CN211216724U - Micro-fluidic chip containing deformable liquid metal electrode - Google Patents
Micro-fluidic chip containing deformable liquid metal electrode Download PDFInfo
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- CN211216724U CN211216724U CN201921366381.XU CN201921366381U CN211216724U CN 211216724 U CN211216724 U CN 211216724U CN 201921366381 U CN201921366381 U CN 201921366381U CN 211216724 U CN211216724 U CN 211216724U
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Abstract
The utility model provides a micro-fluidic chip containing a deformable liquid metal electrode, which comprises a substrate; etching a first shape on the substrate; a micro-channel layer is arranged on the substrate; the micro-channels on the micro-channel layer are respectively a first micro-channel, a second micro-channel, a third micro-channel and a fourth micro-channel; the first micro-channel is communicated with the second micro-channel through a third micro-channel; the fourth micro-channel is communicated with the first micro-channel; the first micro-channel and the second micro-channel are respectively used for flowing liquid metal and solution; the fourth micro-channel is communicated with the first micro-channel to form a buffer channel, and the width of the buffer channel is slightly larger than that of the third micro-channel; the other side of the micro-flow channel layer is provided with a through hole for injecting and flowing out liquid metal and solution; the liquid metal and the first shape together form a deformable electrode. The utility model provides a micro-fluidic chip contains the deformable microelectrode based on liquid metal, and the electrode shape is controllable, and the interelectrode distance is adjustable.
Description
Technical Field
The utility model relates to a biological detection field, concretely relates to micro-fluidic chip who contains deformable liquid metal electrode.
Background
At present, electrodes used in a microfluidic chip are mostly copper electrodes, gold electrodes, platinum electrodes, ITO electrodes and the like, and need to be applied to complicated processes such as photoetching, sputtering and the like, and once the electrode shape is manufactured, the distance between electrodes cannot be adjusted. Meanwhile, the electrode can not be reused, different experiments need to adopt complex methods to manufacture different chips, and the cost is very high. The utility model discloses use liquid metal to replace metal or ITO formation deformable microelectrode for the first time, realized the manufacturing of the adjustable electrode of the interior shape of miniflow chip for the first time, preparation simple process, simultaneously, but liquid metal recycle, greatly reduced the cost. The utility model provides a micro-fluidic chip contains the deformable microelectrode based on liquid metal, and the electrode shape is controllable, and the interelectrode distance is adjustable, therefore its range of application is extensive, and the suitability is strong. The liquid metal electrode has strong conductivity and is not easy to break down under high voltage. The preparation method is simple and convenient, the use is convenient, the reuse can be realized, and the cost is lower. (background patent provenance 200610043686.8) disadvantages of the prior art: the noble metal is adopted, the cost is high, the process is complex, the noble metal cannot be recycled, and the electrode is in a fixed shape and cannot be deformed.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a microfluidic chip including a deformable liquid metal electrode, which has a simple process, and the electrode can be deformed and recycled, and has a low cost.
In order to solve the above problems, the present invention provides a micro-fluidic chip comprising a deformable liquid metal microelectrode, comprising:
a substrate; etching a first shape on the substrate;
a micro-channel layer is arranged on the substrate; the micro-channels on the micro-channel layer are respectively a first micro-channel, a second micro-channel, a third micro-channel and a fourth micro-channel; the first micro-channel is communicated with the second micro-channel through a third micro-channel; the fourth micro-channel is communicated with the first micro-channel;
the first micro-channel and the second micro-channel are respectively used for flowing liquid metal and solution; the fourth micro-channel is communicated with the first micro-channel to form a buffer channel, and the width of the buffer channel is slightly larger than that of the third micro-channel;
the top of the micro-flow channel layer is provided with a through hole for injecting and flowing out liquid metal and solution;
the liquid metal and the first shape together form a deformable electrode.
Preferably, the material for manufacturing the micro-flow channel layer is Polydimethylsiloxane (PDMS).
Preferably, the substrate is ITO conductive glass.
Preferably, the liquid metal deformable electrode is manufactured by changing the liquid metal injection speed.
Preferably, the first micro-channel has a width of 1000 μm, the second micro-channel has a width of 100-.
