CN213507164U - Evaporation crucible and evaporation device - Google Patents
Evaporation crucible and evaporation device Download PDFInfo
- Publication number
- CN213507164U CN213507164U CN202021262952.8U CN202021262952U CN213507164U CN 213507164 U CN213507164 U CN 213507164U CN 202021262952 U CN202021262952 U CN 202021262952U CN 213507164 U CN213507164 U CN 213507164U
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- Prior art keywords
- crucible
- crucible body
- evaporation
- target source
- noble metal
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- 238000001704 evaporation Methods 0.000 title claims abstract description 70
- 230000008020 evaporation Effects 0.000 title claims abstract description 68
- 239000003381 stabilizer Substances 0.000 claims abstract description 26
- 238000009834 vaporization Methods 0.000 claims description 5
- 230000008016 vaporization Effects 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 229910000510 noble metal Inorganic materials 0.000 abstract description 30
- 238000000576 coating method Methods 0.000 abstract description 27
- 239000011248 coating agent Substances 0.000 abstract description 23
- 239000000155 melt Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 9
- 239000000498 cooling water Substances 0.000 abstract description 7
- 238000010894 electron beam technology Methods 0.000 abstract description 7
- 238000007747 plating Methods 0.000 description 12
- 229910002804 graphite Inorganic materials 0.000 description 11
- 239000010439 graphite Substances 0.000 description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 239000010970 precious metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 208000033999 Device damage Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model provides an evaporation crucible, include: a crucible body; the support legs are arranged at the bottom of the crucible body; at least part of the surface of the support leg protrudes out of the bottom of the crucible body so as to suspend the bottom of the crucible body. The utility model discloses an evaporation coating crucible makes the crucible body can be unsettled owing to be provided with the stabilizer blade in crucible body bottom, when the crucible body was placed on evaporation coating device's the volcanic vent like this, just can separate with the volcanic vent, and the bottom of volcanic vent is that the circulation has recirculated cooling water, interval effect through the stabilizer blade, when evaporation coating noble metal target source, the heat that this internal noble metal target source of electron beam bombardment crucible produced can not conduct to the volcanic vent on, like this noble metal target source melts more easily, the power consumption of evaporation coating process is lower, and technical scheme is with low costs.
Description
Technical Field
The utility model relates to the technical field of semiconductors, especially, relate to an evaporation crucible and evaporation equipment.
Background
Evaporation is an important step in the process of manufacturing Light Emitting Diodes (LEDs), i.e., a target source material is heated in a vacuum chamber to be sublimated or melted and gasified into material vapor, which is deposited on a substrate through the openings of the mask. Traditional LED evaporation plating equipment, the crucible of coating by vaporization noble metal is direct and crater contact, and the below of crater leads to there is cooling water, receives the water-cooling influence, and the process of electron gun heating noble metal needs higher energy.
In order to solve the problem of thermal insulation, the graphite gasket is arranged at the bottom of the evaporation crucible in the prior art, but the graphite gasket is easy to damage, so that the graphite gasket needs to be frequently replaced, the cost is seriously consumed, and the graphite gasket easily generates dust to pollute the evaporation environment, so that the film adhesion is poor, and the appearance of the electrode is abnormal.
Accordingly, the prior art is yet to be developed and improved.
SUMMERY OF THE UTILITY MODEL
In view of the not enough of above-mentioned prior art, the utility model aims at providing an evaporation coating crucible and evaporation coating equipment aims at solving the current thermal-insulated technical problem with high costs of evaporation coating crucible of graphite gasket that adopts.
In one aspect, the utility model provides an evaporation crucible, include:
a crucible body; and
the support legs are arranged at the bottom of the crucible body; at least part of the surface of the support leg protrudes out of the bottom of the crucible body so as to suspend the bottom of the crucible body.
In the above embodiment, the utility model discloses an evaporation coating crucible makes the crucible body can be unsettled owing to be provided with the stabilizer blade in crucible body bottom, and when the crucible body was placed on evaporation coating device's the volcanic entrance like this, just can separate with the volcanic entrance, and the bottom of volcanic entrance is that the circulation has recirculated cooling water, through the interval effect of stabilizer blade, when evaporation coating noble metal target source, the heat that this internal noble metal target source of electron beam bombardment crucible produced can not conduct to the volcanic entrance on, so noble metal target source melts more easily, the power consumption of evaporation coating process is lower.
