JPH076775B2 - 3D shape data acquisition device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a three-dimensional shape measuring apparatus for optically measuring a three-dimensional shape of an object to be measured in a non-contact manner.

[Prior Art] A non-contact type shape measuring device is known, which irradiates a measuring object with measuring light and captures the measuring light reflected on the surface of the measuring object to measure the shape of the measuring object. Its application is expected in various fields.

FIG. 7 shows the principle of the shape measuring apparatus that optically measures the shape of the measured object described above. Note that, here, for simplicity, the two-dimensional shape measurement will be described.

In FIG. 7, the measurement light 100 emitted from the measurement light emitting means P such as a laser light source at a predetermined angle θa with respect to the X axis.
Is scattered at the measurement point R of the object to be measured Q, and the reflected measurement light 110 at a specific angle of the scattered light is at the measurement origin 0 at the angle θ.
Reach at b.

Therefore, as can be understood from the geometrical composition shown in FIG. 7, the coordinates of the measurement point R are the distance L between the points O and P, and the distance L and the irradiation of the measurement light. It is possible to analyze using the angle θa and the incident angle θb of the reflected measurement light.

Then, in order to obtain the incident angle θb of the reflected measurement light 110, by providing an image sensor such as a CCD in which light receiving elements are arranged in a matrix on the side opposite to the measured object O with respect to the measurement origin O, the reflection of the reflected light The angle θb can be obtained from the light receiving position S of the measurement light 110.

That is, if the distance from the center C of the image sensor 10 to the light receiving point S is x, and the distance between the center C of the image sensor 10 and the measurement origin O is y, then the trigonometric function is used from these x and y to calculate The angle θb can be calculated, and the coordinates of the measurement point R can be calculated.

In the actual shape measuring device, a light focusing lens is provided at the position of the measurement origin O, and the reflected measuring light 110 is reflected by the light focusing lens.
Are focused and projected onto the image sensor 10, but in this case as well, the coordinates of the measurement point R can be obtained from the light receiving position S of the image sensor 10 in the same manner as described above.

Here, FIG. 7 shows the principle of measuring the two-dimensional shape of the measured object Q, but this is the same in the three-dimensional shape measurement. That is, it is possible to measure the three-dimensional shape of the measured object Q by deflecting and scanning the measuring light 100 in the Z direction or by using slit light having a spread in the Z direction.

In the conventional shape measuring apparatus using the above principle, since the image pickup device 10 is composed of, for example, a CCD, it is necessary to scan all the light receiving devices in order to obtain the position of the light receiving point S. There is a problem in that the shape measurement cannot be performed at high speed depending on the scanning time, and for example, the shape measurement of a moving object cannot be performed.

Therefore, Japanese Laid-Open Patent Publication No. 62-228106 proposes a shape measuring device capable of measuring the shape of an object to be measured at high speed.

FIG. 6 shows the concept of the configuration of the shape measuring apparatus.

In FIG. 6, the irradiation angle (deflection angle) θ of the measurement light (slit light) 100 is detected by the θ signal generator 12, and the θ signal generator 12 outputs the θ signal.

On the other hand, the reflected measurement light (reflected slit light) 110 reflected by the object to be measured Q is incident on the imaging device 14 and
It reaches the two-dimensional array type photo sensor 16 provided in.

The two-dimensional array type photo sensor 16 is one in which independent photo sensors are arranged in a two-dimensional matrix, and an independent trigger signal is output from each photo sensor.

Then, each of the trigger signals is sent corresponding to each storage element that constitutes the θ information storage element group 18,
In each storage element, the θ information is stored when the trigger signal is input.

Therefore, the measurement light is emitted while being deflected and scanned continuously without cutting and irradiating at each irradiation angle, and at the same time, the irradiation angle θ is made to correspond to the light receiving point S and the three-dimensional shape information of the measured object Q is obtained. Can be captured.

Then, the θ information stored in each storage element of the θ information storage element group 18 in this way is read out and the address of each storage element and its θ are read in the three-dimensional shape analysis circuit.
From the information and the information, the coordinates (X, Y, Z) of each point of the measurement line R on the measured object Q can be obtained.