The utility model discloses an it is first improved part do the utility model provides a micro-fluidic chip who contains deformable liquid metal microelectrode, include: a substrate; etching a first shape on the substrate; a micro-channel layer is arranged on the substrate; the micro-channels on the micro-channel layer are respectively a first micro-channel, a second micro-channel, a third micro-channel and a fourth micro-channel; the first micro-channel is communicated with the second micro-channel through a third micro-channel; the fourth micro-channel is communicated with the first micro-channel; the first micro-channel and the second micro-channel are respectively used for flowing liquid metal and solution; the fourth micro-channel is communicated with the first micro-channel to form a buffer channel, and the width of the buffer channel is slightly larger than that of the third micro-channel; the top of the micro-flow channel layer is provided with a through hole for injecting and flowing out liquid metal and solution; the liquid metal and the first shape together form a deformable electrode. The utility model provides a micro-fluidic chip contains the deformable microelectrode based on liquid metal, and the electrode shape is controllable, and the interelectrode distance is adjustable, therefore its range of application is extensive, and the suitability is strong. The liquid metal electrode has strong conductivity and is not easy to break down under high voltage. The preparation method is simple and convenient, the use is convenient, the reuse can be realized, and the cost is lower.
Drawings
Fig. 1 is a schematic view of a micro flow channel layer according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an aligned and sealed microfluidic chip according to an embodiment of the present invention;
FIG. 3 is a schematic diagram showing the relative position relationship between the micro flow channel and the ITO electrodes when liquid metal is not injected according to an embodiment of the present invention;
FIG. 4 is a schematic diagram showing the relative position relationship between the liquid metal electrode and the ITO electrode when injecting at a flow rate of 5 μ L/min according to an embodiment of the present invention;
FIG. 5 is a schematic diagram showing the relative position relationship between the liquid metal electrode and the ITO electrode, which is slightly deformed when the liquid metal electrode and the ITO electrode are injected at a flow rate of 6 μ L/min according to an embodiment of the present invention;
FIG. 6 is a schematic diagram showing the relative position relationship between the liquid metal electrode and the ITO electrode, which is greatly deformed when the liquid metal electrode and the ITO electrode are injected at a flow rate of 7 μ L/min according to an embodiment of the present invention;
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the specific embodiments.
The noun explains:
liquid metal: liquid metal refers to an amorphous metal that can be viewed as a mixture of a positively ionic fluid and a free electron gas. Liquid metal is also an amorphous, flowable liquid metal.
A micro-fluidic chip: the micro-fluidic chip technology integrates basic operation units of sample preparation, reaction, separation, detection and the like in the biological, chemical and medical analysis process into a micron-scale chip, and automatically completes the whole analysis process. Due to its great potential in the fields of biology, chemistry, medicine and the like, the method has been developed into a new research field crossing the disciplines of biology, chemistry, medicine, fluid, electronics, materials, machinery and the like.
DEP: dielectrophoresis (DEP), also known as dielectrophoresis, is a phenomenon in which an object having a low dielectric constant is subjected to a force in a non-uniform electric field. The dielectric force is independent of whether the object is charged or not, and is dependent on the size and the electrical property of the object, the electrical property of the surrounding medium, the field intensity of an external electric field, the field intensity change rate and the frequency.
DEP buffer: DEP buffer solution mainly contains 100ml of deionized water, 8.5g of sucrose, 0.3g of glucose and 0.4mg of calcium chloride. This solution has the effect that firstly the cells can survive for a long time (isotonic, more than 4 hours), the effect of calcium chloride is to adjust the conductivity, 0.4mg just makes the conductivity of the solution 100us/cm, and the amount of this component can be adjusted. Unless otherwise stated, the solutions in the present invention are all referred to as DEPbuffer.
The utility model provides a micro-fluidic chip who contains deformable liquid metal microelectrode, include:
a substrate; etching a first shape on the substrate; a micro-channel layer is arranged on the substrate; the micro-channels on the micro-channel layer are respectively a first micro-channel, a second micro-channel, a third micro-channel and a fourth micro-channel; the first micro-channel is communicated with the second micro-channel through a third micro-channel; the fourth micro-channel is communicated with the first micro-channel; the first micro-channel and the second micro-channel are respectively used for flowing liquid metal and solution; the fourth micro-channel is communicated with the first micro-channel to form a buffer channel, and the width of the buffer channel is slightly larger than that of the third micro-channel; the top of the micro-flow channel layer is provided with a through hole for injecting and flowing out liquid metal and solution; the liquid metal and the first shape together form a deformable electrode.
