CN205874536U - Coating machine process gas inlet pipe - Google Patents
Coating machine process gas inlet pipe Download PDFInfo
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- CN205874536U CN205874536U CN201620846891.7U CN201620846891U CN205874536U CN 205874536 U CN205874536 U CN 205874536U CN 201620846891 U CN201620846891 U CN 201620846891U CN 205874536 U CN205874536 U CN 205874536U
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- pore
- inlet pipe
- air inlet
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- pipe body
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Abstract
The utility model belongs to the technical field of the coating machine technique and specifically relates to a coating machine process gas inlet pipe, include the intake pipe body, establish a plurality of gas pockets on the intake pipe body, its characterized in that: begin along the axial direction of intake pipe body by the inlet end, interval totality between the gas pocket is for steadiling decrease. Compared with the prior art, the utility model, gas pocket interval on the intake pipe body begins the design for the totality trend of tapering off from the inlet end, and it is even to enable the gas output, makes technology more stable.
Description
Technical field
This utility model relates to coater technical field, specifically a kind of coater process gas air inlet pipe.
Background technology
Coater needs to do technique and must be installed in cavity by process gas air inlet pipe, traditional work entering cavity
Process gases air inlet pipe can uniformly lay pore 2 on it, namely is placed equidistant pore, sees Fig. 1, and the spacing of pore thereon all sets
It is set to 50mm.
But because process gas air inlet has certain pressure, use the air inlet pipe of this equidistant placement pore, process gas
Know from experience and in the pore of the front section of the inlet end of process gas air inlet pipe, discharge more gas, in follow-up pore then
Relatively discharging less gas, this design makes technique unstable, and gas release is uneven.
Utility model content
The purpose of this utility model is to overcome prior art not enough, use a kind of from inlet end start pore spacing totally in
Successively decrease design process gas air inlet pipe.
For achieving the above object, a kind of coater process gas air inlet pipe of design, including air inlet pipe body, it is located at air inlet pipe
Some pores on body, it is characterised in that: along the axial direction of air inlet pipe body by inlet end, between described pore
Spacing is generally successively decreased.
Along the axial direction of air inlet pipe body by inlet end, the spacing between some pores is for successively decrease successively.
Described air inlet pipe body includes some pore groups;
Described pore group is made up of the adjacent pore of some equidistant placement, at least provided with 2 in described pore group
Pore;
Along the axial direction of air inlet pipe body by inlet end, the pore spacing in previous group pore group is more than later group
First pore during the pore of end is later pore group in pore spacing in pore group, and previous pore group.
Compared with the existing technology, the pore spacing on air inlet pipe body starts to be designed as totally this utility model from inlet end
Taper off trend, gas output can be made uniform, make technique more stable.
Accompanying drawing explanation
Fig. 1 is the structural representation of the coater using the existing process gas air inlet pipe being disposed with equidistant pore.
Fig. 2 is that this utility model applies the structural representation on coater in an embodiment.
Fig. 3 is the partial enlarged drawing shown in Fig. 2.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is further described:
This utility model one coater process gas air inlet pipe, including air inlet pipe body 1, is located on air inlet pipe body
Some pores 2, it is characterised in that: the spacing along the axial direction of air inlet pipe body 1 by inlet end, between described pore 2
Generally successively decrease.Illustrate with embodiment below, but be not limited to embodiment.
Embodiment 1
In this example, along the axial direction of air inlet pipe body 1 by inlet end, the spacing between some pores 2 is successively
Successively decrease.
Due to the release of pressure effect of pore, therefore air pressure starts gradually to successively decrease from air inlet side, the initial pressure of air inlet side
Power is maximum, then the pore spacing of air inlet side is set to longer, makes that process gas release of pressure during this section of conveying is milder, gas
Pressure is more steady, thus air inlet pipe body 1 will not produce the phenomenons such as violent shake because of die-offing of air pressure, and more to air pressure below
The least, then can reduce the spacing between pore accordingly, make air pressure too fast to lose, thus realize uniformly giving vent to anger.
Embodiment 2
According to concrete technological requirement and admission pressure, the length situation of air inlet pipe body 1, it is possible to use following scheme:
Described air inlet pipe body 1 sets some pore groups;Adjacent by some equidistant placement of described pore group
Pore 2 forms, at least provided with 2 pores in described pore group;Along the axial direction of air inlet pipe body 1 by inlet end,
Pore spacing in previous group pore group is more than the pore spacing in later group pore group, and the gas of end in previous pore group
Hole is the first pore in later pore group.
Seeing Fig. 2 and Fig. 3, start from air inlet side to have set altogether 6 pore groups, wherein first group is made up of 2 pores,
Spacing between 2 pores is 200mm;Second group is made up of 3 pores, and the spacing of its pore is 175mm;3rd group by 4
Pore forms, and the spacing of its pore is 150mm;4th group is made up of 3 pores, and the spacing of its pore is 100mm;5th group by
3 pore compositions, the spacing of its pore is 50mm;6th group is made up of 3 pores, and the spacing of its pore is 30mm.
The above is only preferred implementation of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of without departing from this utility model principle, it is also possible to make some improvements and modifications, these improve and
Retouching also should be regarded as protection domain of the present utility model.
Claims (3)
1. a coater process gas air inlet pipe, including air inlet pipe body (1), some pores of being located on air inlet pipe body
(2), it is characterised in that: along the axial direction of air inlet pipe body (1) by inlet end, the spacing between described pore (2) is total
Body is for successively decreasing.
2. a kind of coater process gas air inlet pipe as claimed in claim 1, it is characterised in that: along air inlet by inlet end
The axial direction of tube body (1), the spacing between some pores (2) is for successively decrease successively.
3. a kind of coater process gas air inlet pipe as claimed in claim 1, it is characterised in that:
Described air inlet pipe body (1) includes some pore groups;
Described pore group is made up of the adjacent pore (2) of some equidistant placement, at least provided with 2 gas in described pore group
Hole;
Along the axial direction of air inlet pipe body (1) by inlet end, the pore spacing in previous group pore group is more than later group
First pore during the pore of end is later pore group in pore spacing in pore group, and previous pore group.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620846891.7U CN205874536U (en) | 2016-08-08 | 2016-08-08 | Coating machine process gas inlet pipe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620846891.7U CN205874536U (en) | 2016-08-08 | 2016-08-08 | Coating machine process gas inlet pipe |
Publications (1)
Publication Number | Publication Date |
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CN205874536U true CN205874536U (en) | 2017-01-11 |
Family
ID=57701908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201620846891.7U Active CN205874536U (en) | 2016-08-08 | 2016-08-08 | Coating machine process gas inlet pipe |
Country Status (1)
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CN (1) | CN205874536U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109722651A (en) * | 2019-02-18 | 2019-05-07 | 长江存储科技有限责任公司 | Film deposition equipment and gas supply device |
-
2016
- 2016-08-08 CN CN201620846891.7U patent/CN205874536U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109722651A (en) * | 2019-02-18 | 2019-05-07 | 长江存储科技有限责任公司 | Film deposition equipment and gas supply device |
CN109722651B (en) * | 2019-02-18 | 2021-03-23 | 长江存储科技有限责任公司 | Thin film deposition apparatus and gas supply device |
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