In addition, as an apparatus capable of performing high-speed three-dimensional shape measurement without performing light cutting, for example, the apparatuses proposed in Japanese Patent Application Nos. 2-46946 and 2-46947 can be cited.

[Problems to be Solved by the Invention] However, when measuring the shape of the measured object in this way, the measured object is accurately positioned within the measurable range determined by the measurement light irradiation region and the reflected measurement light reception region. However, the conventional shape measuring apparatus described above has a problem that it is not possible to easily position the measured object to be measured or the shape measuring apparatus itself.

That is, in the conventional art, the determination as to whether or not the measured object is present in the measurable range is performed by visual observation, and therefore, it is not possible to perform mobile and rapid shape measurement.

In addition, such complicated positioning of each member related to shape measurement causes a time delay until the proper shape data is captured, and thus, unnecessary measurement light related to positioning other than the original shape measurement is obtained. Irradiation occurs, the life of the light source of the measurement light is shortened, and in some cases, the adverse effect on the measured object due to irradiation of the measured light for a long time is feared.

Therefore, there has been a demand for an apparatus capable of confirming a measurement target before performing shape measurement.

The present invention has been made in view of the above conventional problems,
An object thereof is to provide a three-dimensional shape data capturing device capable of displaying a measurement object as a grayscale image and confirming the measurement object before and during shape measurement.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a slit light irradiating means for irradiating a measuring slit light while deflecting and scanning it,
Deflection angle information output means for outputting deflection angle information of the slit light, and a slit light extraction filter for transmitting only the slit light reflected on the surface of the object to be measured are transmitted through the slit light extraction filter. Shape information taking-in means for taking in the three-dimensional shape information corresponding to the deflection angle information at the light receiving position, and light coming through the same optical path as the slit light reflected on the surface of the object. Among them, a slit light exclusion filter that transmits a light component other than the slit light is included, the measurement target is imaged, and measurement target imaging means for outputting the grayscale image information of the measurement target, and the grayscale image information are displayed. And a measurement target display means.

Further, the present invention is characterized in that at least the slit light irradiation means, the shape information acquisition means, and the measurement target imaging means are incorporated in a portable data acquisition device body.

[Operation] According to the above configuration, the measurement target is processed into a grayscale image by the measurement target imaging unit, and is further displayed as a grayscale image by the measurement target display unit.

Therefore, for example, by always displaying the measurement target,
Before performing the three-dimensional shape measurement, the measurement target is confirmed through the image.

In the present invention, the shape information capturing means is provided with the slit light extraction filter, and the measurement target imaging means is provided with the slit light exclusion filter, so that the measurement target is imaged without being affected by the slit light even during shape measurement. Can be converted.

In addition, by forming the data acquisition device main body as a portable type and further incorporating each configuration, it is possible to move the device main body while checking the display image of the measurement target and match the measurement target with a desired measured object. As a result, it is possible to easily and easily position the device main body for data acquisition.

[Embodiment] A preferred embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the configuration of the three-dimensional shape measuring apparatus of the present invention. Here, the three-dimensional shape data acquisition apparatus 30 according to the present invention uses a transmission cable in the main body for performing three-dimensional shape analysis. It is connected.

First, the means for irradiating the slit light which is the measurement light will be described.

The slit light irradiation means is a laser light source that generates laser light.
32, a slit light forming lens 34 that forms the laser light emitted from the laser light source 32 into slit light, and a polygon mirror 36 that is a deflecting unit that deflects the laser light that has passed through the slit light forming lens 34. Has been done. Here, the polygon mirror 36 is constantly rotated at each constant velocity ω, and the slit light is deflected and scanned within a predetermined deflection angle by this rotation.

Here, in order to detect the initial angle related to the deflection scanning, a photodiode 40 is arranged in the vicinity of the polygon mirror 36, and a photodetection signal from this photodiode 40 is sent to a θ signal generator 42. Has been sent out.

Then, the θ signal generator 42 outputs a θ signal indicating the deflection angle of the slit light 100 based on the transmitted light detection signal S.

The slit light 100 emitted from the three-dimensional shape data capturing device 30 is scattered and reflected on the surface of the object Q to be measured, and the scattered and reflected light is focused by the lens system A and then guided to the lens system B. .

