CN106684683B - Continuous and superimposed pulses formula single beam solid state laser - Google Patents

Continuous and superimposed pulses formula single beam solid state laser Download PDF

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Publication number
CN106684683B
CN106684683B CN201611163811.9A CN201611163811A CN106684683B CN 106684683 B CN106684683 B CN 106684683B CN 201611163811 A CN201611163811 A CN 201611163811A CN 106684683 B CN106684683 B CN 106684683B
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laser
wavelength
mirror
polarizer
coated
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CN106684683A (en
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白杨
白冰
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Northwest University
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Northwest University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08059Constructional details of the reflector, e.g. shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08086Multiple-wavelength emission

Abstract

The disclosure discloses a kind of continuous and superimposed pulses formula single beam solid state laser, and the unpolarized stimulated radiation fluorescence of tri- kinds of wavelength of 946nm, 1064nm and 1319nm that Nd:YAG crystal generates simultaneously is decomposed into the s- polarization excited fluorescence of respective wavelength through polarizer with the laser and p- polarizes stimulated radiation fluorescence.It is being adjusted using motorized precision translation stage in compound first resonant cavity of multiple groups, the second resonant cavity that reflecting mirror and outgoing mirror constituted, the s- polarization excited fluorescence and p- polarization stimulated radiation fluorescence of respective wavelength are respectively completed oscillation amplification, realize that the s- polarization continuous laser of respective wavelength and p- polarized pulses laser export simultaneously and beam is closed in equidirectional superposition, three kinds of wavelength can be obtained respectively and there is continuous plus pulse characteristic laser beam, and the processing technologies efficiency such as laser drill, laser marking, laser scoring can be improved in such laser beam.The laser structure of the disclosure is compact, reliable for operation, has very strong practicability.

Description

Continuous and superimposed pulses formula single beam solid state laser
Technical field
This disclosure relates to laser technology field, and in particular to a kind of continuous and superimposed pulses that the output of three kinds of wavelength can be achieved Formula single beam solid state laser.
Background technique
Currently, laser drill, laser marking have been widely used for all kinds of accurate industrial processing fielies.It is sharp in order to improve Drill finish hole, laser marking efficiency, people are by powerful continuous laser irradiation material and while making its fusing, by narrow arteries and veins Rush width, the pulse laser of high-peak power makes irradiation zone sputtering of materials and vaporization in cladding state, to realize fast Fast, efficient laser drill, laser marking.
Conventional method is that the laser for exporting the laser that one continuously exports with a pulse is combined at present, will Continuous laser and pulse laser carry out space overlapping and close beam, generate the continuous and superimposed pulses laser beam with single beam form. Although that such method can have that there are two types of the laser beams of characteristic is controllable, can obtain stable continuous and superimposed pulses formula laser beam The advantages of, but due to using two lasers, cause the with high costs, bulky of system, operation complexity, optical maser wavelength solid Order one limits it in the application range of field of laser processing.
Summary of the invention
To solve the above-mentioned problems, the disclosure provides one kind and is based on composite resonant cavity configuration, can export continuous and pulse Superposing type single beam solid state laser.
The continuous and superimposed pulses formula single beam solid state laser includes: first kind plano-concave reflecting mirror, the first polarization member Part (7), first kind flat output mirror, the second class flat output mirror, in which:
The first kind plano-concave reflecting mirror, the first polarizer (7), first kind flat output mirror form the first resonant cavity;
The first kind plano-concave reflecting mirror, the second class flat output mirror form the second resonant cavity;
First polarizer (7) is located between first kind plano-concave reflecting mirror and the second class flat output mirror, three's Optical center is point-blank;
There are Q switched element (12) between the first polarizer (7) and the second class flat output mirror, the optical center of three is at one On straight line;
There is stimulated radiation light source between the first kind plano-concave reflecting mirror (1) and the first polarizer (7), it is non-for generating Polarize stimulated radiation fluorescence;
The unpolarized stimulated radiation fluorescence through the first polarizer (7) be decomposed into s- polarization excited fluorescence and p- polarization by Swash radiofluorescence;
S- polarization stimulated radiation fluorescence output s- after the amplification of the first internal oscillation polarizes continuous laser;
The p- polarization stimulated radiation fluorescence is modulated through Q switched element (12), is exported after oscillation amplification in the second resonant cavity P- polarized pulses laser;
The s- polarization continuous laser overlaps on same propagation direction with p- polarized pulses laser.
Further, the radius of curvature of the first kind plano-concave reflecting mirror is 1000nm, including the first plano-concave reflecting mirror (1), the second plano-concave reflecting mirror (2), third plano-concave reflecting mirror (3), in which:
The plane of the first plano-concave reflecting mirror (1) is coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength, Concave surface is coated with the high-reflecting film of 0 ° of incidence 946nm wavelength and the double-colored anti-reflection film of 1064nm, 1319nm wavelength;
Plated film, the height that concave surface is coated with 0 ° of incident 1064nm wavelength be not anti-for the plane of the second plano-concave reflecting mirror (2) Film;
The plane of the third plano-concave reflecting mirror (3) is coated with the anti-reflection film of 0 ° of incidence 1064nm wavelength, and concave surface is coated with 0 ° The high-reflecting film of incident 1319nm wavelength and the anti-reflection film of 1064nm wavelength.
Further, the first kind flat output mirror includes the first outgoing mirror (8), the second outgoing mirror (9), third output Mirror (10), in which:
The part that plane of first outgoing mirror (8) close to the first polarizer (7) is coated with 0 ° of incidence 946nm wavelength is anti- The double-colored anti-reflection film of film and 1064nm, 1319nm wavelength is penetrated, another plane is coated with 0 ° of incidence 946nm, 1064nm, 1319nm wave Three long color anti-reflection films;
Plane of second outgoing mirror (9) close to the first polarizer (7) is coated with the part of 0 ° of incidence 1064nm wavelength Reflectance coating, another plane are coated with the anti-reflection film of 0 ° of incidence 1064nm wavelength;
Plane of the third outgoing mirror (10) close to the first polarizer (7) is coated with the part of 0 ° of incidence 1319nm wavelength The anti-reflection film of reflectance coating and 1064nm wavelength, another plane are coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength.
Further, the second class flat output mirror include the 4th outgoing mirror (13), it is the 5th outgoing mirror (14), the 6th defeated Appearance (15), in which:
Plane of 4th outgoing mirror (13) close to the first polarizer (7) is coated with the 0 ° of incidence part 946nm reflectance coating With the double-colored anti-reflection film of 1064nm, 1319nm wavelength, another plane is coated with 0 ° of incidence 946nm, 1064nm, 1319nm wavelength Three color anti-reflection films;
Plane of 5th outgoing mirror (14) close to the first polarizer (7) is coated with 0 ° of part incidence 1064nm and reflects Film, another plane are coated with the anti-reflection film of 0 ° of incident 1064nm wavelength;
Plane of 6th outgoing mirror (15) close to the first polarizer (7) is coated with the 0 ° of incidence part 1319nm reflectance coating With the anti-reflection film of 1064nm wavelength, another plane is coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength.
Further, the first kind plano-concave reflecting mirror is located on the first motorized precision translation stage (4), first kind flat output mirror Positioned on the second motorized precision translation stage (11), the second class flat output mirror is located on third motorized precision translation stage (16);
The first kind plano-concave reflecting mirror, first kind flat output mirror, the second class flat output mirror position can lead to Motorized precision translation stage where crossing it is adjusted along the same rectilinear direction perpendicular to respective optical path.
Further, the Q switched element is acousto-optic crsytal (12).
Further, the s- polarization continuous laser is after the output of first kind flat output mirror, successively through the second polarization member Part (17), third polarizer (18), the reflection of the 4th polarizer (19), it is inclined with the p- through the 4th polarizer (19) total transmissivity Vibration pulse laser overlaps on same propagation direction.
Further, s- polarization continuous laser is in second polarizer (17), third polarizer (18), the Incidence angle on four polarizers (19) is 56.7 °.
Further, incidence angle of the p- polarized pulses laser on the 4th polarizer (19) is 56.7 °.
Further, the stimulated radiation light source includes Nd: YAG crystal bar (5), semiconductor laser side pump module (6), In:
Nd: the YAG crystal bar (5) is laser gain medium, in the semiconductor for absorbing semiconductor laser side pump module (6) After laser energy, while generating the unpolarized stimulated radiation fluorescence of tri- kinds of wavelength of 946nm, 1064nm and 1319nm.
Compared with prior art, the laser of the disclosure has following advantages:
1) p- polarized pulses laser resonator and s- polarization continuous laser resonant cavity are formed into a complex wrapping type resonance Chamber, and be divided using the first polarizer, the p- polarized pulses laser and s- polarization continuous laser for realizing co-wavelength are simultaneously Oscillation output.
2) it can be generated simultaneously using Nd: YAG crystal bar and semiconductor laser side pump module as stimulated radiation light source The unpolarized stimulated radiation fluorescence of tri- kinds of wavelength of 946nm, 1064nm and 1319nm, and using motorized precision translation stage adjustment reflecting mirror and Outgoing mirror may be constructed multiple groups resonant cavity, realizes the p- polarized pulses laser of three kinds of wavelength and connects with the s- polarization of its co-wavelength Continuous laser exports simultaneously.
3) successively with the reflection of 56.7 ° of second polarizers of Brewster's angle, third polarizer and the 4th polarizer S- polarizes that continuous laser transmit with by the 4th polarizer with 56.7 ° of Brewster's angles and the identical p- polarized pulses of wavelength are sharp Realize that superposing type closes beam, so that laser structure is compact, and can generate with single beam shape on their same propagation directions of light The continuous and superimposed pulses laser beam of formula, thus solve two co-wavelengths laser complete superposing type close beam caused by The problem of this is high, bulky, operation is complicated, optical maser wavelength fixed single, has very strong practicability.
Detailed description of the invention
Fig. 1 is in an embodiment of the present disclosure about continuous and superimposed pulses formula single beam solid state laser structural representation Figure;
Wherein: 1, the first plano-concave reflecting mirror;2, the second plano-concave reflecting mirror;3, third plano-concave reflecting mirror;4, first is electronic flat Moving stage;5, Nd: YAG crystal bar;6, semiconductor laser side pump module;7, the first polarizer;8, the first outgoing mirror;9, second is defeated Appearance;10, third outgoing mirror;11, the second motorized precision translation stage;12, Q switched element (Q-switch);13, the 4th outgoing mirror;14, the 5th Outgoing mirror;15, the 6th outgoing mirror;16, third motorized precision translation stage;17, the second polarizer;18, third polarizer;19, Four polarizers.
Specific embodiment
Continuous and superimposed pulses formula single beam solid state laser is illustrated below with reference to Fig. 1.
Laser, by transformation reflecting mirror and outgoing mirror, can form under the premise of using same stimulated radiation light source Multiple groups resonant cavity.Every group of resonant cavity includes the first resonant cavity and the second resonant cavity.First resonant cavity by first kind plano-concave reflecting mirror, First polarizer (7), first kind flat output mirror are constituted, and polarize continuous laser for vibrating amplification s;Second resonant cavity is by A kind of plano-concave reflecting mirror, the second class flat output mirror are constituted, for vibrating amplification p- polarized pulses laser.It is anti-in first kind plano-concave Penetrating between mirror (1) and the first polarizer (7) has stimulated radiation light source, unpolarized for generating unpolarized stimulated radiation fluorescence Stimulated radiation fluorescence is decomposed into s- polarization excited fluorescence through the first polarizer (7) and p- polarizes stimulated radiation fluorescence, in which: s- It polarizes stimulated radiation fluorescence output s- after the amplification of the first internal oscillation and polarizes continuous laser, p- polarizes stimulated radiation fluorescence warp Q switched element (12) modulation in second resonant cavity, exports p- polarized pulses laser after oscillation amplification in the second resonant cavity.It is described S- polarization continuous laser overlaps on same propagation direction with p- polarized pulses laser.
Q switched element (12) is acousto-optic crsytal.The acousto-optic crsytal can use optically uniaxial acousto-optic crsytal, mainly there is dioxy Change the crystal such as tellurium, lead molybdate, calogreen.When extraneous ultrasonic wave passes through acousto-optic crsytal, internal density generating period Variation, causes refractive index periodic to change, and makes to deflect by the p- polarization stimulated radiation fluorescence of acousto-optic crsytal, can not be humorous Intracavitary oscillation of shaking is amplified, and it is even more impossible to form laser output;In the presence of not having ultrasonic wave, it is excited by the p- polarization of acousto-optic crsytal Radiofluorescence can vibrate in resonant cavity amplifies and is formed laser output;When ultrasonic wave is periodically by acousto-optic crsytal, The output of p- polarized pulses laser will be generated.
In said elements, stimulated radiation light source, first kind plano-concave reflecting mirror, the first polarizer (7), the second class plane are defeated Appearance optical center is on the same line.
The characteristic type of first kind plano-concave reflecting mirror, first kind flat output mirror and the second class flat output mirror is according to effect Different wave length selection.
In Fig. 1, first kind plano-concave reflecting mirror is flat including the first plano-concave reflecting mirror (1), the second plano-concave reflecting mirror (2), third Recessed reflecting mirror (3), is respectively acting on the laser of 946nm, 1064nm, 1319nm wavelength, their radius of curvature is 1000nm, and Have the characteristics that following:
The plane of first plano-concave reflecting mirror (1) is coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength, concave surface It is coated with the high-reflecting film of 0 ° of incidence 946nm wavelength and the double-colored anti-reflection film of 1064nm, 1319nm wavelength;
Plated film, concave surface are not coated with the high-reflecting film of 0 ° of incident 1064nm wavelength to the plane of second plano-concave reflecting mirror (2);
The plane of third plano-concave reflecting mirror (3) is coated with the anti-reflection film of 0 ° of incidence 1064nm wavelength, and concave surface is coated with 0 ° of incidence The high-reflecting film of 1319nm wavelength and the anti-reflection film of 1064nm wavelength.
Correspondingly, plane of the first outgoing mirror (8) close to the first polarizer (7) is coated with the portion of 0 ° of incidence 946nm wavelength The double-colored anti-reflection film of point reflectance coating and 1064nm, 1319nm wavelength, another plane be coated with 0 ° of incidence 946nm, 1064nm, Three color anti-reflection films of 1319nm wavelength;Plane of 4th outgoing mirror (13) close to the first polarizer (7) is coated with 0 ° of incidence 946nm The double-colored anti-reflection film of part reflectance coating and 1064nm, 1319nm wavelength, another plane be coated with 0 ° of incidence 946nm, 1064nm, Three color anti-reflection films of 1319nm wavelength;
Plane of second outgoing mirror (9) close to the first polarizer (7) is coated with the part reflection of 0 ° of incidence 1064nm wavelength Film, another plane are coated with the anti-reflection film of 0 ° of incidence 1064nm wavelength;5th outgoing mirror (14) is close to the first polarizer (7) Plane is coated with the 0 ° of incidence part 1064nm reflectance coating, and another plane is coated with the anti-reflection film of 0 ° of incident 1064nm wavelength;
Plane of the third outgoing mirror (10) close to the first polarizer (7) is coated with the part reflection of 0 ° of incidence 1319nm wavelength The anti-reflection film of film and 1064nm wavelength, another plane are coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength;6th Plane of the outgoing mirror (15) close to the first polarizer (7) is coated with the increasing of 0 ° of the incidence part 1319nm reflectance coating and 1064nm wavelength Permeable membrane, another plane are coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength.
In this way, the first plano-concave reflecting mirror (1), the first polarizer (7), the first outgoing mirror (8) the first resonance of formation Chamber polarizes 946nm continuous laser for vibrating amplification output s-;First plano-concave reflecting mirror (1), the 4th outgoing mirror (13) form the Two resonant cavities polarize 946nm pulse laser for output p- after vibrating amplification;Second plano-concave reflecting mirror (2), the first polarizer (7), the second outgoing mirror (9) forms third resonant cavity, polarizes 1064nm continuous laser for vibrating amplification output s-;Second plano-concave Reflecting mirror (2), the 5th outgoing mirror (14) form the 4th resonant cavity, swash for output p- polarization 1064nm pulse after vibrating amplification Light;Third plano-concave reflecting mirror (3), the first polarizer (7), third outgoing mirror (10) form the 5th resonant cavity for vibrating amplification It exports s- and polarizes 1319nm continuous laser;Third plano-concave reflecting mirror (3), the 6th outgoing mirror (15) form the 6th resonant cavity, are used for Output p- polarizes 1319nm pulse laser after oscillation amplification.
By the first plano-concave reflecting mirror (1), the second plano-concave reflecting mirror (2), that third plano-concave reflecting mirror (3) is placed on first is electronic On translation stage (4), it can according to need mobile first motorized precision translation stage (4) and select suitable reflecting mirror.It similarly, can also be by One outgoing mirror (8), the second outgoing mirror (9), third outgoing mirror (10) are placed on the second motorized precision translation stage (11), by the 4th output Mirror (13), the 5th outgoing mirror (14), the 6th outgoing mirror (15) are placed on third motorized precision translation stage (16).Motorized precision translation stage can be with Facilitate according to the needs of different wave length switched mirror or outgoing mirror in the vertical line of corresponding optical path.
The stimulated radiation light source includes Nd: YAG crystal bar (5), semiconductor laser side pump module (2), in which: the Nd : YAG crystal bar (5) is that laser gain medium can after the semiconductor laser energy for absorbing semiconductor laser side pump module (2) 946nm, 1064nm and 1319nm tri- unpolarized stimulated radiation fluorescence is generated as needed.Semiconductor laser side pump module can With preferred 808nm semiconductor laser side pump module.
When the stimulated radiation fluorescence for the respective wavelength that stimulated radiation light source generates is passed through through the first polarizer (7), by the One polarizer (7) is decomposed into s- polarization stimulated radiation fluorescence and p- polarization stimulated radiation fluorescence.It is glimmering in s- polarization stimulated radiation Light amplifies to form s- polarization continuous laser through the first internal oscillation, and p- polarization stimulated radiation fluorescence is put through the second internal oscillation It is big to form p- polarized pulses laser.Increase polarization member in the optical path that s- polarizes continuous laser and p- polarized pulses laser propagation Part, thus it is possible to vary s- polarizes the direction of propagation of continuous laser and/or p- polarized pulses laser, so that s- polarization continuous laser and p- The direction of propagation of polarized pulses laser is identical, overlaps them on same propagation direction.
In Fig. 1, the second polarizer is set in the optical path that s- polarizes continuous laser and p- polarized pulses laser propagation (17), third polarizer (18), the 4th polarizer (19), by the second polarizer (17), third polarizer (18), 4th polarizer (19) changes the direction of propagation of s- polarization continuous laser, makes the biography of its direction of propagation Yu p- polarized pulses laser Broadcast that direction is identical, and the p- polarized pulses laser for crossing the 4th polarizer (19) with full impregnated is overlaped.
Further, Brewster principle, the second polarizer (17), third polarizer (18), the 4th polarization are based on The angle of element (19) and incident light is 56.7 ° of angles.
Using the optical path between the first polarizer (7) and the second class flat output mirror as first straight line optical path, by first Optical path between polarizer (7) and first kind flat output mirror as second straight line optical path, the direction of second straight line optical path with The direction of first straight line optical path is at 66.6 ° of angles.Optical path where second polarizer (17), third polarizer (18) is made For third linear light path, the direction of third linear light path and the direction of second straight line optical path are at 66.6 ° of angles.Third is polarized into member For optical path where part (18), the 4th polarizer (19) as the 4th linear light path, the direction of the 4th linear light path and third are straight The direction on linear light road is at 66.6 ° of angles.In Fig. 1, first straight line optical path is propagated to the right in the horizontal direction, and second straight line optical path is along right Top propagate, third linear light path first level optical path top and propagate to the right in the horizontal direction, the 4th linear light path exists It is simultaneously propagated along lower right on the right of second straight line optical path.Also, the intersection point of second straight line optical path and first straight line optical path is first On polarizer (7) left side plane, the right side of the intersection point of third linear light path and second straight line optical path in the second polarizer (17) On side plane, the intersection point of the 4th linear light path and third linear light path is on the left side plane of third polarizer (18), and the 4th On the right side plan of linear light path and the 4th polarizer (19) of intersection point of first straight line optical path.
For above-mentioned linear light path in same level, this is a kind of preferred embodiment, and laser structure can be made compact, side Just adjustment constitutes each element of laser.But each element also can according to need deployment, there are linear light paths not same The possibility of horizontal plane.
It in one embodiment, is 4mm, stick long 75mm, Nd in Nd: YAG crystal bar diameter3+Ion doping concentration is 0.9at.%, the 808nm semiconductor laser total pump power in semiconductor laser side pump module are 600W, the first outgoing mirror (8) Transmissivity to s- polarization 946nm continuous laser fractional transmission is T=5.6%, and the second outgoing mirror (9) connects s- polarization 1064nm The transmissivity of continuous laser part transmission is T=20%, and third outgoing mirror (10) polarizes 1319nm continuous laser fractional transmission to s- Transmissivity be T=8.8%, the 4th outgoing mirror (13) to p- polarization 946nm pulse laser fractional transmission transmissivity be T= 10.5%, the 5th outgoing mirror (14) is T=33.2% to the transmissivity of p- polarization 1064nm pulse laser fractional transmission, and the 6th is defeated Under the experiment condition that appearance (15) is T=15.0% to the transmissivity of p- polarization 1319nm pulse laser fractional transmission, to continuous It is the continuous and superimposed pulses of 946nm, 1064nm, 1319nm with superimposed pulses formula single beam solid state laser difference generation wavelength The maximum superposition output power of single beam laser is measured, while also measuring s- polarization continuous laser by the second polarizer (17) the maximum continuous power output, p- polarized pulses laser before reflecting are by the maximum before the transmission of the 4th polarizer (19) The pulse recurrence frequency of mean power and p- polarized pulses laser, correlation measure is referring to table 1.
Table 1
As it can be seen from table 1 will from same laser emission light source simultaneously generate, the s of phase co-wavelength polarization continuous laser with P- polarized pulses laser can obtain that high power is continuous and superimposed pulses formula single beam laser in such a way that beam is closed in superposition.Not Under the premise of replacing laser emission light source, by replacing corresponding reflecting mirror and outgoing mirror, the Gao Gong of three kinds of wavelength can be obtained Rate is continuous and superimposed pulses formula single beam laser, and closes beam efficiency and reached 99% or so.
A kind of continuous and superimposed pulses formula single beam solid state laser that the disclosure proposes as a result, with current conventional base The laser that the laser that Yu Yitai is continuously exported is exported with a pulse closes beam by space and obtains the continuous of single beam form Comparing with superimposed pulses laser, there are three types of the design features of composite resonant cavity for tool, and it is cheap, compact-sized, reliable for operation, it is special It is not that the high power that can obtain tri- kinds of wavelength of 946nm, 1064nm, 1319nm respectively using same laser stimulated radiation light source is continuous With superimposed pulses formula single beam laser, the energy conversion efficiency of laser stimulated radiation light source is improved, therefore there is very strong reality The property used.
The disclosure is described in detail above, principle and embodiment party of the specific case to the disclosure are applied in text Formula is expounded, disclosed method that the above embodiments are only used to help understand and its core concept;Meanwhile it is right In those skilled in the art, according to considering for the disclosure, there will be changes in the specific implementation manner and application range.It is comprehensive Upper described, the content of the present specification should not be construed as the limitation to the disclosure.

Claims (9)

1. continuous and superimposed pulses formula single beam solid state laser, which is characterized in that the laser includes:
First kind plano-concave reflecting mirror, the first polarizer (7), first kind flat output mirror, the second class flat output mirror, in which:
The first kind plano-concave reflecting mirror, the first polarizer (7), first kind flat output mirror form the first resonant cavity;
The first kind plano-concave reflecting mirror, the second class flat output mirror form the second resonant cavity;
First polarizer (7) is located between first kind plano-concave reflecting mirror and the second class flat output mirror, the optical center of three Point-blank;
There are Q switched element (12) between the first polarizer (7) and the second class flat output mirror, the optical center of three is in straight line On;
There is stimulated radiation light source between the first kind plano-concave reflecting mirror (1) and the first polarizer (7), it is unpolarized for generating Stimulated radiation fluorescence;
The unpolarized stimulated radiation fluorescence is decomposed into s- polarization excited fluorescence through the first polarizer (7) and p- polarization is excited spoke Penetrate fluorescence;
S- polarization stimulated radiation fluorescence output s- after the amplification of the first internal oscillation polarizes continuous laser;
The p- polarization stimulated radiation fluorescence is modulated through Q switched element (12), and output p- is inclined after oscillation amplification in the second resonant cavity Shake pulse laser;
The s- polarization continuous laser overlaps on same propagation direction with p- polarized pulses laser.
2. laser according to claim 1, which is characterized in that
The radius of curvature of the first kind plano-concave reflecting mirror is 1000nm, including the first plano-concave reflecting mirror (1), the second plano-concave reflect Mirror (2), third plano-concave reflecting mirror (3), in which:
The plane of the first plano-concave reflecting mirror (1) is coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength, concave surface It is coated with the high-reflecting film of 0 ° of incidence 946nm wavelength and the double-colored anti-reflection film of 1064nm, 1319nm wavelength;
Plated film, concave surface are not coated with the high-reflecting film of 0 ° of incident 1064nm wavelength to the plane of the second plano-concave reflecting mirror (2);
The plane of the third plano-concave reflecting mirror (3) is coated with the anti-reflection film of 0 ° of incidence 1064nm wavelength, and concave surface is coated with 0 ° of incidence The high-reflecting film of 1319nm wavelength and the anti-reflection film of 1064nm wavelength.
3. laser according to claim 2, it is characterised in that:
The first kind flat output mirror includes the first outgoing mirror (8), the second outgoing mirror (9), third outgoing mirror (10), in which:
Plane of first outgoing mirror (8) close to the first polarizer (7) is coated with the part reflectance coating of 0 ° of incidence 946nm wavelength With the double-colored anti-reflection film of 1064nm, 1319nm wavelength, another plane is coated with 0 ° of incidence 946nm, 1064nm, 1319nm wavelength Three color anti-reflection films;
Plane of second outgoing mirror (9) close to the first polarizer (7) is coated with the part reflection of 0 ° of incidence 1064nm wavelength Film, another plane are coated with the anti-reflection film of 0 ° of incidence 1064nm wavelength;
Plane of the third outgoing mirror (10) close to the first polarizer (7) is coated with the part reflection of 0 ° of incidence 1319nm wavelength The anti-reflection film of film and 1064nm wavelength, another plane are coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength.
4. laser according to claim 2, it is characterised in that:
The second class flat output mirror includes the 4th outgoing mirror (13), the 5th outgoing mirror (14), the 6th outgoing mirror (15), In:
4th outgoing mirror (13) close to the first polarizer (7) plane be coated with the 0 ° of incidence part 946nm reflectance coating with The double-colored anti-reflection film of 1064nm, 1319nm wavelength, another plane are coated with the three of 0 ° of incidence 946nm, 1064nm, 1319nm wavelength Color anti-reflection film;
Plane of 5th outgoing mirror (14) close to the first polarizer (7) is coated with the 0 ° of incidence part 1064nm reflectance coating, Another plane is coated with the anti-reflection film of 0 ° of incident 1064nm wavelength;
6th outgoing mirror (15) close to the first polarizer (7) plane be coated with the 0 ° of incidence part 1319nm reflectance coating with The anti-reflection film of 1064nm wavelength, another plane are coated with the double-colored anti-reflection film of 0 ° of incidence 1064nm, 1319nm wavelength.
5. laser according to claim 1, it is characterised in that:
The first kind plano-concave reflecting mirror is located on the first motorized precision translation stage (4), and first kind flat output mirror is located in the second electricity On dynamic translation stage (11), the second class flat output mirror is located on third motorized precision translation stage (16);
The first kind plano-concave reflecting mirror, first kind flat output mirror, the second class flat output mirror position can pass through it The motorized precision translation stage at place is adjusted along the same rectilinear direction perpendicular to respective optical path.
6. laser according to claim 1, it is characterised in that:
The Q switched element is acousto-optic crsytal (12).
7. laser according to claim 1, it is characterised in that:
The s- polarization continuous laser is successively inclined through the second polarizer (17), third after the output of first kind flat output mirror It shakes element (18), the reflection of the 4th polarizer (19), exists with the p- polarized pulses laser through the 4th polarizer (19) total transmissivity Same propagation overlaps on direction.
8. laser according to claim 7, it is characterised in that:
The s- polarization continuous laser is in second polarizer (17), third polarizer (18), the 4th polarizer (19) incidence angle on is 56.7 °;
Incidence angle of the p- polarized pulses laser on the 4th polarizer (19) is 56.7 °.
9. laser according to claim 1, it is characterised in that:
The stimulated radiation light source includes Nd:YAG crystal bar (5), semiconductor laser side pump module (6), in which:
The Nd:YAG crystal bar (5) is laser gain medium, in the semiconductor laser for absorbing semiconductor laser side pump module (6) After energy, while generating the unpolarized stimulated radiation fluorescence of tri- kinds of wavelength of 946nm, 1064nm, 1319nm.
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