As shown in fig. 2, the present invention provides a substrate 1 preferably made of ITO glass. The ITO conductive glass is manufactured by coating a layer of indium tin oxide (commonly called ITO) film on the basis of sodium-calcium-based or silicon-boron-based substrate glass by various methods such as sputtering, evaporation and the like. I.e. the glass is coated with a layer of indium tin oxide.
The substrate 1 is manufactured into the shape of the electrode 2 of the utility model by using the technologies such as photoetching and the like and wet etching technology. Namely, a layer of indium tin oxide on glass is made into a first shape required by the utility model through a soft lithography process and an etching technology. The concrete pattern of first shape can be set for according to specific demand, and does not influence the utility model discloses a concrete chip effect.
Preferably, the electrode photoetching and etching process specifically comprises: uniformly coating RJ-304 photoresist on a piece of indium tin oxide (commonly called ITO) glass at the rotating speed of 3500r/m in a clean room environment, then placing the ITO glass uniformly coated with the photoresist on a baking table for baking at 100 ℃ for 3 minutes, then placing the ITO glass under a photoetching machine, and passing through a designed mask plate at the speed of 12.4mJ/cm2Exposing for 1.5s at the power of (1.5), developing for 2min, drying by nitrogen, placing in 36% concentrated hydrochloric acid for 3min, taking out, placing in degumming solution for 2min, and drying by nitrogen to obtain the electrode.
As shown in fig. 1, a first microchannel 5, a second microchannel 6, a third microchannel 4, and a fourth microchannel 7 are formed on the microchannel layer by a soft lithography process. The micro-flow channel layer is preferably made of Polydimethylsiloxane (PDMS), and the PDMS is one of organic silicon, so that the PDMS is a polymer material widely applied to the fields of micro-flow control and the like due to the characteristics of low cost, simplicity in use, good adhesion with a silicon wafer, good chemical inertness and the like.
According to the utility model discloses, the preparation technology of miniflow channel layer is preferred specifically to be: micro-channel photoetching and manufacturing processes: uniformly coating su-82050 photoresist on a silicon wafer at the rotating speed of 2500r/m in a clean room environment, and then placing the uniformly coated silicon wafer on a baking table for baking at 65 DEGBaking at 95 deg.C for 7min for 2min, and placing under a photoetching machine at 12.4mJ/cm through a designed mask2Exposing for 8s, developing for 2min, drying with nitrogen, and adhering the silicon wafer with plate or double-sided tape to surround the silicon wafer (the silicon wafer is surrounded by the edge, which is equivalent to a glass sheet, and water is poured from the middle of the silicon wafer without leaking). Pouring 30g of PDMS (prepared according to the mass ratio of 1: 10) on a silicon chip, heating the silicon chip on a heating plate at 85 ℃ for 40min, then taking down the silicon chip, tearing off the cured PDMS to obtain a micro-channel, and then punching an outlet and an inlet of the micro-channel to facilitate the connection of a catheter or a needle.
The first micro-channel 5 and the second micro-channel 6 are connected through a third micro-channel 4, the width of the first micro-channel 5 is far larger than that of the third micro-channel 4, and preferably, the width of the third micro-channel 4 is 80-120 μm. The width of the first micro-channel 5 is more than 1000 μm, and the width of the second micro-channel 6 is 100-. The micro-channel layer 3 is provided with a through hole 8, and the liquid metal and the DEP buffer flow out of and flow into the first micro-channel 5 and the second micro-channel 6 through the through hole 8.
The fourth microchannel 7 functions as a buffer at the moment when the injection of the liquid metal is stopped and then started, and prevents the liquid metal from leaking out of the third microchannel 4 into the second microchannel 6. In order to achieve the buffering effect, the width of the fourth micro-channel 7 needs to be slightly larger than the width of the third micro-channel 4, preferably, the width of the third micro-channel 4 is 100 μm, the width of the fourth micro-channel 7 needs to be 100 μm to 200 μm, and preferably 150 μm, and the size of the liquid metal deformation can be changed by controlling the flow rate to be 5-8 μ L/min, thereby changing the gradient of the electric field,
as shown in fig. 2, for the present invention, the substrate 1 is finally placed below, the micro flow channel layer 3 is placed above, and the alignment is performed by the alignment platform, and the tight bonding prevents the liquid leakage.
According to the utility model discloses, the bonding of electrode and microchannel is preferred specifically to be: and (3) putting the electrode and the micro-channel in a plasma cleaning machine for cleaning for 2min, taking out, aligning under a microscope or a photoetching machine to ensure that the position of the electrode is aligned with the micro-channel, pressing, and putting on a baking table for heating at 95 ℃ for 10 min. Taking down, inserting a catheter or a needle at the inlet after the outlet to obtain the final microfluidic chip.
