CN209087759U - A kind of hall ion source gas averaging board being conveniently replaceable - Google Patents
A kind of hall ion source gas averaging board being conveniently replaceable Download PDFInfo
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- CN209087759U CN209087759U CN201822157216.5U CN201822157216U CN209087759U CN 209087759 U CN209087759 U CN 209087759U CN 201822157216 U CN201822157216 U CN 201822157216U CN 209087759 U CN209087759 U CN 209087759U
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- gas averaging
- ion source
- averaging board
- hole
- filling member
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Abstract
The utility model discloses a kind of hall ion source gas averaging boards being conveniently replaceable, and are related to technology of ion source field.The utility model includes gas plate ontology, open up fluted at gas averaging board ontology axle center, bottom portion of groove offers conical through-hole, and inside grooves are provided with filling member, filling member includes the connecting plate matched with groove, and connecting plate bottom is provided with the filling cone matched with conical through-hole.The utility model is by carrying out digging circular hole at the bombardment of focus ion beam concentration on ion source gas averaging board, and it does filling member and circular hole is filled, filling member is fixedly connected with gas averaging board ontology using screw, in use process, it can be replaced in time depending on filling member damaged condition, it is new that the filling member change that will be damaged need to be only taken out when replacement, gas averaging board can be safeguarded in the case where not needing to separate component, directly reduce the probability of damage of ion source, production efficiency of equipment is also improved, use cost is reduced.
Description
Technical field
The utility model belongs to technology of ion source field, more particularly to a kind of hall ion source being conveniently replaceable gas
Plate.
Background technique
Ion source is to make neutral atom or molecular ionization, and therefrom draw the device of ion beam current.Hall ion source passes through
Under vacuum conditions, using the electronics of transmitting under the interaction of electric and magnetic fields, make the gas for being filled with vacuum chamber generate from
Change, emits ion under the action of electric and magnetic fields.Hall ion source is as a kind of no grid type ion source, because of its support price
It is cheap, it is widely used in general assisted deposition field.
The metal gas averaging board of existing hall ion source is monoblock type, under the directly bombardment of intense ion beam, ion beam meeting
Gas averaging board is punctured, needs to dismantle ion source after breakdown and renews gas averaging board, not only increases use cost, and in dismounting ion
Installing during source not in place can directly damage ion source.
Utility model content
The purpose of this utility model is to provide a kind of hall ion source gas averaging boards being conveniently replaceable, by equal in ion source
Focus ion beam is concentrated and carries out borehole at bombardment on gas plate, and it is equal to solve existing metal for the filling member that filling one is convenient for changing
It after gas plate is breakdown, needs to dismantle ion source and is replaced, very complicated, integral replacing gas averaging board, use cost is high, dismounts
The problem of ion source can directly be damaged not in place, is installed in journey.
In order to solve the above technical problems, the utility model is achieved through the following technical solutions:
The utility model is a kind of hall ion source gas averaging board being conveniently replaceable, including gas averaging board ontology, the gas averaging board
Open up fluted at ontology axle center, the bottom portion of groove offers the conical through-hole with gas averaging board ontology concentric, the groove
It is internally provided with filling member, material used in the filling member is identical as the material of gas averaging board ontology；The gas averaging board ontology
Be otherwise known as deflector, for connecting gas feeding duct in ion source, by gas averaging board ontology, process gas can be made uniform
Be diffused into anode port.
The filling member includes the connecting plate matched with groove, and the connecting plate bottom is provided with to match with conical through-hole
The rotary table area of the filling cone of conjunction, the filling cone base concentrates face at bombardment with focus ion beam on ion source gas averaging board
Product is identical.
Further, venthole and through-hole are offered on the gas plate ontology, equidistant arrangement exists the venthole in a ring
Outside groove.
Further, the groove is circular configuration, and the bottom portion of groove offers location hole, and the location hole bottom is opened
Equipped with threaded hole.
Further, the connecting plate bottom is fixed with the positioning ring matched with location hole, opens up on the connecting plate
There is the mounting hole closed with corresponding threaded holes, the mounting hole is counter sink.
Further, the cross section of the filling cone is isosceles trapezoidal structure, and filling cone bevel edge inclination angle is
30°。
Further, the thickness of the filling member is identical as the thickness of gas averaging board ontology.
The utility model has the following beneficial effects:
1, the utility model is by carrying out digging circular hole at the bombardment of focus ion beam concentration on ion source gas averaging board, and fills out
It fills part to be filled circular hole, filling member is fixedly connected with gas averaging board ontology using screw, in use process, filling can be regarded
Part damaged condition is replaced in time, and it is new that when replacement need to only take out the filling member change that will be damaged, and can be not required to
Gas averaging board is safeguarded in the case where separating component, the probability of damage of ion source is directly reduced, also improves equipment
Production efficiency reduces use cost.
2, the utility model by conical through-hole and fills being used cooperatively for cone, and installation is facilitated to improve while positioning
Filling member and gas averaging board ontology concentricity, further improve installation accuracy when installation.
3, the utility model location hole, threaded hole, connecting plate and positioning ring are used cooperatively, while facilitating installation to position
Enhance the bonding strength of filling member Yu gas averaging board ontology.
Certainly, any product for implementing the utility model does not necessarily require achieving all the advantages described above at the same time.
Detailed description of the invention
In order to illustrate more clearly of the technical solution of the utility model embodiment, make required for being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are merely some embodiments of the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.
