CN204999968U - Negative pole coating film frock - Google Patents

Negative pole coating film frock Download PDF

Info

Publication number
CN204999968U
CN204999968U CN201520550734.7U CN201520550734U CN204999968U CN 204999968 U CN204999968 U CN 204999968U CN 201520550734 U CN201520550734 U CN 201520550734U CN 204999968 U CN204999968 U CN 204999968U
Authority
CN
China
Prior art keywords
chassis
frock
plated film
negative electrode
coating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201520550734.7U
Other languages
Chinese (zh)
Inventor
邓清东
宋田英
贺兆昌
张丽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui East China Institute of Optoelectronic Technology
Original Assignee
Anhui East China Institute of Optoelectronic Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui East China Institute of Optoelectronic Technology filed Critical Anhui East China Institute of Optoelectronic Technology
Priority to CN201520550734.7U priority Critical patent/CN204999968U/en
Application granted granted Critical
Publication of CN204999968U publication Critical patent/CN204999968U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The utility model provides a negative pole coating film frock which characterized in that: including base and chassis, the tubular structure of base for having the chassis mounting hole, the chassis is the shape of falling a boss structure, install on the chassis in the mounting hole of chassis, set up a plurality of through -holes that correspond with coating film negative pole size on the chassis. The utility model discloses can ensure the quality of negative pole coating film, again because have very big commonality, greatly reduced changes the cost of frock and processing frock, indirectly brings economic benefits for the enterprise.

Description

A kind of negative electrode plated film frock
Technical field
The utility model relates to a kind of plated film frock, particularly a kind of plated film frock of negative electrode.
Background technology
HIGH-POWERED MICROWAVES device is the core devices of radar, electronic warfare, communication and guidance system in modern weapons equipment, and negative electrode is these core devices " hearts ", is also the key part affecting device lifetime.During design negative electrode; need to fully take into account because of have: resistance to ion bombardment, high pressure resistant, resistance to poisoning, vibration resistance, shock-resistant, anti-sparking, emissive power and life-span are grown; based on these requirements; usually can select overlay film immersion type barium-tungsten dispense cathode, cover one deck noble metal film on the surface of negative electrode, the work function of negative electrode can be reduced; improve the emissive power of negative electrode; under equal working current condition, reduce negative electrode working temperature, and extend negative electrode working life.Simultaneously before overlay film, adopt ion etching technology anticathode surface to process, make negative electrode expose fresh surface, substantially increase the compound film quality of negative electrode.Therefore, this type of negative electrode has the advantages such as larger emission, working stability, anti-poisoning capability be strong.During plated film, need, according to cathode size, negative electrode be installed in suitable plated film frock, usually, a kind of negative electrode will corresponding to a plated film frock, and in the plated film lithography of accumulative some cycles, frock has wearing and tearing, and causes size to depart from original size, so need periodic replacement, but existing plated film frock does not have versatility, tooling cost is too large, is unfavorable for Reducing Cost in Enterprises.
Summary of the invention
Do not have versatility to overcome existing plated film frock, tooling cost is too large, is unfavorable for the deficiency of Reducing Cost in Enterprises, the utility model provides a kind of plated film frock, there is very large versatility, greatly reduce the cost changing frock and processing tool, indirectly for enterprise brings economic benefit.
For achieving the above object, the present invention is realized by following technique means:
A kind of negative electrode plated film frock, it is characterized in that: comprise pedestal and chassis, described pedestal is the tubular construction with chassis open holes, and described chassis is the structure of falling boss shape, described chassis is arranged in the open holes of described chassis, chassis offers multiple through hole corresponding with plated film cathode size.
Further:
The internal diameter of described pedestal matches with the external diameter on described chassis, the chassis open holes diameter of described pedestal and matching of chassis boss external diameter.
The base thickness of described pedestal, the upper base thickness on chassis, chassis base thickness are 2 ± 0.5mm.
The material on described pedestal and chassis is high-temperature material molybdenum or tungsten.
The invention has the beneficial effects as follows: the quality that can ensure negative electrode plated film, again because have very large versatility, greatly reduce the cost changing frock and processing tool, indirectly for enterprise brings economic benefit.
Accompanying drawing explanation
Fig. 1 is the plated film tool structure schematic diagram in the utility model, and wherein, a is front view, and b is vertical view, and Fig. 2 is base construction schematic diagram, and Fig. 3 is chassis structure schematic diagram.
Embodiment
Below in conjunction with Figure of description, the present invention is further illustrated.
As shown in accompanying drawing 1--3, a kind of negative electrode plated film frock, it is characterized in that: comprise pedestal 1 and chassis 2, described pedestal 1 is the tubular construction with chassis open holes, described chassis 2 is the structure of falling boss shape, described chassis 2 is arranged in the open holes of described chassis, chassis 2 offers multiple through hole D3 corresponding with plated film cathode size, for installing by plated film negative electrode.
Chassis is mounted in the lower bottom part of pedestal, and pedestal periphery size is fixed based on concrete coating equipment equipment size.
Further:
The internal diameter D1 of described pedestal 1 matches with the outer diameter D 3 on described chassis 2, the chassis open holes diameter D2 of described pedestal 1 and matching of chassis boss outer diameter D 4.
The base thickness H1 of described pedestal, the upper base thickness H3 on chassis, chassis base thickness H2 are 2 ± 0.5mm.
The material on described pedestal 1 and chassis 2 is high-temperature material molybdenum or tungsten.But based on processing characteristics and cost, tend to select molybdenum.
More than show and describe ultimate principle of the present invention, principal character and advantage.The technician of the industry should understand; the design is not restricted to the described embodiments; the principle that the design is just described described in above-described embodiment and specification sheets; under the prerequisite not departing from the design's spirit and scope; the design also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the design.The claimed scope of the design is defined by appending claims and equivalent thereof.

