CN211480499U - Laser for directly generating double-path coherent light - Google Patents
Laser for directly generating double-path coherent light Download PDFInfo
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- CN211480499U CN211480499U CN202020352262.5U CN202020352262U CN211480499U CN 211480499 U CN211480499 U CN 211480499U CN 202020352262 U CN202020352262 U CN 202020352262U CN 211480499 U CN211480499 U CN 211480499U
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Abstract
The application belongs to the technical field of short pulse laser, and particularly relates to a laser for directly generating double-path coherent light. The existing multi-beam laser photoetching device has the defects of too many devices, low light energy utilization rate, uneven light intensity distribution of interference fringes and the like. The application provides a laser for directly generating double-path coherent light, which comprises a first laser oscillation component, an electro-optical Q-switching component and a second laser oscillation component which are sequentially arranged; the first laser oscillation component comprises a first Dammann transmission grating, a first laser crystal excitation component and a first Dammann reflection grating which are sequentially arranged; the second laser oscillation component comprises a second Dammann reflection grating, a second laser crystal excitation component and a second Dammann transmission grating; the first laser crystal excitation component comprises a first pump light source and a first laser crystal, and the second laser crystal excitation component comprises a second pump light source and a second laser crystal. The double-path light interference effect is good, the working efficiency is high, and the reliability is high.
Description
Technical Field
The application belongs to the technical field of short pulse laser, and particularly relates to a laser for directly generating double-path coherent light with a single longitudinal mode, phase difference locking, consistent polarization state and equal light intensity.
Background
The multi-beam laser interference manufacturing functional surface refers to a technology for processing a material surface through a micro-nano structure to construct a large-area submicron periodic structure, a periodic or quasi-periodic optical field is formed through multiple beams of coherent laser, the periodic or quasi-periodic optical field can be directly applied to the material surface or etched inside to form a three-dimensional periodic structure, and the periodic structure has special functions such as self-cleaning, water repellency, hydrophilicity, wear resistance, light trapping and the like. The multi-beam laser interference processing has the advantages of large processing area, flexible and changeable processing scale, low cost and the like, has been highly valued by researchers and users, and the micro-nano structure processed by the multi-beam laser interference is widely applied to various fields, such as chip manufacturing, artificial joints, aerospace elements, solar panels and the like.
The prior multi-beam laser interference system adopts a laser with single beam output, adopts various light splitting modes to split original beams, and then uses a reflector to reflect and intersect each split beam to obtain interference, and the light splitting system has two problems, namely the composition of the system has the problems of complex structure, difficult adjustment and low reliability; secondly, the single-beam laser generates phenomena of wave front distortion, phase and polarization state change, inconsistent light intensity and the like in the light splitting and intersecting process due to the action of a plurality of transmission media and reflection media, and the interference processing effect and quality are influenced.
SUMMERY OF THE UTILITY MODEL
1. Technical problem to be solved
Based on the existing multi-beam laser lithography system, a method for splitting the original laser beam into two parts and four parts is generally adopted, a discrete multi-bracket device is needed, the calibration process is complicated, only the processing of a single-period nano structure can be carried out, the whole set of light path needs to be readjusted when the interference patterns of other periods are required to be obtained, and the process is complex and is not easy to realize; meanwhile, the problems of too many devices, low light energy utilization rate, uneven light intensity distribution of interference fringes and the like exist, and the application provides a laser directly generating multipath coherent light.
2. Technical scheme
In order to achieve the above object, the present application provides a laser for directly generating two-path coherent light, comprising a first laser oscillation component, an electro-optical Q-switched component and a second laser oscillation component which are sequentially arranged;
the first laser oscillation component comprises a first Dammann transmission grating, a first laser crystal excitation component and a first Dammann reflection grating which are sequentially arranged, and the first Dammann reflection grating is obliquely arranged;
the second laser oscillation component comprises a second Dammann reflection grating, a second laser crystal excitation component and a second Dammann transmission grating, and the second Dammann reflection grating is obliquely arranged;
the first Dammann reflection grating, the electro-optical Q-switching component and the second Dammann reflection grating are sequentially arranged;
the first laser crystal excitation component comprises a first pump light source and a first laser crystal, the first pump light source is arranged opposite to the first laser crystal, the second laser crystal excitation component comprises a second pump light source and a second laser crystal, and the second pump light source is arranged opposite to the second laser crystal.
