thereto, and the piezoelectric actuator 2 of the fluid control device of the present invention is formed by bonding the piezoelectric element 22 and the metal plate, but not limited thereto. The outer frame 23 is disposed around the outer side of the suspension board 21, and has a conductive pin 231 protruding outward for electrical connection, but not limited thereto; and the four brackets 24 are connected between the suspension plate 21 and the outer frame 23 to provide elastic support. In the present embodiment, one end of each of the brackets 24 is connected to the side of the suspension plate 21, the other end is connected to the inner side of the outer frame 23, and at least one gap 25 is further provided between the bracket 24, the suspension plate 21 and the outer frame 23 for fluid flow, and the type and number of the suspension plate 21, the outer frame 23 and the brackets 24 are various. Through the bracket 24 spanning between the suspension plate 21 and the outer frame 23, the uneven offset angle of the suspension plate 21 during operation is reduced, which is helpful to increase the amplitude of the suspension plate 21 on the Z axis, so that the suspension plate 21 can have a better displacement state during vertical vibration, i.e. the suspension plate 21 is more stable and consistent during actuation, thereby facilitating the improvement of the stability and efficiency of the actuation of the piezoelectric actuator 2. In the embodiment, the suspension plate 21 is a square structure with a step surface, that is, a protrusion 26 is further disposed on a surface of the suspension plate 21, and the protrusion 26 may be a circular protrusion structure, but not limited thereto.

The two insulating sheets 3a and 3b are provided so as to sandwich the conductive sheet 4 from above and below. In addition, in some embodiments, the insulating sheets 3a and 3b are made of an insulating material, such as: plastic, but not limited to this, for insulation; in other embodiments, the conductive sheet 4 is made of a conductive material, such as: but not limited to, metals for electrical conduction. In the embodiment, a conductive pin 41 may be disposed on the conductive sheet 4 for electrical conduction.

When the fluid control device is assembled, the outlet plate 11, an insulating plate 3b, a conductive plate 4, an insulating plate 3a, a piezoelectric actuator 2, and a base 12 are sequentially stacked, assembled, and fixed upwards, and are accommodated in the accommodating space 113 of the outlet plate 11, and finally the accommodating space 113 on both sides of the sidewall 111 of the outlet plate 11 is coated with the sealant 6 to provide a leak-proof seal, thereby forming a fluid control device with small flow volume and miniaturized shape. In the above-described configuration, when the driving voltage is applied to the piezoelectric element 22, the suspension plate 21 is subjected to bending vibration due to the expansion and contraction of the piezoelectric element 22, and the movable portion 1221 of the resonator plate 122 is vibrated along with the vibration of the suspension plate 21, whereby the fluid control device sucks fluid from the at least one inlet hole 1211 of the base 12, introduces the fluid into the at least one bus groove 1212 and into the bus chamber 1213, introduces the fluid into the buffer chamber 114 through the hollow hole 1223, compresses the volume of the buffer chamber 114 by the vibration of the suspension plate 21 of the piezoelectric actuator 2 and the resonance effect of the resonator plate 122, and discharges the fluid through the at least one discharge hole 115 of the outlet plate 11, thereby configuring an operation of the fluid control device for transferring the fluid.

As shown in fig. 1 and 3, a gap h is formed between the resonator plate 122 and the piezoelectric actuator 2, and a glue layer 5 is filled in the gap h between the resonator plate 122 and the outer frame 23 of the piezoelectric actuator 2, for example: the conductive paste, but not limited thereto, can maintain the depth of the gap h between the resonator plate 122 and the suspension plate 21 of the piezoelectric actuator 2, so as to guide the air flow to flow more rapidly; and, the compression chamber 116 is formed between the resonator plate 122 and the piezoelectric actuator 2 in response to the depth of the gap h, so that the fluid can be guided to flow between the chambers more rapidly through the hollow hole 1223 of the resonator plate 122, and the noise generation can be reduced because the floating plate 21 and the resonator plate 122 maintain a proper distance to reduce contact interference therebetween.