Optionally, the support legs are integrally formed with the crucible body or detachably connected thereto.
In the above embodiment, the stabilizer blade can with crucible body integrated into one piece, the simple manufacture of stabilizer blade like this, and the stabilizer blade is more firm with crucible body coupling, and the stabilizer blade is connected with dismantling, and the coating by vaporization crucible can satisfy the demand of different use scenes like this, for example, when need not separate crucible body and crater, then can pull down the stabilizer blade.
Optionally, when the supporting legs are detachably connected with the crucible body, a first groove is formed in the bottom of the crucible body, and one end of each supporting leg is embedded into the first groove.
In the above embodiment, the first groove is formed in the bottom of the crucible body, and the support legs are embedded in the first groove, so that the crucible body can be detachably connected.
Optionally, a magnet is arranged in the first groove, and the support leg is magnetically connected with the crucible body.
In the above embodiment, the support legs are magnetically connected with the crucible body, and the support legs are convenient to disassemble and assemble.
Optionally, an inner thread is arranged on the inner wall of the first groove, an outer thread is arranged on the outer wall of the support leg, and the support leg is in threaded connection with the crucible body.
In the above embodiment, the support legs are connected with the crucible body through threads, so that the support legs are convenient to disassemble and assemble.
Optionally, the surface of the part of the support foot protruding out of the bottom of the crucible body is a curved surface.
In the above embodiment, part of the surface of the leg is a curved surface, so that the contact area between the leg and the flare is greatly reduced, and the heat transfer rate between the crucible body and the flare can be further reduced.
Optionally, the number of the support legs is multiple, and the support legs are uniformly distributed at the bottom of the crucible body.
In the above embodiment, the supporting legs are provided with a plurality of supporting legs which are uniformly distributed at the bottom of the crucible body, so that the stress of the crucible body is more balanced, and the temperature of the bottom of the crucible body is more uniform.
Optionally, the crucible body has an opening, and a platform is disposed around an edge of the opening, and the platform has a groove.
In the above embodiment, the platform is disposed at the edge of the opening, and the groove is disposed on the platform, so that difficulty in overflowing the precious metal target source melt in the crucible body to the crucible is increased, and damage to the device due to overflowing of the precious metal target source melt is prevented.
Optionally, a geometric center of the trench coincides with a geometric center of the opening.
In the above embodiment, the groove is concentrically disposed with the opening, and the space on the surface of the platform is fully utilized, so that the noble metal target source melt can be prevented from overflowing well.
On the other hand, the utility model also provides an evaporation device, including the above-mentioned arbitrary one the evaporation crucible.
In the above embodiment, the utility model discloses an evaporation plating device is owing to adopted above-mentioned arbitrary evaporation plating crucible, can separate through the stabilizer blade between crucible body and the crater like this, and when the crucible was at the precious metal target source of evaporation plating, the heat that the precious metal target source produced in the electron beam bombardment crucible can not conduct to crater one side, and the precious metal target source melts more easily, and the power consumption of evaporation plating process is lower.
Drawings
Fig. 1 is a schematic view of a usage scenario of an evaporation crucible according to an embodiment of the present invention;
fig. 2 is a schematic view of a usage scenario of an evaporation crucible according to another embodiment of the present invention;
fig. 3 is a schematic cross-sectional view of an evaporation crucible according to an embodiment of the present invention;
fig. 4 is a schematic view of a usage scenario of an evaporation crucible according to another embodiment of the present invention;
fig. 5 is a schematic view of an explosion structure of an evaporation crucible according to an embodiment of the present invention;
FIG. 6 is a schematic view of an explosion structure of an evaporation crucible according to another embodiment of the present invention;
fig. 7 is a schematic view showing a shape of a leg of an evaporation crucible according to an embodiment of the present invention.