Another embodiment provided by the present application is: the first laser crystal is Ce-Nd: YAG, the first laser crystal is phi 7 x 110mm, the second laser crystal is Ce-Nd: YAG, and the second laser crystal is phi 7 x 110 mm.
Another embodiment provided by the present application is: the first Dammann transmission grating is a transmission type volume grating, and the second Dammann transmission grating is a transmission type volume grating.
Another embodiment provided by the present application is: the first Dammann reflection grating is a reflection type volume grating, and the second Dammann reflection grating is a reflection type volume grating.
Another embodiment provided by the present application is: the electro-optical Q-switching component comprises a Q switch and a polarizer, and the first Dammann reflection grating, the Q switch, the polarizer and the second Dammann reflection grating are sequentially arranged.
Another embodiment provided by the present application is: the first Dammann reflection grating is perpendicular to the optical axis plane and has an included angle of 45 degrees with the optical axis, and the second Dammann reflection grating is perpendicular to the optical axis plane and has an included angle of 45 degrees with the optical axis.
Another embodiment provided by the present application is: the first Dammann transmission grating, the first Dammann reflection grating, the second Dammann reflection grating and the second Dammann transmission grating form a laser resonant cavity.
Another embodiment provided by the present application is: the first pump light source and the first laser crystal form a laser pump source and a working substance, a double-lamp double-rod one-charge-two-discharge working mode is adopted, the size of a high-voltage pulse xenon lamp is 7 x 180mm, and the effective electrode spacing is 110 mm; the second pump light source and the second laser crystal form a laser pump source and a working substance, a double-lamp double-rod one-charge-two-discharge working mode is adopted, the size of the high-voltage pulse xenon lamp is 7 x 180mm, and the effective electrode spacing is 110 mm.
Another embodiment provided by the present application is: the laser directly generating the two paths of coherent light is applied to metal materials and non-metal materials.
Another embodiment provided by the present application is: the metal material is titanium alloy or stainless steel, and the nonmetal material is silicon chip or ceramic.
3. Advantageous effects
Compared with the prior art, the laser device directly generating double-path coherent light has the advantages that:
the application provides a laser for directly generating double-path coherent light, which is a multi-path output laser for pumping polycrystal in a resonant cavity to perform mutual injection operation by using a reflection Dammann grating and a transmission Dammann grating as cavity mirrors of the resonant cavity of the laser. The dual-path linear polarization laser source with single longitudinal mode operation, phase difference locking and electro-optical modulation is innovatively designed and developed from a system source, output dual-path laser can be directly intersected and interfered, operations such as light splitting, phase adjustment, polarization state modulation and light intensity matching are not needed, the problems of complex system structure and difficulty in adjustment are solved, links such as light splitting and phase adjustment are reduced, light beam quality is guaranteed, a good interference processing effect can be achieved, and a good technical solution is provided for the application fields such as photoetching processing. The designed device has the advantages of simple structure, low cost, quick and convenient operation and easy realization of engineering while meeting the requirements of the application field.
The application provides a laser instrument of direct production double-circuit coherent light adopts grating technique to make the laser instrument obtain single longitudinal mode output with higher efficiency, realizes the phase difference locking with mutual injection working method, has guaranteed the good coherence of multiplexed output's laser beam, can directly reflect crossing interference, also can carry out one minute two and obtain four light beam interference, interference effectual, work efficiency height, reliability height.
