TWM596453U - Defect inspection tray - Google Patents

Abstract

A defect detection carrier plate is composed of at least one loading tray and a detection platform; the aforementioned loading tray has a body and a plurality of receiving slots, and the receiving slots are used to install at least one object, and the receiving slot A penetration part is provided; the detection platform provides the loading tray to be assembled for detection; it is characterized in that the detection platform is provided with a plurality of positioning parts, each of which is composed of a positioning concave part and a positioning convex part; The positioning protrusions correspond to the positions of the receiving grooves and pass through the penetrating parts, and the object is positioned on the positioning protrusions of the positioning parts. Furthermore, the positioning protrusions are provided with a plurality of suction holes. The suction holes are connected to a suction module, and the suction module generates negative pressure to allow the suction holes to adsorb the objects, so that the objects are attached to the positioning convex portion, and the positioning convex portion is adjusted in advance The position of the object can improve the detection efficiency.

Description

Defect detection carrier

This work is about testing equipment, especially a kind of flaw detection carrier.

According to press, almost all types of precision products such as semiconductors, wafers, PCB printed circuit boards are manufactured with automated equipment from production to packaging and shipment.

In the process of quality inspection, the optical inspection machine relies on whether there are defects or defects on the inspection items; the structure and operation mode of the tray (Tray disc) commonly used for supporting object inspection are shown in the first and second figures. The robot arm places the objects one by one on the material tray (91). After the robot arm fills the material tray (91) with the objects (92), it is sent to a detection stage (93), which is set on the aforementioned detection stage (93) An air extraction unit (not shown in the figure), which can closely adsorb the object (92) and the material tray (91) on the detection stage (93); then the optical detection device (94) at the upper end of the second figure (92), the object (92) may be a semiconductor, or a wafer, or a PCB printed circuit board to perform related inspection operations such as appearance and surface.

When the position of the object (92) is shifted, a calibration unit (95) or a pneumatic element is required to push the object, so that the object (92) can be accurately configured to facilitate the inspection operation.

However, the lack of conventional testing equipment lies in:

1. When the object (92) is placed on the material tray (91), it is inevitable that it is placed incorrectly. The object must be pushed through the calibration unit (95) or the air pressure component to make the object flat, but this operation method lengthens the detection time and reduces effectiveness.

2. The detection stage (93) only sucks the objects (92). When the material tray (91) is used for a long time, the plastic ribs used to receive the objects (92) are easily deformed and the objects are not placed correctly.

3. As mentioned above, when the plastic ribs are skewed, the object (92) is naturally uneven, which may require manual or re-inspection, causing heavy work, poor inspection efficiency, and affecting delivery.

4. In some embodiments, the material (92) is placed on the detection stage (93) through the handling equipment, so that the machine spends most of its time loading and unloading, which greatly reduces the machine's utilization rate.

Therefore, how to solve the above-mentioned problems and shortcomings of the conventional knowledge is a subject urgently required by the relevant industry to develop.

The purpose of this creation is to improve the above-mentioned shortcomings, achieved through the following technical means: with a feeding tray, a detection platform;

The aforementioned loading tray is composed of a body and a plurality of receiving grooves. The receiving grooves are used for installing at least one object, and a through portion is further provided in the receiving groove;

The testing platform provides the loading tray to be assembled on it for testing; it is characterized by:

The detection platform is provided with a plurality of positioning parts, each of which is composed of a positioning concave part and a positioning convex part; the positioning convex parts correspond to the position of the receiving slot and pass through the penetrating part. Furthermore, the The positioning protrusions are provided with a plurality of suction holes, and the suction holes are connected to a suction module, and the suction module generates a negative pressure to allow the suction holes to adsorb the objects, so that the objects fit In the positioning convex part, the object is positioned on the positioning convex parts of the positioning parts.

In the embodiment of the present invention, the detection platform is provided with a plurality of adsorption holes on the area corresponding to the body.

In the embodiment of the present invention, the detection platform further includes an optical detection module, which detects defects such as the appearance and surface of the object.

Comparing this creation with conventional techniques, the following functions and advantages can be obtained:

1. When the loading tray is assembled on the detection platform by using conveying equipment, the positioning projections can be used to calibrate the position of the object in the detection area; Subsequent adjustment of components or pneumatic components greatly improves detection efficiency.