The reference numerals in the figures are as follows:
10-a crucible body; 20-crater; 30-circulating cooling water; 40-a noble metal target source; 50-graphite gaskets; 60-a leg; 70-a first groove; 80-a magnet; 90-internal threads; 100-external threads; 110-a platform; 120-trenches.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
Referring to fig. 1, in a conventional process for evaporating a noble metal electrode from an LED, a crucible body 10 of an evaporation crucible is directly placed on a crater 20, the bottom of the crucible body 10 needs to be completely attached to the crater 20, circulating cooling water 30 is introduced below the crater 20, since the conventional evaporation crucible is designed for metals with low melting points (such as aluminum and cadmium), and for noble metals with high melting points (such as platinum and gold), etc., since the crucible body 10 is affected by water cooling, the process of heating the noble metal target source 40 by an electron gun requires higher energy, and the noble metal is easily damaged seriously, the noble metal target source 40 at the bottom of the crucible body 10 is not melted completely, which results in unstable power of the coating film and poor film quality.
In order to solve the problem of thermal insulation, one way is to provide a graphite gasket at the bottom of the evaporation crucible, and in particular refer to fig. 2, the evaporation crucible comprises a crucible body 10 and a graphite gasket 50 arranged at the bottom of the crucible body 10. Placing graphite gasket 50 through the bottom of crucible body 10, can playing isolated heat effect equally, but because graphite gasket 50 fragile, so need frequently to change, the cost consumption is serious, and graphite gasket 50 produces dust pollution coating by vaporization environment easily, leads to the rete adhesion poor, and the outward appearance of electrode is unusual.
In order to solve the technical problem that the above-mentioned thermal-insulated mode exists, refer to fig. 3, the utility model provides an evaporation crucible, include:
a crucible body 10; and
a support leg 60 disposed at the bottom of the crucible body 10; at least a part of the surface of the leg 60 protrudes from the bottom of the crucible body 10 to suspend the bottom of the crucible body 10.
Referring to fig. 4, the utility model discloses an evaporation coating crucible makes crucible body 10 unsettled owing to be provided with stabilizer blade 60 in crucible body 10 bottom, like this crucible body 10 when placing evaporation coating device's crater 20 on, just can separate with crater 20, and crater 20's bottom is the circulation and has recirculated cooling water 30, through the interval effect of stabilizer blade 60, when evaporation coating noble metal target source 40, the heat that electron beam bombardment crucible body 10 interior noble metal target source 40 produced can not conduct to crater 20 on, noble metal target source 40 melts more easily like this, the power consumption of evaporation coating process is lower.
Referring to fig. 3, 5 and 6, in certain embodiments, the legs 60 are integrally formed with or removably attached to the crucible body 10. The stabilizer blade 60 can with crucible body 10 integrated into one piece, the simple manufacture of stabilizer blade 60 like this, the stabilizer blade 60 is connected more firmly with crucible body 10, the stabilizer blade 60 with can dismantle and be connected, the evaporation crucible can satisfy the demand of different use scenes like this, for example, when need not separate crucible body 10 and crater 20, then can pull down stabilizer blade 60.
Referring to fig. 5, in some embodiments, when the support legs 60 are detachably connected to the crucible body 10, the bottom of the crucible body 10 is provided with a first groove 70, and one end of the support legs 60 is embedded in the first groove 70. Through set up first recess 70 in the bottom of crucible body 10, the stabilizer blade 60 embedding sets up in first recess 70, realizes being connected with dismantling of crucible body 10, in order to facilitate the stabilizer blade 60 fixed in first recess 70, can interference fit between stabilizer blade 60 and the first recess 70.
In certain embodiments, the shape of the first groove 70 comprises a triangle. The shape of the first groove is made into a triangle, after the support leg 60 is connected with the crucible body 10, relative movement between the support leg 60 and the crucible body 10 is not easy to occur, and the crucible is placed more stably.
Referring to FIG. 5, in certain embodiments, a magnet 80 is disposed within the first recess and the leg 60 is magnetically coupled to the crucible body 10. The support legs 60 are magnetically connected with the crucible body 10, and the support legs 60 are convenient to disassemble and assemble.
