CN211897086U

CN211897086U - Evaporation line source crucible with heat conduction device

Info

Publication number: CN211897086U
Application number: CN201921576328.2U
Authority: CN
Inventors: 张麒麟; 卢玄龙; 林少钦
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2019-09-20
Filing date: 2019-09-20
Publication date: 2020-11-10
Anticipated expiration: 2029-09-20

Abstract

The utility model relates to a line source crucible technical field, in particular to coating by vaporization line source crucible with heat conduction device sets up heat conduction device in setting up crucible body inner chamber, and the energy of crucible body lateral wall can be through the organic material at the middle part and the middle part of heat-conducting plate conduction to crucible body inner chamber, can improve the homogeneity that the organic material of crucible body inner chamber was heated like this, is favorable to organic material's evaporation rate to remain stable to improve the homogeneity of base plate film.

Description

Evaporation line source crucible with heat conduction device

Technical Field

The utility model relates to a line source crucible technical field, in particular to coating by vaporization line source crucible with heat conduction device.

Background

An Organic Light-emitting Diode (OLED) is a new generation of display technology, and in a current vacuum evaporation process, a crucible is used as an evaporation source of evaporation equipment, a crucible body holds a material, the material is heated and vaporized, and then overflows through a nozzle on an upper cover of the crucible, and finally is deposited on a substrate to form a solid film for realizing the Light emission of an OLED device.

The OLED organic material is generally a sublimation type material or a melting type material, wherein the sublimation type material is heated and then directly sublimated from a solid state to a gas state, and the melting type material is heated and then firstly changed from the solid state to the liquid state and then evaporated to the gas state. However, the thermal conductivity of the organic materials of the OLED in both sublimation and melting types is generally poor, when the inside of the crucible is heated, the material near the inner wall of the crucible is heated and vaporized, and the temperature of the material in the middle part needs to be continuously transferred from the outside to be consistent with that of the material outside. In addition, a line source crucible used by the evaporation equipment is generally heated by an external resistance wire, but the crucible is difficult to be completely and uniformly heated by the heating mode of the resistance wire, so that the temperature field in the crucible is not uniform, evaporation materials in the crucible are not uniformly vaporized due to the factors, the stability of the plating rate is influenced, and the reduction of the uniformity of a substrate film causes the reduction of the quality and the service life of an OLED device.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model aims to solve the technical problems that: provides an evaporation line source crucible capable of improving the uniformity of heating of materials in an inner cavity of a crucible body.

In order to solve the technical problem, the utility model discloses a technical scheme be:

the utility model provides an evaporation line source crucible with heat-transfer device, includes the crucible body inner chamber is equipped with heat-transfer device, heat-transfer device includes the heat conduction mother board peg graft on the extending direction of heat conduction mother board and have more than two heat-conducting plates, adjacent two be equipped with the interval between the heat-conducting plate, the heat-conducting plate is configured to conduct the middle part of crucible body inner chamber with the heat on the crucible body lateral wall.

Furthermore, more than two heat-conducting plates are non-uniformly distributed on the heat-conducting mother plate and are perpendicular to the heat-conducting mother plate.

Furthermore, be equipped with two or more first breachs on the heat conduction mother board, the central point of heat-conducting plate puts and is equipped with a second breach, the second breach with the mutual block of first breach, the quantity of heat-conducting plate with the quantity of first breach equals.

Furthermore, more than two through holes are formed in the heat conduction mother board and the heat conduction plate.

Furthermore, the heat conducting mother board and the heat conducting board are both made of graphite.

The beneficial effects of the utility model reside in that:

through setting up heat-transfer device in setting up crucible body inner chamber, the energy of crucible body lateral wall can conduct the organic material to the middle part of crucible body inner chamber and middle part through the heat-conducting plate, can improve the homogeneity that the organic material of crucible body inner chamber was heated like this, is favorable to organic material's evaporation coating rate to remain stable to improve the homogeneity of base plate film. The heat conduction device of this scheme design comprises heat conduction mother board and heat-conducting plate, and the heat-conducting plate is pegged graft on the heat conduction mother board, and heat conduction device's group material is processed easily, with low costs, the heat conduction is effectual, the installation is dismantled and is washd the convenience promptly.

Drawings

Fig. 1 is a schematic structural view of an evaporation line source crucible with a heat conduction device according to the present invention;

fig. 2 is a top view of an evaporation line source crucible having a heat transfer device according to the present invention;

fig. 3 is a schematic structural view of a heat conductive mother plate of an evaporation line source crucible with a heat conductive device according to the present invention;

fig. 4 is a schematic structural view of a heat-conducting plate of an evaporation line source crucible with a heat-conducting device according to the present invention;

description of reference numerals:

1. a crucible body; 2. a heat-conducting motherboard; 3. a heat conducting plate; 4. a through hole; 5. a first notch; 6. a second notch.

Detailed Description

In order to explain the technical content, the objects and the effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.

Referring to fig. 1, the technical solution provided by the present invention is:

From the above description, the beneficial effects of the present invention are:

From the above description, by non-uniformly arranging more than two heat conducting plates on the heat conducting mother plate, the distance between the heat conducting plates can be set through the temperature field of the inner cavity of the crucible body, and the small-distance high temperature position at the lower temperature position adopts the larger distance, so that the uniformity of heating the organic material in the inner cavity of the crucible body can be further improved.

From the above description, it can be known that two or more first notches are arranged on the heat conducting mother plate, the central position of the heat conducting plate is provided with a second notch, and the second notch and the first notch are mutually clamped, so that the heat conducting mother plate can be conveniently installed and detached and can be firmly fixed without sliding.

As can be seen from the above description, the two or more through holes are formed in both the heat-conducting mother plate and the heat-conducting plate, which is beneficial to the flow of the molten organic material in the crucible body.

From the above description, it can be known that the heat conducting motherboard and the heat conducting plate are made of uniform materials, so that the consistency of heat conducting performance can be ensured.

Referring to fig. 1 to 4, a first embodiment of the present invention is:

referring to fig. 1 and 2, an evaporation line source crucible with a heat conduction device comprises a crucible body 1, wherein the heat conduction device is arranged in the inner cavity of the crucible body 1, the heat conduction device comprises a heat conduction mother plate 2, more than two heat conduction plates 3 are inserted in the extending direction of the heat conduction mother plate 2, a gap is arranged between every two adjacent heat conduction plates 3, and the heat conduction plates 3 are configured to conduct heat on the side wall of the crucible body 1 to the middle part of the inner cavity of the crucible body 1.

Referring to fig. 1 and 2, two or more heat conductive plates 3 are non-uniformly arranged on the heat conductive mother plate 2 and are perpendicular to the heat conductive mother plate 2.

Referring to fig. 3 and 4, the heat conductive sheet is square, and the heat conductive mother plate 2 is square.

The heat conduction mother board 2 is provided with more than two first gaps 5, the center position of the heat conduction plate 3 is provided with a second gap 6, the second gap 6 is mutually clamped with the first gaps 5, and the number of the heat conduction plates 3 is equal to that of the first gaps 5.

The gaps of the heat conduction mother plate 2 and the heat conduction plate 3 are formed to a height which satisfies the condition that the heat conduction mother plate 2 and the heat conduction plate 3 are flush with each other after the device is integrally placed in the inner cavity of the crucible body 1, and the heat conduction plate 3 cannot be suspended relative to the heat conduction mother plate 2 to ensure that the heat conduction plate 3 cannot move easily.

After putting into 1 inner chamber of crucible body, whole height will be less than the inner chamber height of line source crucible body 1 after heat conduction mother board 2 and the 3 blocks of heat-conducting plate, and heat-conducting plate 3 highly will be higher than the height of 1 single maximum material volume of adding of crucible body slightly, and heat conduction mother board 2 and the 3 sizes of heat-conducting plate will be less than the length limit size of 1 inner space of crucible body respectively, guarantee that heat-conducting device and 1 inner wall of crucible have certain space, be convenient for get and put.

All be equipped with two or more through-holes 4 on heat conduction mother board 2 and the heat-conducting plate 3, through-hole 4 on the heat-conducting plate 3 sets up about second breach 6 symmetry, the through-hole 4 quantity on 5 both sides of first breach equals.

The heat conduction mother board 2 and the heat conduction plate 3 are made of materials with melting points higher than the evaporation temperature of organic materials and stable properties and do not react with the organic materials, and the heat conduction mother board 2 and the heat conduction plate 3 can be made of graphite or titanium alloy or stainless steel.

To sum up, the utility model provides a pair of coating by vaporization line source crucible with heat conduction device sets up heat conduction device in setting up crucible body inner chamber, and the energy of crucible body lateral wall can be through the organic material at the middle part of heat-conducting plate conduction to crucible body inner chamber and middle part, can improve the homogeneity that the organic material of crucible body inner chamber was heated like this, is favorable to organic material's coating by vaporization speed to remain stable to improve the homogeneity of base plate film. The heat conduction device of this scheme design comprises heat conduction mother board and heat-conducting plate, and the heat-conducting plate is pegged graft on the heat conduction mother board, and heat conduction device's group material is processed easily, with low costs, the heat conduction is effectual, the installation is dismantled and is washd the convenience promptly.

The above mentioned is only the embodiment of the present invention, and not the limitation of the patent scope of the present invention, all the equivalent transformations made by the contents of the specification and the drawings, or the direct or indirect application in the related technical field, are included in the patent protection scope of the present invention.

Claims

1. An evaporation line source crucible with a heat conduction device is characterized by comprising a crucible body, wherein the heat conduction device is arranged in the inner cavity of the crucible body and comprises a heat conduction mother plate, more than two heat conduction plates are inserted in the extending direction of the heat conduction mother plate, a space is arranged between every two adjacent heat conduction plates, and the heat conduction plates are configured to conduct heat on the side wall of the crucible body to the middle part of the inner cavity of the crucible body;

the heat conducting plates are arranged on the heat conducting mother plate in a non-uniform mode and are perpendicular to the heat conducting mother plate.

2. The crucible of claim 1, wherein the heat conducting plate is provided with at least two first notches, the heat conducting plate is provided with a second notch at the center thereof, the second notch and the first notch are engaged with each other, and the number of the heat conducting plates is equal to that of the first notches.

3. The source crucible of claim 2, wherein the heat-conducting mother plate and the heat-conducting plate are provided with two or more through holes.

4. The source crucible of claim 1, wherein the heat-conducting mother plate and the heat-conducting plate are made of graphite.