2. Since the object is positioned on the positioning convex part during the detection process, the loading tray does not need to be affected by the adsorption force, so the loading tray will not be deformed and the positioning is not accurate.

Please refer to the third to eighth figures. The creative defect detection carrier basically consists of at least one feeding tray (1) and a detection platform (2).

The aforementioned loading tray (1) is composed of a body (11) and a plurality of receptacles (12). The receptacles (12) are used to install at least one object (3). The receptacle (12) A penetration portion (121) is provided.

The testing platform (2) provides the loading tray (1) to be mounted on it for testing.

Please refer to figures 4 to 6, the detection platform (2) is provided with a plurality of positioning parts (21), each positioning part (21) is composed of a positioning concave part (211) and a positioning convex part (212), as shown in the first As shown in figures 4, 5, and 6, the positioning convex portion (212) corresponds to the position of the receiving groove (12) and passes through the penetrating portion (121). Furthermore, the positioning convex portions (212) are provided with multiple Suction holes (22), the suction holes (22) are connected to a suction module (23), and the suction module (23) generates a negative pressure to allow the suction holes (22) to adsorb the suction holes (22) The objects (3) make the objects (3) fit the positioning protrusion (212). Preferably, in addition to the positioning part (21) being provided with suction holes (22), the detection platform (2) may also be provided with a plurality of suction holes (22) in the area corresponding to the body (11) of the detection platform (2). The suction tray (1) is fully adsorbed to facilitate detection.

The aforementioned positioning recess (211) provides a receiving groove (12) of the upper feeding tray. The positioning recess (211) is slightly larger than the receiving groove (12), and the penetration portion (121) is slightly larger than the positioning convex ( 212), so that the accommodating groove (12) is sleeved on the positioning portion (21).

The operation process and available effects of this creation are as follows:

1. As shown in the third figure, this creative feeding process places objects (3) on the loading tray (1), and places the loading tray (1) on the detection platform (2) through the handling equipment.

2. Please refer to the fifth to seventh figures. During the actual inspection of this creation, the suction module (23) is used to generate negative pressure, and the loading tray (1) and the object to be inspected (3) are passed through the suction hole (22) Adhere to the detection platform (2), use an optical detection module (4) to detect the appearance, shape, surface and other related defects of the object (3), and pre-adjust the position of the object (3) through the positioning protrusion (212), And through the adsorption hole (22), the object (3) is smoothly adsorbed on the positioning convex portion (212), so that the object (3) is captured and detected in a horizontal state, and the detection accuracy and detection efficiency are improved.

3. As shown in the eighth figure, after the inspection, the loading tray (1) is separated from the inspection platform (2) through the conveying equipment, and the inspected object (3) is handed over to the next workstation for subsequent processing.

4. Pre-adjust the position of the object (3) by positioning the convex portion (212), which can eliminate the need for the subsequent adjustment of the calibration component or the pneumatic component of the conventional structure, and greatly improve the detection efficiency.

5. Since the object (3) is positioned on the positioning protrusion (212) during the detection process, the receiving groove (12) of the upper tray (1) does not need to be affected by the adsorption force, so the upper tray (1) will not produce The problem of deformation and inaccurate positioning.

Please refer to the ninth to twelfth diagrams, which are related system diagrams of the second embodiment of this creation, and its structure is derived from the first to eighth diagrams; the basic structure includes: an upper tray (5), an inspection Platform (6).

The aforementioned loading tray (5) is composed of a body (51) and a plurality of receiving grooves (52), which are used for installing at least one object (7).

The testing platform (6) provides the loading tray (5) to be mounted on it for testing.

As shown in the ninth to eleventh figures, the aforementioned detection platform (6) is provided with a plurality of positioning parts (61), each of the positioning parts (61) is provided with a plurality of suction holes (62), and these suction holes (62) ) Is connected to a suction module (63), and the suction module (63) generates a negative pressure to allow the suction holes (62) to adsorb the loading tray (5), so that the loading tray (5) ) Is attached to the positioning portion (61). Preferably, in addition to the positioning portion (61) being provided with suction holes (62), the detection platform (6) may also be provided with a plurality of suction holes (62) in the area corresponding to the body (51) of the detection platform (6). Fully adsorb the loading tray (5) to facilitate detection.

