CN211552737U - Desk-top thick measuring device of membrane - Google Patents
Desk-top thick measuring device of membrane Download PDFInfo
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- CN211552737U CN211552737U CN202020577177.9U CN202020577177U CN211552737U CN 211552737 U CN211552737 U CN 211552737U CN 202020577177 U CN202020577177 U CN 202020577177U CN 211552737 U CN211552737 U CN 211552737U
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- measuring head
- film thickness
- box body
- power supply
- silicon wafer
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Abstract
A desk-top film thickness measuring device comprises a box body, a cross-shaped moving platform, a silicon wafer tray, a light shield, a measuring head, a differential regulator, an optical fiber, a cantilever, a power supply input port and a signal output port; the cross-shaped moving platform is movably arranged on the top surface of the box body, and the silicon wafer tray is fixed on the cross-shaped moving platform; the measuring head is arranged through a cantilever and is provided with a differential regulator, the differential regulator is positioned above the silicon wafer tray, and the measuring head is provided with a light shield; the bottom of the cantilever is fixedly connected to one side of the box body and is provided with a power supply input port and a signal output port. The device is used for offline film thickness measurement, is suitable for sampling measurement control of a production line, laboratory research of precise film coating and the like, has adjustable multiple parameters, and can adapt to measurement of different samples.
Description
Technical Field
The utility model relates to a thick measurement field of membrane, concretely relates to thick measuring device of desk-top membrane.
Background
The coating is widely applied to the fields of photosensitive materials, electronics, adhesive tapes, optical films, packaging and the like, and the detection of the thickness of the coating film is a necessary means for ensuring the quality of various coated products, and has extremely important significance for the development of high and new technology industries.
Disclosure of Invention
The utility model provides a thick measuring device of desk-top membrane for the thick measurement of off-line membrane, the laboratory research etc. that is applicable to the sampling measurement control of production line and accurate filming, the multi-parameter is adjustable, can adapt to the measurement of different samples.
A desk-top film thickness measuring device comprises a box body, a cross-shaped moving platform, a silicon wafer tray, a light shield, a measuring head, a differential regulator, an optical fiber, a cantilever, a power supply input port and a signal output port;
the cross-shaped moving platform is movably arranged on the top surface of the box body, and the silicon wafer tray is fixed on the cross-shaped moving platform;
the measuring head is installed through a cantilever and is provided with a differential regulator, the differential regulator is positioned above the silicon wafer tray, and a light shield is installed on the measuring head;
the bottom of the cantilever is fixedly connected to one side of the box body and is provided with a power supply input port and a signal output port.
Further, the silicon wafer tray is rotatably installed on the cross-shaped moving platform.
Furthermore, an optical light source, a stabilized voltage power supply and a spectrometer are arranged in the box body.
Furthermore, the stabilized voltage power supply is connected with the power supply input port to supply power to the whole measuring device.
Furthermore, the optical light source and the spectrometer are connected with the measuring head through optical fibers, and the spectrometer analyzes data returned by the measuring head to obtain film thickness data and outputs the film thickness data to external equipment through a signal output port.
Furthermore, the measuring head is provided with a measuring head lens, and the optical light source irradiates the measured object through the optical fiber and the measuring head lens and then carries out data acquisition by the measuring head.
Further, the differential adjuster adjusts the probe up and down.
The utility model discloses the beneficial effect who reaches does: the device is used for offline film thickness measurement, is suitable for sampling measurement control of a production line, laboratory research of precise film coating and the like, has adjustable multiple parameters, and can adapt to measurement of different samples.
Drawings
Fig. 1 is a schematic structural diagram of a measuring device according to an embodiment of the present invention.
Fig. 2 is a schematic side view of the measuring device according to the embodiment of the present invention.
Fig. 3 is a schematic top view of the measuring device according to the embodiment of the present invention.
Fig. 4 is a schematic perspective view of a measuring device according to an embodiment of the present invention.
In the figure, 1-box body, 2-cross mobile platform, 3-silicon chip tray, 4-lens hood, 5-measuring head, 6-differential regulator, 7-optical fiber, 8-cantilever, 9-power input port and 10-signal output port.
Detailed Description
The technical solution of the present invention will be further described in detail with reference to the accompanying drawings.
A desk-top thick measuring device of membrane, includes box body 1, cross moving platform 2, silicon chip tray 3, lens hood 4, gauge head 5, differential regulator 6, optic fibre 7, cantilever 8, power input 9, signal output 10.
The cross-shaped moving platform 2 is movably arranged on the top surface of the box body 1, and the silicon wafer tray 3 is rotationally fixed on the cross-shaped moving platform 2; the measuring head 5 is arranged through a cantilever 8 and is provided with a differential regulator 6, the differential regulator is positioned above the silicon wafer tray 3, and a light shield 4 is arranged on the measuring head 5; the bottom of the cantilever 8 is fixedly connected with one side of the box body 1 and is provided with a power supply input port 9 and a signal output port 10.
An optical light source, a stabilized voltage power supply and a spectrometer are arranged in the box body 1. The stabilized voltage supply is connected with the power supply input port 9 and supplies power to the whole measuring device. The optical light source and the spectrometer are connected with the measuring head 5 through the optical fiber 7, and the spectrometer analyzes data returned by the measuring head 5 to obtain film thickness data and outputs the film thickness data to external equipment through a signal output port. The measuring head 5 is provided with a measuring head lens, and the optical light source irradiates the measured object through the optical fiber 7 and the measuring head lens and then carries out data acquisition by the measuring head 5.
The differential adjuster 6 adjusts the probe up and down.
The device is an integrated device for off-line optical reflection film thickness measurement, integrates an optical light source, a stabilized voltage power supply, a spectrometer and the like in a box body, and can output data signals to enter a computer only by inputting a power supply.
As shown in the attached drawing, a sample to be measured is placed on a silicon wafer tray 3, and the silicon wafer tray 3 can rotate and move back and forth and left and right along with a cross-shaped moving platform 2. The measuring head 5 can be adjusted up and down along with the differential regulator 6, and the light source irradiates to the measured surface through the measuring head lens and is reflected back to the spectrometer by the optical fiber 7, so that data is output.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiment, but all equivalent modifications or changes made by those skilled in the art according to the present invention should be included in the protection scope of the claims.
Claims (7)
1. The utility model provides a thick measuring device of desk-top membrane which characterized in that:
the device comprises a box body, a cross-shaped moving platform, a silicon wafer tray, a light shield, a measuring head, a differential regulator, an optical fiber, a cantilever, a power supply input port and a signal output port;
the cross-shaped moving platform is movably arranged on the top surface of the box body, and the silicon wafer tray is fixed on the cross-shaped moving platform;
the measuring head is installed through a cantilever and is provided with a differential regulator, the differential regulator is positioned above the silicon wafer tray, and a light shield is installed on the measuring head;
the bottom of the cantilever is fixedly connected to one side of the box body and is provided with a power supply input port and a signal output port.
2. The bench-type film thickness measuring apparatus according to claim 1, wherein: the silicon wafer tray is rotatably arranged on the cross-shaped moving platform.
3. The bench-type film thickness measuring apparatus according to claim 1, wherein: an optical light source, a stabilized voltage power supply and a spectrometer are arranged in the box body.
4. The bench-type film thickness measuring apparatus according to claim 3, wherein: the stabilized voltage power supply is connected with the power supply input port and supplies power to the whole measuring device.
5. The bench-type film thickness measuring apparatus according to claim 3, wherein: the optical light source and the spectrometer are connected with the measuring head through optical fibers, and the spectrometer analyzes data returned by the measuring head to obtain film thickness data and outputs the film thickness data to external equipment through a signal output port.
6. The bench-type film thickness measuring apparatus according to claim 5, wherein: the measuring head is provided with a measuring head lens, and the optical light source irradiates the measured object through the optical fiber and the measuring head lens and then carries out data acquisition by the measuring head.
7. The bench-type film thickness measuring apparatus according to claim 1, wherein: the differential regulator regulates the measuring head up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020577177.9U CN211552737U (en) | 2020-04-17 | 2020-04-17 | Desk-top thick measuring device of membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020577177.9U CN211552737U (en) | 2020-04-17 | 2020-04-17 | Desk-top thick measuring device of membrane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211552737U true CN211552737U (en) | 2020-09-22 |
Family
ID=72495636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020577177.9U Active CN211552737U (en) | 2020-04-17 | 2020-04-17 | Desk-top thick measuring device of membrane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211552737U (en) |
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2020
- 2020-04-17 CN CN202020577177.9U patent/CN211552737U/en active Active
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