CN211602885U

CN211602885U - Flaw detection carrying disc

Info

Publication number: CN211602885U
Application number: CN202020054943.3U
Authority: CN
Inventors: 余世琮; 李彦志
Original assignee: SYNPOWER CO Ltd
Current assignee: SYNPOWER CO Ltd
Priority date: 2020-01-10
Filing date: 2020-01-10
Publication date: 2020-09-29
Anticipated expiration: 2030-01-10

Abstract

The utility model provides a flaw detection carrying disc, which comprises at least one upper material disc and a detection platform; the feeding tray is provided with a body and a plurality of accommodating grooves, the accommodating grooves are used for installing at least one object, and a penetrating part is arranged in each accommodating groove; the detection platform is used for detecting the feeding disc assembled on the detection platform; the method is characterized in that: the detection platform is provided with a plurality of positioning parts, and each positioning part consists of a positioning concave part and a positioning convex part; the positioning convex parts correspond to the positions of the accommodating grooves and penetrate through the penetrating parts to position the object at the positioning convex parts of the positioning parts, furthermore, the positioning convex parts are provided with a plurality of adsorption holes which are connected to an air extraction module, negative pressure is generated by the air extraction module to enable the adsorption holes to adsorb the at least one object, the at least one object is attached to the positioning convex parts, and the object position is adjusted in advance through the positioning convex parts to improve the detection efficiency.

Description

Flaw detection carrying disc

Technical Field

The utility model relates to a check out test set especially indicates a flaw detects and carries dish.

Background

Precision products such as semiconductors, wafers, PCB are manufactured in almost automated equipment from production to shipment of packages.

The problem of whether the object is flawed or not is detected by an optical detection machine in the process of detecting the object; a common Tray (Tray) structure for supporting and detecting objects and an operation method thereof are shown in fig. 1 and fig. 2, the objects are placed in a Tray 91 one by a robot arm, the Tray 91 is filled with the objects 92 by the robot arm and then is sent to a detection carrier 93, and an air extraction unit (not shown) is arranged on the detection carrier 93, and can tightly adsorb the objects 92 and the Tray 91 on the detection carrier 93; then, the object 92, which may be a semiconductor, or a wafer, or a PCB, is inspected with an optical inspection device 94 at the top of fig. 2, such that the object 92 is inspected with respect to appearance, surface, etc.

When the object 92 is displaced, a calibration unit 95 or a pneumatic element is required to push the object, so that the object 92 can be accurately positioned for the detection operation.

However, the existing detection devices have the disadvantages that:

1. when the article 92 is placed in the tray 91, it is inevitable that the article is improperly placed, and must be leveled by pushing with the calibration unit 95 or the air pressure member, but such an operation lengthens the inspection time and reduces the efficiency.

2. The detection carrier 93 only sucks the object 92, and the plastic ribs for receiving the object 92 are easy to deform and the object placing position is incorrect when the tray 91 is used for a long time.

3. As mentioned above, when the plastic rib is inclined, the object 92 is naturally uneven, and may need to be inspected manually or again, which causes troubles such as rework, poor inspection efficiency, and influence on delivery.

4. In some embodiments, the material 92 is placed on the detecting carrier 93 by the carrying device, so that most of the time of the machine is consumed for loading and unloading, and the utilization rate of the machine is greatly reduced.

SUMMERY OF THE UTILITY MODEL

Therefore, how to solve the above-mentioned conventional problems and deficiencies is a topic that the related art needs to develop.

In order to achieve the above object, the utility model adopts the following technical scheme:

a defect detection carrier, comprising: at least one feeding tray and a detection platform;

the feeding tray is provided with a body and a plurality of accommodating grooves, the accommodating grooves are used for mounting at least one object, and a penetrating part is arranged in each accommodating groove;

the detection platform is used for detecting the feeding disc assembled on the detection platform; the method is characterized in that:

the detection platform is provided with a plurality of positioning parts, and each positioning part consists of a positioning concave part and a positioning convex part; the positioning convex part corresponds to the accommodating groove and penetrates through the penetrating part, the positioning convex part is provided with a plurality of adsorption holes, the adsorption holes are connected to an air extraction module, negative pressure is generated by the air extraction module, and then the adsorption holes adsorb the at least one object, so that the at least one object is attached to the positioning convex part, and the object is positioned on the positioning convex part of the positioning parts.