Through the foregoing description, when the loading tray (5) is placed on the detection platform (6), the suction module (63) generates negative pressure, and the loading tray (5) is adsorbed by the suction hole (62). Lay on the inspection platform (6), so that the objects (7) set on the feeding tray (5) are horizontally subjected to the optical inspection module (8) to detect the appearance, shape, surface and other related defects; such as As shown in the twelfth figure, after the object is inspected, the loading tray (5) is separated from the inspection platform (6) through the conveying equipment, and the inspected object (7) is handed over to the next workstation for subsequent processing.

In summary, the main structure of this creation has not been seen in various books or public use, since it meets the requirements of the new type of patent application, I urge the Jun Bureau to learn from it and grant the patent as soon as possible.

To be clear, the above is the technical principle immediately used in the specific implementation of this creation. If the changes made in accordance with the concept of this creation, the function produced does not exceed the spirit covered by the description and drawings, All should be within the scope of this creation, to Chen Ming.

(1): loading tray (11): Ontology (12): container (121): penetrating part (2): Detection platform (21): Positioning section (211): positioning recess (212): Positioning convex (22): Adsorption hole (23): Suction module (3): Object (4): Optical detection module (5): Loading tray (51): Ontology (52): container (6): Detection platform (61): Positioning part (62): Adsorption hole (63): Suction module (7): Object (8): Optical detection module (91): feed tray (92): Object (93): Test stage (94): Optical inspection equipment (95): Calibration unit

The first figure is a schematic diagram of the detection action of the conventional detection system; The second picture is the detection state diagram of the conventional detection system; The third figure is a schematic diagram of the action of the creative object placed on the loading tray; The fourth picture is the structure diagram of the detection platform; The fifth figure is a schematic diagram of the combined action of the feeding tray and the detection platform; The sixth figure is a schematic diagram of attaching the object to the positioning convex portion of the detection platform through the suction hole; The seventh figure is a schematic diagram of the inspection platform fully adsorbing the feeding tray and objects and performing defect detection; The eighth picture is the state diagram of the separation of the feeding tray and the detection platform; The ninth figure is a schematic diagram of the structure separation of the second embodiment of the present creation; The tenth figure is a schematic diagram of the material tray installed on the detection platform on the second embodiment of the present creation; The eleventh figure is a detection state diagram of the second embodiment of this creation; The twelfth figure is a schematic diagram of the separation and detection platform for the loading tray after the completion of the second embodiment of the invention.

(1): loading tray

(2): Detection platform

(21): Positioning section

(22): Adsorption hole

(3): Object

(4): Optical detection module

Claims (7)

A defect detection carrier plate, comprising: at least one feeding plate and a detection platform; The aforementioned loading tray is composed of a body and a plurality of receiving grooves. The receiving grooves are used for installing at least one object, and a through portion is further provided in the receiving groove; The testing platform provides the loading tray to be assembled on it for testing; it is characterized by: The detection platform is provided with a plurality of positioning parts, each of which is composed of a positioning concave part and a positioning convex part; the positioning convex parts correspond to the position of the receiving slot and pass through the penetrating part. Furthermore, the The positioning protrusions are provided with a plurality of suction holes, and the suction holes are connected to a suction module, and the suction module generates a negative pressure to allow the suction holes to adsorb the objects, so that the objects fit In the positioning convex part, the object is positioned on the positioning convex parts of the positioning parts. The defect detection carrier according to claim 1, wherein the detection platform is provided with a plurality of suction holes in the area corresponding to the body. The defect detection carrier according to claim 1, wherein the detection platform further includes an optical detection module. The defect detection carrier according to claim 1, wherein the positioning concave portion provides the receiving groove of the loading tray to abut, the positioning concave portion is slightly larger than the receiving groove, and the penetration portion is slightly larger than the positioning convex portion, so that The accommodating groove is sleeved on the positioning part. A defect detection carrier plate, comprising: at least one feeding plate and a detection platform; The aforementioned loading tray is composed of a body and a plurality of receiving slots, which are used to install at least one object; The testing platform provides the loading tray to be assembled on it for testing; it is characterized by: The aforementioned detection platform is provided with a plurality of positioning parts, and each of the positioning parts is provided with a plurality of suction holes. The suction holes are connected to a suction module, and the suction module generates negative pressure to allow the suction holes to adsorb the The loading tray makes the loading tray fit on the positioning portion. The defect detection carrier according to claim 5, wherein the detection platform is provided with a plurality of suction holes in the area corresponding to the body. The flaw detection carrier according to claim 5, wherein the inspection platform further includes an optical inspection module.

Images