The application provides a directly produce laser instrument device of double-circuit coherent light has designed the double-circuit output pulse laser of initiative mode selection and passive phase locking, and two way single longitudinal mode laser beams that exportable phase difference locking, energy equal, and this two bundles of lasers are fine coherent light, can be used to build laser interference processingequipment. When the laser is used, two beams of laser emitted by the laser can be converged together to form interference light spots after angle adjustment is carried out by utilizing the two reflectors, and the included angles of the two reflectors determine the difference of processing periods, so that the convergence interference of double beams and various incidence included angles is realized. The interference fringe generated by the interference of the two laser beams interacts with the processing material, and a groove structure on the surface of the material to be processed can be etched; if the two beams are divided into four beams, four-beam interference processing can be realized, and array micro-nano structures with different periods can be obtained.
The application provides a laser instrument of directly producing double-circuit coherent light, provides a method of obtaining high-quality coherent laser double-beam, for one minute many schemes that current laser interference processing system adopted, the laser instrument device of production double-circuit coherent light that this application provided has designed the double-circuit output pulse laser of initiative mode selection and passive phase-locked, but output phase difference locking, have high beam quality, energy equal double-circuit single longitudinal mode laser beam, laser interference processing device can directly be built to the coherent light that produces.
Drawings
FIG. 1 is a schematic diagram of a laser of the present application that directly produces two-way coherent light;
FIG. 2 is a schematic perspective view of a laser for directly generating two-way coherent light according to the present application;
in the figure: 1-a first Dammann transmission grating, 2-a first pump light source, 3-a first laser crystal, 4-a first Dammann reflection grating, 5-Q switch, 6-polarizer, 7-a second Dammann reflection grating, 8-a second pump light source, 9-a second laser crystal and 10-a second Dammann transmission grating.
Detailed Description
Hereinafter, specific embodiments of the present application will be described in detail with reference to the accompanying drawings, and it will be apparent to those skilled in the art from this detailed description that the present application can be practiced. Features from different embodiments may be combined to yield new embodiments, or certain features may be substituted for certain embodiments to yield yet further preferred embodiments, without departing from the principles of the present application.
The conventional Mach-Zehnder interference lithography apparatus is a double-beam interference lithography apparatus, the calibration process is complicated, the position of each lens in the optical path needs to be accurately adjusted, only the single-period nanostructure can be processed at one time, the whole optical path needs to be readjusted when the nano patterns in other periods need to be processed, and the process is complex, time-consuming and difficult to realize. To obtain multi-beam interference fringes with uniform light intensity distribution, laser is firstly split, and at present, a plurality of methods for realizing optical beam splitting are commonly used, such as a spectroscope method [3], a microlens array method, a grating spectroscope method and the like.
The beam splitting method is most popular at present, and adopts a neutral beam splitter with a transmittance and a reflectance of 50/50 to split one laser beam into two parts, then two beams are intersected by utilizing the reflection of a reflector, and the two beams at the intersection point are interfered to realize interference processing. Other proportion lenses can be adopted to split the light beams in various proportions, so that interference processing of more than three light beams can be realized. Due to the actual control precision of the optical coating process and the angle adjustment in the light splitting and reflecting operations, the beam splitting method is difficult to ensure the size consistency and uniformity of each light beam, and further the processing effect is influenced.
In the microlens array spectroscopy, a complete laser wavefront is spatially divided into a plurality of tiny portions by a microlens array, each portion is focused by a corresponding lenslet on a focal plane, and a series of microlenses results in a plane consisting of a series of focal points. If the laser wavefront is an ideal plane wavefront, a group of uniform and regular focus distribution can be obtained on the focal plane of the microlens array; however, the actual laser wavefront is not an ideal plane wavefront, and has more or less some distortion, and after being focused by the micro-lens array, the focus is not uniformly distributed any more, but is displaced from the ideal focus. In addition, manufacturing errors between lenses during fabrication can also affect beam splitter performance.
The grating used in the grating spectroscopy mainly includes a transmission grating and a reflection grating. Transmission gratings are gratings that utilize diffraction of transmitted light, such as talbot gratings. The talbot grating has a diffraction efficiency of theoretically close to 100% by near-field fresnel diffraction, but actually has a diffraction efficiency of about 80% due to the influence of edge effect, aberration, and the like, and has a maximum disadvantage of uneven light intensity distribution. The reflective grating is a grating that diffracts light reflected between two notches, such as a Dammann grating. The Dammann grating can split incident light into light beams with equal light intensity and an equal spatial distance array, but space coordinates and phases in a period are modulated, corresponding compensation devices are required to be added, and the Dammann grating is not ideal in the aspect of strong laser damage resistance.