An enlarged view of the third microchannel is shown in FIG. 3. It should be noted that: the width of the electrode 2 is not limited and may be 50 to 300. mu.m, and the width of the third micro flow channel 4 is most preferably 150 μm and the thickness thereof is required to be 20 μm or less.
The utility model discloses the method can be used for catching the cell, and is tensile, the utility model discloses can reject the polystyrene bobble. Without being limited to the above, the utility model discloses more experiments based on DEP principle all have application potential.
The embodiment of the utility model is as follows:
example 1
As shown in FIG. 4, first, a liquid metal is introduced into the first microchannel 5 at a flow rate of 5. mu.L/min and fills the microchannel. When the width of the third microchannel 4 is 150 μm or less, the liquid metal having a flow rate of 5 μ L/min or less does not leak from the third microchannel 4, and the liquid metal flows forward only.
Then, DEP buffer added with red blood cells is introduced into the solution micro-channel at the speed of 30 mu L/min, at this time, the whole first micro-channel 5 is liquid metal, the second micro-channel 6 is solution, and the third micro-channel 4 is also solution.
Then, the micro-flow pump can be turned off to stop feeding the solution, and simultaneously sine waves are fed to the two sides of the liquid metal and the electrode, the frequency of the sine waves is 2Mhz, the voltage is 2Vpp, cells can be captured on the electrode, the capture area is the edge of the electrode 2, which is opposite to the third micro-channel 4, and the red blood cells can be stretched by increasing the voltage.
After the experiment is finished, the liquid metal can be recycled from the outlet by introducing air, so that the cost is reduced.
Example 2
As shown in FIG. 5, first, the liquid metal is introduced into the first microchannel 5 at a flow rate of 6. mu.L/min to fill the microchannel. When the width of the third microchannel 4 is 150. mu.m, the liquid metal does not leak from the third microchannel 4 at a flow rate of 8. mu.L/min or less, and the liquid metal is formed into a protruding shape.
Then, DEP buffer added with red blood cells is introduced into the solution micro-channel at the speed of 30 mu L/min, at this time, the whole first micro-channel 5 is liquid metal, the second micro-channel 6 is solution, and the third micro-channel 4 is also solution.
Then, the micro-flow pump can be turned off to stop feeding the solution, and simultaneously sine waves are fed to the two sides of the liquid metal and the electrode, the frequency of the sine waves is 2Mhz, the voltage is 2Vpp, cells can be captured on the electrode, the capture area is the edge of the electrode 2, which is opposite to the third micro-channel 4, and the red blood cells can be stretched by increasing the voltage.
After the experiment is finished, the liquid metal can be recycled from the outlet by introducing air, so that the cost is reduced.
Example 3
As shown in FIG. 6, first, the liquid metal is introduced into the first micro flow channel 5 of the liquid metal at a flow rate of 7 μ L/min to fill the micro flow channel, and when the width of the third micro flow channel 4 is 150 μm, the liquid metal forms a more prominent protruding shape.
Then, DEP buffer added with red blood cells is introduced into the solution micro-channel at the speed of 30 muL/min, at this time, the whole first micro-channel 5 is liquid metal, the second micro-channel 6 is solution, and the third micro-channel 4 is also solution (water has small tension, space can flow in, liquid metal has large surface tension, and can not flow, the experiment is based on the principle).
Then, the micro-flow pump can be closed to stop flowing the solution, and simultaneously sine waves are flowed to two sides of the liquid metal and the electrode, the frequency of the sine waves is 2Mhz, the voltage is 2Vpp, cells can be captured on the electrode, the capture area is the edge of the electrode 2 opposite to the 4, and the red blood cells can be stretched by increasing the voltage.
After the experiment is finished, the liquid metal can be recycled from the outlet by introducing air, so that the cost is reduced.
The utility model discloses can be used for catching the cell, it is tensile, the utility model discloses can reject the polystyrene bobble. Without being limited to the above, the utility model discloses more experiments based on DEP principle all have application potential.
Example 4
And (4) capturing the yeast cells.
Small undistorted electric field gradient: a sine wave of frequency 1Mhz, voltage 2 Vpp. Can capture 1, 2 cells
The electric field gradient is large after deformation: a sine wave of frequency 1Mhz, voltage 2 Vpp. Tens of capture can be achieved, and the efficiency is improved by dozens of times.