Here, a beam splitter such as a half mirror or a prism is used for the lens system B, as described later. The slit light 112 transmitted through the lens system B is
It is incident on the shape data acquisition unit 50.

The shape data capturing unit 50 includes a filter 52 that transmits only a specific wavelength of the slit light in the incident light 112.
And a photosensor group 54 for receiving the slit light transmitted through the filter 52, and a θ information storage element group provided with storage elements corresponding to the photosensors of the photosensor group 54.
It consists of 56 and.

As described with reference to FIG. 6, the photosensor group 54 uses a two-dimensional array type photosensor, and the light receiving position of the slit light 112 can be determined from the address of the light receiving photosensor.

The θ information storage element group 56 includes the aforementioned θ signal generator 42.
Signal is input to each memory element.
Signals are supplied in parallel, and each memory element stores θ information based on a trigger signal related to light reception of the photosensor.

The three-dimensional shape information of the measured object Q captured by the shape data capturing unit 50 is read out and sent to the three-dimensional shape analysis circuit 60 provided in the main body of the three-dimensional shape measuring apparatus.

Here, as described above, this three-dimensional shape data is
The θ information is made to correspond to the address of each element of the information storage element group 56.

Then, the three-dimensional shape analysis circuit 60 calculates the coordinates of each point on the surface of the measured object Q by using the address n of each storage element and the θ information.

Next, a means for capturing a grayscale image to be measured and displaying the grayscale image will be described.

The optical image of the measurement target determined by the orientation of the device is guided to the measurement target imaging unit 62 via the lens system A and the lens system B.

That is, it is possible to image the measurement target through the same optical path as the slit light 110 for measurement, and the same image as the image of the measurement target formed in the shape data capturing unit 50 is converted into a grayscale image. It is possible to

The measurement target imaging unit 62 includes an optical filter 64 that transmits only light other than the wavelength of the slit light 100 out of the one light 114 branched by the lens system B, and a CCD that receives the light that has passed through the optical filter 64. And the image pickup element 66. That is, the slit light is excluded by the optical filter 64.

The grayscale image information of the measurement target formed by the image sensor 66 is
It is read and sent to the display 68.

The display 68 displays the three-dimensional shape data capturing device 30.
The grayscale image of the measurement target in is displayed.

In the three-dimensional shape data capturing device 30 of the present embodiment, the measurement target is always displayed on the display 68.

Here, in this embodiment, the grayscale image information 200 and the three-dimensional shape information 210 of the measurement target are sent to an image synthesizing unit (not shown), and the measured object is spatially image-processed as a three-dimensional image. However, it is also displaying.

The three-dimensional shape data acquisition device 30 of the present embodiment has the above-mentioned configuration, and the internal structure and appearance of the device will be described below.

FIG. 2 shows the three-dimensional shape data acquisition device 30 of this embodiment.
A cross-sectional view showing the internal configuration of is shown.

Further, FIG. 4 shows a perspective view of the apparatus seen from the front, and FIG. 5 shows a perspective view of the apparatus seen from the rear.

In FIG. 2, on the measurement side front portion 70A of the main body case 70,
The laser light source 32 shown in FIG. 1 is arranged,
A polygon mirror 36 is provided below the front portion 70A.

Then, in order to emit the slit light reflected by the polygon mirror to the outside of the device 30, the main body case front part 70
A curved surface-shaped irradiation unit 71 made of a transparent member is formed below the front surface of A on the measurement side.

A lens system A80 is provided above the front case 70A of the main body case, and the slit light reflected by the object to be measured enters from the lens system A80.

In the cavity 70B formed in the upper part of the main body case 70, the half mirror 74 forming the lens system B is arranged at a predetermined angle with respect to the guided light.

The shape data capturing unit 50 described above is disposed behind the half mirror 74, and further, the measurement target imaging unit 62 is disposed below the half mirror 74.

Here, referring to FIG. 3, a three-dimensional shape data acquisition device
The optical path of light incident on 30 will be described.

The incident light 120 passes through the lens system A80 and is guided to the half mirror 74 forming the lens system B.

The half mirror 74 splits the incident light into two systems, and one of the divided incident lights is a shape data capturing section.
The other incident light that has been guided to 50 and has been split is guided to the measurement target imaging unit 62.