In order to improve the problem that when the glue layer 5 is disposed between the outer frame 23 of the suspension plate 21 and the resonator plate 122 during the coating operation, the glue layer 5 coated on the piezoelectrically actuated outer frame 23 is subject to the capillary action of the outer frame 23, so that the glue layer 5 flows along the outer frame 23 toward the bracket 24, and the flowing easily overflows from the outer frame 23 and adheres to the bracket 24, and the like, the structure of the outer frame 23 of the piezoelectric actuator 2 is further improved, an anti-overflow structure 27 (as shown in fig. 4A) is disposed on the second surface 23b of the outer frame 23 near the second surface 24b of the bracket 24, and the anti-overflow structure 27 is a notch or anti-blocking protrusion achieved by using an etching technique, so that the glue overflow of the glue layer 5 can be suppressed by using the anti-overflow structure 27.

As shown in fig. 4A and 5, the piezoelectric actuator 2 of the present embodiment includes: a suspension plate 21 having a first surface 21a and a second surface 21b corresponding to the first surface 21a, the second surface 21b having a protrusion 26 thereon; a frame 23 disposed around the suspension plate 21 and having a first surface 23a and a second surface 23b corresponding to the first surface 23a, wherein the first surface 21a of the suspension plate 21 and the first surface 23a of the frame are coplanar; at least one bracket 24 connected between the suspension plate 21 and the outer frame 23 and having a first surface 24a and a second surface 24b corresponding to the first surface 24a, wherein the first surface 24a of the bracket and the first surface 23a of the outer frame are coplanar; at least one overflow preventing structure 27 formed between the frame 23 and the support 24 to maintain a height difference between the frame 23 and the support 24; and a piezoelectric ceramic plate 22 attached to the first surface 21a of the suspension plate.

As shown in fig. 4A, 4B and 5, in the first embodiment of the present invention, the anti-overflow structure 27 is formed by connecting the edge of the outer frame 23 to the bracket 24 and extending toward the second surface 24B of the outer frame 23 to form a first section of differential surface 28a, the first section of differential surface 28a and the second surface 23B of the outer frame maintain a first anti-overflow depth s1, and the first section of differential surface 28a and the second surface 24B of the bracket 24 form a coplanar abutment, so that the anti-overflow structure 27 can fill the space between the first section of differential surface 28a and the first anti-overflow depth s1 by connecting the edge of the bracket 24 and extending toward the second surface 24B to fill the glue overflow of the glue layer 5, thereby suppressing the problem of glue overflow of the glue layer 5.

As shown in fig. 6, in the second embodiment of the disclosure, the anti-overflow structure 27 is formed by connecting the edge of the outer frame 23 to the bracket 24 and extending toward the second surface 24b of the outer frame 23 to form a second section difference surface 28b, the second section difference surface 28b and the second surface 23b of the outer frame 23 maintain a second anti-overflow depth s2, the second section difference surface 28b and the second surface 23b of the bracket 23 maintain a third anti-overflow depth s3, and the second anti-overflow depth s2 is greater than the third anti-overflow depth s3, so that the space between the second section difference surface 28b and the second anti-overflow depth s2 fills the glue overflow of the glue layer 5, and the third anti-overflow depth s3 provides a further anti-overflow effect to block the glue overflow of the glue layer 5 from flowing along the bracket 24, and also can inhibit the glue overflow problem of the glue layer 5.

As shown in fig. 7, in the third embodiment of the present invention, the spill-proof structure 27 is formed by connecting the edge of the outer frame 23 to the bracket 24 and extending toward the second surface 24b of the outer frame 23 to form a spill-proof concave portion 27a and a spill-proof convex portion 27b, the spill-proof concave portion 27a is adjacent to the outer frame 23, the spill-proof convex portion 27b is adjacent to the spill-proof concave portion 27a, the spill-proof concave portion 27a has a third section difference surface 28c maintaining a fourth spill-proof depth s4 with the second surface 23b of the outer frame 23, and the top surface of the spill-proof convex portion 27b is coplanar with the second surface 23b of the outer frame 23 and maintaining a fifth spill-proof depth s5 with the bracket 24. The space of the third section difference surface 28c and the fourth overflow-preventing depth s4 formed by the overflow-preventing concave portion 23a of the present embodiment fills up the glue overflow of the glue layer 5, and the fifth overflow-preventing depth s5 of the overflow-preventing convex portion 27b provides a better overflow-preventing effect, so that the glue overflow of the glue layer 5 is blocked from flowing along the direction of the bracket 24, and the glue overflow problem of the glue layer 5 can also be suppressed.