As shown in fig. 4, first, the liquid metal is introduced into the liquid metal micro flow channel 5 at a flow rate of 5 μ L/min to fill the channel, and when the width of the third micro flow channel 4 is less than 100 μm, the liquid metal at a flow rate of less than 5 μ L/min does not leak from the third micro flow channel 4, and the liquid metal flows forward only, and then the liquid metal micro flow pump is turned off to stop injecting the liquid metal.
Secondly, the DEP buffer added with the yeast cells is introduced into the solution channel at the speed of 30 mu L/min, at this time, the whole first micro-channel 5 is liquid metal, the second micro-channel 6 is solution, and the third micro-channel 4 is also solution, because the tension of water is small, space can flow in, the surface tension of the liquid metal is large, and the liquid metal can not flow, and the experiment is based on the principle.
The solution micro-flow pump can then be turned off and the solution stopped, while a sine wave at 1MHz and a voltage of 2Vpp is applied across the liquid metal and the electrodes, allowing the capture of yeast cells on the electrodes, and only 1 to 2 yeast cells were found to be captured.
Subsequently, the yeast cells are washed away, as shown in fig. 6, liquid metal is introduced at a flow rate of 8 μ L/min, the electrode deforms, a larger electric field gradient is generated, the liquid metal microflow pump is closed, the solution microflow pump is opened, the yeast cells are introduced, sine waves are introduced to the two sides of the liquid metal and the electrode at the same time, the frequency is 1MHz, the voltage is 2Vpp, the yeast cells can be captured on the electrode, and dozens of yeast cells are found to be captured.
After the experiment is finished, the liquid metal can be recycled from the outlet by introducing air, so that the cost is reduced.
Through the above-mentioned embodiment, can see, the utility model provides a method and electrode will show the multipurpose and the universality that improve micro-fluidic chip, and the velocity of flow increases to 10 from 5 in the experiment of once, and the slow grow of deformation perhaps lets in different velocities of flow in different experiments, produces the electrode of different deformations.
The above is only a preferred embodiment of the present invention, and it should be noted that the above preferred embodiment should not be considered as limiting the present invention, and the protection scope of the present invention should be subject to the scope defined by the claims. It will be apparent to those skilled in the art that various modifications and enhancements can be made without departing from the spirit and scope of the invention, and such modifications and enhancements are intended to be within the scope of the invention.
Claims (5)
1. A microfluidic chip comprising a deformable liquid metal electrode, comprising:
a substrate; etching a first shape on the substrate;
a micro-channel layer is arranged on the substrate; the micro-channels on the micro-channel layer are respectively a first micro-channel, a second micro-channel, a third micro-channel and a fourth micro-channel; the first micro-channel is communicated with the second micro-channel through a third micro-channel; the fourth micro-channel is communicated with the first micro-channel;
the first micro-channel and the second micro-channel are respectively used for flowing liquid metal and solution; the fourth micro-channel is communicated with the first micro-channel to form a buffer channel, and the width of the buffer channel is slightly larger than that of the third micro-channel;
the top of the micro-flow channel layer is provided with a through hole for injecting and flowing out liquid metal and solution;
the liquid metal and the first shape together form a deformable electrode.
2. The chip of claim 1, wherein the micro channel layer is made of Polydimethylsiloxane (PDMS).
3. The chip of claim 1, wherein the substrate is ITO conductive glass.
4. The die of claim 1, wherein the liquid metal deformable electrode is formed by varying a liquid metal injection speed.
5. The chip of claim 1, wherein the first micro-channel has a width of 1000 μm, the second micro-channel has a width of 100-.
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| CN201921366381.XU CN211216724U (en) | 2019-08-21 | 2019-08-21 | Micro-fluidic chip containing deformable liquid metal electrode |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110354925A (en) * | 2019-08-21 | 2019-10-22 | 苏州大学 | It is a kind of comprising can deformation liquid metal electrode micro-fluidic chip and preparation method thereof |
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2019
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110354925A (en) * | 2019-08-21 | 2019-10-22 | 苏州大学 | It is a kind of comprising can deformation liquid metal electrode micro-fluidic chip and preparation method thereof |
| CN110354925B (en) * | 2019-08-21 | 2023-09-19 | 苏州大学 | Microfluidic chip containing deformable liquid metal electrode and preparation method thereof |
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