The existing multi-beam laser photoetching device generally adopts a method of splitting the original laser beam into two parts and four parts, a discrete multi-bracket device is needed, the calibration process is complicated, only the processing of a single-period nano structure can be carried out, the whole set of light path needs to be readjusted when the interference patterns of other periods are needed to be obtained, the process is complex and is not easy to realize; meanwhile, the defects of too many devices, low light energy utilization rate, uneven light intensity distribution of interference fringes and the like exist.
The Q-switch (english: Q-switching), also known as a giant pulse generator, is a technique for generating pulsed laser. The repetition rate, pulse energy, and pulse duration of the Q-switch mode are longer than the mode-locked mode, which is also used to generate pulses. Sometimes, both techniques are used simultaneously. The output power of the laser is improved and the laser pulse width is compressed by changing the Q value of the laser resonant cavity.
Laser crystals (laser crystals) convert externally supplied energy into spatially and temporally coherent crystalline materials with highly parallel and monochromatic lasers through optical resonators. Is the working substance of the crystal laser.
Referring to fig. 1-2, the present application provides a laser for directly generating two-path coherent light, including a first laser oscillation component, an electro-optical Q-switched component, and a second laser oscillation component, which are sequentially arranged;
the first laser oscillation component comprises a first Dammann transmission grating 1, a first laser crystal excitation component and a first Dammann reflection grating 4 which are sequentially arranged, and the first Dammann reflection grating 4 is obliquely arranged;
the second laser oscillation component comprises a second Dammann reflection grating 7, a second laser crystal excitation component and a second Dammann transmission grating 10, and the second Dammann reflection grating 7 is obliquely arranged;
the first Dammann reflection grating 4, the electro-optical Q-switching component and the second Dammann reflection grating 7 are sequentially arranged;
the first laser crystal excitation component comprises a first pump light source 2 and a first laser crystal 3, the first pump light source 2 is arranged opposite to the first laser crystal 3, the second laser crystal excitation component comprises a second pump light source 8 and a second laser crystal 9, and the second pump light source 8 is arranged opposite to the second laser crystal 9.
The first pump light source 2 and the second pump light source 8 work synchronously to excite the first laser crystal 3 and the second laser crystal 9, laser oscillation is formed in a laser resonant cavity consisting of the first Dammann transmission grating DTG1, the second Dammann transmission grating DTG10, the first Dammann reflection grating DRG4 and the second Dammann reflection grating DRG7, spectrum selection based on diffraction angles is carried out on the first Dammann transmission grating DRG4 and the second Dammann reflection grating DRG7, the first Dammann transmission grating 1 and the second Dammann transmission grating 10 realize selective transmission of different angles to intracavity oscillation laser, the first Dammann transmission grating 1 and the second Dammann transmission grating are used as output mirrors to realize laser output, meanwhile, the reflection action of the first Dammann transmission grating and the second Dammann reflection grating enables the first laser crystal 3 and the second laser crystal 9 to generate intracavity oscillation beams to realize mutual injection, the working mode of the mutual injection enables the phase difference of the two paths of the finally output beams to be locked as a fixed value, and the electro-optical Q-regulating component realizes the Q function, nanosecond pulses are obtained.
Furthermore, the first laser crystal 3 is Ce-Nd: YAG, the size of the first laser crystal 3 is phi 7 x 110mm, the second laser crystal 9 is Ce-Nd: YAG, and the size of the second laser crystal 9 is phi 7 x 110 mm.
Further, the first dammann transmission grating 1 is a transmission type volume grating, and the second dammann transmission grating 10 is a transmission type volume grating.