Wherein, a plurality of adsorption holes are arranged on the area of the detection platform corresponding to the body.

The detection platform also comprises an optical detection module, and the optical detection module is used for detecting defects of the appearance, the surface and the like of the object.

The positioning concave part is used for supporting the containing groove of the upper charging tray, the size of the positioning concave part is larger than that of the containing groove, and the size of the penetrating part is larger than that of the positioning convex part, so that the containing groove is sleeved on the positioning part.

the feeding tray is provided with a body and a plurality of accommodating grooves, and the accommodating grooves are used for mounting at least one object;

the detection platform is provided with a plurality of positioning parts, a plurality of adsorption holes are formed in each positioning part, the adsorption holes are connected to an air exhaust module, the air exhaust module generates negative pressure to enable the adsorption holes to adsorb the feeding disc, and the feeding disc is attached to the positioning parts.

Compared with the prior art, the utility model, obtainable efficiency and advantage are as follows:

1. when the feeding tray is assembled on the detection platform by using the carrying equipment, the positions of the objects in the detection area can be calibrated by using the positioning convex parts; in other words, the position of the object is adjusted in advance by the positioning convex part, so that the need of subsequent adjustment of a calibration element or an air pressure element in the conventional structure can be eliminated, and the detection efficiency is greatly improved.

2. Because the object is positioned on the positioning convex part in the detection process, the feeding tray is not required to be influenced by adsorption force, and the problems of deformation and inaccurate positioning of the feeding tray are avoided.

Drawings

FIG. 1 is a schematic diagram of a detection operation of a prior art detection system;

FIG. 2 is a state diagram of a prior art detection system;

FIG. 3 is a schematic view of the present invention showing the objects disposed on the feeding tray;

FIG. 4 is a block diagram of an inspection platform;

FIG. 5 is a schematic view of the combined action of the feeding tray and the detection platform;

FIG. 6 is a schematic view of the positioning protrusion for attaching the object to the inspection platform through the suction hole;

FIG. 7 is a schematic view of the inspection platform sucking the loading tray and the object to perform defect inspection;

FIG. 8 is a state diagram of the feeding tray separated from the detection platform;

fig. 9 is a schematic diagram showing a second embodiment of the present invention in a separated configuration;

fig. 10 is a schematic view of the upper tray of the second embodiment of the present invention installed on the detection platform;

fig. 11 is a diagram illustrating a second exemplary embodiment of the present invention;

fig. 12 is a schematic view of the platform for detecting the separation of the feeding tray after the second embodiment of the present invention is detected.

Description of reference numerals: 1-feeding a tray; 11-a body; 12-a vessel; 121-a penetration; 2-detection platform; 21-a positioning section; 211-positioning recesses; 212-a locating boss; 22-adsorption pores; 23-an air extraction module; 3-an object; 4-an optical detection module; 5, feeding a material plate; 51-a body; 52-containing groove; 6-detection platform; 61-a positioning section; 62-adsorption holes; 63-an air extraction module; 7-an object; 8-an optical detection module; 91-material tray; 92-an object; 93-a detection stage; 94-an optical detection device; 95-calibration unit.

Detailed Description

Referring to fig. 3 to 8, the defect detecting carrier of the present invention basically comprises at least one upper tray 1 and a detecting platform 2.

The tray 1 has a main body 11 and a plurality of receiving slots 12, the receiving slots 12 are used for receiving at least one object 3, and a through portion 121 is disposed in the receiving slots 12.

The detection platform 2 is used for detecting the material loading tray 1 assembled on the detection platform.

Referring to fig. 4 to 6, the inspection platform 2 is provided with a plurality of positioning portions 21, each positioning portion 21 is composed of a positioning concave portion 211 and a positioning convex portion 212, as shown in fig. 4, 5 and 6, the positioning convex portion 212 just corresponds to the position of the accommodating groove 12 and passes through the penetrating portion 121, furthermore, the positioning convex portions 212 are provided with a plurality of absorption holes 22, the absorption holes 22 are connected to an air extraction module 23, and the air extraction module 23 generates negative pressure to enable the absorption holes 22 to absorb the at least one object 3, so that the at least one object 3 is attached to the positioning convex portion 212. Preferably, the detection platform 2 is provided with a plurality of adsorption holes 22 in the area corresponding to the body 11 except the positioning portion 21, and the detection platform 2 can adsorb the feeding tray 1 completely to facilitate the detection.