That is, in the present embodiment, by using the half mirror 74, it is possible to form an image of the same measurement target on the shape data capturing unit 50 and the measurement target imaging unit 62, respectively. While confirming the grayscale image of the measurement target displayed on the display 68, the device can be positioned easily and reliably.

Here, the indicator 68 is incorporated in the rear portion 70C of the main body case 70.

Here, the display device 68 is composed of an LCD, a small cathode ray tube or the like in this embodiment. Here, the display surface of the display device 68 is attached slightly obliquely upward so that the operator can easily see it.

Slit light irradiation is turned on in the central part 70D of the main body case /
A switch 76 for off control is provided.

In this embodiment, the switch 76 has the same structure as the trigger of the pistol, and the operator holds the grip 70C.
For example, an index finger can be hung on the switch 76 while holding the.

It should be noted that in FIG. 2, although the other components shown in FIG. 1 are provided, they are not shown.

Here, the θ signal generator 42 shown in FIG. 1 is not required to be provided in this three-dimensional shape data acquisition device,
It may be incorporated in the main body of the three-dimensional shape measuring apparatus.

Further, the display 68 may be separated from the main body case 70 and connected by a transmission cable.

The three-dimensional shape data acquisition device 30 of the present embodiment is configured as a portable type as described above, and further, since each of the above-described configurations is incorporated, it is extremely mobile and can be accurately and easily checked while checking the displayed image. It is possible to measure the three-dimensional shape of the measured object.

Especially when positioning the device for three-dimensional shape measurement,
It can be performed without irradiating the slit light, and after the positioning is performed, the switch 76 is operated to irradiate the slit light to perform the three-dimensional shape measurement. This has the effect of enabling rapid three-dimensional shape measurement while preventing adverse effects on the object to be measured and deterioration of the laser light source.

In the present embodiment, since the shape data capturing unit 50 is capable of high-speed processing, even with such a portable type, accurate three-dimensional shape measurement can be performed without being affected by camera shake. You can

[Effects of the Invention] As described above, according to the three-dimensional shape data capturing device of the present invention, it is possible to form a grayscale image of a measurement object and further display it. Original shape measurement can be performed.

In addition, by forming the data acquisition device main body as a portable type and incorporating each component, it is possible to acquire the data in mobile 3D shape measurement quickly and easily.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram of a three-dimensional shape data acquisition device according to the present invention, FIG. 2 is a cross-sectional view showing the internal structure of the device, FIG. 3 is a perspective view of essential parts of the device, 4 is a perspective view of the apparatus seen from the front, FIG. 5 is a perspective view of the apparatus seen from the rear, FIG. 6 is an explanatory view of a conventional three-dimensional shape measuring apparatus, and FIG. 7 is a non-contact type shape measuring apparatus. It is a principle explanatory view. 30 …… Three-dimensional shape data acquisition device 32 …… Laser light source 36 …… Polygon mirror 42 …… θ signal generator 50 …… Shape data acquisition unit 54 …… Photo sensor group 56 …… θ Information storage element group 60 …… 3D shape analysis circuit 62 …… Measurement target imaging unit 66 …… Imaging device (CCD) 68 …… Display unit 100 …… Measuring light (slit light) 110 …… Reflected measurement light (reflected slit light)

Claims (2)

[Claims] 1. A slit light irradiating means for irradiating a measuring slit light while deflecting and scanning it, a deflection angle information output means for outputting deflection angle information of the slit light, and reflection on a surface of an object to be measured. A shape information capturing means that has a slit light extraction filter for transmitting only the slit light, receives the slit light transmitted through the slit light extraction filter, and captures three-dimensional shape information corresponding to the deflection angle information at the light receiving position. And a slit light exclusion filter that transmits light components other than the slit light among the light coming through the same optical path as the slit light reflected on the surface of the object, images the measurement target, and measures the measurement. A measurement target imaging unit that outputs the grayscale image information of the target, and a measurement target display unit that displays the grayscale image information. Shape data capture device. 2. The three-dimensional shape data acquisition device according to claim 1, wherein at least the slit light irradiation means, the shape information acquisition means, and the measurement target are provided in a portable data acquisition device body. An apparatus for capturing three-dimensional shape data, characterized in that imaging means is incorporated.