The transmission type volume grating can realize the transmission of specific wavelength by adjusting the angle, and the transmission type volume grating is mainly used as an output mirror and a mode selection element of a laser in the invention and works together with the first Dammann reflection grating 4 and the second Dammann reflection grating 7 to realize the selection and output of a single longitudinal mode.
Further, the first dammann reflection grating 4 is a reflective volume grating, and the second dammann reflection grating 7 is a reflective volume grating.
The reflective type volume grating has a spectrum selection function, and can realize the reflection of a specific wavelength under a specific diffraction angle by adjusting the angle, thereby inhibiting other redundant longitudinal modes.
Further, the electro-optical Q-switch assembly comprises a Q switch 5 and a polarizer 6, and the first Dammann reflection grating 4, the Q switch 5, the polarizer 6 and the second Dammann reflection grating 7 are sequentially arranged.
The Q switch and the polarizer are Q-switching devices, and the functions of the Q switch and the polarizer are electro-optical modulation, so that the laser outputs nanosecond pulse light.
Further, the first dammann reflection grating 4 is perpendicular to the optical axis plane and has an included angle of 45 degrees with the optical axis, and the second dammann reflection grating 7 is perpendicular to the optical axis plane and has an included angle of 45 degrees with the optical axis.
Further, the four elements of the first dammann transmission grating 1, the first dammann reflection grating 4, the second dammann reflection grating 7 and the second dammann transmission grating 10 are all dammann gratings, and can divide incident light into emergent arrays with equal intensity and equal intervals according to requirements. And constitutes a laser resonator. Under the mutual injection working mode, the phase difference of the two paths of light beams finally output is locked to be a fixed value; the spacing and position of the four elements can be adjusted according to actual needs to facilitate the installation and working requirements of the actual processing system.
Furthermore, the first pump light source 2 and the first laser crystal 3 form a laser pump source and a working substance, a double-lamp double-rod one-charge-two-discharge working mode is adopted, the size of the high-voltage pulse xenon lamp is 7 x 180mm, and the effective polar distance is 110 mm; the second pumping light source 8 and the second laser crystal 9 form a laser pumping source and a working substance, a double-lamp double-rod one-charge-two-discharge working mode is adopted, the size of the high-voltage pulse xenon lamp is 7 x 180mm, and the effective electrode spacing is 110 mm.
Further, the laser directly generating the multipath coherent light is applied to metal materials and non-metal materials.
Further, the metal material is titanium alloy or stainless steel, and the non-metal material is silicon chip or ceramic.
Interference fringes generated by the interference of outgoing beams of the two-path laser interact with the processing material, and a groove structure on the surface of the material to be processed can be etched; if the two beams are divided into four beams, four-beam interference processing can be realized, and array micro-nano structures with different periods can be obtained. In the same way, the multi-path laser can directly realize the interference of multiple beams, and obtain various specific three-dimensional interference effects and processing results.
The application provides a double-output laser device and a double-output laser technology with a grating menu longitudinal mode and an injection operation phase lock, aiming at the bottleneck (unequal light intensity after light splitting, too many light splitting elements, difficult adjustment and low system reliability) encountered by the traditional laser interference processing technology. The double-path output laser with single longitudinal mode output, phase difference locking and consistent light intensity is designed and realized simultaneously; the laser is specially designed for a multi-beam laser interference processing system, two paths of output lasers can be directly subjected to included angle adjustment through a reflector to realize modulation and acquisition of a processing period, and can be further split to obtain four beams or even eight-beam interference display.
The light splitting method with two splitting parts and four splitting parts adopted by the existing system is replaced from the light source, the problems of unequal light intensity, difficult adjustment and low reliability caused by the discrete multi-support in the prior art are solved, and the convenience, reliability and efficiency of the system are greatly improved. The invention has the advantages of high reliability, good interference effect, simple and convenient light path adjustment, controllable processing size, high efficiency, suitability for low-cost mass production, simple operation and the like.
The present application provides a multiple laser apparatus and technique that is superior to prior art apparatuses. The existing device and technology have the defects of complex system, multiple components, difficult adjustment, low effect and efficiency and the like.