The positioning concave part 211 provides the holding groove 12 of the feeding tray to abut against, the size of the positioning concave part 211 is slightly larger than that of the holding groove 12, and the size of the penetrating part 121 is slightly larger than that of the positioning convex part 212, so that the holding groove 12 is sleeved on the positioning part 21.

The utility model discloses an operation flow and obtainable efficiency then as follows:

1. as shown in fig. 3, the material loading process of the present invention places the object 3 on the material loading tray 1, and places the material loading tray 1 on the detecting platform 2 through the handling device.

2. Please refer to fig. 5 to 7, the utility model discloses during actual detection, utilize this module 23 of bleeding to produce the negative pressure, will go up charging tray 1 and will detect article 3 and adsorb on testing platform 2 through adsorption hole 22, carry out outward appearance, shape, the relevant flaw detection such as surface to article 3 with an optical detection module 4, adjust article 3 position in advance through location convex part 212, and through this adsorption hole 22 with the smooth absorption of article 3 at location convex part 212, let article 3 get for the picture under the horizontality and detect, promote the precision and the detection efficiency that detect.

3. As shown in fig. 8, after the inspection, the loading tray 1 is separated from the inspection platform 2 by the handling equipment, and the inspected object 3 is delivered to the next workstation for subsequent processing.

4. By pre-adjusting the position of the object 3 by the positioning protrusion 212, the conventional structure can be eliminated from requiring subsequent adjustment of a calibration device or an air pressure device, thereby greatly improving the detection efficiency.

5. Because the objects 3 are positioned on the positioning convex part 212 in the detection process, the containing groove 12 of the upper tray 1 is not influenced by the adsorption force, and the problems of deformation and inaccurate positioning of the upper tray 1 can be avoided.

Please refer to fig. 9 to 12, which are related system diagrams of a second embodiment of the present invention, and the structures of the system diagrams are derived from the first to eighth figures; the basic structure comprises: a feeding tray 5 and a detecting platform 6.

The tray 5 has a main body 51 and a plurality of receiving slots 52, and the receiving slots 52 are used for receiving at least one object 7.

The detection platform 6 is provided with the feeding tray 5 assembled thereon for detection.

As shown in fig. 9 to 11, the above-mentioned detecting platform 6 is provided with a plurality of positioning portions 61, each positioning portion 61 is provided with a plurality of absorption holes 62, the plurality of absorption holes 62 are connected to an air extraction module 63, the air extraction module 63 generates a negative pressure to allow the plurality of absorption holes 62 to absorb the upper tray 5, so that the upper tray 5 is attached to the positioning portions 61. Preferably, the detection platform 6 is provided with a plurality of adsorption holes 62 in the area corresponding to the body 51 of the detection platform 6 except for the adsorption holes 62 in the positioning portion 61, so that the feeding tray 5 is comprehensively adsorbed by the adsorption holes 62, thereby facilitating the detection.

Through the above description, when the upper tray 5 is placed on the detection platform 6, the air extraction module 63 generates negative pressure, the upper tray 5 is adsorbed by the adsorption holes 62 and attached to the detection platform 6, so that the objects 7 arranged on the upper tray 5 are subjected to the optical detection module 8 in a horizontal state to perform defect detection related to appearance, shape, surface and the like; as shown in fig. 12, after the object inspection, the loading tray 5 is separated from the inspection platform 6 by the handling equipment, and the inspected object 7 is delivered to the next workstation for subsequent processing.

The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A defect detection carrier, comprising: at least one feeding tray and a detection platform;

2. The defect inspection carrier of claim 1, wherein the inspection platform has a plurality of suction holes formed in a region corresponding to the main body.

3. The defect detection carrier of claim 1, wherein the inspection platform further comprises an optical inspection module.

4. The defect detection carrier disc of claim 1, wherein the positioning concave portion provides a groove for the upper tray to abut against, the positioning concave portion is larger than the groove, and the penetrating portion is larger than the positioning convex portion, so that the positioning portion is sleeved with the groove.

5. A defect detection carrier, comprising: at least one feeding tray and a detection platform;

6. The defect inspection carrier of claim 5, wherein the inspection platform has a plurality of suction holes formed in a region corresponding to the main body.

7. The defect inspection carrier of claim 5 wherein the inspection platform further comprises an optical inspection module.