In addition to the above-mentioned spill-proof structure 27 of the embodiment, in the fourth embodiment, the spill-proof structure 27 may be formed by connecting the edge of the outer frame 23 to the bracket 24 and extending a ring-shaped step surface toward the second surface 24B of the outer frame 23, in detail, as shown in fig. 8A and 8B, the spill-proof structure 27 is formed by connecting the edge of the outer frame 23 to the bracket 24 and extending a ring-shaped step surface 28d toward the second surface 24B of the outer frame 23, the fourth step surface 28d maintains a sixth spill-proof depth s6 with the second surface 23B of the outer frame 23, and the fourth step surface 28d forms a coplanar abutment with the second surface 24B of the bracket 24. The anti-overflow structure 27 thus configured can fill up the glue overflow of the glue layer 5 by utilizing the space where the edge connects the bracket 24 and extends a ring shape toward the second surface 24b to form a fourth section difference surface 28d and a sixth anti-overflow depth s6, thereby suppressing the glue overflow of the glue layer 5.

In summary, the present disclosure provides a micro fluid control device, wherein an anti-overflow structure is disposed on a second surface of the outer frame near the second surface of the support to prevent the glue layer from overflowing, and the miniaturized piezoelectric actuator can further reduce the overall size and thickness of the micro fluid control device, so as to achieve the portable purpose of portability.

[ notation ] to show

1: shell body

11: outlet plate

111: side wall

112: plate member

113: containing space

114: temporary storage chamber

115: discharge hole

116: compression chamber

12: base seat

121: entrance plate

1211: feed inlet

1212: bus bar groove

1213: confluence chamber

122: resonance sheet

1221: movable part

1222: fixing part

1223: hollow hole

2: piezoelectric actuator

21: suspension plate

21 a: the first surface of the suspension plate

21 b: second surface of the suspension plate

22: piezoelectric element

23: outer frame

23 a: the first surface of the outer frame

23 b: second surface of the outer frame

231: conductive pin

24: support frame

24 a: first surface of the bracket

24 b: second surface of the bracket

25: voids

26: convex part

27: anti-overflow structure

27 a: spill-proof concave part

27 b: spill-proof convex part

28 a: first stage difference surface

28 b: second stage difference surface

28 c: third stage difference surface

28 d: difference surface of the fourth section

3a, 3 b: insulating sheet

4: conductive sheet

41: conductive pin

5: glue layer

6: sealing compound

h: gap

s 1: first anti-overflow depth

s 2: second spill depth

s 3: third prevention of overflow depth

s 4: fourth depth of overflow prevention

s 5: fifth depth of overflow prevention

s 6: sixth anti-overflow depth

Claims (10)

1. A microfluidic control device, comprising:

a piezoelectric actuator, comprising:

a suspension plate having a first surface and a corresponding second surface, wherein the second surface has a convex portion;

the outer frame is arranged around the outer side of the suspension plate and is provided with a first surface and a corresponding second surface, and the first surface of the suspension plate and the first surface of the outer frame are coplanar;

at least one bracket connected between the suspension plate and the outer frame and provided with a first surface and a corresponding second surface, wherein the first surface of the bracket and the first surface of the outer frame are coplanar;

at least one overflow-proof structure formed between the outer frame and the support to make the outer frame and the support maintain a height difference; and

the piezoelectric ceramic plate is attached to the first surface of the suspension plate;

a housing, comprising:

the outlet plate is a frame structure with a side wall at the periphery and a plate at the bottom to form an accommodating space, so that the piezoelectric actuator is arranged in the accommodating space; and

a base seat formed by joining an inlet plate and a resonance plate, and combined in the containing space of the outlet plate to seal the piezoelectric actuator, wherein the inlet plate is provided with at least one air inlet hole and at least one bus bar hole communicated with the air inlet hole to form a bus chamber, the resonance plate is arranged and fixed on the inlet plate and is provided with a hollow hole, and the hollow hole is opposite to the bus chamber of the inlet plate and corresponds to the convex part of the suspension plate;

wherein, a glue layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance sheet of the base, a depth is maintained between the piezoelectric actuator and the resonance sheet of the base to form a compression chamber, and the height difference of the overflow-proof structure can be used for filling the overflowing glue layer so as to inhibit the glue layer from overflowing out of the outer frame.

