CN211348010U - Adjusting device based on monochromatic X-ray single crystal stress measurement - Google Patents
Adjusting device based on monochromatic X-ray single crystal stress measurement Download PDFInfo
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- CN211348010U CN211348010U CN201921556262.0U CN201921556262U CN211348010U CN 211348010 U CN211348010 U CN 211348010U CN 201921556262 U CN201921556262 U CN 201921556262U CN 211348010 U CN211348010 U CN 211348010U
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Abstract
The utility model discloses an adjusting device based on monochromatic X-ray single crystal stress measurement, adjusting device this, the tilting table including the supporting part that is used for supporting and the tilting part that tilts and connects the supporting part, the tilting part tilts around the concentric point, the liftable elevating platform is established at the horizontal top surface of the tilting part, the sample platform is rotatably established on the elevating platform, its rotation axis passes through the concentric point; the X-ray generator generates monochromatic X-rays to irradiate the single crystal sample, the X-ray generator performs circular motion along a circle with the concentric point as a rotation center, an irradiation end of the X-ray generator always points to the concentric point, the detector receives diffraction signals from the single crystal sample, and the detector performs circular motion along the circle with the concentric point as a circle center.
Description
Technical Field
The utility model belongs to the technical field of the single crystal measurement, especially an adjusting device based on monochromatic X ray single crystal stress measurement.
Background
The residual stress is an important influence factor of the service performance of the single crystal blade. Quantification of residual stress is of great importance to blade machining processes and service life estimation. At present, monochromatic X-rays are used for measuring residual stress, or the monochromatic X-rays are used for forming a diffraction ring on a detector at a certain angle aiming at a polycrystalline sample, and a line detector can easily capture a diffraction peak, so that the change of the interplanar spacing is calculated according to the diffraction angle. Unlike a polycrystalline sample, a diffraction signal of a single crystal sample does not form a diffraction ring, and therefore how to spatially capture the diffraction signal becomes an urgent problem to be solved.
In a conventional stress meter, an X-ray generator and a detector can only swing in a plane, the captured area is limited, the X-ray generator and the detector are only suitable for polycrystalline samples, the X-ray generator and the detector are not suitable for large-grain samples or single-crystal samples, and diffraction signals cannot be acquired in the swing range. Therefore, the means for large grain samples or single crystal samples is to rotate the sample so that the diffraction signal can be projected onto the detector. The swing of the sample is the swing of a three-dimensional space, and comprises the rotation around a shaft and the tilting in a plane, so that the deviation of an observation point is easily caused in the motion process, and the uncertainty is brought to the measurement of the corresponding force. Therefore, the sample needs to be placed at a position with a constant observation point, namely the concentric height of the sample table and the detector during the movement. In addition, the measurement of the concentric height is often directed at one position, and the sample stage needs to be readjusted when the sample is moved to another position, and if the heights of a plurality of positions can be recorded at the same time, the automatic adjustment of the concentric height can be realized. The measuring steps are simplified, and the efficiency is improved.
In light of the deficiencies of the prior art and the technical requirements set forth, we aimed to provide an adjustment device based on monochromatic X-ray single crystal stress measurement. The device can realize accurate adjustment and automatic adjustment of the center height in the single crystal stress measurement process. Therefore, the observation point is ensured not to change position in the measurement process, and the measurement result is not influenced.
The above information disclosed in this background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known in this country to a person of ordinary skill in the art.
SUMMERY OF THE UTILITY MODEL
To the problem that exists among the prior art, the utility model provides an adjusting device based on monochromatic X ray single crystal stress measurement realizes the accurate regulation of high concentric in the single crystal stress measurement process, realizes changeing sample in-process observation point unchangeably tilting, realizes that the outline line is gathered and the selection point is measured, simplifies the detection demand, only need low laboratory energy level monochromatic X ray alright conveniently obtain the single crystal stress.
The utility model aims to realize the technical proposal that an adjusting device based on monochromatic X-ray single crystal stress measurement comprises,
a tilting table including a support portion for supporting and a tilting portion tilting-connected to the support portion, the tilting portion tilting around a concentric point,
a lifting platform which can be lifted and is arranged on the horizontal top surface of the tilting part,
the sample stage is rotatably arranged on the lifting stage, and the rotating shaft of the sample stage passes through the concentric point;
an X-ray generator that generates monochromatic X-rays to irradiate the single crystal sample, the X-ray generator performing a circular motion along a circle having the concentric point as a rotation center, an irradiation end of the X-ray generator always pointing to the concentric point,
a detector receiving a diffraction signal from the single crystal sample, the detector performing a circular motion along a circle centered at the concentric point.