Claims (4)

1. a negative electrode plated film frock, it is characterized in that: comprise pedestal and chassis, described pedestal is the tubular construction with chassis open holes, described chassis is the structure of falling boss shape, described chassis is arranged in the open holes of described chassis, described chassis offers multiple through hole corresponding with plated film cathode size.
2. a kind of negative electrode plated film frock as claimed in claim 1, is characterized in that: the internal diameter of described pedestal matches with the external diameter on described chassis, the straight warp of chassis open holes of described pedestal and matching of chassis boss external diameter.
3. a kind of negative electrode plated film frock as claimed in claim 1, is characterized in that: the base thickness of described pedestal, the upper base thickness on chassis, chassis base thickness are 2 ± 0.5mm.
4. a kind of negative electrode plated film frock as claimed in claim 1, is characterized in that: the material on described pedestal and chassis is high-temperature material molybdenum or tungsten.
CN201520550734.7U 2015-07-28 2015-07-28 Negative pole coating film frock Active CN204999968U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520550734.7U CN204999968U (en) 2015-07-28 2015-07-28 Negative pole coating film frock

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520550734.7U CN204999968U (en) 2015-07-28 2015-07-28 Negative pole coating film frock

Publications (1)

Publication Number Publication Date
CN204999968U true CN204999968U (en) 2016-01-27

Family

ID=55156865

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520550734.7U Active CN204999968U (en) 2015-07-28 2015-07-28 Negative pole coating film frock

Country Status (1)

Country Link
CN (1) CN204999968U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105646002A (en) * 2016-03-22 2016-06-08 苏州伽蓝致远电子科技股份有限公司 Ceramic insertion core film-coating tool
CN112899775A (en) * 2021-01-14 2021-06-04 北方夜视技术股份有限公司 Coating disc of multi-alkali cathode stable film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105646002A (en) * 2016-03-22 2016-06-08 苏州伽蓝致远电子科技股份有限公司 Ceramic insertion core film-coating tool
CN105646002B (en) * 2016-03-22 2018-05-11 苏州伽蓝致远电子科技股份有限公司 A kind of ceramic insertion core plated film frock
CN112899775A (en) * 2021-01-14 2021-06-04 北方夜视技术股份有限公司 Coating disc of multi-alkali cathode stable film

Similar Documents

Publication Publication Date Title
CN204999968U (en) Negative pole coating film frock
CN104409328A (en) Mask plate cleaning method and device
CN201859827U (en) Structure of electron gun of floated grid-controlled multiple-beam klystron
CN104362065A (en) Large-caliber parallel beam ion source used for ion beam etcher
CN206127452U (en) Electrolytic copper foil is with negative pole roller that prevents ablation
CN205542698U (en) Clamping nut filament support's shielding structure in ion source arc chamber
CN204289361U (en) A kind of for ionogenic aperture plate device
CN202434462U (en) Large-power electronic gun with maximum power of 800kW
CN210736927U (en) High-performance PCB electroplating device
US20120325530A1 (en) Circuit board with even current distribution
CN109881174A (en) The double filament averagers of ion beam apparatus
CN105441889A (en) Ion source magnetic field distribution structure
CN203721612U (en) Supporting structure of 110-KV combined electric appliance upper polar post
CN203205372U (en) Electron gun for industrial electron irradiation accelerator
CN209087759U (en) A kind of hall ion source gas averaging board being conveniently replaceable
CN213507164U (en) Evaporation crucible and evaporation device
CN205194763U (en) Battery shell fragment of diversified assembly
CN209914341U (en) Controller for narrow-band communication
CN213574800U (en) Novel pump impeller
CN204289360U (en) A kind of for the ionogenic anode assembly of parallel beam
CN219088424U (en) Electron smog piece structure that generates heat
CN104451702A (en) Water heater
CN203875467U (en) Silver end surface plasma cutting electrode
CN201785480U (en) Cathode coating equipment
CN220122121U (en) Grounding rod

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant