CN211497784U - Gas path device for improving vacuum coating atmosphere uniformity - Google Patents
Gas path device for improving vacuum coating atmosphere uniformity Download PDFInfo
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- CN211497784U CN211497784U CN202020160275.2U CN202020160275U CN211497784U CN 211497784 U CN211497784 U CN 211497784U CN 202020160275 U CN202020160275 U CN 202020160275U CN 211497784 U CN211497784 U CN 211497784U
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Abstract
The utility model discloses an improve gas circuit device of vacuum coating atmosphere homogeneity, divide pipe and an outlet duct including an intake pipe, at least one secondary, the secondary divides the pipe to be connected with the outlet duct behind the 1-10 level symmetry equal divisions of gas in with the intake pipe, the both ends of outlet duct are sealed, and the even venthole of arranging the constant diameter of outlet duct along its length direction. The utility model discloses with conventional gas circuit device comparison, guaranteed the uniformity of the gas flow of longer length, the atmosphere that provides is more even, and the controllability is higher, and atmosphere speed of adjustment is fast.
Description
Technical Field
The utility model relates to a vacuum coating technical field such as physical vapor deposition, chemical vapor deposition especially relate to an improve gas circuit device of vacuum coating atmosphere homogeneity.
Background
Vacuum coating technology includes Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD), and has been widely used in many fields, such as solar photovoltaic, photo-thermal, LED, magnetic storage material preparation, etc., especially in recent years, atmosphere uniformity is one of the key factors influencing the uniformity of large-area thin film materials, and the performance of large-area thin film materials and the large-scale production efficiency can be guaranteed only by ensuring the large-area atmosphere uniformity.
Aiming at atmosphere uniformity, a great deal of research is also carried out on gas circuit arrangement, and the existing mainstream gas circuit arrangement methods comprise a single-tube method, a sleeve gas mixing method, a gas mixing tank method and the like, which have advantages, but also have many problems, such as difficult adjustment and control delay of atmosphere, and the like, so that a new gas circuit arrangement method needs to be developed urgently to ensure the uniformity and the controllability of the atmosphere.
SUMMERY OF THE UTILITY MODEL
The utility model aims to avoid the shortcomings of the prior art and provide a gas circuit device for improving the uniformity of vacuum coating atmosphere, thereby effectively solving the shortcomings existing in the prior art.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the gas path device for improving the uniformity of vacuum coating atmosphere comprises a gas inlet pipe, at least one secondary branched pipe and a gas outlet pipe, wherein the secondary branched pipe is used for symmetrically and equally dividing 1-10 levels of gas in the gas inlet pipe and then is connected with the gas outlet pipe, two ends of the gas outlet pipe are sealed, and gas outlet holes with equal diameters are uniformly distributed in the gas outlet pipe along the length direction of the gas outlet pipe.
Further, the air outlet holes face to the same direction.
Further, the air outlet direction of the air outlet hole is opposite to the air inlet direction of the air inlet pipe.
Furthermore, the air outlet direction of the air outlet hole and the air inlet direction of the air inlet pipe are arranged in an acute angle.
Furthermore, the aperture of the air outlet is 0.1-5mm, and the distance between the air outlet is not less than the aperture of the air outlet.
Furthermore, each single tube of the secondary branch tube directly connected with the air outlet tube supplies air for 1-5 air outlet holes on two sides of the single tube.
The above technical scheme of the utility model following beneficial effect has: the utility model discloses compare with conventional gas circuit device, guaranteed the uniformity of the gas flow of longer length, the atmosphere that provides is more even, and the controllability is higher, and atmosphere adjustment speed is fast to can separately supply working gas (like Ar gas) and reacting gas (like O2, N2, NH3 or CO2 etc.), need not mix before advancing the vacuum cavity promptly, further improve mixed atmosphere's homogeneity and controllability.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a top view of an outlet duct according to an embodiment of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2 at A;
fig. 4 is a schematic structural diagram of a glow area in a vacuum chamber applied in an embodiment of the present invention;
fig. 5 is a layout view (plan view) of a gas circuit device according to an embodiment of the present invention;
FIG. 6 is a side view of FIG. 5;
fig. 7 is another layout structure diagram of the gas circuit device according to the embodiment of the present invention.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1-3, the gas path device for improving uniformity of vacuum coating atmosphere in this embodiment includes an air inlet tube 100, at least one secondary branched tube 200, and an air outlet tube 300, wherein the secondary branched tube 200 equally divides 1-10 stages of gas in the air inlet tube 100 symmetrically and then is connected to the air outlet tube 300, two ends of the air outlet tube 300 are sealed, and the air outlet tube 300 is uniformly provided with air outlets 400 with equal diameters along a length direction thereof.
By 1-10-level symmetrical equally dividing, it is meant that the way of dividing 1 into 2, 2 into 4, 4 into 8 … … (and so on) is finally ensured that uniform air outlet can be performed from each air outlet 404.
As shown in fig. 1, in this embodiment, a secondary branch pipe is provided in two stages, that is, after the gas flow is divided into 2 sections, each section is divided into 2 sections, that is, divided into 4 sections, and finally the gas is uniformly ejected from the gas outlet holes 400 on the gas outlet pipe 300, and in addition, the number of the gas outlet holes 400 corresponding to the secondary branch pipe 200 at the end is uniform, so as to ensure the uniformity of the gas outlet.
The venthole 400 faces the same direction, and specifically, the arrangement mode of the venthole is various according to the actual situation, such as: the air outlet direction of the air outlet holes 400 is opposite to the air inlet direction of the air inlet pipe 100, or the air outlet direction of the air outlet holes 400 and the air inlet direction of the air inlet pipe 100 are arranged at an acute angle.
The aperture of the air outlets 400 is 0.1-5mm, the distance between the air outlets is not less than the aperture of the air outlets, each single tube of the secondary branched pipe 200 directly connected to the air outlet pipe 300 supplies air to 1-5 air outlets 400 on both sides thereof, as shown in fig. 1-2, in this embodiment, the single tube of the secondary branched pipe 200 located at the end supplies air to two air outlets 400 on the left and right sides, respectively.
A mass flow meter is provided on a pipe connected to the intake pipe 100 to control the flow rate of the gas.
Reference is made below to fig. 4-7 to the utility model discloses a method of use does concrete zhuangming, wherein structure 500 represents the vacuum cavity who is used for the coating film, fixed being provided with target 600 along the axial direction who is on a parallel with vacuum cavity 500 (in this embodiment, vacuum cavity's inner chamber is cylindrical) in vacuum cavity 500, be provided with glow area 700 at its side, generally in order to guarantee the homogeneity of coating film, one section distance in glow area will be extended at the both ends of target 600, and one section distance of waiting to coat film article will be extended at the both ends in glow area, as shown in fig. 5, use glow area 700 as the benchmark, glow area 700 divides for 6 sections air feed subregions 701 equally, every air feed subregion 701 all corresponds and is provided with a gas circuit device in the utility model.
As shown in fig. 6, the gas circuit device is placed in an arrangement manner, the gas circuit device is fixed on the top of the vacuum chamber, the gas inlet pipe 100 is arranged in the vertical direction and supplies gas from top to bottom, the gas outlet pipe 300 is arranged in parallel to the glow area 700, and the gas outlet 400 is arranged upward, so that under the action of the bottom vacuum-pumping device, the gas emitted from the gas outlet 400 is uniformly dispersed to the glow area 700 at the two sides, and the uniformity of the atmosphere is ensured; as shown in fig. 7, in another arrangement of the gas circuits, the gas circuit devices are distributed on two sides, and the gas circuit devices on the two sides respectively provide a uniform atmosphere for the glow area 700 under the action of the vacuum pumping device.
Of course, the air path device may also be fixed on the top of the vacuum chamber as in fig. 6, except that the air outlet 400 is not disposed upward, but directly faces the glow area 700, that is, the air outlet direction of the air outlet 400 and the air inlet direction of the air inlet 100 are arranged at an acute angle.
The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
Claims (6)
1. The utility model provides an improve gas circuit device of vacuum coating atmosphere homogeneity which characterized in that: the gas inlet pipe comprises a gas inlet pipe, at least one secondary branched pipe and a gas outlet pipe, wherein the secondary branched pipe is used for symmetrically and equally dividing 1-10 levels of gas in the gas inlet pipe and then is connected with the gas outlet pipe, two ends of the gas outlet pipe are sealed, and gas outlet holes with equal diameters are uniformly arranged on the gas outlet pipe along the length direction of the gas outlet pipe.
2. The gas path device for improving the uniformity of vacuum coating atmosphere according to claim 1, wherein: the air outlet holes face to the same direction.
3. The gas path device for improving the uniformity of vacuum coating atmosphere according to claim 2, wherein: the air outlet direction of the air outlet hole is opposite to the air inlet direction of the air inlet pipe.
4. The gas path device for improving the uniformity of vacuum coating atmosphere according to claim 2, wherein: the air outlet direction of the air outlet hole and the air inlet direction of the air inlet pipe are arranged in an acute angle.
5. The gas path device for improving the uniformity of vacuum coating atmosphere according to claim 2, wherein: the aperture of the air outlet is 0.1-5mm, and the distance between the air outlet is not less than the aperture of the air outlet.
6. The gas path device for improving the uniformity of vacuum coating atmosphere according to claim 1, wherein: each single tube of the secondary branch tube directly connected with the air outlet tube supplies air for 1-5 air outlet holes on two sides of the single tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020160275.2U CN211497784U (en) | 2020-02-11 | 2020-02-11 | Gas path device for improving vacuum coating atmosphere uniformity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020160275.2U CN211497784U (en) | 2020-02-11 | 2020-02-11 | Gas path device for improving vacuum coating atmosphere uniformity |
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| Publication Number | Publication Date |
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| CN211497784U true CN211497784U (en) | 2020-09-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020160275.2U Active CN211497784U (en) | 2020-02-11 | 2020-02-11 | Gas path device for improving vacuum coating atmosphere uniformity |
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| CN (1) | CN211497784U (en) |
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2020
- 2020-02-11 CN CN202020160275.2U patent/CN211497784U/en active Active
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Effective date of registration: 20221207 Address after: 100089 room 916, scientific research building, No.61 Zhichun Road, Haidian District, Beijing Patentee after: BEIJING TRX SOLAR TECHNOLOGY Co.,Ltd. Address before: 061000 No.29, East Jilin Avenue, high tech Industrial Development Zone, Cangzhou City, Hebei Province Patentee before: CANGZHOU TRX SOLAR TECHNOLOGY Co.,Ltd. |