In the adjusting device, the adjusting device also comprises,
an optical lens disposed directly above and perpendicular to an upper surface of the single crystal sample on which an observation point is marked,
and the image acquisition unit acquires an observation point image from the optical lens, wherein the optical lens is imaged by adjusting the heights of the tilting table and the lifting table for multiple times to observe the observation point mark until the observation point acquired by the image acquisition unit is kept unchanged.
In the adjusting device, the optical lens includes a long depth-of-field optical lens.
In the adjusting device, the adjusting device also comprises,
a laser ranging unit arranged right above the single crystal sample, the laser ranging unit measuring the height of each point on the surface of the single crystal sample,
and the image processing unit receives the heights of all points on the surface of the single crystal sample to generate a contour line, and a preset observation point on the contour line is adjusted to a concentric point.
In the adjusting device, the laser ranging unit comprises a two-dimensional laser range finder.
In the adjusting device, the adjusting device further comprises a control unit which is electrically connected with the tilting table, the lifting table, the sample table, the X-ray generator and the detector.
In the regulating device, the control unit comprises a digital signal processor, an Application Specific Integrated Circuit (ASIC) or a Field Programmable Gate Array (FPGA).
In the regulating device, the control unit comprises a storage unit and a communication device, wherein the storage unit comprises one or more of a read only memory ROM, a random access memory RAM, a flash memory or an electrically erasable programmable read only memory EEPROM.
In the adjusting device, the communication device includes a wireless local area network communication device and a wired communication device
In the adjusting device, the X-ray generator is rotatably arranged on a first circumferential track taking the concentric point as a rotation center through a first driving unit, and the detector is rotatably arranged on a second circumferential track taking the concentric point as a rotation center through a second driving unit.
Compared with the prior art, the utility model has the advantages of it is following:
the utility model overcomes the drawback that current single crystal stress detected provides a more high-efficient, the more cheap mode of cost, is fit for big single crystal sample assembly line in batches and detects, realizes the accurate regulation of high concentricity among the single crystal stress measurement process, realizes changeing sample in-process observation point unchangeably verting, realizes the outline line and gathers and select the point to measure, simplifies the detection demand, can conveniently detect single crystal stress in batches and need not the X ray and the neutron diffraction synchronization of high energy level.
Drawings
Various other advantages and benefits of the present invention will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be obtained from these drawings without inventive effort. Also, like parts are designated by like reference numerals throughout the drawings.
In the drawings:
fig. 1 is a schematic diagram of an adjustment device based on monochromatic X-ray single crystal stress measurement according to an embodiment of the present invention.
The invention is further explained below with reference to the drawings and examples.
Detailed Description
Specific embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While specific embodiments of the invention are shown in the drawings, it will be understood that the invention may be embodied in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
It should be noted that certain terms are used throughout the description and claims to refer to particular components. As one skilled in the art will appreciate, various names may be used to refer to a component. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. The following description is of the preferred embodiment of the invention, and is made for the purpose of illustrating the general principles of the invention and not for the purpose of limiting the invention. The protection scope of the present invention is subject to the limitations defined by the appended claims.
For the purpose of facilitating understanding of the embodiments of the present invention, the following description will be given by way of example with reference to the accompanying drawings, and the drawings do not limit the embodiments of the present invention.
For better understanding, as shown in fig. 1, the adjustment device based on monochromatic X-ray single crystal stress measurement comprises,
a tilt table 1 including a support portion 2 for support and a tilt portion 3 tilt-connected to the support portion 2, the tilt portion 3 tilting about a concentric point,
a lifting platform 4, the lifting platform 4 capable of lifting is arranged on the horizontal top surface of the tilting part 3,
a sample stage 5 rotatably provided on the elevating stage 4, a rotation axis of which passes through the concentric point;
an X-ray generator 6 which generates monochromatic X-rays to irradiate the single crystal sample, the X-ray generator 6 performing a circular motion along a circle having the concentric point as a rotation center, an irradiation end of the X-ray generator 6 always pointing to the concentric point,
a detector 7 receiving a diffraction signal from the single crystal sample, the detector 7 performing a circular motion along a circle centered on the concentric point.
In a preferred embodiment of the adjusting device, the adjusting device further comprises,
an optical lens disposed directly above and perpendicular to an upper surface of the single crystal sample on which an observation point is marked,
and an image acquisition unit which acquires an observation point image from the optical lens, wherein the optical lens is imaged by adjusting the heights of the tilting table 1 and the lifting table 4 for a plurality of times to observe the observation point mark until the observation point acquired by the image acquisition unit is kept unchanged.
In a preferred embodiment of the adjusting device, the optical lens comprises a long depth-of-field optical lens.
In a preferred embodiment of the adjusting device, the adjusting device further comprises,
a laser ranging unit arranged right above the single crystal sample, the laser ranging unit measuring the height of each point on the surface of the single crystal sample,
and the image processing unit receives the heights of all points on the surface of the single crystal sample to generate a contour line, and a preset observation point on the contour line is adjusted to a concentric point.
In a preferred embodiment of the adjusting device, the laser ranging unit comprises a two-dimensional laser range finder.
In a preferred embodiment of the adjusting device, the adjusting device further comprises a control unit electrically connected with the tilting table 1, the lifting table 4, the sample table 5, the X-ray generator 6 and the detector 7.
In a preferred embodiment of the regulating device, the control unit comprises a digital signal processor, an application specific integrated circuit ASIC or a field programmable gate array FPGA.
In a preferred embodiment of the regulating device, the control unit comprises a memory unit and a wireless communication device, the memory unit comprising one or more of a read only memory ROM, a random access memory RAM, a flash memory or an electrically erasable programmable read only memory EEPROM.
In a preferred embodiment of the adjusting apparatus, the wireless communication device at least includes a wireless local area network communication device and/or a mobile communication network device, the wireless local area network communication device includes a bluetooth module, a ZigBee module and/or a Wi-Fi module, and the mobile communication network device includes a 2G wireless communication chip, a 3G wireless communication chip, a 4G wireless communication chip and/or a 5G wireless communication chip.
In a preferred embodiment of the adjustment device, the X-ray generator 6 is rotatably mounted on a first circumferential track with the concentric point as a rotation center via a first drive unit, and the detector 7 is rotatably mounted on a second circumferential track with the concentric point as a rotation center via a second drive unit.
In the preferred embodiment of the adjusting device, the laser ranging unit comprises a two-dimensional laser range finder, the adjusting device further comprises a control unit, the control unit is connected with the tilting table 1, the lifting table 4, the sample table 5, the X-ray generator 6, the detector 7, the laser ranging unit and the image processing unit, the control unit sends a ranging instruction to the laser ranging unit to measure the heights of all points on the surface of the single crystal sample, the image processing unit receives the heights of all points on the surface of the single crystal sample to generate a contour line, the control unit sends an adjusting instruction to the tilting table 1, the lifting table 4 and the sample table 5 to enable a preset observation point on the contour line to be adjusted to a concentric point, and the rotation centers of the X-ray generator 6 and the detector 7 are adjusted to the concentric point.
For further understanding of the present invention, in one embodiment, the concentric height adjustment method includes two concentric height adjustments, one for the tilt stage 1-sample concentric height adjustment and the other for the sample-X-ray-detector 7 concentric height adjustment. In a preferred embodiment, the concentric height refers to the position where the sample is tilted and rotated without changing the height of the observation point, and is the position where the sample rotation axis and the tilt axis pass through. Meanwhile, the position where the irradiation point is not changed when the incident angle of the X-ray is changed is also the rotation center of the detector 7 when the detector rotates. The concentric position is determined by the instrument itself. In the actual operation process, two concentric heights, namely the tilting table 1-sample concentric height and the sample-X-ray-detector 7 concentric height, need to be overlapped.
In a preferred embodiment, the observation point is the intersection point of the rotation axis and the tilting axis on the surface of the sample when the sample is adjusted to the concentric height of the tilting platform 1-sample.
In a preferred embodiment, the adjustment of the concentricity height of the sample-X-ray-detector 7 may rely on laser ranging or low depth of field optical lenses.
In a preferred embodiment, during adjustment of the tilt-table 1-sample concentric height, the tilt-table 1 has a center of rotation, and the height of the sample is adjustable by means of a fixture or a lifting table 4 mounted on the tilt-table 1, to which height the sample can be adjusted according to the detailed dimensions using a ruler if the tilt-table 1 is designed to give the concentric height position. And the sample and the tilting platform 1 are integrally moved to the concentric height of the sample-X-ray-detector 7.
In a preferred embodiment, during the adjustment of the tilt stage 1-sample height, a long depth-of-field optical lens may be used, which is required to cooperate with image transmission, to place the lens directly above the sample, perpendicular to the sample surface, while the sample surface has been adjusted to be horizontal. Marking the observation point, and adjusting the overall height of the tilting platform 1 and the sample to ensure that the optical lens can image clearly and the mark of the observation point can be observed. At the moment, the sample is repeatedly tilted and is matched with the height adjustment of the lifting platform 4 until the change of the mark of the observation point cannot be observed in the tilting process, and the concentric height adjustment of the tilting platform 1-sample is completed. And the sample and the tilting platform 1 are integrally moved to the concentric height of the sample-X-ray-detector 7.
In a preferred embodiment, where a single lens is used, it is necessary to position the lens directly above the sample, perpendicular to the sample surface, when the sample surface has been adjusted to be horizontal. If the low depth-of-field optical lens is used, the height of the sample is directly raised to a position where the optical lens can clearly collect clear sample images, and at the moment, the concentric height adjustment of the sample-X-ray-detector 7 is realized. And then performing a tilting test, and adjusting the lifting platform 4 until the mark position of the observation point is unchanged.
In a preferred embodiment, after the sample is adjusted to the concentric height of the tilting table 1-sample and the concentric height of the sample-X-ray-detector 7, the height of each point on the surface of the sample can be measured by means of the translation table below the sample in cooperation with the laser distance of the point, contour line mapping is completed, and point selection adjustment of the concentric height and measurement on a contour line are realized in cooperation with the control of the sample table 5.
In a preferred embodiment, laser profile acquisition may use two-dimensional laser ranging.
In the embodiment, the sample is placed on the fixture, the fixture is adjusted to make the surface of the sample to be measured horizontal, the observation point is marked with a marker pen, and the marker is moved to the rotation center, and at this time, if the sample stage 5 is rotated, the marker can be found and the position is not changed. Then, the tilt table 1-sample concentric height is adjusted, the tilt table 1 and the sample are adjusted in height to allow the mark to be clearly observed in the optical lens, the sample is tilted to observe the position of the mark captured by the optical lens, and if the mark moves to the side where the mark is raised during tilting, the mark is lower than the concentric height, and if the mark moves to the opposite side, the mark is farther from the concentric height. Correspondingly, the height of the sample is adjusted through the lifting platform 4 until the position of the mark is unchanged in the tilting process, and at the moment, the sample observation point is positioned on the concentric height of the tilting platform 1-the sample. When the concentric height of the sample-X-ray-detector 7 is adjusted by using an optical lens, the entire tilt table 1 and the sample are directly adjusted to a position where the observation point mark can be clearly seen. Due to the use of low depth of field optical lenses, it can be known that the sample has reached the concentric height of the sample-X-ray-detector 7. If laser ranging is used, the tilt table 1 and the entire sample are adjusted to a concentric height by directly reading the height value. When the point laser source is used, the displacement table is used for displacing the sample, so that the height values of all points on the surface to be measured can be obtained, and then the concentric heights are automatically adjusted to respectively measure the stress according to the selected observation points.
In a preferred embodiment, the long-depth-of-field optical lens is placed right above the single crystal sample and is vertical to the surface of the sample adjusted to be horizontal, an observation point is marked, the heights of the tilting platform 1 and the lifting platform 4 are adjusted to enable the optical lens to image clearly, and the single crystal sample on the sample platform 5 is determined to be positioned on the concentric point by repeatedly tilting and adjusting the height of the lifting platform 4 until the change of the observation point is not observed in the tilting process.
In a preferred embodiment, during the adjustment of the concentric height of the tilt table 1 and the single crystal sample thereon, the height of the single crystal sample is adjusted by the fixture or the lift table 4 on the tilt table 1, the single crystal sample is adjusted to the concentric height position based on the scale, and then the sample and the tilt table 1 are integrally moved to the concentric point of the single crystal sample, the X-ray generator 6 and the detector 7.
In a preferred embodiment, a single low-depth-of-field optical lens is placed right above the single crystal sample and is vertical to the sample surface which is adjusted to be horizontal, the height of the single crystal sample is directly raised to the position where the low-depth-of-field optical lens clearly collects a clear sample image so as to reach the concentric point of the single crystal sample, the X-ray generator 6 and the detector 7, and then the tilting test and the adjustment of the lifting platform 4 are carried out until the observation point position of the single crystal sample is unchanged.
In a preferred embodiment, after adjusting the single crystal sample to the concentric high position, the height of each point on the surface of the sample is measured by point laser ranging to generate a contour line, and the adjustment of the predetermined observation point on the contour line to the concentric point is realized based on the control of the sample stage 5.
Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments and application fields, and the above-described embodiments are illustrative, instructive, and not restrictive. Those skilled in the art, having the benefit of this disclosure, may effect numerous modifications thereto without departing from the scope of the invention as defined by the appended claims.
Claims (10)
1. An adjusting device based on monochromatic X-ray single crystal stress measurement, which comprises,
a tilting table including a support portion for supporting and a tilting portion tilting-connected to the support portion, the tilting portion tilting around a concentric point,
a lifting platform which can be lifted and is arranged on the horizontal top surface of the tilting part,
the sample stage is rotatably arranged on the lifting stage, and the rotating shaft of the sample stage passes through the concentric point;
an X-ray generator that generates monochromatic X-rays to irradiate the single crystal sample, the X-ray generator performing a circular motion along a circle having the concentric point as a rotation center, an irradiation end of the X-ray generator always pointing to the concentric point,
a detector receiving a diffraction signal from the single crystal sample, the detector performing a circular motion along a circle centered at the concentric point.
2. The adjustment device of claim 1, wherein the adjustment device further comprises,
an optical lens disposed directly above and perpendicular to an upper surface of the single crystal sample on which an observation point is marked,
and the image acquisition unit acquires an observation point image from the optical lens, wherein the optical lens is imaged by adjusting the heights of the tilting table and the lifting table for multiple times to observe the observation point mark until the observation point acquired by the image acquisition unit is kept unchanged.
3. The adjustment device of claim 2, wherein the optical lens comprises a long depth of field optical lens.
4. The adjustment device of claim 1, wherein the adjustment device further comprises,
a laser ranging unit arranged right above the single crystal sample, the laser ranging unit measuring the height of each point on the surface of the single crystal sample,
and the image processing unit receives the heights of all points on the surface of the single crystal sample to generate a contour line, and a preset observation point on the contour line is adjusted to a concentric point.
5. The adjustment device of claim 4, wherein the laser ranging unit comprises a two-dimensional laser range finder.
6. The adjustment device of claim 1, wherein the adjustment device further comprises a control unit electrically connecting the tilt table, the lift table, the sample table, the X-ray generator, and the detector.
7. The adjustment device of claim 6, wherein the control unit comprises a digital signal processor, an Application Specific Integrated Circuit (ASIC) or a Field Programmable Gate Array (FPGA).
8. The adjustment device according to claim 6, wherein the control unit comprises a memory unit and a communication device, the memory unit comprising one or more of a read only memory ROM, a random access memory RAM, a flash memory or an electrically erasable programmable read only memory EEPROM.
9. The adjustment device of claim 8, wherein the communication device comprises wireless communication and wired communication.
10. The adjusting apparatus according to claim 1, wherein the X-ray generator is rotatably provided on a first circumferential track centered on the concentric point via a first driving unit, and the detector is rotatably provided on a second circumferential track centered on the concentric point via a second driving unit.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024082185A1 (en) * | 2022-10-19 | 2024-04-25 | 中车工业研究院有限公司 | Measurement device for package stress of chip, and measurement method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024082185A1 (en) * | 2022-10-19 | 2024-04-25 | 中车工业研究院有限公司 | Measurement device for package stress of chip, and measurement method |
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