CN211102141U - Laser marking focusing device - Google Patents

Laser marking focusing device Download PDF

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Publication number
CN211102141U
CN211102141U CN201922087474.5U CN201922087474U CN211102141U CN 211102141 U CN211102141 U CN 211102141U CN 201922087474 U CN201922087474 U CN 201922087474U CN 211102141 U CN211102141 U CN 211102141U
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China
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optical fiber
mirror
semi
collimating mirror
laser marking
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CN201922087474.5U
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Chinese (zh)
Inventor
赵汝豪
曾亚光
韩定安
王茗祎
谭海曙
熊红莲
李泽
张�浩
曾锟
张章
廖锤
朱新泽
谭朗海
刘碧旺
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Foshan University
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Foshan University
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Abstract

The utility model discloses a laser marking focusing device, include: the device comprises a semi-reflecting and semi-transmitting mirror, a laser, a scanning galvanometer, a driving device, a processing terminal, a flat field focusing lens, a workbench, a low-coherence light source, an optical fiber coupler, a first collimating mirror, a second collimating mirror, a photoelectric detector, a linear moving platform and a reflector, wherein the reflector is arranged on the linear moving platform; the first collimating lens is connected with the optical center of the semi-reflecting and semi-transmitting lens through a linear light path, the fourth port of the optical fiber coupler is connected with the input end of the photoelectric detector through an optical fiber, and the processing terminal is respectively connected with the output ends of the driving device and the photoelectric detector. The utility model discloses mainly used laser marking technical field.

