CN211263958U

CN211263958U - High-sensitivity transparent object pulse texture and surface defect observation device

Info

Publication number: CN211263958U
Application number: CN201922170329.3U
Authority: CN
Inventors: 邵幼平; 童雷
Original assignee: Wave Crest Shanghai Co ltd
Current assignee: Wave Crest Shanghai Co ltd
Priority date: 2019-12-06
Filing date: 2019-12-06
Publication date: 2020-08-14
Anticipated expiration: 2029-12-06

Abstract

The utility model discloses a high sensitivity transparent object pulse theory and surface defect observation device, including camera, pointolite, chenille lens, spectroscope, speculum, light path correction unit, moving platform and transmission unit, the light that the pointolite sent projects on the spectroscope after chenille lens focus, projects on the speculum after the spectroscope beam split, and the light after the speculum reflection is projected in the light path correction unit, and the light is corrected through the light path correction unit and is exported parallel light and throw on moving platform's transparent object and through transparent object projection on the transmission unit; the imaging return light path correction unit on the transmission unit is corrected by the light path correction unit, and then the imaging return light path correction unit is conveyed into the camera through the reflecting mirror and the spectroscope and is shot by the camera. The utility model discloses a coaxial mode comes to transparent object pulse reason and defect observation, has the advantage that sensitivity is high.

Description

High-sensitivity transparent object pulse texture and surface defect observation device

Technical Field

The utility model relates to an object defect observation device technical field, in particular to high sensitivity transparent object pulse theory and surface defect observation device.

Background

The existing device for observing the defects of the transparent object basically adopts a common microscope to observe the surface defects of the transparent object, has low observation sensitivity and cannot observe the texture of the transparent object in particular.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that the not enough and provide a high sensitivity transparent object reason and surface defect observation device to current transparent object defect observation device exists.

The utility model discloses the technical problem that will solve can realize through following technical scheme:

the high-sensitivity transparent object pulse texture and surface defect observation device comprises a camera, a point light source, a Fresnel lens, a spectroscope, a reflector, a light path correction unit, a mobile platform and a transmission unit, wherein light rays emitted by the point light source are focused by the Fresnel lens and then projected onto the spectroscope, split by the spectroscope and projected onto the reflector, the light rays reflected by the reflector are projected into the light path correction unit, and output parallel light after being corrected by the light path correction unit is projected onto a transparent object of the mobile platform and projected onto the transmission unit through the transparent object; the imaging return light path correction unit on the transmission unit is corrected by the light path correction unit, and then the imaging return light path correction unit is conveyed into the camera through the reflecting mirror and the spectroscope and is shot by the camera.

In a preferred embodiment of the present invention, the optical axis of the camera is coaxial with the optical axes of the spectroscope and the reflector; and the optical axis of the optical path correcting unit and the optical axis of the transmission unit are coaxial.

In a preferred embodiment of the present invention, a zoom lens is provided on the camera.

In a preferred embodiment of the present invention, the camera, the point light source, the fresnel lens, the beam splitter, the reflecting mirror, the optical path correcting unit, the moving platform, and the transmission unit are all mounted on a frame.

Owing to adopted above technical scheme, the utility model discloses a coaxial mode comes to have the high advantage of sensitivity to transparent object pulse theory and defect observation.

Drawings

Fig. 1 is a schematic view of the optical principle of the high-sensitivity observation device for observing the texture and surface defects of the transparent object of the present invention.

Detailed Description

The invention is further described below with reference to the accompanying drawings and the detailed description.

Referring to fig. 1, the high-sensitivity transparent object texture and surface defect observation device shown in the figure includes a camera 10, a point light source 20, a fresnel lens 30, a spectroscope 40, a reflecting mirror 50, a light path correction unit 60, a moving platform 70 and a transmission unit 80; the camera 10, the point light source 20, the fresnel lens 30, the beam splitter 40, the reflecting mirror 50, the optical path correcting unit 60, the moving platform 70 and the transmission unit 80 are all mounted on a frame.

The camera 10 is provided with a zoom lens 11, and an optical axis of the camera 10 is coaxial with optical axes of the spectroscope 40 and the reflecting mirror 50. The optical axes of the optical path correcting unit 60 and the transmission unit 80 are coaxial

Light emitted by the point light source 20 is focused by the Fresnel lens 30 and then projected onto the beam splitter 40, is split by the beam splitter 40 and then projected onto the reflector 50, is projected into the light path correction unit 60 after being reflected by the reflector 50, is corrected by the light path correction unit 60 and then outputs parallel light which is projected onto the transparent object 90 of the mobile platform 70 and is projected onto the transmission unit 80 through the transparent object 90; the image formed on the transmission unit 80 is returned to the optical path correction unit 60, corrected by the optical path correction unit 60, and then sent to the camera 10 via the mirror 50 and the beam splitter 40, and captured by the camera 10.

Light from the light source 20 is concentrated in the optic 30. A point source of light emerges from the pinhole device 33 at the location where the light is concentrated. While the light beam emitted from the point light source is reflected and collimated in the optical unit 60 in the light beam (white LED of a standard color) splitter 40, the parallel light is vertically irradiated on the sample placed on the stage 70, and the reflected light (the reflected light is also parallel light) generated by the sample concentrates the light beam at the focal position. The image of the sample generated by the lens 11 is combined and imaged on the sensing surface of the camera 10.

Further, a mirror 80 with high surface accuracy is provided below the stage 70, and a sample 90 is placed between the optical unit 60 and the mirror 80, so that when parallel light is irradiated onto a sample surface where internal defects (texture) and surface defects may be observed and no abnormality may occur, the surface is a mirror surface, and the reflected parallel light is reflected at a predetermined reflection angle. In the case of a sample in which an abnormality occurs, the sample is not flat, and the reflection direction of the parallel light is changed by the inclination of the concave and convex portions, and the sample goes out of the predetermined visual field range or is condensed more. Such a formed shadow can be observed. Foreign matters, cutting marks, watermarks and the like generated on the surface of the material are concave-convex objects as shown in the figure. This optical system can detect such asperities. The image is seen much more clearly than the anomalies that actually occur.

Claims

1. The device is characterized by comprising a camera, a point light source, a Fresnel lens, a spectroscope, a reflector, a light path correction unit, a mobile platform and a transmission unit, wherein light rays emitted by the point light source are focused by the Fresnel lens and then projected onto the spectroscope, split by the spectroscope and projected onto the reflector, the light rays reflected by the reflector are projected into the light path correction unit, and parallel light is output after being corrected by the light path correction unit and projected onto a transparent object of the mobile platform and projected onto the transmission unit through the transparent object; the imaging return light path correction unit on the transmission unit is corrected by the light path correction unit, and then the imaging return light path correction unit is conveyed into the camera through the reflecting mirror and the spectroscope and is shot by the camera.

2. The high-sensitivity transparent object texture and surface defect observation device according to claim 1, wherein the optical axis of the camera is coaxial with the optical axes of the spectroscope and the reflector; and the optical axis of the optical path correcting unit and the optical axis of the transmission unit are coaxial.

3. The high-sensitivity transparent object texture and surface defect observation apparatus according to claim 1, wherein a zoom lens is provided on the camera.

4. The high-sensitivity transparent object texture and surface defect observation device of claim 1, wherein the camera, the point light source, the fresnel lens, the beam splitter, the mirror, the optical path correction unit, the moving platform and the transmission unit are all mounted on a frame.