2. The microfluidic control device according to claim 1, wherein the overflow prevention structure is formed by a first step difference surface formed at the position where the frame edge is connected to the bracket and extending toward the second surface of the frame, the first step difference surface and the second surface of the frame maintain a first overflow prevention depth, and the first step difference surface and the second surface of the bracket form a coplanar abutment.

3. The micro fluid control device according to claim 1, wherein the overflow preventing structure is formed by connecting the edge of the outer frame to the bracket and extending toward the second surface of the outer frame to form a second step difference surface, the second step difference surface and the second surface of the outer frame maintain a second overflow preventing depth, the second step difference surface and the second surface of the bracket maintain a third overflow preventing depth, and the second overflow preventing depth is greater than the third overflow preventing depth.

4. The microfluidic control device according to claim 1, wherein the anti-overflow structure comprises an anti-overflow recess and an anti-overflow protrusion extending from the edge of the frame to the second surface of the frame, the anti-overflow recess is adjacent to the frame, the anti-overflow protrusion is adjacent to the anti-overflow recess, the anti-overflow recess has a third section difference surface that maintains a fourth anti-overflow depth with the second surface of the frame, and a top surface of the anti-overflow protrusion is coplanar with the second surface of the frame and maintains a fifth anti-overflow depth with the frame.

5. The microfluidic control device of claim 1 wherein the overflow prevention structure is a fourth stepped surface formed by a ring shape extending from the edge of the frame to the second surface of the frame, the fourth stepped surface and the second surface of the frame maintain a sixth overflow prevention depth, and the fourth stepped surface and the second surface of the frame form a coplanar abutment.

6. A piezoelectric actuator, comprising:

a suspension plate having a first surface and a corresponding second surface, wherein the second surface has a convex portion;

the outer frame is arranged around the outer side of the suspension plate and is provided with a first surface and a corresponding second surface, and the first surface of the suspension plate and the first surface of the outer frame are coplanar;

at least one bracket connected between the suspension plate and the outer frame and provided with a first surface and a corresponding second surface, wherein the first surface of the bracket and the first surface of the outer frame are coplanar;

at least one overflow-proof structure formed between the second surface of the outer frame and the second surface of the support to make the outer frame and the support maintain a height difference; and

and the piezoelectric ceramic plate is attached to the first surface of the suspension plate.

7. The piezoelectric actuator according to claim 6, wherein the spill-proof structure is formed by a first step difference surface extending from the edge of the outer frame to the support toward the second surface, the first step difference surface and the second surface of the outer frame maintain a first spill-proof depth, and the first step difference surface and the second surface of the support form a coplanar abutment.

8. The piezoelectric actuator according to claim 6, wherein the anti-overflow structure is formed by a second step difference surface formed at the position where the edge of the frame is connected to the bracket and extending toward the second surface of the frame, the second step difference surface and the second surface of the frame maintain a second anti-overflow depth, the second step difference surface and the second surface of the bracket maintain a third anti-overflow depth, and the second anti-overflow depth is greater than the third anti-overflow depth.

9. The piezoelectric actuator according to claim 6, wherein the anti-overflow structure is formed by disposing an anti-overflow concave portion and an anti-overflow convex portion at the position where the edge of the outer frame is connected to the bracket and extending toward the second surface of the outer frame, the anti-overflow concave portion is adjacent to the outer frame, the anti-overflow convex portion is adjacent to the anti-overflow concave portion, the anti-overflow concave portion has a third section difference surface that maintains a fourth anti-overflow depth with the second surface of the outer frame, and a top surface of the anti-overflow convex portion is coplanar with the second surface of the outer frame and maintains a fifth anti-overflow depth with the bracket.

10. The piezoelectric actuator according to claim 6, wherein the spill-proof structure is a ring-shaped fourth stepped surface formed where the rim of the frame is connected to the frame and extending toward the second surface of the frame, the fourth stepped surface maintains a sixth spill-proof depth with respect to the second surface of the frame, and the fourth stepped surface is in coplanar abutment with the second surface of the frame.

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