This application has designed grating selection mould, has injected into lock looks moving double-circuit output laser each other, and this laser can directly export two way list vertical mode, phase difference locking, the unanimous laser beam of light intensity, can directly interfere through the speculum reflection, more can realize processing cycle's adjustment through the contained angle between the adjustment light beam, has simplified traditional beam split and adjustment mode, has improved reliability, convenience and the efficiency of system greatly. The two beams of output laser can be further divided into four beams, so that four-beam interference processing is realized, and the processing quality and the application range of the processing device are effectively improved.
Although the present application has been described above with reference to specific embodiments, those skilled in the art will recognize that many changes may be made in the configuration and details of the present application within the principles and scope of the present application. The scope of protection of the present application is determined by the appended claims, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.
Claims (10)
1. A laser for directly producing two-way coherent light, comprising: the electro-optical Q-switching device comprises a first laser oscillation component, an electro-optical Q-switching component and a second laser oscillation component which are sequentially arranged;
the first laser oscillation component comprises a first Dammann transmission grating, a first laser crystal excitation component and a first Dammann reflection grating which are sequentially arranged, and the first Dammann reflection grating is obliquely arranged;
the second laser oscillation component comprises a second Dammann reflection grating, a second laser crystal excitation component and a second Dammann transmission grating, and the second Dammann reflection grating is obliquely arranged;
the first Dammann reflection grating, the electro-optical Q-switching component and the second Dammann reflection grating are sequentially arranged;
the first laser crystal excitation component comprises a first pump light source and a first laser crystal, the first pump light source is arranged opposite to the first laser crystal, the second laser crystal excitation component comprises a second pump light source and a second laser crystal, and the second pump light source is arranged opposite to the second laser crystal.
2. A laser for directly producing dual-path coherent light as claimed in claim 1, wherein: the first laser crystal is Ce-Nd: YAG, the first laser crystal is phi 7 x 110mm, the second laser crystal is Ce-Nd: YAG, and the second laser crystal is phi 7 x 110 mm.
3. A laser for directly producing dual-path coherent light as claimed in claim 1, wherein: the first Dammann transmission grating is a transmission type volume grating, and the second Dammann transmission grating is a transmission type volume grating.
4. A laser for directly producing dual-path coherent light as claimed in claim 1, wherein: the first Dammann reflection grating is a reflection type volume grating, and the second Dammann reflection grating is a reflection type volume grating.
5. A laser for directly generating two-way coherent light according to any of claims 1 to 4, wherein: the electro-optical Q-switching component comprises a Q switch and a polarizer, and the first Dammann reflection grating, the Q switch, the polarizer and the second Dammann reflection grating are sequentially arranged.
6. The laser for directly generating dual-path coherent light of claim 5, wherein: the first Dammann reflection grating is perpendicular to the optical axis plane and has an included angle of 45 degrees with the optical axis, and the second Dammann reflection grating is perpendicular to the optical axis plane and has an included angle of 45 degrees with the optical axis.
7. The laser for directly generating dual-path coherent light of claim 5, wherein: the first Dammann transmission grating, the first Dammann reflection grating, the second Dammann reflection grating and the second Dammann transmission grating form a laser resonant cavity.
8. The laser for directly generating dual-path coherent light of claim 5, wherein: the first pump light source and the first laser crystal form a laser pump source and a working substance, a double-lamp double-rod one-charge-two-discharge working mode is adopted, the size of a high-voltage pulse xenon lamp is 7 x 180mm, and the effective electrode spacing is 110 mm; the second pump light source and the second laser crystal form a laser pump source and a working substance, a double-lamp double-rod one-charge-two-discharge working mode is adopted, the size of the high-voltage pulse xenon lamp is 7 x 180mm, and the effective electrode spacing is 110 mm.
9. The laser for directly generating dual-path coherent light of claim 5, wherein: the laser capable of directly generating the multipath coherent light is applied to metal materials and non-metal materials.
10. A laser for directly producing dual-path coherent light as claimed in claim 9, wherein: the metal material is titanium alloy or stainless steel, and the nonmetal material is silicon chip or ceramic.
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