CN202586072U - High-power all solid-state axisymmetric polarization laser device for laser machining - Google Patents
High-power all solid-state axisymmetric polarization laser device for laser machining Download PDFInfo
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- CN202586072U CN202586072U CN 201220127134 CN201220127134U CN202586072U CN 202586072 U CN202586072 U CN 202586072U CN 201220127134 CN201220127134 CN 201220127134 CN 201220127134 U CN201220127134 U CN 201220127134U CN 202586072 U CN202586072 U CN 202586072U
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Abstract
The utility model discloses a high-power all solid-state axisymmetric polarization laser device for laser machining. The laser device comprises an all solid-state laser generation device. The all solid-state laser generation device comprises a main oscillator for generating a laser beam and a power amplifier for amplifying the output power of the main oscillator, wherein the main oscillator comprises a completely reflecting mirror and an all solid-state single crystal pumping module. The completely reflecting mirror and the all solid-state single crystal pumping module are arranged along the same optical axis and a polarized light focusing surface is formed between the completely reflecting mirror and the all solid-state single crystal pumping module. The laser device also comprises a polarization element which is arranged at a joint of the optical axis between the completely reflecting mirror and the all solid-state single crystal pumping module and the polarized light focusing surface. By the laser device, laser in an axisymmetric polarization state can be output, such that the efficiency and accuracy of the laser machining are improved.
Description
Technical field
The utility model relates generally to field of semiconductor lasers, particularly a kind of all solid state axial symmetry polarization laser of high power that is used for laser processing.
Background technology
Laser processing comprises and utilizes high power laser to realize the metal texturing, cutting, boring, operations such as bending, welding.For traditional diamond-making technique; Laser processing has and has wide range of applications, and machining accuracy is high, rapidly and efficiently waits advantage; Its principle is that high-octane laser beam of high strength and material interact; The thermal effect that utilize to produce realizes the separation and the change of form of material, and therefore, the precision of raising laser processing and the key of efficient are that how control material is for the area and the absorption efficiency of laser beam effect.
The axial symmetry polarised light is the vector beam that a kind of particular polarization attitude distributes for laser, is characterized in that polarization state distributes on perpendicular to the cross section of wave vector direction to satisfy the axial symmetry characteristic.The axial symmetry polarised light has two kinds of basic polarization states to distribute, and radial polarisation distributes and the angle polarisation distribution, and corresponding respectively on the direction is radial vector direction and angle direction vector accordingly in the polar coordinate system of the origin of coordinates with the beam center.Distribute because the polarization state of light field center will satisfy axial symmetry, the light intensity of having only central spot just can make light beam have the actual physical meaning when being zero.Therefore, the intensity distributions of axial symmetry polarised light on cross section is the loop configuration of center blackening, and promptly the axial symmetry polarization is a kind of special non-homogeneous polarization structure.Compare with traditional polarised light, the maximum advantage of axial symmetry light beam is that it can provide the distribution of polarization state and control, and can realize that 3 d light fields distributes and the control of focousing field polarization state for focousing field provides modulation more flexibly thus.For example; Utilize axial symmetry angle light beam and light beam mixed state radially, can realize that the flat-top of focousing field distributes, axially producing bigger action length simultaneously; Help improving the degree of depth [R.Weber that laser processing produces; A.michalowski, M.Abdou-Ahmed, Effects of Radial and Tangential Polarization in Laser Material Processing (in the Materialbearbeitung mit Laserlicht radially with tangential polarization effect) .Physics Procedia; 12,21-30 (2011)].Experiment shows, because the Fresnel absorption coefficient of radial polarisation laser when vertically getting into cut surface is the highest, compares with linearly polarized light; Axial symmetry polarised light working (machining) efficiency can improve 1.5 to 4 times of [M.Meier, V.Romano, T.Feurer; Material processing with pulsed radially and azimuthally polarized laser radiation (pulse radially with the materials processing of angle polarization laser); Appl.Phys.A, 86,329-334 (2007)].In addition, in metal processing, the void shape that the otch smoothness of laser processing, processing produce etc. all can receive the influence of light field polarization state.
At present, though laser processing utilizes gas to do the high power axial symmetry laser output that gain media can obtain tens kilowatts, its facular model is relatively poor, precision is low, aspect stable, can't compare with solid state laser.And there is singular point in solid state laser because have the axisymmetric vectoring light beam of phase place singular point on light intensity, and common lasers can't produce axisymmetric polarization mode.And the most in the past xenon flash lamp pumping mode that adopts of the solid state laser that is used for laser processing, this is also from having determined laser can not have long-life and high efficiency in essence.
In the above-mentioned prior art; No matter for existing LASER Light Source is to adopt xenon lamp laser or employing solid state laser; But all there is defective in the laser beam that it produced, thereby can't produce axisymmetric polarization mode, thereby effectively control material is for the area and the absorption efficiency of laser beam effect; Therefore, can't obtain high-precision processing effect.
The utility model content
In order to solve the problems referred to above that exist in the prior art, the utility model provides a kind of all solid state axial symmetry polarization laser of high power that is used for laser processing, be used to improve the precision and the efficient of laser processing.
For achieving the above object; The utility model provides a kind of all solid state axial symmetry polarization laser of high power that is used for laser processing; Comprise the all-solid state laser generation device; Said all-solid state laser generation device comprises and is used to the power amplifier that produces the master oscillator of laser beam and be used for the power output of master oscillator is amplified; Said master oscillator comprises with completely reflecting mirror that is arranged in order with optical axis and all solid state monocrystalline pump module; Produce the polarised light focusing surface between said completely reflecting mirror and all solid state monocrystalline pump module, the intersection of optical axis and said polarised light focusing surface is provided with polarizing component between said completely reflecting mirror and all solid state monocrystalline pump module, to be used to obtain single polarization state laser beam.
According to the utility model, polarizing component comprises aperture or the conical dielectric film that distributes.
According to the utility model, the polarised light focusing surface comprises radially or the focusing surface of angle polarised light.
According to the utility model; This laser also comprises two-way mechanical adjustment frame; Said two-way mechanical adjustment frame one end connects with said polarizing component; The other end connects with master oscillator, is used for moving with optical axis is two-way along said, makes said polarizing component be positioned at the focusing surface place of radially said or angle polarised light.
According to the utility model, master oscillator also specifically comprises acoustooptic Q-switching, photogate and laser output mirror, and it is to be sequentially arranged in said all solid state monocrystalline pump module downstream with optical axis.
According to the utility model, all solid state monocrystalline pump module comprises diode laser matrix and gain medium, and that said diode laser matrix adopts is multi-direction, be symmetrical set, and is used for the said gain medium of side symmetric pump.
According to the described laser of the utility model, also comprise optical rotation plate, beam expanding lens and laser power monitor device to be set in turn in said power amplifier downstream with optical axis, said optical rotation plate is used to realize the conversion between angle polarization state and the radial polarisation attitude.
Preferably, said power amplifier is made up of one or more levels all solid state polycrystalline ceramics pump module.
The laser of the utility model also comprises supply unit, Q switching driver and cooling device, and said supply unit is used to the power supply of said full laser generator admittedly; The Q switching driver is used to control the output waveform of said all solid state axial symmetry polarization laser generation device; Cooling device is used to said all solid state axial symmetry polarization laser generation device heat radiation.
The beneficial effect of the utility model technical scheme is:
At first, the utility model has been set up polarizing component in the master oscillator structure, thereby can export and have axial symmetry polarization characteristic and high-power laser.Utilize laser diode to replace xenon lamp, improve the utilization ratio and the life-span of laser, and improve the beam quality of output laser as pump light source.Thereby for laser process equipment provides focousing field modulation more flexibly, therefore the parameters such as the distribution of polarization state control beam, active area and action length through control laser, have improved the precision and the efficient of laser processing.
Secondly; The utility model adopts aperture to be arranged on wherein a kind of focusing surface place of polarised light as polarizing component; Be used for selecting the axial symmetry polarization mode of needs; Suppress other a kind of axial symmetry polarization mode simultaneously, make a kind of polarised light loss, realize the perhaps stable vibration of low-loss of single angle polarization state of single radial polarisation attitude much larger than other a kind of polarised light.
Once more, the power amplifier of the utility model employing is made up of one or more levels all solid state polycrystalline ceramics pump module.Gain media adopts polycrystalline ceramics; Its microcrystal by random orientation constitutes, and shows as isotropic material on the macroscopic view, utilizes the polycrystalline ceramics rod not move back partially or move back negligible partially characteristic; Realize the further amplification of axial symmetry polarization laser power, and guarantee that the axial symmetry polarisation distribution is constant.
Once more; The structure of the multidirectional symmetrical profile pump rod-shaped laser gain media of laser diode that the utility model adopts; Radial distribution with symmetry can realize the symmetry and the uniformity of gain profiles in the laser bar, thereby effectively reduces moving back partially that the angle distortion causes.Adopt laser diode to replace xenon lamp,, realize the raising of output laser beam quality in the utilization ratio that improves laser with in the life-span as pump light source.
Once more; The utility model is through being arranged on the two-way mechanical adjustment frame between polarizing component and the master oscillator; Can realize polarizing component radially with the focusing surface place flexible of angle polarised light; Thereby improved the flexibility that polarizing component is regulated, and the handover operation of easy radial polarisation light and angle polarised light.
At last, the utility model laser also comprises the optical rotation plate that is used to realize the conversion between angle polarization state and the radial polarisation attitude that is arranged on the power amplifier downstream part.Optical rotation plate is according to specifically needing setting, and for example laser is output as radial polarisation light, and 90 degree optical rotation plates can realize that light beam is converted into the angle polarization state from the radial polarisation attitude.In addition, the utility model also comprises beam expanding lens and the laser power monitor device that is arranged on said optical rotation plate downstream.Beam expanding lens and laser power monitor device are provided with according to specifically needing, and can realize the real-time monitoring of power in long-distance transmissions and the laser processing procedure of light beam.
Description of drawings
Through below in conjunction with the description of accompanying drawing, can make scheme, effect and the characteristics of the utility model obtain more thorough understanding to the utility model specific embodiment.In the accompanying drawings:
Fig. 1 is the block diagram of the general structure of the said laser of the utility model.
Fig. 2 is the structural representation of the said all-solid state laser generation device of the utility model.
Fig. 3 is even polarization structure and non-homogeneous polarization structure contrast sketch map.
Fig. 4 is the light path sketch map of the said all-solid state laser generation device of the utility model.
Fig. 5 is for directly measuring and the radial polarized light beam surface of intensity distribution through recording behind the different angles polarizer.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the structure of all solid state axial symmetry polarization laser of the high power of the utility model is described in detail.
Fig. 1 is the described a kind of general structure block diagram that is used for all solid state axial symmetry polarization laser of high power of laser processing of the utility model.As shown in Figure 1, this laser comprises all-solid state laser generation device A, diode laser DC power supply B, Q switching driver C and water cooling unit D.All-solid state laser generation device A adopts laser diode as light source.Power supply B is the laser diode power supply.Q switching driver C is used to control the output waveform of all-solid state laser generation device A.Water cooling unit D is used to all-solid state laser generation device A heat radiation.
Fig. 2 is the structural representation of the said all-solid state laser generation device of the utility model A.As shown in Figure 2, this all-solid state laser generation device A comprises master oscillator I and power amplifier II.Master oscillator I comprises: completely reflecting mirror 1, aperture 2, all solid state monocrystalline pump module 3, acoustooptic Q-switching 4, photogate 5, laser output mirror 6.Completely reflecting mirror 1, laser output mirror 6 constitute the resonant cavity of master oscillator I; Aperture 2, all solid state monocrystalline pump module 3, acoustooptic Q-switching 4, photogate 5 are arranged in the resonant cavity by being arranged in order with optical axis.Through the aperture of placing on focusing surface therein 2, the polarization mode so that selection needs suppresses other a kind of polarization mode, thereby realizes that master oscillator produces the axial symmetry polarization laser.4 pairs of laser beams of acoustooptic Q-switching carry out waveform modulated, and control laser beam waveform pattern reaches the purpose of controlling the processing stand pattern.Laser can opened or turn-off to photogate 5 at any time, thus the operation of control laser processing.Power amplifier II is positioned at the downstream of master oscillator I; It is made up of one or more levels all solid state polycrystalline ceramics pump module 7; The master oscillator outgoing laser beam is not only realized the further amplification of laser power through after the power amplification, and guarantees that laser beam axis symmetry polarization characteristic does not change.
In the embodiment of the utility model, all solid state monocrystalline pump module 3 or all solid state polycrystalline ceramics pump module 7 are all solid state, and the employing laser diode is a light source, the side pumped solid laser gain media.In order to reduce moving back partially that angle distortion causes, all solid state pump module 3 and 7 has symmetrical radial distribution characteristic.The two-dimensional laser diode array is from the side by the bar-shaped gain media of a plurality of direction symmetric pump, and the slow-axis direction of diode laser matrix (full duration of the angle of divergence generally is about 10 °) is parallel with the axis direction of laser bar.For symmetry and the uniformity that guarantees gain profiles in the laser bar, under the prerequisite that mechanical design structure allows, improve the direction number of pumping as much as possible, and then effectively reduce because the higher order aberratons that asymmetry produced of gain profiles.In the coupled structure of side-pump laser rod, in order to guarantee symmetry and prevent that the pump light of diode laser matrix emission from shining on the diode laser matrix on opposite through behind the laser bar that the pumping direction number is got odd number usually.In order to improve the coupling absorption efficiency of side pump configuration; With the direction of array symmetry on place reflector block; Being looped around around the laser bar of reflector block symmetry is with the pump light reflected back laser bar inside that is not absorbed fully by laser bar, to improve pumping coupling efficiency and pump light distributing homogeneity.Through optimizing the pumping distance between diode laser matrix and the laser bar, guarantee that pump module has best absorption efficiency and gain profiles uniformity.
In addition, also be provided with optical rotation plate 8, and be provided with expansion bundle and monitoring device 9 in the downstream of optical rotation plate 8 in the downstream of power amplifier.Optical rotation plate 8 can adopt 90 degree optical rotation plates, and it is arranged on the laser output place of power amplifier, realizes the conversion between angle polarization state and the radial polarisation attitude according to concrete needs.Beam expanding lens and laser power monitor device 9 place the equipped at outlet port of laser, are convenient to the transmission of laser beam and the monitoring of laser stability ability, and to satisfy the actual needs of laser processing, this belongs to the routine techniques of laser process equipment.
Below the utility model master oscillator is produced the axial symmetry polarised light principle specify.Under the high power laser pumping, the heat deposition in the laser bar will cause laser bar interior temperature distributing disproportionation, thermal stress and receive the thermal deformation phenomenon, thereby produce thermal lensing effect, and thermal focal can be expressed as:
Wherein, K representes thermal conductivity, and A is the area of section of laser bar, P
dBe the total amount of heat that laser bar absorbs, dn/dT representes the temperature gradient of refractive index, and α is a thermal coefficient of expansion, r
0The radius of expression laser bar, n
0The refractive index at expression laser bar center, C
rAnd C
φRespectively corresponding radially with the constant of angle situation, all be the function of material strain optical coefficient, for the Nd:YAG monocrystalline, they are respectively 0.017 and-0.0025.Can find out that from above-mentioned thermal lens accounting equation laser bar is equivalent to bifocal lens, its angle and radially have different focal length.For the Nd:YAG monocrystalline, result of theoretic analysis is f
φ/ fr=1.2, actual measured results is between 1.35～1.5.
The utility model utilizes radial polarisation light and angle polarised light focusing different features in the laser bar; Record accurately that monocrystal rod produces radially with the angle thermal focal after, according to the cavity resonator structure of laser stability condition appropriate design master oscillator, place aperture 2 on a focusing surface therein; Be used for selecting the polarization mode of needs; Suppress other a kind of polarization mode, make a kind of polarised light loss, realize the stable vibration of low-loss of single polarization much larger than other a kind of polarised light.Finally, master oscillator output shaft symmetry polarization laser.As shown in Figure 3; Evenly distribute different with traditional wire polarised light and circular polarization polarization state of light; On the cross section perpendicular to the wave vector direction, axial symmetry polarization polarization state of light distributes and satisfies the axial symmetry characteristic, all satisfies the axial symmetry characteristic in radial polarisation distribution and angle polarisation distribution.
Need to prove that in this execution mode, for convenience of description, a focusing surface that is arranged in resonant cavity with aperture is an example, but not only for aperture as polarizing component.For example in the master oscillator laser cavity, add the effect that the conical dielectric film that distributes can reach polarizing component equally; The transmissivity of the conical dielectric film that distributes is relevant with incident light polarization state; Through the transmission rate variance between introducing radial polarisation light and the angle polarised light in the chamber, thereby realize the stable vibration of radial polarisation light low-loss by the mode competition in the resonant cavity.But; If select for use aperture 2 as polarizing component, its position can not at will be placed, and for example aperture 2 is positioned over the focusing surface place of radial polarisation light; At this moment; The angle polarised light is because can't be through aperture so can't stable oscillation stationary vibration, but and the stable oscillation stationary vibration of radial polarisation light, promptly output beam is the radial polarisation attitude; Otherwise if output beam is the angle polarization state, then aperture 2 must be positioned over the focusing surface place of angle polarised light.In addition and since aperture 2 must with oscillating laser Shu Tongxin in the chamber, so aperture 2 can be realized accurate displacements by means of a two-way mechanical adjustment frame 10.Two-way mechanical adjustment frame 10 1 ends connect with said polarizing component; The other end connects with master oscillator; Be used for moving with optical axis is two-way, make said polarizing component be positioned at the focusing surface place of radially said or angle polarised light along said, can realize polarizing component radially with the focusing surface place flexible of angle polarised light; Thereby improved the flexibility that polarizing component is regulated, and the handover operation of easy radial polarisation light and angle polarised light.Because this two-way mechanical adjustment frame 10 can be realized through multiple prior art, so do not give unnecessary details in this article.
Gain media in all solid state monocrystalline pump module 3 of the utility model is the monocrystalline cylindrical rod.Gain media can be Nd:YAG monocrystal, perhaps Nd:Y
3Al
5O
12, or Nd:GGG or Yb:YAG or Yb:Y
3Al
5O
12, or monocrystal such as Yb:GGG or other have the twin-lens monocrystal of thermic.Bar-like single crystal has different thermal focals to polarised light radially with the angle polarised light under the profile pump condition.Under low pump power, bar-like single crystal can be ignored moving back partially of axial symmetry polarization.
It is gain media that all solid state polycrystalline ceramics pump module 7 in the power amplifier of the utility model adopts the ceramic cylinder rod of polycrystalline structure.Guaranteeing that optical maser wavelength is consistent with master oscillator, amplifying power reaches under the actual demand prerequisite, gain media can be polycrystalline Nd:YAG pottery, perhaps Nd:Y
3Al
5O
12, or Nd:GGG or Yb:YAG or Yb:Y
3Al
5O
12, or polycrystalline ceramics such as Yb:GGG or other wavelength polycrystalline ceramics consistent etc. with master oscillator alternative.With polycrystalline Nd:YAG pottery is example; Its spectral characteristic, physical and chemical performance, laser characteristics and monocrystalline Nd:YAG and are the thermal effect isotropic material much at one, do not move back partially or move back partially and can ignore; And with respect to monocrystal; Polycrystalline Nd:YAG pottery ion doping is more even, and doping content can be higher, is easier to prepare large scale.
The all solid state monocrystalline pump module 3 and all solid state polycrystalline ceramics pump module 7 of the utility model are modular construction, at least 8000 hours useful life, and work as its useful life extremely, the module that directly more renews gets final product, middle no any maintenance work.In addition; The laser of the utility model has taked corresponding safeguard measure to guarantee the practicability of equipment: for example; Select optical element for use with high damage threshold; Full chamber optical element all adopts water-cooled, relies on Machine Design to guarantee laser and the light path system operational environment is stable, cleaning, drying, increases cooling water hydraulic pressure and crosses low protection and accident emergency stop device.
Fig. 4 provides the light path sketch map of a kind of instantiation of all solid state axial symmetry polarization laser of the utility model generation device, and all solid state axial symmetry polarization laser generation device comprises master oscillator and two stage power amplifier.Wherein master oscillator comprises: 1064nm completely reflecting mirror 1, aperture 2, all solid state monocrystalline Nd:YAG pump module 3, acoustooptic Q-switching 4, photogate 5,1064nm laser output mirror 6.Master oscillator is the flat-concave cavity structure, and 1064nm completely reflecting mirror 1 is the plano-concave mirror of 130mm for radius of curvature, and 1064nm laser output mirror 6 is for to the 1064nm laser transmittance being 30% level crossing.All solid state monocrystalline Nd:YAG pump module 3 adopts laser diode side pumped structure, and each pump module comprises 9 diode arrays, respectively from three-dimensional symmetric pump monocrystalline Nd:YAG; The long 64mm of monocrystalline Nd:YAG, diameter are 3mm, and doping content is 0.6%.Acoustooptic Q-switching 4 centre frequencies are 27.12MHz, and repetition rate 1k-50kHz is adjustable continuously.Power amplifier comprises two-stage, i.e. two all solid state polycrystalline Nd:YAG pottery pump modules 7, and each pump module comprises 30 diode arrays, respectively from five to symmetrical profile pump polycrystalline Nd:YAG pottery, each diode array peak power output is 20W; Polycrystalline Nd:YAG pottery diameter is 4mm, long 120mm, and doping content is 1.0%.When 808nm laser diode Maximum pumping, record monocrystalline Nd:YAG rod radially, the angle thermal focal is respectively 350mm and 480mm, polycrystalline Nd:YAG pottery thermal focal is 170mm.1064nm completely reflecting mirror 1 is set to 130mm to aperture 2 apart from d1; All be set to 330mm with what aperture 2,1064nm laser output mirror were clipped to about 3 two primary flats of all solid state monocrystalline Nd:YAG pump module in 6 minutes apart from d2; Be that aperture 2 places on the focal plane of radial polarisation pattern, aperture 2 diameters are selected 0.6mm for use.Finally, master oscillator output average power is the radial polarisation attitude 1064nm laser of 12W, and repetition rate is 10kHz, and pulsewidth is 60ns.The two stage power amplifier adopts the 2f system; Mensuration result according to thermal focal length; The polycrystalline Nd:YAG ceramic rod of first order amplifier left side primary flat is set to 350mm to master oscillator outgoing mirror 6 apart from d3, two adjacent primary flats of polycrystalline Nd:YAG ceramic rod be set to 340mm apart from d4.Behind first order amplifier, the 1064nm laser power is amplified to 50W, and through behind the amplifier of the second level, the 1064nm laser power is amplified to 125W again.Behind dual-stage amplifier, the radial polarisation attitude distributes and remains unchanged.90 degree optical rotation plates can realize that according to specifically needing the selectivity setting light beam is converted into the angle polarization state from the radial polarisation attitude.
Do not using under the optical rotation plate situation; It is the rotatable polarizer of axle that output beam is incided with the wave vector; Be coupled to the polarization characteristic of CCD camera analyses light beam again, analysis result is as shown in Figure 5, and Fig. 5 is for directly measuring and the radial polarized light beam surface of intensity distribution through measuring behind 0 °, 45 °, 90 °, the 135 ° polarizers; Wherein arrow is represented optical rotation plate light transmission shaft direction, and angle is represented the polarization direction of polarizer and the angle of vertical direction.Can know by Fig. 5; The radial polarisation light distribution of directly measuring is non-uniform Distribution in the form of a ring; Through light distribution behind the polarizer is the bivalve structure, and blanking bar is vertical with the polarizer direction, promptly on the cross section perpendicular to the wave vector direction; Axial symmetry polarization polarization state of light is the radial polarisation attitude, thereby proof utilizes the polarization state distribution of the light beam of above-mentioned all solid state axial symmetry polarization laser generation to satisfy the axial symmetry characteristic.The quartzy optical rotation plate of the 90 degree 8 optional laser output places that are put in of the two-sided 1064nm of being coated with anti-reflection film realize the conversion of radial polarisation attitude to the angle polarization state according to concrete needs.Through multi-stage power amplifier more, can also laser power further be improved.
In sum, disclose as above though the scheme of the utility model is a mode with specific embodiment, the utility model is not limited in the above embodiments.For those of ordinary skill in the art, can require without prejudice to accessory rights and the scope of the purport of all utility models of knowing of specification or thought in, the utility model is carried out various conversion and/or modification.But these conversion also all should be included within the protection range of the utility model with revising.
Claims (9)
1. all solid state axial symmetry polarization laser of high power that is used for laser processing; Comprise the all-solid state laser generation device; Said all-solid state laser generation device comprises and is used to the power amplifier that produces the master oscillator of laser beam and be used for the power output of master oscillator is amplified; Said master oscillator comprises completely reflecting mirror and all solid state monocrystalline pump module of arranging with optical axis; Produce the polarised light focusing surface between said completely reflecting mirror and all solid state monocrystalline pump module, the optical axis between said completely reflecting mirror and all solid state monocrystalline pump module and the intersection of said polarised light focusing surface are provided with polarizing component.
2. laser as claimed in claim 1 is characterized in that, said polarizing component comprises aperture or the conical dielectric film that distributes.
3. according to claim 1 or claim 2 laser is characterized in that, said polarised light focusing surface comprises radially or the focusing surface of angle polarised light.
4. laser as claimed in claim 3; It is characterized in that also comprising two-way mechanical adjustment frame; Said two-way mechanical adjustment frame one end connects with said polarizing component; The other end connects with master oscillator, is used for moving with optical axis is two-way along said, makes said polarizing component be positioned at the focusing surface place of radially said or angle polarised light.
5. laser as claimed in claim 3 is characterized in that said master oscillator also comprises acoustooptic Q-switching, photogate and laser output mirror, and it is to be sequentially arranged in said all solid state monocrystalline pump module downstream with optical axis.
6. laser as claimed in claim 3; It is characterized in that; Said all solid state monocrystalline pump module comprises diode laser matrix and gain medium, and that said diode laser matrix adopts is multi-direction, be symmetrical set, and is used for the said gain medium of side symmetric pump.
7. laser as claimed in claim 3; It is characterized in that also comprising optical rotation plate, beam expanding lens and the laser power monitor device to be set in turn in said power amplifier downstream with optical axis, said optical rotation plate is used to realize the conversion between angle polarization state and the radial polarisation attitude.
8. laser as claimed in claim 3 is characterized in that, said power amplifier is made up of one or more levels all solid state polycrystalline ceramics pump module.
9. laser as claimed in claim 3 is characterized in that also comprising supply unit, Q switching driver and cooling device, and said supply unit is used to the power supply of said full laser generator admittedly; The Q switching driver is used to control the output waveform of said all solid state axial symmetry polarization laser generation device; Said cooling device is used to said all solid state axial symmetry polarization laser generation device heat radiation.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623884A (en) * | 2012-03-29 | 2012-08-01 | 北京工商大学 | High-power all solid-state axisymmetric polarization laser for laser machining |
| CN104102015A (en) * | 2013-04-09 | 2014-10-15 | 深圳市大族激光科技股份有限公司 | Radial-polarization-light generation device and laser processing system |
| CN106501262A (en) * | 2016-12-06 | 2017-03-15 | 深圳大学 | A kind of sapphire ingot detection means |
-
2012
- 2012-03-29 CN CN 201220127134 patent/CN202586072U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623884A (en) * | 2012-03-29 | 2012-08-01 | 北京工商大学 | High-power all solid-state axisymmetric polarization laser for laser machining |
| CN104102015A (en) * | 2013-04-09 | 2014-10-15 | 深圳市大族激光科技股份有限公司 | Radial-polarization-light generation device and laser processing system |
| CN106501262A (en) * | 2016-12-06 | 2017-03-15 | 深圳大学 | A kind of sapphire ingot detection means |
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