Description

Laser marking focusing device
Technical Field
The utility model relates to a laser marking technical field, in particular to laser marking focusing device.
Background
Laser marking is that a laser generator emits continuous high-energy laser beams, and the laser beams are focused on the surface of a marked article to cause the physical change or chemical change of the surface of the article to leave a permanent mark. In the laser marking process, the energy of a laser beam is focused on one point as much as possible through focusing, so that the light spot of the laser marking on a marked article is ensured to be thin enough, and the laser marking method is an important guarantee for realizing high-precision marking. In the production process of products, due to the difference of the shapes and sizes of marked objects, before laser marking is started, the focal point of laser marking needs to be adjusted according to the marked objects, and the laser beams are guaranteed to be focused on the surfaces of the marked objects. Meanwhile, because of the uncontrollable property of the production environment, the manual adjustment of the marking focus is difficult, and the focusing accuracy cannot be ensured, so that the production efficiency and the product quality are influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a laser marking focusing device to solve one or more technical problem that exist among the prior art, provide a profitable selection or create the condition at least.
The utility model provides a solution of its technical problem is: a laser marking focusing device, comprising: the device comprises a semi-reflecting and semi-transparent mirror, a laser, a scanning galvanometer, a driving device, a processing terminal, a flat field focusing lens, a workbench, a low-coherence light source, an optical fiber coupler, a first collimating mirror, a second collimating mirror, a photoelectric detector, a linear moving platform and a reflector, wherein the reflector is arranged on the linear moving platform, the output end of the low-coherence light source is connected with a first port of the optical fiber coupler, a second port of the optical fiber coupler is connected with the second collimating mirror through an optical fiber, the second collimating mirror is connected with the reflector through a linear light path, and a third port of the optical fiber coupler is connected with the first collimating mirror through an optical fiber; the optical path between the second collimating mirror and the second port of the optical fiber coupler is a second optical path, and the first optical path is equal to the second optical path.
Further, the second collimating mirror and the reflecting mirror form a reference arm light path.
Further, the first collimating mirror and the semi-reflecting and semi-transmitting mirror form a sample arm light path.
Further, the scanning galvanometer comprises an X-axis galvanometer and a Y-axis galvanometer, the X-axis galvanometer and the Y-axis galvanometer are orthogonally arranged, and the X-axis galvanometer and the Y-axis galvanometer are both connected with a driving device.
Further, the processing terminal is a computer.
Further, the photodetector is a single-point detector.
The utility model has the advantages that: the offset of the sample is detected through a low-coherence light source, an optical fiber coupler, a first collimating mirror, a second collimating mirror, a photoelectric detector, a linear moving platform and a reflecting mirror, and then the working table is adjusted by utilizing the offset to realize the focusing of the marking laser.
Drawings
In order to more clearly illustrate the technical solution in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below. It is clear that the described figures represent only some embodiments of the invention, not all embodiments, and that a person skilled in the art can also derive other designs and figures from these figures without inventive effort.
Fig. 1 is a schematic structural diagram of a laser marking focusing device.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the coupling/connection relationships mentioned herein do not mean that the components are directly connected, but mean that a better coupling structure can be formed by adding or reducing coupling accessories according to specific implementation conditions. All technical characteristics in the invention can be interactively combined on the premise of not conflicting with each other.
Referring to fig. 1, a laser marking focusing device includes: the semi-reflecting and semi-transmitting mirror 400, the laser 100, the scanning galvanometer 200, the driving device 800, the processing terminal 700, the flat field focusing lens 300, the workbench 500, the low coherent light source 620, the optical fiber coupler 610, the first collimating mirror 640, the second collimating mirror 650, the photoelectric detector 630, the linear moving platform 660 and the reflecting mirror 670, wherein the reflecting mirror 670 is installed on the linear moving platform 660, the output end of the low coherent light source 620 is connected with the first port of the optical fiber coupler 610, the second port of the optical fiber coupler 610 is connected with the second collimating mirror 650 through an optical fiber, the second collimating mirror 650 is connected with the reflecting mirror 670 through a linear optical path, and the third port of the optical fiber coupler 610 is connected with the first collimating mirror 640 through an optical fiber; first collimating mirror 640 is connected through straight line light path and the optical center of semi-transparent mirror 400 that reflects, the fourth port of fiber coupler 610 passes through optic fibre and is connected with photoelectric detector 630's input, processing terminal 700 is connected with drive arrangement 800 and photoelectric detector 630's output respectively, scanning galvanometer 200, flat field focusing lens 300 and semi-transparent mirror 400 that reflects pass through the support and prop up, scanning galvanometer 200, flat field focusing lens 300, semi-transparent mirror 400 and workstation 500 are from last down set gradually. The half-reflecting and half-transmitting lens 400 and the optical axis of the flat field focusing lens 300 are arranged at an angle of 45 degrees, so that the optical path between the first collimating lens 640 and the third port of the optical fiber coupler 610 is a first optical path, the optical path between the second collimating lens 650 and the second port of the optical fiber coupler 610 is a second optical path, and the first optical path is equal to the second optical path.
When the laser marking focusing device works, the second collimating mirror 650 and the reflecting mirror 670 form a reference arm light path, and the first collimating mirror 640 and the semi-reflecting and semi-transmitting mirror 400 form a sample arm light path.
When the marking is normally performed, a sample is placed in the workbench 500, marking laser generated by the laser 100 enters the scanning galvanometer 200, a specific light path refers to a track of a dotted arrow in fig. 1, the scanning galvanometer 200 outputs the marking laser to the flat field focusing lens 300, and the flat field focusing lens 300 focuses the marking laser in the sample through the transmission of the transflective lens 400.
When the sample needs to be in focus. The low coherence light source 620 emits near infrared probe light into the fiber coupler 610, and then the ratio of 10: the 90-split light is emitted and respectively goes to the sample arm light path and the reference arm light path. The photodetector 630 receives the light from the fiber coupler 610 and converts the light into an electrical signal to be collected and transmitted to the processing terminal 700. For convenience of description, the light entering the reference arm path is referred to as a first beam and the light entering the sample arm path is referred to as a second beam. Specifically, in the reference arm optical path, the first light beam is emitted from the second port of the fiber coupler 610, passes through the optical fiber and is emitted from the second collimating mirror 650, the first light beam reaches the reflecting mirror 670, the reflecting mirror 670 reflects the first light beam, and the first light beam returns to the fiber coupler 610 along the original optical path. In the sample arm optical path, the second light beam is emitted from the third port of the fiber coupler 610, passes through the optical fiber and is emitted from the first collimating mirror 640, and the second light beam continues to advance, is reflected by the transflective mirror 400 and reaches the worktable 500, and acts on the sample on the worktable 500. The sample reflects the second beam, which is returned to the fiber coupler 610 along the original path. The first and second light beams returning to the fiber coupler 610 interfere in the fiber coupler 610, and the interference signal is input to the photodetector 630 through the fourth port of the fiber coupler 610. Since the interference signal reflects the optical path information between the sample arm optical path and the reference arm optical path. Therefore, the reflecting mirror 670 can be driven to make linear motion by the linear movement of the linear moving platform 660, so that the optical path between the reflecting mirror 670 and the second collimating mirror 650 is changed. Compensation is performed by changing the optical path between the mirror 670 and the second collimating mirror 650, which is the amount of offset that occurs to the sample. Through the offset, the adjustment workbench 500 compensates the offset, and the focusing of the marking laser is realized.
In some preferred embodiments, the scanning galvanometer 200 includes an X-axis galvanometer 210 and a Y-axis galvanometer 220, the X-axis galvanometer 210 and the Y-axis galvanometer 220 are orthogonally disposed, and both the X-axis galvanometer 210 and the Y-axis galvanometer 220 are connected to the driving device 800. The processing terminal 700 can output control parameters, the driving device 800 controls the rotation angles of the X-axis galvanometer 210 and the Y-axis galvanometer 220 according to the control parameters, and the marking laser is projected into the sample after being reflected by the X-axis galvanometer 210 and the Y-axis galvanometer 220.
In some preferred embodiments, the processing terminal 700 is a computer.
In some preferred embodiments, the photodetector 630 is a single point detector.
While the preferred embodiments of the present invention have been described in detail, it will be understood by those skilled in the art that the invention is not limited to the details of the embodiments shown, but is capable of various modifications and changes without departing from the spirit of the invention.

Claims (6)

1. A laser marking focusing device, comprising: the device comprises a semi-reflecting and semi-transparent mirror, a laser, a scanning galvanometer, a driving device, a processing terminal, a flat field focusing lens, a workbench, a low-coherence light source, an optical fiber coupler, a first collimating mirror, a second collimating mirror, a photoelectric detector, a linear moving platform and a reflector, wherein the reflector is arranged on the linear moving platform, the output end of the low-coherence light source is connected with a first port of the optical fiber coupler, a second port of the optical fiber coupler is connected with the second collimating mirror through an optical fiber, the second collimating mirror is connected with the reflector through a linear light path, and a third port of the optical fiber coupler is connected with the first collimating mirror through an optical fiber; the optical path between the second collimating mirror and the second port of the optical fiber coupler is a second optical path, and the first optical path is equal to the second optical path.
2. The laser marking focusing device of claim 1, wherein: and the second collimating mirror and the reflecting mirror form a reference arm light path.
3. The laser marking focusing device of claim 1, wherein: the first collimating mirror and the semi-reflecting and semi-transmitting mirror form a sample arm light path.
4. The laser marking focusing device of claim 1, wherein: the scanning galvanometer comprises an X-axis galvanometer and a Y-axis galvanometer, the X-axis galvanometer and the Y-axis galvanometer are orthogonally arranged, and the X-axis galvanometer and the Y-axis galvanometer are both connected with a driving device.
5. The laser marking focusing device of claim 1, wherein: the processing terminal is a computer.
6. The laser marking focusing device of claim 1, wherein: the photodetector is a single-point detector.
CN201922087474.5U 2019-11-27 2019-11-27 Laser marking focusing device Active CN211102141U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922087474.5U CN211102141U (en) 2019-11-27 2019-11-27 Laser marking focusing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922087474.5U CN211102141U (en) 2019-11-27 2019-11-27 Laser marking focusing device

Publications (1)

Publication Number Publication Date
CN211102141U true CN211102141U (en) 2020-07-28

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Application Number Title Priority Date Filing Date
CN201922087474.5U Active CN211102141U (en) 2019-11-27 2019-11-27 Laser marking focusing device

Country Status (1)

Country Link
CN (1) CN211102141U (en)

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