Fig. 1 is the structural schematic diagram for the hall ion source gas averaging board that the utility model is conveniently replaceable；
Fig. 2 is the schematic diagram of the section structure of Fig. 1；
Fig. 3 is the structural schematic diagram of the utility model gas averaging board ontology；
Fig. 4 is the schematic diagram of the section structure of Fig. 3；
Fig. 5 is the structural schematic diagram of the utility model filling member；
Fig. 6 is the schematic diagram of the section structure of Fig. 5；
Fig. 7 is the structural schematic diagram that the utility model gas averaging board ontology and filling member match；
In attached drawing, parts list represented by the reference numerals are as follows:
1- gas averaging board ontology, 101- groove, 102- conical through-hole, 103- venthole, 104- through-hole, 105- location hole,
106- threaded hole, 2- filling member, 201- connecting plate, 202- fill cone, 203- positioning ring, 204- mounting hole.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
All other embodiment obtained, fall within the protection scope of the utility model.
It please refers to shown in Fig. 1-7, the utility model is a kind of hall ion source gas averaging board being conveniently replaceable, including gas averaging board
Ontology 1 opens up fluted 101 at 1 axle center of gas averaging board ontology, and 101 bottom of groove offers the cone with 1 concentric of gas averaging board ontology
Shape through-hole 102, groove 101 are internally provided with filling member 2, the material phase of material used in filling member 2 and gas averaging board ontology 1
Together.
Filling member 2 includes the connecting plate 201 matched with groove 101, and 201 bottom of connecting plate is provided with and conical through-hole
The 102 filling cones 202 matched fill focus ion beam collection on the rotary table area and ion source gas averaging board of 202 bottom of cone
Area is identical at middle bombardment.
Wherein, offer venthole 103 and through-hole 104 on gas plate ontology 1, venthole 103 in a ring equidistant arrangement recessed
Outside slot 101.
Wherein, groove 101 is circular configuration, and 101 bottom of groove offers location hole 105, and 105 bottom of location hole offers
Threaded hole 106.
Wherein, 201 bottom of connecting plate is fixed with the positioning ring 203 matched with location hole 105, opens up on connecting plate 201
There is the mounting hole 204 matched with threaded hole 106, mounting hole 204 is counter sink.
Wherein, the cross section for filling cone 202 is isosceles trapezoidal structure, and filling 202 bevel edge inclination angle of cone is 30 °.
Wherein, the thickness of filling member 2 is identical as the thickness of gas averaging board ontology 1.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the utility model
In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or
Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiment or examples
In can be combined in any suitable manner.
The preferred embodiment in the utility model disclosed above is only intended to help to illustrate the utility model.Preferred embodiment is simultaneously
There is no the details that detailed descriptionthe is all, also not limiting the utility model is only the specific embodiment.Obviously, according to this theory
The content of bright book can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to preferably
The principles of the present invention and practical application are explained, so that skilled artisan be enable to better understand and utilize this
Utility model.The utility model is limited only by the claims and their full scope and equivalents.
Claims (6)
1. a kind of hall ion source gas averaging board being conveniently replaceable, including gas averaging board ontology (1), it is characterised in that: the gas averaging board
It is opened up fluted (101) at ontology (1) axle center, groove (101) bottom offers the cone with gas averaging board ontology (1) concentric
Shape through-hole (102), the groove (101) are internally provided with filling member (2)；
The filling member (2) includes the connecting plate (201) matched with groove (101), and connecting plate (201) bottom is provided with
The filling cone (202) matched with conical through-hole (102).
2. a kind of hall ion source gas averaging board being conveniently replaceable according to claim 1, which is characterized in that the gas plate sheet
Offer venthole (103) and through-hole (104) on body (1), the venthole (103) in a ring equidistant arrangement in groove (101)
It is external.
3. a kind of hall ion source gas averaging board being conveniently replaceable according to claim 1, which is characterized in that the groove
It (101) is circular configuration, groove (101) bottom offers location hole (105), and location hole (105) bottom offers
Threaded hole (106).
4. a kind of hall ion source gas averaging board being conveniently replaceable according to claim 1, which is characterized in that the connecting plate
(201) bottom is fixed with the positioning ring (203) matched with location hole (105), offers on the connecting plate (201) and screw thread
The mounting hole (204) that hole (106) matches, the mounting hole (204) are counter sink.
5. a kind of hall ion source gas averaging board being conveniently replaceable according to claim 1, which is characterized in that the filling cone
The cross section of body (202) is isosceles trapezoidal structure, and filling cone (202) the bevel edge inclination angle is between 15 ° -30 °.
6. a kind of hall ion source gas averaging board being conveniently replaceable according to claim 1, which is characterized in that the filling member
(2) thickness is identical as the thickness of gas averaging board ontology (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822157216.5U CN209087759U (en) | 2018-12-21 | 2018-12-21 | A kind of hall ion source gas averaging board being conveniently replaceable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822157216.5U CN209087759U (en) | 2018-12-21 | 2018-12-21 | A kind of hall ion source gas averaging board being conveniently replaceable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209087759U true CN209087759U (en) | 2019-07-09 |
Family
ID=67127131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822157216.5U Active CN209087759U (en) | 2018-12-21 | 2018-12-21 | A kind of hall ion source gas averaging board being conveniently replaceable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209087759U (en) |
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2018
- 2018-12-21 CN CN201822157216.5U patent/CN209087759U/en active Active
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