Referring to fig. 6, in other embodiments, the inner wall of the first groove 70 is provided with an internal thread 90, the outer wall of the leg 60 is provided with an external thread 100, and the leg 60 is screwed with the crucible body 10. The support legs 60 are connected with the crucible body 10 by screw threads, and the support legs 60 are also convenient to disassemble and assemble.
In other embodiments, the first groove 70 may be coated with a glue layer, and the support leg 60 and the crucible body 10 may be connected by adhesion, or the support leg 60 and the crucible body 10 may be connected by a folding connection.
Referring to fig. 7, in some embodiments, the surface of the portion of the leg 60 protruding from the bottom of the crucible body 10 is curved. Since a part of the surface of the leg 60 is curved, the contact area between the leg 60 and the flare 20 is greatly reduced, and the heat transfer rate between the crucible body 10 and the flare 20 can be further reduced.
In some embodiments, the thickness of the portion of the surface of the leg 60 protruding above the bottom of the crucible body 10 is 1-5 cm. Such as 1cm, 3cm and 5cm, the thickness of the part of the surface of the leg 60 projecting from the bottom of the crucible body 10 can be selected to be 3cm for the stability of the crucible body 10 on the evaporation apparatus and the effect of evaporation.
In certain embodiments, the shape of the portion of the surface of the leg 60 protruding above the bottom of the crucible body 10 includes, but is not limited to, a hemispherical shape or an ellipsoidal shape. When the support leg 60 having a hemispherical surface is used, the support leg 60 is in point contact with the crater 20, so that a better heat insulation effect can be achieved.
In some embodiments, the number of the legs 60 is plural, and each of the legs 60 is uniformly distributed at the bottom of the crucible body 10. The supporting legs 60 are provided in a plurality and uniformly distributed at the bottom of the crucible body 10, so that the stress of the crucible body 10 is more balanced, and the temperature at the bottom of the crucible body 10 is more uniform.
Referring to fig. 5, in some embodiments, the crucible body 10 has an opening, and a platform 110 is disposed around the opening, and the platform 110 has a groove 120.
Target source materials commonly used to vapor plate metal electrodes include: high work function metal-gold (Au), silver (Ag), nickel (Ni) and the like for evaporating and plating the metal anode of the top emission device; the low work function metal-calcium (Ca), magnesium (Mg), aluminum (Al) and so on used for preparing the metal cathode of the device. In the phase change process of part of the metal material from solid to liquid and from liquid to solid, the surface property between the target source material and the crucible body 10 changes, and the molten liquid of a small amount of the target source material ascends along the inner wall of the crucible body 10 and finally overflows out of the crucible. The platform 110 is arranged around the edge of the opening of the crucible body 10, and the groove 120 is arranged on the platform 110, so that the difficulty that the melt of the noble metal target source 40 in the crucible body 10 overflows the crucible is increased, and the device damage caused by the overflow of the melt of the noble metal target source 40 is prevented.
In some embodiments, the shape of the groove 120 includes a circular ring, and the groove 120 is provided with a plurality of grooves 120, and the plurality of grooves 120 are concentrically arranged, so as to achieve a better effect of preventing the melt of the noble metal target source 40 from overflowing.
In certain embodiments, the geometric center of the trench 120 coincides with the geometric center of the opening. The groove 120 is concentric with the opening, and the space on the surface of the platform 110 is fully utilized, so that the effect of well preventing the melt of the noble metal target source 40 from overflowing can be achieved.
In certain embodiments, the shape of the crucible body 10 comprises a truncated cone shape. The inner volume of the truncated cone-shaped crucible body 10 is large, the opening of the truncated cone-shaped crucible body is large, the evaporation area is larger, and the evaporation efficiency can be improved.
In certain embodiments, the crucible body 10 comprises a tungsten crucible body. The tungsten crucible body has high melting point and high temperature resistance, is used for containing the noble metal target source 40, does not deform in the electron beam irradiation process, and can be repeatedly used.
Furthermore, the utility model also provides an evaporation device, including the above-mentioned arbitrary one the evaporation crucible. The utility model discloses an evaporation plating device is owing to adopted above-mentioned arbitrary evaporation plating crucible, can separate through stabilizer blade 60 between crucible body 10 and the volcanic vent 20 like this, and when the crucible was at evaporation plating noble metal target source 40, the heat that the noble metal target source 40 produced in the electron beam bombardment crucible can not conduct to volcanic vent 20 one side, and noble metal target source 40 melts more easily, and the power consumption of evaporation plating process is lower.
In some embodiments, adopt the utility model discloses an evaporation device carries out the coating film, and the process of evaporation coating can be divided into high low plating rate two-step and is accomplished, again because can remain too much heat in the crucible body 10, so the thick design thickness of membrane of coating film need be less than the thickness of technological requirement to high plating rate evaporation coating reduces the noble metal loss.
To sum up, the utility model provides an evaporation crucible, include: a crucible body; the support legs are arranged at the bottom of the crucible body; at least part of the surface of the support leg protrudes out of the bottom of the crucible body so as to suspend the bottom of the crucible body. The utility model discloses an evaporation coating crucible makes the crucible body can be unsettled owing to be provided with the stabilizer blade in crucible body bottom, and when the crucible body was placed on evaporation coating device's volcanic vent like this, just can separate with the volcanic vent, and the bottom of volcanic vent is that the circulation has recirculated cooling water, through the interval effect of stabilizer blade, when evaporation coating noble metal target source, the heat that this internal noble metal target source of electron beam bombardment crucible produced can not conduct to the volcanic vent on, like this noble metal target source melts more easily, the power consumption of evaporation coating process is lower.
It is to be understood that the invention is not limited to the above-described embodiments, and that modifications and variations may be made by those skilled in the art in light of the above teachings, and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.
Claims (8)
1. An evaporation crucible, comprising:
a crucible body; and
the support legs are arranged at the bottom of the crucible body; at least part of the surface of the support leg protrudes out of the bottom of the crucible body so as to suspend the bottom of the crucible body;
the stabilizer blade with the crucible can be dismantled and be connected, the bottom of crucible body is provided with first recess, the one end embedding of stabilizer blade sets up in the first recess, the stabilizer blade with interference fit between the first recess.
2. A vaporization crucible according to claim 1, wherein a magnet is provided in the first recess, and the legs are magnetically connected to the crucible body.
3. An evaporation crucible according to claim 1, wherein an inner thread is provided on an inner wall of the first groove, an outer thread is provided on an outer wall of the leg, and the leg is connected to the crucible body by a thread.
4. A vaporization crucible according to claim 1, wherein the part of the surface of the leg projecting from the bottom of the crucible body is curved.
5. A deposition crucible according to any of claims 1 to 4, wherein the number of the support legs is plural, and each support leg is uniformly distributed at the bottom of the crucible body.
6. An evaporation crucible according to claim 5, wherein the crucible body has an opening, and a platform is provided around the edge of the opening, and the platform is provided with a groove.
7. A evaporation crucible according to claim 6, wherein the geometric centre of the groove coincides with the geometric centre of the opening.
8. A vapor deposition apparatus comprising the vapor deposition crucible according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021262952.8U CN213507164U (en) | 2020-07-01 | 2020-07-01 | Evaporation crucible and evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021262952.8U CN213507164U (en) | 2020-07-01 | 2020-07-01 | Evaporation crucible and evaporation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213507164U true CN213507164U (en) | 2021-06-22 |
Family
ID=76433555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021262952.8U Active CN213507164U (en) | 2020-07-01 | 2020-07-01 | Evaporation crucible and evaporation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213507164U (en) |
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2020
- 2020-07-01 CN CN202021262952.8U patent/CN213507164U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
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Address after: 402760 No.69, Wushan Road, Biquan street, Bishan District, Chongqing Patentee after: Chongqing Kangjia Optoelectronic Technology Co.,Ltd. Country or region after: China Address before: 402760 No.69, Wushan Road, Biquan street, Bishan District, Chongqing Patentee before: Chongqing Kangjia Photoelectric Technology Research Institute Co.,Ltd. Country or region before: China |